MKS Baratron 722A User manual

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SM
View
Instra

119475-P1
Rev B, 12/00
MKS Baratron


Type 722A
Absolute Pressure Transducer
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Copyright © 2000 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
VCR, and VCOare registered trademarks of Cajon Company, Macedonia, OH
Inconelis a registered trademark of Inco Alloys International, Inc., Huntington, WV
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Table of Contents
iii
Table of Contents
Safety Procedures and Precautions ............................................................................................. 1
Chapter One: General Information............................................................................................. 3
Introduction....................................................................................................................3
How This Manual is Organized ..................................................................................... 4
Customer Support .......................................................................................................... 4
Chapter Two: Installation........................................................................................................... 5
How To Unpack the Type 722 Unit............................................................................... 5
Unpacking Checklist ......................................................................................... 5
Product Location and Requirements.............................................................................. 6
Operating Environmental Requirements........................................................... 6
Dimensions..................................................................................................................... 6
Setup............................................................................................................................... 9
Mounting........................................................................................................... 9
Fittings .............................................................................................................. 10
Making Mechanical Connections ..................................................................... 10
Connectors ........................................................................................................ 11
How to Wire a PDR Series Readout to a Type 722 Transducer with a 9-
pin Type “D” Connector. .................................................................................. 13
Electrical Information ....................................................................................... 14
NW-16-KF Fitting Information......................................................................... 14
Interface Cables................................................................................................. 15
Attaching the Terminal Block Connector Cable............................................... 17
How To Check the Transducer Zero.............................................................................. 18
How To Zero the 722 Transducer..................................................................... 18
Span Adjustment............................................................................................... 19
Chapter Three: Overview........................................................................................................... 21
General Information....................................................................................................... 21
Sensor............................................................................................................................. 21
Signal Conditioning Electronics .................................................................................... 22
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Table of Contents
iv
Label............................................................................................................................... 22
Chapter Four: Operation ............................................................................................................ 23
General ........................................................................................................................... 23
Lowest Suggested Pressure Available for Reading .......................................... 23
Lowest Suggested Pressure to Use for Control................................................. 23
Chapter Five: Maintenance and Troubleshooting...................................................................... 25
General ........................................................................................................................... 25
Zero Adjustment............................................................................................................. 25
Troubleshooting ............................................................................................................. 26
Appendix A: Product Specifications.......................................................................................... 27
Performance Specifications............................................................................................ 27
Physical Specifications .................................................................................................. 27
NW-16-KF Fitting Information...................................................................................... 27
Electrical Specifications................................................................................................. 28
Appendix B: Model Code Explanation...................................................................................... 29
Model Code.................................................................................................................... 29
NW-16-KF Fitting Information...................................................................................... 31
Index............................................................................................................................................ 33
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List of Figures and Tables
v
List of Figures and Tables
Figures
Figure 1: Dimensions of the Low Pressure (up to 1000 Torr) Type 722 Transducer................ 7
Figure 2: Fitting Dimensions for the Low Pressure Type 722 Transducer................................ 7
Figure 3: Dimensions of the High Pressure (>1000 to 25,000 Torr) Type 722 Transducer...... 8
Figure 4: Fitting Dimensions of the High Pressure Type 722 Transducer ................................ 8
Figure 5: Vertical Mounting Positions....................................................................................... 9
Figure 6: Acceptable Horizontal Mounting Position ................................................................. 9
Figure 7: Electrical Scheme for a Voltage Unit......................................................................... 14
Figure 8: How To Connect the Cable to a Terminal Block (Example 1) .................................. 17
Figure 9: How To Connect the Cable to a Terminal Block (Example 2) .................................. 17
Figure 10: Product Label............................................................................................................ 22
Tables
Table 1: Pinout of the 9-Pin Type “D” Connector........................................................................11
Table 2: Pinout of the 5-Pin Terminal Block Connector ..............................................................11
Table 3: Pinout of the 15-Pin Type “D” Connector......................................................................12
Table 4: Connections Between a Transducer with a Type “D” Connector and a PDR Readout..13
Table 5: Interface Cables ..............................................................................................................15
Table 6: Highest Pressure for Proper Zero Adjustment................................................................19
Table 7: Suggested Pressures for Reading and Control................................................................23
Table 8: Troubleshooting Chart ....................................................................................................26
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List of Figures and Tables
vi
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Safety Procedures and Precautions
1
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to a MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used
is compatible with sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely
with a clean dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect
personnel.
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive atmosphere unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer's
directions.
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Safety Procedures and Precautions
2
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the
instrument to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to
the product specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the
vacuum system to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination
such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit.
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
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Chapter One: General Information Introduction
3
Chapter One: General Information
Introduction
The BaratronType 722A Absolute Pressure Transducer offers the proven technology of the
Baratron transducer in a smaller package. The unit provides an accuracy of 0.5% of Reading and
carries a CE Mark to indicate full compliance with the EMC Directive 89/336/EEC.
The 722 transducer is available with a selection of options.
•Range: 1 Torr through 25,000 Torr (0.2 psia through 500 psia)
•Fittings: ½ tube, 4-VCR, 8-VCR, 8-VCO, Mini-CF, and NW-16-KF
•Connectors: 5-pin terminal block, 9-pin Type “D”, and 15-pin Type “D” on a six inch
length of cable
Refer to Appendix A: Product Specifications, page 27, for a complete list of product
specifications. The model code of your transducer specifies the options chosen. Refer to
Appendix B: Model Code Explanation, page 29, for more information on the model code.
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How This Manual is Organized Chapter One: General Information
4
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate a Type 722
unit.
Before installing your Type 722 unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.
Chapter One: General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two: Installation, explains the environmental requirements and describes how to mount
the instrument in your system.
Chapter Three: Overview, gives a brief description of the instrument and its functionality.
Chapter Four: Operation, describes how to use the instrument and explains all the functions and
features.
Chapter Five: Maintenance and Troubleshooting, lists a few general practices to follow to
ensure that the unit will perform optimally. It also includes a table of hints for reference in the
event the unit malfunctions.
Appendix A: Product Specifications, lists the specifications of the instrument.
Appendix B: Model Code Explanation, describes the model code.
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your
Type 722 instrument, or to obtain information about companion products MKS offers, contact
any authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
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Chapter Two: Installation How To Unpack the Type 722 Unit
5
Chapter Two: Installation
How To Unpack the Type 722 Unit
MKS has carefully packed the Type 722 unit so that it will reach you in perfect operating order.
Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc.,
to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Caution Only qualified individuals should perform the installation and any
user adjustments. They must comply with all the necessary ESD and
handling precautions while installing and adjusting the instrument.
Proper handling is essential when working with all highly sensitive
precision electronic instruments.
Unpacking Checklist
Standard Equipment:
•Type 722 Unit
•Type 722 Instruction Manual (this book)
Optional Equipment:
•Electrical Connector Accessories Kit - 722A-K1 (includes a mating connector for the
electrical connector)
•Most pressure, flow, flow ratio, and throttling valve controllers
•MKS Type 146, Type 660, Type PDR-C-1C, or Type PDR-C-2C power supply/readout
unit
•Cables to connect the 722 transducer to the above equipment
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Product Location and Requirements Chapter Two: Installation
6
Product Location and Requirements
Operating Environmental Requirements
•Ambient Operating Temperature: 0°C to 50°C (32°F to 122°F)
•Ventilation requirements include sufficient air circulation
Dimensions
Note All dimensions are listed in inches with millimeters referenced in
parentheses.
The dimensions of the 722 transducer vary depending upon the full scale range:
Full scale ranges up to and including 1000 Torr: are referred to as “low pressure” transducers
Full scale ranges above 1000 Torr: are referred to as “high pressure” transducers
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Chapter Two: Installation Dimensions
7
0.19 (4.7)
2.75 (69.8)
0.94 (23.9)
4-VCR Female
1.50 (38.1) Dia.
9-Pin Type "D"
Connector
5-Pin Terminal Block
Connector
15-Pin Type "D"
Connector
Screw Access From
This Side
Wire Entry
28 AWG to 14 AWG
0.54 (13.7)
Max.
6.00 (152)
Figure 1: Dimensions of the Low Pressure (up to 1000 Torr) Type 722 Transducer
0.76 (19.2)
0.049 (1.2)
0.50 (12.7) Dia.
" Tube
½
0.86 (21.7)
NW-16-KF
0.80 (20.2)
Mini-CF, Rotatable
1.19 (30.1)
8-VCO Female
8-VCR Female
1.40 (35.5)
4-VCR Male, Rotatable
0.94 (23.9)
Figure 2: Fitting Dimensions for the Low Pressure Type 722 Transducer
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Dimensions Chapter Two: Installation
8
0.19 (4.7)
2.68 (68.1)
1.36 (34.4)
4-VCR Female
1.50 (38.1) Dia.
Screw Access
From This Side
Wire Entry
28 AWG to 14 AWG
0.54 (13.7)
Max.
6.00 (152)
9-Pin Type "D"
Connector
5-Pin Terminal Block
Connector
15-Pin Type "D"
Connector
Figure 3: Dimensions of the High Pressure (>1000 to 25,000 Torr) Type 722 Transducer
1.07 (27.1) 0.75 (19.1)
0.049 (1.2)
0.50 (12.7) Dia.
(1000 Torr/19.3 PSI Max.)
" Tube
½
1.17 (29.6)
NW-16-KF
(1200 Torr/23.2 PSI Max.)
1.11 (28.1)
Mini-CF, Rotatable
1.50 (38.0)
8-VCO Female
8-VCR Female
1.71 (43.4)
1.36 (34.4)
4-VCR Male, Rotatable
Figure 4: Fitting Dimensions of the High Pressure Type 722 Transducer
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Chapter Two: Installation Setup
9
Setup
Mounting
The 722 transducer can be mounted with the cylindrical end in either a vertical (upright) or
horizontal position. The mounting requirements allow any foreign matter entering the pressure
port to fall away from the sensing diaphragm.
Mounting the Unit in a Vertical Position
If the unit is mounted in a vertical position, the cylindrical end of the unit must point upwards, as
shown in Figure 5. Do not install the unit with the cylindrical end of the unit pointing downward
because particulate impurities may accumulate on the sensing diaphragm and alter the pressure
reading.
4-VCR Female
shown
4-VCR Female
shown
Acceptable Vertical Mounting Unacceptable Vertical Mounting
Figure 5: Vertical Mounting Positions
Mounting the Unit in a Horizontal Position
In a horizontal position, the cylindrical end of the unit can point in any direction.
4-VCR Female
shown
Figure 6: Acceptable Horizontal Mounting Position
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Setup Chapter Two: Installation
10
Fittings
The 722 transducer is available with a variety of different fittings, listed below:
•½Tube
•4-VCRtype Female
•8-VCRtype Female
•8-VCOtype Female
•NW-16-KF
•Mini-CF
Caution 1. MKS does not warranty the 722 transducer when single or double
metal ferrule compression-type vacuum fittings are used because
damage will occur to the transducer when improper tightening
procedures are followed.
2. Before proceeding to Setup, page 9, carefully check all plumbing
connections to the instrument to ensure a leak-tight installation.
Making Mechanical Connections
To make mechanical connections in line to a system, use the recommended installation practices,
as specified by the fitting manufacturer or by an appropriate standard.
Warning Improper installation can cause personal injury or damage
equipment. Follow proper installation procedures at all times.
How To Tighten Fitting Attachments
For VCR Fittings: Tighten ¹/8turn past the finger tight position for 316 SS or nickel gaskets
(¼ turn for copper or aluminum).
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Chapter Two: Installation Setup
11
Connectors
The 722 transducer is available with a 9-pin Type “D”, a 5-pin terminal block connector, or a 15-
pin Type “D” on a 6 inch cable
Note A “No Connection” pin assignment means that the pin has no internal
connection.
Pinout of the 9-Pin Type “D” Connector
Pin Assignment
1 Pressure Output
2 No Connection
3 No Connection
4 + Power Input
5 No Connection
6 No Connection
7 No Connection
8 Pressure Return
9 Power Return
Table 1: Pinout of the 9-Pin Type “D” Connector
Pinout of the 5-Pin Terminal Block Connector
Pin Assignment
1 Power Return
2 Pressure Return
3 Pressure Output
4 No Connection
5 + Power Input
Table 2: Pinout of the 5-Pin Terminal Block Connector
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Setup Chapter Two: Installation
12
Pinout of the 15-Pin Type “D” Connector
Pin Assignment
1 No Connection
2 Pressure Output
3 No Connection
4 No Connection
5 Power Return
6 No Connection
7 + Power Input
8 No Connection
9 No Connection
10 No Connection
11 No Connection
12 Pressure Return
13 No Connection
14 No Connection
15 Chassis
Table 3: Pinout of the 15-Pin Type “D” Connector
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Chapter Two: Installation Setup
13
How to Wire a PDR Series Readout to a Type 722 Transducer with a 9-pin Type
“D” Connector.
Caution DO NOT use the -15 VDC output of the PDR readout to power the
722 transducer. When the -15 VDC signal of the PDR is connected to
the power return of the transducer, a short between the -15 VDC of
the transducer and the A GND of the PDR occurs. The PDR readout
will blank out. Either unit may be damaged.
The correct cable to use to connect the 9 pin Type “D” connector to the PDR readout is a CB700-
2 cable. This cable has the mating Type “D” connector on the transducer end and flying leads on
the PDR end. Table 4 lists the pin assignments for the various colored wires on the flying leads
end of the cable.
Connections Between a Transducer with a Type “D” Connector and a PDR Readout
Pin Number Transducer Signal Flying Lead Color Code PDR Signal
1 Pressure Output Red Pressure Input
4 + Power Input Green + 15 VDC
8 Pressure Return Black Signal Ground (A GND)
9 Power Return White Power Ground (D GND)
Table 4: Connections Between a Transducer with a Type “D” Connector and a PDR Readout
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