MKS Newport HXP1000-MECA User manual

HXP1000-MECA Hexap d
USER’SMANUAL
High L ad 6-Axis-Parallel
Kinematic P siti ning System
A863E

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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
Warranty
Newpor Corpora ion warran s his produc o be free from defec s in
ma erial and workmanship for a period of 1 year from he da e of
shipmen . If found o be defec ive during he warran y period, he produc
will ei her be repaired or replaced a Newpor ’s discre ion.
To exercise his warran y, wri e or call your local Newpor represen a ive,
or con ac Newpor headquar ers in Irvine, California. You will be given
promp assis ance and re urn ins ruc ions. Send he ins rumen ,
ranspor a ion prepaid, o he indica ed service facili y. Repairs will be
made and he ins rumen re urned, ranspor a ion prepaid. Repaired
produc s are warran ed for he balance of he original warran y period, or
a leas 90 days.
Limitation of Warranty
This warran y does no apply o defec s resul ing from modifica ion or
misuse of any produc or par .
This warrant is in lieu of all other warranties, expressed or implied,
including an implied warrant of merchantabilit or fitness for a
particular use. Newport Corporation shall not be liable for an indirect,
special, or consequential damages.
b Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document ma be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
information onl , and product specifications are subject to change without
notice. An change will be reflected in future publishings.
CAUTION
Warranty doe not apply to damage re ulting from:
• Incorrect u age:
– Load on the Hexapod greater than maximum pecified load.
– Carriage peed higher than pecified peed.
–Improper grounding.
¬ Connector mu t be properly ecured.
¬ When the load on the Hexapod repre ent an electrical ri k, it
mu t be connected to ground.
– Exce ive or improper cantilever load .
•Modification of the Hexapod or any part thereof.
CAUTION
Please ret rn eq ipment in
the original (or eq ivalent)
packing.
Yo will be responsible for
damage inc rred from
inadeq ate packaging if the
original packaging is not
sed.
© 2019
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
able of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction.................................................................................1
1.1 Unpacking ..................................................................................................2
2.0 — Description ...................................................................................3
3.0 — Characteristics............................................................................4
3.1 Mechanical Specifications .......................................................................4
3.2 Max. Cantilever Distance of the Load.....................................................4
Horizontal Base Plate ...............................................................................4
Vertical Base Plate ....................................................................................4
Base Plate at Any Position .......................................................................5
Horizontal Base Plate - Lateral Force .....................................................5
3.3 Weight.........................................................................................................5
4.0 — Connection to the HXP1000-ELEC-D Controllers .....6
4.1 Warnings on Controllers ..........................................................................6
4.2 Connection.................................................................................................7
4.3 Cables .........................................................................................................8
5.0 — Dimensions...................................................................................9
6.0 — Maintenance ..............................................................................10
6.1 Maintenance ............................................................................................10
6.2 Repair .......................................................................................................10
Service Form .........................................................................................................11
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
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v
HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
HXP1000-
MECA
EU Declaration of Conformity
following Annex II-1A
of Directive 2006/42/EC on machinery
The manufacturer:
MICRO-CONTROLE Spectra-Physics,
9, rue du Bois Sauvage
91055 Evry CEDEX, FRANCE
Hereby declares that the machinery:
yDescription: " HXP1000-MECA"
yFunction: High Load 6-Axis-Parallel Kinematic Positioning System
yModels: HXP1000-MECA
– the technical file of which was compiled by:
Mr Hervé LE COINTE , Quality Director,
MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29
F-45340 Beaune La Rolande France
–complies with all the relevant provisions of the Directive 2006/42/EC on machinery.
–complies with all the relevant provisions of the Directive 2014/30/EU relating to electro-
magnetic compatibility.
– complies with all the relevant provisions of the Directive 2011/65/EU relating to RoHS2.
–was designed and built in accordance with the following harmonised standards:
yNF EN 61326-1:2013 « Electrical equipment for measurement, control and
laboratory use – EMC requirements – Part 1: General requirements »
yNF EN 55011:2010/A1:2011 Class A
– was designed and built in accordance with the following other standards:
yNF EN 61000-4-2
yNF EN 61000-4-3
yNF EN 61000-4-4
yNF EN 61000-4-6
ORIGINAL DECLARATION
Done in Beaune La Rolande on 16 May 2017
Hervé LE COINTE
Quality Director
DC1-EN rev:A
EC Declaration of Conformity
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
Definitions and Symbols
The following erms and symbols are used in his documen a ion and also
appear on he produc where safe y-rela ed issues occur.
General Warning or Caution
The exclama ion symbol may appear in warning and cau ion ables in his
documen . This symbol designa es an area where personal injury or
damage o he equipmen is possible.
The following are defini ions of he Warnings, Cau ions and No es ha may
be used in his manual o call a en ion o impor an informa ion regarding
personal safe y, safe y and preserva ion of he equipmen , or impor an
ips.
WAR N I N G
Warning indicate a potentially dangerou ituation which can re ult in
bodily harm or death.
CAUTION
Caution indicate a potentially hazardou ituation which can re ult in
damage to product or equipment.
NOTE
Note indicate additional information that mu t be con idered by the
u er or operator.
European Union CE Mark
The presence of he CE Mark on Newpor Corpora ion equipmen means
ha i has been designed, es ed and cer ified as complying wi h all
applicable European Union (CE) regula ions and recommenda ions.
Warning and Caution
ATTENTION
Thi tage i a Cla A device. In a re idential environment, thi device
can cau e electromagnetic interference. In thi ca e, uitable mea ure
mu t be taken by the u er.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
Warnings
WARNING
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WAR N I N G
Do not use this Hexapod when struts are emitting smoke or is unusua y
hot to the touch or are emitting any unusua odor or noise or is in any
other abnorma state.
Stop using the Hexapod immediate y, switch off struts power and then
disconnect the HXP contro er from power supp y.
After checking that smoke is no onger being emitted contact your
Newport service faci ity and request repairs. Never attempt to repair the
Hexapod yourse f as this can be dangerous.
WAR N I N G
Make sure that this Hexapod is not exposed to moisture and that iquid
does not get into the Hexapod.
Neverthe ess, if any iquid has entered the Hexapod, switch off struts
power and then disconnect the HXP contro er from power supp y.
Contact your Newport service faci ity and request repairs.
WAR N I N G
Do not insert or drop objects into this Hexapod, this may cause an
e ectric shock, or ock the drive.
Do not use this Hexapod if any foreign objects have entered the
Hexapod. Switch off struts power and then disconnect the HXP
contro er from power supp y.
Contact your Newport service faci ity for repairs.
WAR N I N G
Do not p ace this Hexapod in unstab e ocations such as on a wobb y
tab e or s oping surface, where it may fa or tip over and cause injury.
If this Hexapod has been dropped or the case has been damaged, switch off
struts power and then disconnect the HXP contro er from power supp y.
Contact your Newport service faci ity and request repairs.
WAR N I N G
Do not attempt to modify this Hexapod; this may cause an e ectric shock
or downgrade its performance.
WAR N I N G
Do not exceed the usab e depth indicated on the mounting ho es (see
section “Dimensions”). Longer screws can damage the mechanics or
cause a short-circuit.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
Caution
CAUTION
Do not manipulate struts. This may ause it to malfun tion.
C
CAUTION
Do not pla e this Hexapod in a hostile environment su h as X-Rays, hard
UV,… or in any va uum environment.
C
CAUTION
Do not pla e this Hexapod in a lo ation affe ted by dust, oil fumes,
steam or high humidity. This may ause an ele tri sho k.
CAUTION
Do not leave this Hexapod in pla es subje t to extremely high
temperatures or low temperatures. This may ause an ele tri sho k.
• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original pa kaging)
CAUTION
Do not move this Hexapod if struts power is on.
Make sure that the able to the ele troni s is dis onne ted before
moving the Hexapod. Failure to do so may damage the able and ause
an ele tri al sho k.
CAUTION
Be areful that the Hexapod is not bumped when it is being arried. This
may ause it to malfun tion.
CAUTION
When handling this Hexapod, always unplug the equipment from the
power sour e for safety.
CAUTION
Conta t your Newport servi e fa ility to request leaning and
spe ifi ation ontrol every year.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
High Load 6-Axis-Parallel
Kinematic Positioning System
HXP1000-MECA Hexapod
1.0 —Introduction
his manual provides operating instructions for the Hexapod that you
have purchased.
CAU ION
Please read all chapters of this manual carefully before operating your
Hexapod.
A EN ION
Do not manually turn
struts.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
1.1 Unpacking
CAU ION
he HXP1000-MECA weighs 60 kg. Use proper lifting techniques and
personnel protection to handle the HXP1000-MECA.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
2.0 —Description
he HXP1000-MECA Hexapod is a high load capacity parallel kinematic
motion device that provides six degrees of motion. It also features long
travel ranges, fast speeds, high stiffness and stability as well as very easy
to use and flexible coordinate systems or pivot points.
Newport's HXP1000-MECA Hexapod is driven by six DC servo motor driven
actuators which provide precise MIM and fast speed. he quality of the
actuators has obviously a strong impact on the overall motion
performance of a Hexapod, but of equal importance are the joints with
which the actuators are attached to the base and the moving top plate.
he preloaded and backlash-free, cardan joints enhance not only the
repeatability and positioning performance of the HXP1000-MECA, but are
also key to its position stability and stiffness.
he HXP1000-ELEC-D controller accurately masters the synchronized
transformations from Cartesian input coordinates to the motion of the
Hexapod legs. In addition, the HXP1000-ELEC-D feature instrument grade
I/O's, hardware based input triggers, event triggers, high-speed on-the-fly
data acquisition, fast CP/IP communication, and integrated CL
programming language for on-board processes. All these make automating
the application and programming much easier.
A requirement for many Hexapod motion applications is a virtual pivot
point, allowing the user to freely choose the pivot point in space for all
rotations. Newport has taken this a step further by providing two pivot
points. he two user-definable coordinate systems provided, called tool
(moves with the Hexapod) and work (stationary coordinate system) are
programmable and flexible. Imagine a machine tool where one can adjust
the orientation of both the cutting tool and workpiece or in photonics, the
optical beam and the sample. Incremental displacements are possible in
either one in user-friendly Cartesian coordinates, and positions can be
easily switched from one system to the other by a function call. hese
powerful functions are a completely new way of mastering Hexapod
motions without the need for complex external coordinate
transformations.
Absolute mo es and positions are
defined in the work coordinate
system. Incremental mo es can
be done in the tool or in the work
coordinate systems.
WORLD
WORK
CARRIAGE
TOOL
BASEBASEBASE
As a standard feature, the HXP1000-ELEC-D
controller allows the user to choose a irtual pi ot
point in space for all rotations.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
3.0 —Characteristics
3.1 Mechanical Specifications
CAU ION
o reach specifications stated, stages must be fixed on a plane surface
with a flatness of 50 µm or better.
3.2 Max. Cantilever Distance of the Load
3.2.1 Horizontal Base Plate
3.2.2 Vertical Base Plate
XYZU (Rx) V (Ry) W (Rz)
Travel range (1) -62; +93 mm ±69 mm ±39.5 mm ±11° ±10° ±19.5°
MIM, Minimum incremental motion 0.3 µm 0.3 µm 0.16 µm 0.06 mdeg 0.06 mdeg 0.1 mdeg
Uni-directional repeatability, typical ±0.15 µm ±0.15 µm ±0.08 µm ±0.03 mdeg ±0.03 mdeg ±0.05 mdeg
Max. speed 9 mm/s 9 mm/s 4 mm/s 1.4 °/s 1.4 °/s 2.8 °/s
Stiffness (2) 10 N/µm 10 N/µm 100 N/µm –––
1) Travel ranges are interdependent. The listed val es are max. travels per axis when all other axis are in their centered position
(Height = 395 mm for Z).
2) Stiffness depends on Hexapod position. Val es are given for all axis in their centred position.
5000
Max. Load (N)
0
2000
4000
1000
3000
0 400
200 600100 500300 700
Radial Distance, D (mm)
Load Position: D = 0 to 800 mm; H = 0 to 600 mm
Load
800
H = 0
H = 100
H = 200
H = 300
H = 400
H = 500
H = 600
H
D
3000
Max. Load (N)
0
1000
2000
0 400
200 600100 500300 700
Radial Distance, D (mm)
Load Position: D = 0 to 800 mm; H = 0 to 600 mm
800
Load
H = 0
H = 100
H = 200
H = 300
H = 400
H = 500
H = 600
H
D
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
3.2.3 Base Plate at Any Position
3.2.3 Horizontal Base Plate - Lateral Force
3.3 Weight
Max. Load (N)
0
2000
1000
0 400200 600100 500300 700
Radial Distance, D (mm)
Load Position: D = 0 to 800 mm; H = 0 to 600 mm
800
Load
H = 0
H = 100
H = 200
H = 300
H = 400
H = 500
H = 600
H
D
Max. Load (N)
0
2000
1000
0 400200 600100 500300 700
Radial Distance, D (mm)
Force Position: D = 0 to 800 mm; H = 0 to 600 mm
800
H = 0
H = 100
H = 200
H = 300
H = 400
H = 500
H = 600
H
D
Force
F
With Any
Orientation
Weight lb (kg)]
HXP1000-MECA (without cables) 132 (60)
Cables, length 9.8 ft (3 m) 8.2 (3.7)
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
4.0 —Connection to the HXP1000-ELEC-D Controllers
4.1 Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize
shock hazards and are familiar with safety precautions required to avoid
possible injury. Read the controller user’s manual carefully before
operating the instrument and pay attention to all written warnings and
cautions.
WAR N I N G
Disconnect t e power plug under t e following circumstances:
• If t e power cord or any attac ed cables are frayed or damaged in
any way.
• If t e power plug is damaged in any way.
• If t e unit is exposed to rain, excessive moisture, or liquids are spilled
on t e unit.
• If t e unit as been dropped or t e case is damaged.
• If you suspect service or repair is required.
• W enever you clean t e electronics unit.
CAUTION
To protect t e unit from damage, be sure to:
• Keep all air vents free of dirt and dust.
• Keep all liquids away from t e unit.
• Do not expose t e unit to excessive moisture (85% umidity).
• Read t is manual before using t e unit for t e first time.
WAR N I N G
All attac ment plug receptacles in t e vicinity of t is unit are to be of
t e grounding type and properly polarized.
Contact your electrician to c eck your receptacles.
WAR N I N G
T is product is equipped wit a 3-wire grounding type plug.
Any interruption of t e grounding connection can create an electric
s ock azard.
If you are unable to insert t e plug into your wall plug receptacle,
contact your electrician to perform t e necessary alterations to ensure
t at t e green (green-yellow) wire is attac ed to eart ground.
WAR N I N G
T is product operates wit voltages t at can be let al.
Pus ing objects of any kind into cabinet slots or oles, or spilling any
liquid on t e product, may touc azardous voltage points or s ort out
parts.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
4.2 Connection
WARNING
Always turn the controller's power OFF before connecting to a strut.
Anytime prior to power-up, each strut must be connected with the
supplied cable to the corresponding SUB-D25F plug located at the rear
panel of the HXP1000-ELEC-D controller, labeled “MO OR”.
WARNING
Each Hexapod strut label corresponds to the axis number on the
HXP1000-ELEC-D controller. his label is also indicated on connectors
of the strut.
6 SUB-D25F CONNECTORS
FOR MOTOR CABLES
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
4.3 Cables
Each Hexapod is equipped with 3-meter cables terminated with SUB-D25
connectors. These cables must connect the struts to the corresponding
axis on the HXP1000-ELEC-D controller.
CAU ION
Numbering of axes is important for both motor and encoder
connections. A mismatch will cause fatal errors during initialization
or unexpected hexapod motions.
NO E
A sticker indicates the axis number on the SUB-D25 connectors of each
cable.
WARNING
he HXP1000-MECA must be grounded via a threaded hole to avoid
electrical disturbances generated by ground loops (see image below).
WAR N I N G
These cables are shielded correctly. For a correct operation, make s re
to lock connectors (gro nd contin ity provided by the cable).
WAR N I N G
Keep the motor cables at a safe distance from other electrical cables in
yo r environment to avoid potential cross talk.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
5.0 —Dimensions
NO E
op and base plates of the HXP1000-MECA Hexapod are made of
anodized aluminum.
CARRIAGE
BASE
15.55 ±1.55 (395 ±39.5)
HEXAPOD AT
MIDDLE POSITION
3.94
(100)
5.91
(150)
EACH SIDE:
3 HOLES M6 THD,
DEPTH: .47 (12)
BOTH PLATES:
3x 3 HOLES M8 THD,
DEPTH: .63 (16)
BOTH PLATES:
3 HOLES ø.35 (9)
C’BORED ø.79 (20) x 1.97 (50),
AT 120° ON ø15.35 (390)
BOTH PLATES:
6 HOLES ø.35 (9)
C’BORED ø.79 (20) x 1.97 (50),
AT 60° ON ø11.81 (300)
1.57
(40)
.59 (15)
2.56
(65)
2.59
(65)
ø7.87
(200)
ø16.7
(425)
ø21,6
(550)
X
Y
– TOP VIEW –
8.94
(227)
6.89
(175)
6.38
(162)
1.48
(37.5)
BASE PLATE
TOP PLATE
MODEL SHOWN: HXP1000-MECA
DIMENSIONS IN INCHES (AND MILLIMETERS)
Z
XY
NOTE
The +X-axis points in the direction of the cable output
between struts #3 and #4.
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HXP1000-MECA High L ad 6-Axis-Parallel Kinematic P siti ning System
6.0 —Maintenance
RECOMMENDA ION
Please contact echnical Sales Support team for recommendations on
application specific maintenance.
6.1 Maintenance
he Hexapod requires no particular maintenance. Nevertheless, this is a
precision mechanical device that must be kept and operated with caution.
PRECAU IONS
he Hexapod must be used or stocked in a clean environment, without
dust, humidity, solvents or other substances.
RECOMMENDA ION
It is recommended to return the Hexapod to Newport for re-lubrication
after 2000 hours of use.
If the HXP1000-MECA is mounted on a workstation and cannot be easily
removed, please contact Newport's After Sales Service for further
instructions.
6.2 Repair
CAU ION
Never attempt to disassemble a component of the Hexapod that has not
been covered in this manual.
o disassemble a non specified component can cause a malfunction of
the stage.
If you observe a malfunction in your Hexapod, please contact us
immediately to arrange for a repair.
CAU ION
Any attempt to disassemble or repair a Hexapod without prior
authorization will void your warranty.
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Your Local Representative
Tel.:
Fax:
Name:
Company:
Addre :
Country:
P. O . N u m b e r :
Item(s) Being Returned:
Model #:
De cription:
Rea on of return of good (plea e li t any pecific problem ):
Return authorization #:
(Plea e obtain prior to return of item)
Date:
Phone Number:
Fax Number:
Serial #:
Service Form
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Visit Newp rt Online at:
www.newp rt.c m
North America & Asia
Newport Corporation
1791 Deere Ave.
Irvine, CA 92606, USA
Sales
Tel.: [phone]
e-mail: [e-mail]
Technical Support
Tel.: [phone]
e-mail: [e-mail]
Service, RMAs & Returns
Tel.: [phone]
e-mail: [e-mail]
Europe
MIC O-CONT OLE Spectra-Physics S.A.S
9, rue du Bois Sauvage
91055 Évry CEDEX
France
Sales & Technical Support
Tel.: [phone]
e-mail: [e-mail]
Service & Returns
Tel.: [phone]