MKS HPS Products 999 Quattro Series User manual

Operation and
Maintenance Manual
Series 999 Quattro
Multisensor Transducer

Series 999 QuattroTransducer
Part # 100012689 Revision A
Series 999 Quattro
Multisensor Transducer

Series 999 QuattroTransducer
Part # ________ - __________________
Please fill in the transducer part and flange type numbers
in the space above and have them readily available when
calling for service or additional information.
(The part number can be found on your packing slip. Both
the part number and serial number are located on the
bottom side of the housing.)
For more information or literature, contact:
HPS® Products of MKS Instruments, Inc.
5330 Sterling Drive
Boulder, CO 80301 USA
Phone: [phone]
1-800-345-1967
Fax: [phone]
Web: www.mksinst.com/hpshome.html
©2005 by HPS® Products of MKS Instruments, Inc.
All rights reserved.
U.S. Patent No. 6,672,171 and Patent Pending
U.S. Patent No. 6,756,785 and Patent Pending

Series 999 QuattroTransducer
Table of Contents
Package Contents ..................................................................... 9
Symbols Used in this Manual .................................................. 10
Safety Precautions .................................................................. 11
General Specifications ............................................................ 13
Feature and Control Locations ................................................ 14
About the 999 Quattro Transducer ........................................... 15
Typical Applications for the 999 Quattro Transducer ................ 16
Installing the 999 Quattro Transducer ...................................... 17
Quattro Transducer Installation ...............................................................17
Location ...........................................................................................17
Orientation .......................................................................................17
Contamination ..................................................................................18
Vacuum Connection ...............................................................................18
Electrical Connection .............................................................................19
Input/Output Wiring ..........................................................................19
999 Quattro Transducer Electrical Connections Table .......................20
Relay Inductive Loads and Arc Suppression ..........................................20
Operation................................................................................. 22
999 Quattro Transducer Factory Defaults Table .......................................22
RS-485 Protocol ..................................................................................... 23
Standard Addresses ........................................................................ 23
Universal Addresses ........................................................................23
Query and Command Syntax ...........................................................23
Response Syntax (ACK/NAK) .........................................................24
RS-485 Command Set ............................................................ 25
Set Up Commands ................................................................................. 25
Active Filament – AF .......................................................................25
Baud Rate – BR ...............................................................................26
Analog Output - DAC ........................................................................26
Emission Current – EC ....................................................................26
Factory Default – FD ........................................................................26
RS Delay – RSD ..............................................................................27
Test RS485 – TST ............................................................................ 27
Unit – U ............................................................................................27
User Tag – UT ..................................................................................27
Status Commands.................................................................................. 28
Device Type – DT .............................................................................28
Filament Status – FS .......................................................................28
Firmware Version MicroPirani – FV ..................................................28

Series 999 QuattroTransducer
Firmware Version Piezo – FV2 ......................................................... 28
Firmware Version Hot Cathode – FVHC ........................................... 28
Hardware Version MicroPirani – HV ..................................................28
Hardware Version Hot Cathode – HVHC ........................................... 28
Manufacturer – MF........................................................................... 29
Model – MD ..................................................................................... 29
Serial Number – SN ......................................................................... 29
Time On – TIM1, TIM2 .....................................................................29
Transducer Status – T ...................................................................... 29
Transducer Temperature – TEM1, TEM2 ........................................... 30
Pressure Measurement and Degas Commands ......................................30
Filament Power – FP........................................................................ 30
Degas Power – DG ...........................................................................30
Pressure Reading – PR1, PR2, PR3, PR4 .......................................31
Set Point Commands .............................................................................31
Set Point Value – SP1, SP2, SP3 .................................................... 32
Hysteresis Value – SH1, SH2, SH3 ................................................. 32
Set Point Direction – SD1, SD2, SD3 .............................................. 32
Enable Set Point – EN1, EN2, EN3 ................................................. 33
Enable Control Set Point – ENC ...................................................... 33
Set Point Status – SS1, SS2, SS3 .................................................. 33
Protect Set Point – PRO ..................................................................33
Calibration Commands ........................................................................... 34
Atmospheric Calibration – ATM ........................................................34
Vacuum Calibration – VAC ............................................................... 34
Atmosphere Span Calibration – ATS ...................................................... 34
Atmosphere Zero Calibration– ATZ ..................................................34
Atmospheric Piezo Absolute Pressure output Calibration – ATD .....35
Gas Correction – GC ........................................................................35
Analog Output ......................................................................... 36
DAC1 Pressure to Voltage Table .............................................................37
...............................................................................................................37
DAC2 Pressure to Voltage Table .............................................................39
Sensitivities Relative to Nitrogen ............................................ 40
Gas Correction Factor Table ...................................................................40
Control and Status Pins Operation .......................................... 41
Degas On (Pin 13) ...........................................................................41
Degas Status (Pin 9) ........................................................................ 41
Filament Select (Pin 10)................................................................... 41
Degassing the Sensor ............................................................. 42
Leak Detection ........................................................................ 43
Maintenance and Troubleshooting .......................................... 44
Maintenance and Troubleshooting Table ..................................................44
Cleaning the 999 Quattro Transducer Case and Sensor Tube .................45

Series 999 QuattroTransducer
Accessories ............................................................................ 46
NOTES: ................................................................................... 47
Warranty .................................................................................. 48
Appendix: How the 999 Quattro Transducer Works.................. 49
Hot Cathode Ionization Sensor ...............................................................49
Piezo ......................................................................................................50
Pirani Sensor.......................................................................................... 51
MicroPirani Sensor

Series 999 QuattroTransducer

Series 999 Quattro Transducer 9
Before unpacking the 999 Mulisensor Transducer, check all surfaces of the
packing material for shipping damage.
Confirm that the 999 Quattro Transducer package contains these items:
♦One 999 Quattro unit (integrated sensor and electronics)
♦One 999 Multisensor Transducer Operation and Maintenance Manual
Inspect the components for visible evidence of damage during shipment. If
anything has been damaged, notify the carrier immediately. Keep all shipping
materials and packaging for claim verification.
If any items are missing from the package, call MKS Customer
Service at 1-303-449-9861 or 1-800-345-1967.
Do not return the product to MKS unless specified to do so by MKS Customer
Service.
MKS customer service and support:
MKS Instruments, Inc. Telephone [phone]
5330 Sterling Dr. Toll-Free 1-800-345-1967 (USA only)
Boulder, CO 80301 Facsimile 1-303- 449-2003
USA
Europe:
MKS Denmark Aps Telephone [phone]
Nordre Strandvej 119 G Facsimile [phone]
DK-3150 Hellebaek
Denmark
Package Contents

10 Series 999 Quattro Transducer
CAUTION: Risk of electrical shock.
CAUTION: Refer to the manual. Failure to heed the message could
result in personal injury, serious damage to the equipment, or both.
Calls attention to important procedures, practices, or
conditions.
Symbols Used in this Manual

Series 999 Quattro Transducer 11
Safety Precautions
Always disconnect the power supply before removing
electronics from the Hot Cathode sensor for sensor
replacement or bakeout purposes. Lethal voltages and currents
may be present while the circuit is operating. Only a qualified
technician should replace or adjust electronic components.
Use the proper power source. Use + 24 VDC @ 0.75 Amps.
Properly ground the transducer. The transducer should be
connected to earth ground both through the vacuum flange and the
back shell of the electrical connector.
Do not turn on filament power when system pressure is above
5x10-2 Torr. Hot Cathode sensor damage will result.
Do not operate with explosive gas mixtures or gases that are
combustible in air. The Hot Cathode sensor has a heated element
and the MicroPirani uses a thin-film Nickel element that is heated to
a constant temperature above ambient. Either of these could ignite
explosive gas mixtures.
Do not substitute parts or modify instrument. Do not install
substitute parts or perform any unauthorized modification to the
instrument. Return the instrument to an MKS Calibration and Service
Center for service and repair to ensure that all of the safety features
are maintained.

12 Series 999 Quattro Transducer
Allow only qualified technicians to service the transducer. Users
should not remove covers, casing, or plug-in components. Injury may
result. A qualified technician must perform any part replacement or
internal adjustments.
Keep the unit free of contaminants. Do not allow contamination of
any kind to enter the unit before or during use. Contaminants such
as dust, dirt, lint, glass chips, and metal chips may permanently
damage the unit.

Series 999 Quattro Transducer 13
General Specifications
5x10-10 to 1500 Torr
5x10-10 to 1500 Torr
± 760 Torr
0.5 to 7.09V
.75 to 10.23V
1500 Torr
± 5%(Mini-Ion,MicroPirani),1%(Piezo)
±1% of reading 50-1000 Torr absolute
<1% of reading differential
24 VDC
15 Watts
1A @ 30 VAC/VDC resistive load
Semi 52/ul991 Safety Compliant
304 stainless steel, Silicon, SiO2, SiN4,
gold, Ultem®1000, Viton®, glass,
tungsten, platinum clad molybdenum,
yttria coated iridium,epoxy resin,Kovar
304 stainless steel
23 cm3
0 to 40oC
80oC
Any
EN-61326-1, EN-61010-1
1” OD, Tube,Mini CF, 2.75” CF, NW16 KF,
NW25 KF, NW40 KF
2.9” x 3.1” x 4.4” (74 x 79.6 x 112 mm)
0.96 lbs. (0.44 Kg)
Measuring range
Set point range (absolute)
Set point range (differential)
Analog out
DAC1
DAC2
Maximum pressure
Repeatability 1x10-9 to1500
Torr
Accuracy Piezo (±100 Torr)
Supply voltage
Power consumption
Relay contact rating
Materials exposed to
vacuum
Housing material
Internal volume
Operating temperature
Bakeout temperature (not
operating)
Installation orientation
CE certification
Vacuum connections
Dimensions (with1”OD tube)
Weight (with KF 25)

14 Series 999 Quattro Transducer
All user access is through the 15-pin D-sub connector and the two push
buttons. See the RS-485 Command Set section for more information.
The POWER LED indicates when power is applied to the 999 Quattro
Transducer. The FILAMENT ON LED indicates when power is applied to the
transducer filament. The FILAMENT ON light can also be used in
conjunction with the Test RS485 – TST command (described in the RS485
Command Set section) to visually identify which sensor is set to a particular
address. This is useful when several HPS transducers are connected to the
same system.
The figure below shows the front view of the 999 Quattro Transducer.
Feature and Control Locations
ACTIVE FILAMENT
QUATTRO
999
DEGAS
ON
21
POWER

Series 999 Quattro Transducer 15
The 999 Quattro Transducer not only includes three sensors in one package
but also gives the functionality of four sensors: 1) hot cathode ionization
sensor; 2) micro Pirani sensor; 3) differential piezo sensor; 4) absolute piezo
sensor. The fourth sensor is a pseudo sensor which uses the piezo’s
deviation from zero to determine the absolute pressure.
About the 999 Quattro Transducer
PR3 the combined absolute digital pressure output and the analog output
provide a single combined reading from 3 x 10-10 to 1500 Torr. In addition,
each of the three sensors can be read indepently. Along with an analog
output external controls are available for filament select and degas so the
transducer (after set point values,calibration values etc. have been entered)
can operate independently of a computer.
For additional information on how the 999 Quattro Transducer works, see the
appendix How the 999 Quattro Transducer Works.

16 Series 999 Quattro Transducer
Typical Applications for the 999
Quattro Transducer
♦Measure total vacuum pressure: atmosphere, sub atmosphere, low and
high vacuum.
♦Control system pressure using digital communications or analog output
as input to an automatic pressure controller.
♦Control valves and pumps to automate pump-down using relay set
points.
♦Sense abnormal pressure and take appropriate security measures using
relay set points.
♦Start or stop system processes and safety intelocks with relay set points.
♦Measure pressures of backfilling gases.

Series 999 Quattro Transducer 17
Quattro Transducer Installation
Location
Locate the 999 Quattro Transducer where it can measure chamber pressure.
Install the device away from pumps and gas sources so it will give the most
representative pressure values.
Orientation
The 999 Quattro Transducer can be installed and operated in any position
without compromising accuracy.
Installing the 999 Quattro
Transducer

18 Series 999 Quattro Transducer
Contamination
Locate and orient the 999 Quattro Transducer where contamination is least
likely. For example, if the 999 Quattro Transducer is mounted directly above a
source of evaporation, the vapor could contaminate the sensor elements and
cause the calibration to shift. Whenever possible, install the 999 Quattro
Transducer with the vacuum port facing down to keep particulates or liquids
from entering the device. To prevent inaccurate pressure measurements,
shield an 999 located near an electron or ion source (e.g., near an electron
beam source or in a sputtering system) and mount it away from strong
magnetic fields.
Vacuum Connection
The 999 Quattro Transducer is available with the following flanges:
♦2.75” CF (rotatable)
♦1.33” CF (rotatable)
♦KF 16
♦KF 25
♦KF 40
♦1” tube
The figure below shows the dimensions for each flange type. The top
dimensions, also shown below, are valid for any flange configuration.
2.75 CF 1.33 CF KF16
1.00" TUBE
KF40
KF25
3.620
4.377
2.910
5.086
2.834
4.710
4.793
2.745
3.939
3.325
3.939
3.031
2.900
3.100

Series 999 Quattro Transducer 19
Electrical Connection
Use a cable with a female, 15-pin, high-density D-sub connector with strain
reliefs to ensure proper electrical connection and to reduce stress on the
connectors.
Ensure a low impedance electrical connection between the 999
sensor body and the grounded vacuum system to shield the
sensor from external electromagnetic sources.
Input/Output Wiring
The figure and the 999 Quattro Transducer Electrical Connections Table
on the following page identify the pins of the 999 connector and their
functions; make a cable using this information. To comply with EN61326-1
immunity requirements, use a braided, shielded cable. Connect the braid to
the metal hoods at both ends of the cable with the end for power supply
connected to earth ground.
The power supply input is 24 VDC. The positive side of the power supply is
connected to pin 3 and the negative side to pin 4 of the D-sub connector.
Damage may occur to the circuitry if excessive voltage is applied,
polarity reversed, or if a wrong connection is made.
If using analog output (described in the Analog Output section), the analog
output voltages are pins 5 (+) and 6 (-). Connect them to a differential input
voltmeter or an analog-to-digital (A/D) converter with a differential input in a
system controller.
Do not connect the negative side of the analog output (pin 6) to
the negative side of the power supply input (pin 4) or to any
other ground. Doing so will cause half of the power current to
flow through this wire. Measurement errors in the output
voltage may be seen due to the voltage drop from this current.
The longer the cable, the worse the error will be.

20 Series 999 Quattro Transducer
999 Quattro Transducer Electrical Connections Table
The digital communications connections are pins 1 and 2. RS-485 uses pin 1
for RS485(-) and pin 2 for RS485(+).
Relay Inductive Loads and Arc Suppression
If using the set point relay to switch inductive loads (e.g., solenoids, relays,
transformers, etc.), the arcing of the relay contacts might interfere with 999
operation and reduce relay contact life. Therefore, an arc suppression
network, shown schematically below, is recommended.
The values of the capacitance C and the resistance R can be calculated by
the following equations:
C = I2/(1 x 107)
R = E/ Ia
where:
C is in farads
R is in ohms
I is DC or Acpeak load current in amperes
E is DC or Acpeak source voltage in volts
a = 1 + (50/ E)
Note that Rmin = 0.5 Ωand Cmin = 1.0 x 10-9 F
RELAY 2 N. O.
DEGAS STATUS
POWER + (24V)
POWER -
ANALOG OUT +
RELAY 1 N.O.
RS485 +/RS232 RXD
ANALOG OUT -
RS485 -/RS232 TXD
RELAY 1 COMMON
DEGAS ON
FILAMENT SELECT
RELAY 3 N. O.
RELAY 2 COMMON
RELAY 3 COMMON
MALE CONNECTOR ON
999
PIN 1 PIN 5
PIN 6 PIN 10
PIN 11 PIN 15