MKS 670B User manual

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120466-P1
Rev B, 1/98
Instruction Manual
MKS Type 670B
High Accuracy
Signal Conditioner
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com
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WARRANTY
Type 670B Equipment
MKS Instruments, Inc. (MKS) warrants that the equipment described above (the
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of two
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctly
perform all date-related operations and store and transmit dates and date-related data
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any other
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, the
sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventative
maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
11-98 120466-P1
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120466-P1
Rev B, 1/98
MKS Type 670B
High Accuracy
Signal Conditioner
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Local
Remote
B
A
Cursor
Trip
Points
Ch 1
X 1
Ch 2
X 0.1
Ch 3X 0.01
Cal
Auto
Zero
Type 670
Signal Conditioner
Menu Adjust
Parameters
Enter Setup
Copyright © 1998 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
This manual is for firmware/software version 1.1x
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Table of Contents
iii
Table of Contents
Safety Information.................................................................................................................. 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions............................................................................. 3
Sicherheitshinweise................................................................................................................ 5
In dieser Betriebsanleitung vorkommende Symbole................................................... 5
Am Gerät angebrachte Symbole................................................................................. 6
Sicherheitsvorschriften und Vorsichtsmaßnahmen...................................................... 7
Informations relatives à la sécurité..........................................................................................9
Symboles utilisés dans ce manuel d'utilisation ........................................................... 9
Symboles apparaissant sur l'appareil .......................................................................... 10
Mesures de sécurité et mises en garde........................................................................ 11
Información sobre seguridad................................................................................................... 13
Símbolos usados en el manual de instrucciones.......................................................... 13
Símbolos que aparecen en la unidad........................................................................... 14
Procedimientos y precauciones de seguridad.............................................................. 15
Chapter One: General Information......................................................................................... 17
Introduction............................................................................................................... 17
How This Manual is Organized.................................................................................. 18
Manual Conventions ..................................................................................... 19
Customer Support...................................................................................................... 20
Chapter Two: Installation......................................................................................................21
How To Unpack the Type 670 Unit ........................................................................... 21
Unpacking Checklist ..................................................................................... 21
Interface Cables ......................................................................................................... 23
System Interface Cables ................................................................................ 23
Remote Communications Interface Cables..................................................... 24
Generic Shielded Cable Description .............................................................. 25
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Table of Contents
iv
Example 1: Preferred Method To Connect Cable...........................................26
Example 2: Alternate Method To Connect Cable ..........................................26
Product Location and Requirements...........................................................................27
Operating Environmental Requirements.........................................................27
Safety Conditions ..........................................................................................27
Electrical Requirements.................................................................................27
Dimensions................................................................................................................28
Chapter Three: Hardware Overview.......................................................................................31
Front Panel.................................................................................................................31
Key Lock Switch ...........................................................................................31
Display Area..................................................................................................32
Trip Point LEDs ............................................................................................32
Range Selector Keys......................................................................................32
Channel Selector Lights.................................................................................32
Cursor Key ....................................................................................................32
Adjust Knob ..................................................................................................32
Arrow Keys ...................................................................................................32
Rear Panel..................................................................................................................33
Serial Interface or IEEE-488 Connector .........................................................34
I/O Connector................................................................................................36
Pressure Output Signal...................................................................................36
Signal Conditioner Board...............................................................................38
Power Entry Module......................................................................................40
Labels ........................................................................................................................41
Serial Number Label......................................................................................41
Chapter Four: Functional Overview.......................................................................................43
General Information ...................................................................................................43
Color Coded Keys .........................................................................................43
Scrolling........................................................................................................43
How To Change Entries.................................................................................44
Display Screen...............................................................................................44
How To Change Channels .............................................................................45
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Table of Contents
v
The [SETUP] Key.................................................................................................. 45
Display Size.................................................................................................. 45
Response....................................................................................................... 46
Heater ........................................................................................................... 47
Pressure Units ............................................................................................... 48
Sensor Range ................................................................................................ 49
Temperature Compensation........................................................................... 50
Averaging ..................................................................................................... 51
RS-232 Communication Parameters (Optional)............................................. 53
IEEE-488 Communication Parameters (Optional).......................................... 53
The [TRIP POINTS] Key....................................................................................... 54
Trip Point Settings ........................................................................................ 54
Hysteresis...................................................................................................... 56
Relay State.................................................................................................... 57
Channel Selection.......................................................................................... 58
Latching a Trip Point.....................................................................................58
The [CAL] Key...................................................................................................... 60
Null............................................................................................................... 60
Full Scale...................................................................................................... 60
System Check Calibration............................................................................. 61
The [ZERO] Key ................................................................................................... 62
Zero Enable................................................................................................... 62
Zero Calibration............................................................................................ 62
The [AUTO] and Range Keys................................................................................ 64
Chapter Five: Operation ........................................................................................................67
How To Configure the 670 Instrument....................................................................... 67
How To Interface to the Type 274 Multiplexer........................................................... 69
Connecting the Cables................................................................................... 69
Configuring the 274 Multiplexer................................................................... 70
Configuring the 670 Instrument..................................................................... 70
How To Set the Sensor Full Scale Entry .................................................................... 71
How To Calibrate the 670 Instrument ........................................................................ 72
Additional Calibration for the Type 274 Multiplexer..................................... 74
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Table of Contents
vi
How To Configure the Trip Points .............................................................................75
How To Disable a Trip Point......................................................................................77
How To Clear a Latched Trip Point............................................................................77
How To Adjust Hysteresis..........................................................................................78
How To Select the Range Setting Remotely ...............................................................79
How To Use the Remote Zero Feature........................................................................80
How To Display the Software Version Number..........................................................81
How To Display the Heater Current with the Pressure Reading ..................................81
How To Change the Line Voltage Selection...............................................................82
How To Use the SYSCHK Feature.............................................................................83
Chapter Six: RS-232 Communications Option.......................................................................85
General Information ...................................................................................................85
Communication Parameters........................................................................................85
RS-232 Protocol.........................................................................................................86
Message Syntax.............................................................................................86
Commands.....................................................................................................86
Requests........................................................................................................87
Responses......................................................................................................87
RS-232 Messages.......................................................................................................89
Global Messages............................................................................................90
Channel-Specific Messages............................................................................92
Trip Point Messages ......................................................................................96
Diagnostic Messages......................................................................................98
Chapter Seven: IEEE-488 Communications Option ...............................................................103
General Information ...................................................................................................103
Key Lock Switch ...........................................................................................103
IEEE-488 Device Compliance........................................................................104
Buffer Length ................................................................................................104
Address..........................................................................................................104
Status Information......................................................................................................105
Standard Event Status Register ......................................................................106
Status Byte Register.......................................................................................107
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Table of Contents
vii
Generating a Service Request........................................................................ 108
IEEE-488 Messages................................................................................................... 109
Clear Status Command (*CLS) ..................................................................... 109
Operation Complete Messages....................................................................... 109
Wait-to-Continue Command (*WAI)............................................................. 109
Identification Query (*IDN?).........................................................................110
Reset Command (*RST)................................................................................ 110
Self-Test Query (*TST?)............................................................................... 110
MKS Device Dependent Messages............................................................................. 111
Command Syntax.......................................................................................... 111
Global Configuration Messages..................................................................... 112
Channel-Specific Messages........................................................................... 115
Trip Point Messages...................................................................................... 121
Diagnostic Messages..................................................................................... 124
Chapter Eight: Maintenance and Troubleshooting.................................................................. 127
General Information................................................................................................... 127
How To Clean the Unit ................................................................................. 127
How To Replace the Fuses......................................................................................... 128
Troubleshooting......................................................................................................... 130
Troubleshooting Chart................................................................................... 132
Test A: Localizing Malfunction to the Cable or the Electronics Unit ............133
Test B: Localizing Malfunctions to the Electronics Unit............................... 136
Appendix A: Product Specifications...................................................................................... 137
Performance Specifications........................................................................................ 137
Physical Specifications .............................................................................................. 139
Environmental Specifications..................................................................................... 140
Electrical Specifications............................................................................................. 140
Appendix B: Model Code Explanation.................................................................................. 141
Model Code............................................................................................................... 141
Appendix C: Initial Settings.................................................................................................. 143
General Information................................................................................................... 143
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Table of Contents
viii
Appendix D: Interface Cables for a Type 274 Multiplexer......................................................145
I/O Connector Cables.................................................................................................145
CB670-2 Y Cable ..........................................................................................145
Index ......................................................................................................................................149
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List of Fi
g
ures
ix
List of Figures
Figure 1: Preferred Method.................................................................................................... 26
Figure 2: Alternate Method To Use When Cable Clamp is Not Available.............................. 26
Figure 3: Front View Dimensions.......................................................................................... 28
Figure 4: Side View Dimensions........................................................................................... 28
Figure 5: Top View Dimensions............................................................................................ 29
Figure 6: The Front Panel......................................................................................................31
Figure 7: The Rear Panel with RS-232 Communications....................................................... 33
Figure 8: The Rear Panel with IEEE-488 Communications.................................................... 33
Figure 9: Labels on the Rear Panel........................................................................................ 41
Figure 10: Serial Number Label............................................................................................. 41
Figure 11: Averaging with 5 Data Points............................................................................... 51
Figure 12: Hysteresis Bands Applied to the Trip Point Values............................................... 56
Figure 13: Hysteresis Bands and Trip Point Values ............................................................... 56
Figure 14: Autoranging on a 10 Volt Full Scale Signal.......................................................... 64
Figure 15: Connecting to a Single Pressure Transducer ......................................................... 67
Figure 16: Connecting to a Type 274 Multiplexer.................................................................. 69
Figure 17: IEEE-488 Registers.............................................................................................. 105
Figure 18: Troubleshooting Flow Chart................................................................................. 132
Figure 19: Two Resistors Added to the Transducer Cable...................................................... 134
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List of Figures
x
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List of Tables
xi
List of Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Definitionen der am Gerät angebrachten Symbole.......................................................6
Tableau 3 : Définition des symboles apparaissant sur l'appareil .................................................10
Tabla 4 : Definición de los símbolos que aparecen en la unidad.................................................14
Table 5: System Interface Cables..............................................................................................23
Table 6: Interface Cables for Remote Communications ............................................................24
Table 7: Pinout of the Serial Interface Connector......................................................................34
Table 8: Pinout of the IEEE-488 Connector..............................................................................35
Table 9: Pinout of the I/O Connector........................................................................................37
Table 10: Pinout of the Head Connector on the Signal Conditioner Board................................38
Table 11: Pinout of the Signal Connector on the Signal Conditioner Board..............................39
Table 12: Color Coding of Front Panel Keys............................................................................43
Table 13: Instrument Response Settings ...................................................................................46
Table 14: Optimal Averaging and Response Entries.................................................................52
Table 15: Action of the Trip Points ..........................................................................................54
Table 16: Relationship Between Averaging Entry and Calibration Times.................................73
Table 17: Connections to Clear a Latch on the Trip Points .......................................................77
Table 18: Pin State for Remote Range Selection.......................................................................79
Table 19: RS-232 Communication Parameters..........................................................................85
Table 20: Responses for Rejected Commands...........................................................................88
Table 21: RS-232 Global Messages..........................................................................................90
Table 22: RS-232 Channel-Specific Messages..........................................................................92
Table 23: RS-232 Trip Point Messages.....................................................................................96
Table 24: RS-232 Diagnostic Messages....................................................................................98
Table 25: I/O Connector Output Bit Assignment......................................................................99
Table 26: I/O Connector Input Bit Assignment.......................................................................101
Table 27: IEEE-488 Device Compliance ................................................................................104
Table 28: Standard Event Status Register...............................................................................106
Table 29: Status Byte Register................................................................................................107
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List of Tables
xii
Table 30: Commands for the Enable Registers....................................................................... 108
Table 31: Identification Query Response................................................................................ 110
Table 32: IEEE-488 Global Messages.................................................................................... 112
Table 33: IEEE-488 Channel-Specific Messages.................................................................... 115
Table 34: IEEE-488 Trip Point Messages............................................................................... 121
Table 35: IEEE-488 Diagnostic Messages.............................................................................. 124
Table 36: Fuses for the Type 670 Instrument ......................................................................... 128
Table 37: Transducer Cable Voltage Check............................................................................ 134
Table 38: Electronics Unit Voltage Check.............................................................................. 136
Table 39: Initial Settings........................................................................................................ 143
Table 40: Pinout of the Y-Cable 25-pin Male Connector........................................................ 146
Table 41: Pinout of the Y-Cable 25-pin Female Connector .................................................... 147
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Safety Information S
y
mbols Used in This Instruction Manual
1
Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
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Symbols Found on the Unit Safet
y
Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007 Off (Supply)
IEC 417, No.5008 Earth (
g
round)
IEC 417, No.5017
Protective earth
(
g
round)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031 Alternatin
g
current
IEC 417, No.5032
Both direct and
alternatin
g
current
IEC 417, No.5033-a Class ll equipment
IEC 417, No.5172-a
Three phase
alternatin
g
current
IEC 617-2 No.020206
Caution, refer to
accompanyin
g
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6 Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
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Safety Information Safet
y
Procedures and Precautions
3
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
GROUNDING THE PRODUCT
This product is grounded through the grounding conductor of the power cord. To avoid electrical
shock, plug the power cord into a properly wired receptacle before connecting it to the product
input or output terminals. A protective ground connection by way of the grounding conductor in
the power cord is essential for safe operation.
DANGER ARISING FROM LOSS OF GROUND
Upon loss of the protective-ground connection, all accessible conductive parts (including knobs
and controls that may appear to be insulating) can render an electrical shock.
GROUND AND USE PROPER ELECTRICAL FITTINGS
Dangerous voltages are contained within this instrument. All electrical fittings and cables must
be of the type specified, and in good condition. All electrical fittings must be properly connected
and grounded.
USE THE PROPER POWER CORD
Use only a power cord that is in good condition and which meets the input power requirements
specified in the manual.
Use only a detachable cord set with conductors that have a cross-sectional area equal to or greater
than 0.75 mm2. The power cable should be approved by a qualified agency such as VDE,
Semko, or SEV.
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Safety Procedures and Precautions Safet
y
Information
4
USE THE PROPER POWER SOURCE
This product is intended to operate from a power source that does not apply more voltage
between the supply conductors, or between either of the supply conductors and ground, than that
specified in the manual.
USE THE PROPER FUSE
Use only a fuse of the correct type, voltage rating, and current rating, as specified for your
product.
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
HIGH VOLTAGE DANGER
High voltage is present in the cable, and in the sensor when the controller is turned on.
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Sicherheitshinweise In dieser Betriebsanleitun
g
vorkommende S
y
mbole
5
Sicherheitshinweise
In dieser Betriebsanleitung vorkommende Symbole
Definition der mit WARNUNG!, VORSICHT! und HINWEIS überschriebenen Abschnitte in
dieser Betriebsanleitung.
Warnung!
&CU 5[ODQN 9#4070) YGKUV CWH GKPG )GHCJTGPSWGNNG JKP 'U
OCEJV CWH GKPGP #TDGKVUCDNCWH GKPG #TDGKVUYGKUG GKPGP
<WUVCPF QFGT GKPG UQPUVKIG )GIGDGPJGKV CWHOGTMUCO FGTGP
WPUCEJIGO·G #WUHÒJTWPI D\Y WPIGPÒIGPFG
$GTÒEMUKEJVKIWPI \W -ÌTRGTXGTNGV\WPI HÒJTGP MCPP
8QTUKEJV
Das Symbol VORSICHT! weist auf eine Gefahrenquelle hin. Es
macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung
bzw. Ungenügende Berücksichtigung zu einer Beschädigung oder
Zerstörung des Produkts oder von Teilen des Produkts führen kann.
*KPYGKU
Das Symbol HINWEIS weist auf eine wichtige Mitteilung hin, die auf
einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige
Gegebenheit von besonderer Wichtigkeit aufmerksam macht.
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