MKS Granville-Phillips Series 275 User manual

Series 275
Mini-Convectron
®
Vacuum Gauge Module
with DeviceNetTM Digital Interface
Instruction Manual
Instruction manual part number 275502
Revision C –September 2021

Series 275
Mini-Convectron
®
Vacuum Gauge Module
with DeviceNetTM Digital Interface
This Instruction Manual is for use with MKS Series 275
Convectron Modules with DeviceNet, catalog numbers
275420-1-GQ-T-00011and 275420-1-PQ-T-00001.
A list of catalog numbers for replacement gauges (not the
entire module) is provided on the following page.
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [e-mail]
Visit our website at www.mksinst.com
Instruction Manual
© 2019 MKS Instruments, Inc. All rights reserved.
G r a nv ill e- Ph illi p s
®
and Co nvect r on® are regi ster e d t r ademarks, and mksins t
TM
is a t r ademark of
MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of
their respective owners.

Series 275 Convectron
®
Module with DeviceNet
TM
Catalog numbers for Series 275 Convectron Modules with DeviceNet
and Interface for Applied Materials, Inc.
This Instruction Manual is for use with the following catalog numbers:
275420-1-GQ-T-00011 Convectron Gauge with Gold-plated Tungsten Filament
275420-1-PQ-T-00001 Convectron Gauge with Platinum Filament
Replacement Convectron Gauges for the 2 modules listed above:
Gold-plated Tungsten Filament
1/4 inch VCR-type female fitting 275811
Platinum Filament
1/4 inch VCR-type female fitting 275572-PQ
VCR is a registered trademarks of Swagelok Company
All other trademarks and registered trademarks are the properties of their respective owners.

Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
5
Chapter 1 Safety Instructions .......................................................................................................................................................7
1.1 Safety Introduction.........................................................................................................................................................7
1.2 Damage Requiring Service..........................................................................................................................................8
1.3 Overpressure Conditions .............................................................................................................................................9
1.4 Warranty Information..................................................................................................................................................10
1.5 Service Guidelines.........................................................................................................................................................11
1.6 FCC Verification .............................................................................................................................................................11
1.7 Canadian users...............................................................................................................................................................12
Chapter 2 Introduction/Specifications................................................................................................................................... 13
2.1 The Mini-Convectron Gauge Module...................................................................................................................13
2.2 Specifications..................................................................................................................................................................14
2.3 Module Dimensions.....................................................................................................................................................15
Chapter 3 Installation ................................................................................................................................................................... 17
3.1 Receiving Inspection....................................................................................................................................................17
3.1.1 Damaged Material..........................................................................................................................................17
3.2 Mini-Convectron Module Installation...................................................................................................................17
3.2.1 Important Precautions for Mini-Convectron Installation................................................................18
3.2.2 Environment......................................................................................................................................................19
3.2.3 Location ..............................................................................................................................................................19
3.2.4 Grounding..........................................................................................................................................................19
3.3 I/O Connector Wiring..................................................................................................................................................20
Chapter 4 Operation ..................................................................................................................................................................... 21
4.1 Theory of Operation ....................................................................................................................................................21
4.2 Front Panel Indicators and Adjustments .............................................................................................................22
4.2.1 Module (MOD) LED Status..........................................................................................................................22
4.2.2 DeviceNet Network (NET) LED Status.....................................................................................................23
4.2.3 Process Control Relay Settings..................................................................................................................23
4.2.4 Data Rate (Baud Rate) Switches................................................................................................................25
4.2.5 MAC ID Address Switches ...........................................................................................................................25
Chapter 5.......................................................................................................................... DeviceNet Operation 27
5.1 DeviceNet Protocol for the Mini-Convectron Module...................................................................................27
5.1.1 Standard Objects ............................................................................................................................................27
Chapter 6..........................................................................................................................................Calibration 33
6.1 Preparing for Pressure Measurement...................................................................................................................33
6.2 Gas Type...........................................................................................................................................................................33
6.3 Preparing For Convectron Gauge Operation.....................................................................................................33
6.4 Understanding Convectron Gauge Pressure Measurement In Gases Other Than Nitrogen or Air34
6.4.1 Examples.............................................................................................................................................................36
6.5 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications.................................43
6.5.1 Calibrate the Vacuum Reading..................................................................................................................43
6.5.2 Calibrate the Atmosphere Reading .........................................................................................................43
6.5.3 Special Considerations for Convectron Gauge Use Below 10-3 Torr...........................................43
Table of Contents

Chapter 7 Service and Maintenance....................................................................................................................................... 45
7.1 Service Guidelines.........................................................................................................................................................45
7.2 Damage Requiring Service........................................................................................................................................46
7.3 Troubleshooting - Symptoms and Possible Causes........................................................................................47
7.4 Convectron Gauge Test Procedure........................................................................................................................47
7.5 Cleaning Contaminated Convectron Gauges ....................................................................................................48
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
6

Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
7
These safety alert symbols in this manual or on the Product
rear panel, mean caution −personal safety, property damage
or dangerfrom electric shock. Read these instructions carefully.
Failure to comply with these instructions may result in serious personal
injury,including death, or property damage.
The service and repair information in this manual is for the use of
Qualified Service Personnel. To avoid shock, do not perform any
procedures in this manual or perform any servicing on this product
unless you are qualified to do so.
To reduce the risk of fire or electric shock, do not expose this product
to rainor moisture.
Objects and Liquid Entry − Never push objects of any kind into this
product through openings as they may touch dangerous voltage
points or short out parts that could result in a fire or electric shock. Be
careful not to spill liquid ofany kind onto the products.
1.1 Safety Introduction
Safety Instructions
BEGIN BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for
your convenience and repeated with additional information at appropriate points in these
instructions.
In these instructions the word “product” refers to the Mini-Convectron Module and all of its approved
parts and accessories.
NOTE: These instructions do not and cannot provide for every contingency that may arise in
connection with the installation, operation, or maintenance of this product. If you require further
assistance, contact MKS.
This product is designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict
accordance with these safety instructions.
These safety precautions must be observed during all phases of operation, installation, and serviceof
this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument. MKS
Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
• Read Instructions –Read all safety and operating instructions before operating the product.
• Retain Instructions –Retain the Safety and Operating Instructions for future reference.
• Heed Warnings –Adhere to all warnings on the product and in the operating instructions.
• Follow Instructions –Follow all operating and maintenance instructions.
• Accessories –Do not use accessories not recommended in this manual as they may be hazardous.
Chapter 1

8
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
1 Safety Instructions
Replacement Parts − When replacement parts are required, be certain
to usethe replacement parts that are specified by MKS or that have the
same characteristics as the original parts. Unauthorized substitutions
may result infire, electric shock or other hazards.
Safety Check −Upon completion of any service or repairs to this
product, askthe Qualified Service Person to perform safety checks to
determine that the product is in safe operating order.
Finite Lifetime −After ten years of normal use or even non−use, the
electricalinsulation in this product may become less effective at
preventing electrical shock. Under certain environmental conditions
which are beyond the manufacturer’s control, some insulation
material may deteriorate sooner.
Therefore, periodically inspect all electrical insulation for cracks,
crazing, or other signs of deterioration. Do not use if the electrical
insulation has become unsafe.
Be aware that when high voltage is present in any vacuum system, a
life threatening electrical shock hazard may exist unless all exposed
conductors are maintained at Earth ground.
This hazard is not peculiar to this product.
1.2 Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel
under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into, the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions. Adjust
only those controls that are covered by the operation instructions. Improper adjustment of other
controls may result in damage and will often require extensive work by a qualified technician to
restore the product to its normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for service.
Do not substitute parts or modify instrument.
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the
product. Return the product to a service facility designated by MKS
for service and repair to ensure that safety features are maintained. Do
not use this product ifit has unauthorized modifications.

1 Safety Instructions
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
9
Install suitable devices that will limit the pressure to the level that the
vacuumsystem can safely withstand. In addition, install suitable
pressure relief valvesor rupture disks that will release pressure at a
level considerably below the pressure that the system can safely
withstand.
Series 275 Gauges should not be used above 1000 Torr true pressure.
If accurate conversion data is not used, or is improperly used, a
potentialoverpressure explosion hazard can be created under certain
conditions.
Proper Grounding:
All components of a vacuum system used with this or any similar high voltage
product must be maintained at Earth ground for safe operation. The power
cord of this product shall be connected only to a properly grounded outlet. Be
aware, however, that grounding this product does not guarantee that other
components of the vacuum system are maintained at earth ground.
Complying with the usual warning to connect the power cable only to a properly
grounded outlet is necessary but not sufficient for safe operation of a vacuum
system with this or any similar high voltage producing product.
Verify that the vacuum port to which the Mini−Convectron Gauge is mountedis
electrically grounded. It is essential for personnel safety as well as proper
operation that the envelope of the gauge be connected to a facility ground. Use
a ground lug on a flange bolt if necessary.
1.3 Overpressure Conditions
Series 275 instruments are furnished calibrated for N
2
. They also measure the pressure of air correctly
within the accuracy of the instrument. Do not attempt to use a Series 275 Gauge calibrated for N
2
to
measure or control the pressure of other gases such as argon or CO
2
, unless accurate conversion data
for N2 to the other gas is properly used.
A pressure relief valve should be installed in the system if the possibility of exceeding 1000 Torr (1333
mbar) exists. Suppliers of pressure relief valves and pressure relief disks can be found via an online
search. Confirm that these safety devices are properly installed before installing the product.
In addition, check that:
a. The proper gas cylinders are installed,
b. Gas cylinder valve positions are correct on manual systems, and
c. The automation is correct on automated gas delivery systems.
Be aware that an electrical discharge through a gas may couple
dangerous high voltage directly to an ungrounded conductor almost
as effectively as would a copper wire connection. A person may be
seriously injured or even killed by merely touching an exposed
ungrounded conductor at high potential.
This hazard is not unique to this product.

1 Safety Instructions
10
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
Using the N2calibration to pressurize a vacuum system above about 1
Torr with certain other gases can cause dangerously high pressures which
may causeexplosion of the system. See Chapter 6, Calibration, before
using with other gases.
Warning − If used improperly, Mini−Convectron Gauges can supply
misleading pressure indications that can result in dangerous
overpressureconditions within the system.
Do not operate in an explosive atmosphere.
Do not operate the product in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment
constitutes adefinite safety hazard.
Do not use the product to measure the pressure of explosive or
combustible gases or gas mixtures. The sensor wire of the
Mini−Convectron Gauge normally operates at only 125 ˚C, but it is
possible that Controller malfunctioncan raise the sensor temperature
above the ignition temperature of combustible mixtures.
Danger of explosion or inadvertent venting to atmosphere exists on all
vacuumsystems which incorporate gas sources or involve processes
capable of pressurizing the system above safe limits.
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
It is the installer's responsibility to ensure that the automatic signals provided by the product are
always used in a safe manner. Carefully check manual operation of the system and the set point
programming before switching to automatic operation.
Where an equipment malfunction could cause a hazardous situation, always provide for fail-safe
operation. As an example, in an automatic backfill operation where a malfunction might cause high
internal pressures, provide an appropriate pressure relief device.
1.4 Warranty Information
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new
MKS products. The MKS Instruments, Inc. General Terms and Conditions of Sale provides the
complete and exclusive warranty for MKS products. This document may be located on our web site at
www.mksinst.com, or may be obtained by contacting an MKS Customer Service Representative.

1 Safety Instructions
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
11
1.5 Service Guidelines
Some minor problems are readily corrected on site. If the product requires service, contact the MKS
Technical Support Department at [phone]. If the product must be returned to the factory
for service, request a Return Material Authorization (RMA) from MKS. Do not return products
without first obtaining an RMA. In some cases a hazardous materials disclosure form may be
required. The MKS Customer Service Representative will advise you if the hazardous materials
document is required.
When returning products to MKS, be sure to package the products to prevent shipping damage.
Shipping damage on returned products as a result of inadequate packaging is the Buyer's
responsibility.
For Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [e-mail]
Visit our website at www.mksinst.com
1.6 FCC Verification
This equipment has been tested and found to comply with the limits for a Class A digital device,
pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection
against harmful interference when the equipment is operated in a commercial environment. This
equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in
accordance with this instruction manual, may cause harmful interference to radio communications.
However, there is no guarantee that interference will not occur in a particular installation. Operation of
this equipment in a residential area is likely to cause harmful interference in which case the user will be
required to correct the interference at his own expense. If this equipment does cause harmful
interference to radio or television reception, which can be determined by turning the equipment off
and on, the user is encouraged to try to correct the interference by one or more of the following
measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and the receiver.
• Connect the equipment into an outlet on a circuit different from that to which the receiver is
connected.
• Consult the dealer or an experienced radio or television technician for help.

1 Safety Instructions
12
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
1.7 Canadian users
This Class B digital apparatus meets all requirements of the Canadian Interference-Causing
Equipment Regulations.
Cet appareil numerique de la classe B respecte toutes les exigences du Reglement sur le material
broilleur du Canada.

Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
13
2.1 The Mini-Convectron Gauge Module
Introduction/Specifications
Unlike traditional thermocouple and Pirani gauges, Convectron gauges take advantage of heat loss
due to convection cooling at higher pressures. This extends the range of accurate, repeatable
vacuum measurements to atmosphere.
The Mini-Convectron module is a self-contained measurement device incorporating Convectron
gauge technology and electronics in a compact modular design. The electronics and gauge are
packaged in an all-metal package that provides a rugged enclosure and a high level of immunity to
electrical noise. The Convectron gauge used in the module is field-replaceable.
The Mini-Convectron module is available in a variety of output configurations. This instruction manual
is for use with a Mini-Convectron Module with DeviceNet interface and one
pressure-threshold setpoint relay. The adjustable setpoint allows control of valves, switches, alarm
signals, or other controls.
Within this manual:
• The term “Module” refers to the entire Mini-Convectron Module.
• The term “Gauge” refers to the replaceable Convectron Gauge inside the module.
Figure 2-1 Mini-Convectron Module with DeviceNet Interface
Chapter 2

14
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
2 Introduction/Specifications
2.2 Specifications
Table 2-1 Specifications
Function
Description
Measuring range for Air or N2
(See Chapter 4 of this instruction manual
for correction curves for other gases.)
•1 x 10-4 to 1000 Torr
Operation in the range of 1x10
–4
to 1x10
-3
Torr will require periodic
verification of the zero by reducing system pressure to below 1 x 10
–5
Torr
•1 x 10–4to 1300 mBar
•1 x 10–2to 130 KPa
Resolution
1 x 10-4 Torr; 1 x 10–4mBar; 1 x 10–2pascal
Mounting position
Horizontal preferred
IP Rating
• IP20
Power required
• +11.5 Vdc to 26.5 Vdc
+11.5 Vdc, 0.22 A
+26.5 Vdc, 0.1 A
• 3.5 watts maximum
• Protected against reversals, transients or over-voltages
Digital interface
DeviceNet
Baud rate
125K, 250K, or 500K, switch selectable
Setpoint
• Single pole, double throw relay, silver alloy - gold clad contacts
• UL rating: 1 A at 30 Vdc, 0.3A @ 12.5 VAC
• Potentiometer adjustment
Connectors
5-pin Micro
9-pin D male
Ambient operating temperature range
0 °C to +40 °C (non-condensing)
Non-operating temperature range
-40 °C to +70 °C
Bakeout temperature range (non-operating)
85 °C max.
Package
• Aluminum extrusion design with aluminum end plates
• 4.5” long x 1.7” wide x 2.5” high plus gauge port and fitting
Weight
340gm (12 oz) with 1/8 NPT fitting
Gauge tube internal volume
40 cc (2.5 cu in.)
Sensor wire
Platinum or Gold-plated Tungsten

Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
15
2 Introduction/Specifications
2.3 Module Dimensions
Figure 2-2 DeviceNet Mini-Convectron Module Dimensions
Table 2-1 Fitting/Flange Dimensions
Fitting
Description
Dimension H
VCR-type female fitting
1/4 inch VCR-type female fitting
3.0 cm (1.2 in.)

2 Introduction/Specifications
16
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502

Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
17
3.1 Receiving Inspection Installation
Inspect all material received for shipping damage. Confirm that your shipment includes all material and
options ordered. If materials are missing or damaged, the carrier that made the delivery must be notified
within 15 days of delivery in accordance with Interstate Commerce regulations to file a valid claim
with the carrier. Any damaged material including all containers and packing should beheld for carrier
inspection. Contact MKS if the shipment is not correct for reasons other than shipping damage.
3.1.1 Damaged Material
Any damaged material, including all containers and packaging, should be held for carrier inspection.
If your shipment is not correct for reasons other than shipping damage, contact MKS.
3.1.1.1 International Shipments
If an airfreight forwarder handles the shipment and their agent delivers the shipment to customs the
claim must be filed with the airfreight forwarder.
If an airfreight forwarder delivers the shipment to a specific airline and the airline delivers the
shipment to customs the claim must be filed with the airline, not the freight forwarder.
All materials have been chosen for ultra high vacuum service, corrosion resistance and bakeable to
150 °C. The gauge tube envelope is type 304 stainless steel. All metallic joints in the envelope are
welded. No solder is used within the envelope. The following materials are exposed to the vacuum:
Type 304 stainless steel, Carpenter Alloy 52, Kovar, Kapton
®
, gold-plated Tungsten (or Platinum) and
borosilicate glass.
3.2 Mini-Convectron Module Installation
Dimensions of the Mini-Convectron Module are given in Figure 2-2 on page 15.
Cleanliness pays. Keep the port cover in place until moments before installation.
For proper operation above about 1 Torr, install Mini-Convectron Modules with the gauge axis
horizontal. See Figure 3-1. Although the gauge will read correctly below 1 Torr when mounted inany
position, erroneous readings will result at pressures above 1 Torr if the gauge axis is not horizontal.
Vibration causes convection cooling of the sensor and will result in high pressure readings. Mount
Mini-Convectron Modules where they will not vibrate excessively.
Orient the gauge to prevent condensation of process vapors on the internal surfaces through
line-of-sight access to its interior. If vapor condensation is likely, orient the port downward to help
liquids drain out of the gauge.
Chapter 3

3 Installation
18
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
Figure 3-1 Recommended Convectron Gauge Orientation
3.2.1 Important Precautions for Mini-Convectron Installation
The following precautions in the use and installation of the Mini-Convectron must be observed.
• It is recommended that the Mini-Convectron be installed with the port oriented vertically
downward to ensure that no system condensates or other liquids collect in the gauge tube. The
gauge tube axis must be horizontal if it is to be used at pressures above 1 Torr. Although the gauge
tube will read correctly below 1 Torr when mounted in any position, erroneous readings will result
at pressures above 1 Torr if the gauge tube axis is not horizontal.
• Do not mount the Mini-Convectron in a manner that will allow deposition of process vapors on
the internal surfaces of the gauge tube, may occur through line-of-sight access to the interior of
the gauge tube.
• Do not install the Mini-Convectron where high amplitudes of vibration are present. Excessive
vibration will cause forced convection at high pressure giving erroneous readings.
• Do not use a compression mount (quick connect) for attaching the Mini-Convectron to the system
in applications resulting in positive pressures in the gauge tube. Positive pressures might blow the
gauge tube out of a compression fitting and damage equipment and injure personnel. Pipe thread
or flange mounting systems should be used for positive pressure applications. In any case, the
absolute pressure in the gauge tube should not exceed 1000 Torr.
• The Platinum Sensor in the gauge is fragile; handle the gauge carefully.
• Do not perform electrical continuity tests on the Mini-Convectron gauge tube with instruments
applying voltages in excess of 1 volt when the gauge tube is at vacuum, or 5 volts when at
atmospheric pressure. Exceeding these voltages will damage the sensing element.
• Keep the gauge tube clean. Do not remove the mounting port cover until you are ready to install
the gauge tube.
• Do not bake the Mini-Convectron at temperatures exceeding 85 °C.

Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
19
When high voltage is present, all exposed conductors of a vacuum
systemmust be maintained at Earth ground.
3 Installation
• Do not install the Mini-Convectron where it will be subject to corrosive gases such as mercury
vapor or fluorine which will attack the gold-plated Titanium sensor. Mini-Convectrons with the
Platinum sensor should not be used in corrosive environments.
• For greatest accuracy and repeatability, the Mini-Convectron gauge tube should be located in a
stable room temperature environment.
• All connections to the unit are to be made with shielded cable or cables. The shield or shields are to
be connected to the connector shell.
3.2.2 Environment
To minimize temperature effects, locate pressure gauges away from internal and external heat sources,
in an area where the ambient temperature is reasonably constant.
3.2.3 Location
Where you mount the gauge is critical to obtaining reliable pressure measurements. Long tubing or
other constrictions can cause large errors in pressure readings. If you mount the gauge near the
pump, the pressure in the gauge may be considerably lower than in the rest of the system. If you
place the gauge near a gas inlet or other source of contamination, the pressure in the gauge may be
much higher than in the rest of the system.
3.2.4 Grounding
Under certain conditions, dangerously high voltage can be conducted through a gas directly to an
ungrounded conductor almost as effectively as through a copper wire. The ability of an electric
current to flow through a gas under certain circumstances poses a serious risk. Do not touch the
exposed pins on any gauge installed on a vacuum system when high voltage is present.
The Convectron Gauge envelope may not be reliably grounded through its vacuum connection. For
safety, you must either:
• Add a separate ground wire, or
• Shield the envelope to prevent human contact. Ground the gauge envelope by using a metal hose
clamp on the gauge connected by a #12 AWG (minimum size) copper wire to the grounded
vacuum chamber.

3 Installation
20
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
Do not connect or disconnect any electrical connectors while power
is applied to the equipment (hot swapping). Doing so may cause
damage to the equipment or severe electrical shock to personnel.
3.3 I/O Connector Wiring
DeviceNet requires a 121 ohm terminating resistor to be installed at each end of the trunk as
specified in the DeviceNet Volume 1, Release 1.2, Section 9.3.4.
Figure 3-2 DeviceNet Micro Connector
Figure 3-3 Series 275 DeviceNet Mini-Convectron Process Control Relay Connector