MKS 901P How to use

P/N: 100017411
Short form manual
REV: A, December 2009
Product: 901P-x1090-0072
Connector: 6 pin Hirschmann
Output: 19 (TPR280,TPR265)
RoHS Compliant
Measuring range (N2and Air): 1×10-5 to 1500 Torr
MP Accuracy 5×10-4 to 1×10-3 Torr: ± 10% of reading
1×10-3 to 100 Torr: ± 5% of reading
100 to Atm.: ± 25% of reading
PZd Accuracy(1) -760 to +100 Torr: ± 1-10 % of reading
MP Repeatability (2) 1×10-3 to 100 Torr: ± 2% of reading
Supply Voltage: 9 –30 VDC
Power consumption: < 1.2 Watt
Fuse (thermal recoverable): 200 mA
Analog output 1: (100 Ω impedance): 2.199 –8.625 VDC
Analog output 1 resolution: 16 bit
Materials exposed to vacuum: 304 Stainless steel, Silicon
SiO2, Si3N4, gold, Viton®
Low outgassing Epoxy resin
Internal volume: KF16 flange 2.8 cm3
KF16 long flange 6.7 cm3
KF25 flange 3.6 cm3
1/8” NPT , VCR8 3.1 cm3
VCR4 flange 1.9 cm3
Flange and Housing material: Stainless steel 304
Weight (901P with KF16): 170 g
Climate category: IP40
Operating temperature: 0 to 40 oC
Bakeout temperature (Power off): 85 oC
(1) Refer to Operation and Installation manual for Piezo accuracy details.
(2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at
ambient temperature after zero adjustment.
MKS Instruments HPS Products
www.mksinst.com

The 901P transducer package contains these items:
1 pcs. 901P Transducer
1 pcs. Short form manual (P/N: 100017411)
1 pcs. Documentation & Software CD (P/N: 100017096)
If any items are missing contact MKS customer service.
This short form manual provides the basic information for simple use and
setup. For system integration and advanced setup refer to Operation and
Installation manual and demo software on the supplied Documentation &
Software CD.
The 901P Loadlock vacuum transducer offers a wide measuring range from
1×10-5 to 1500 Torr and atmospheric differential switching function.
It is based on the measurement of thermal conductivity in a small cavity on a
MEMS silicon chip sensor and a differential Piezo sensor.
RS232 or RS485 digital interface
Analog voltage output compatible with TPR265, TPR280
Standalone use or with PDR900 controller
The user switch can used to perform measurement adjustments. Refer to
Operation and Installation manual before pressing the user switch.
The transducer is factory calibrated when delivered. Additional adjustment is
normally not required. Refer to Operation and Installation manual for
calibration and adjustment recommendations.
Install the 901P away from pumps and gas sources and where vibration is
minimized to give the most representative pressure measurement.
The 901P can be mounted in any orientation, without compromising accuracy
and performance.
The 901P is not intended for use in corrosive or
explosive environments. Refer to materials exposed to
vacuum for process compatibility.
Refer to Operation and Installation manual for installation specifications and
recommendations.

Use a cable with a female 6-pin connector with strain reliefs to ensure proper
electrical connection and to reduce stress.

Ensure a low impedance electrical connection between the
901P transducer body and the grounded vacuum system to
shield the sensor from external electromagnetic sources.
To comply with EN61326-1 immunity requirements, use a braided, shielded
cable. Connect the braid to the metal hoods at both ends of the cable with
the end for power supply connected to earth ground.
925 I/O Connector (6 pin)
6 pin Hirschmann
PIN
Description
1
Identification resistor 3KΩ
2
Analog Output +
3
Analog Output –
4
Power + (9-30 VDC)
5
Power return -
6
Chassis

The analog pressure output (16 bit resolution) is based on the digital
pressure reading (PR1). Connect the signal to a differential input.

Do not connect the negative side of the analog output to
the power supply return or to any other ground. The
voltage drop from supply current will produce errors in the
analog output.
Converting voltage to pressure:
P = 10(Vout –c)
Vout = c + log10(P)
c
mbar
5.5
Torr
5.625
Pascal
3.5
Vout vs. Pressure (Torr / mbar, N2setup)
The transducer can provide other analog output characteristics than the
standard 1VDC/decade. Refer to Operation and installation manual.
Gas dependence
The combined sensor output provides gas independent measurement from
60 to 1500 torr. The MicroPirani™sensor is based on measurement of
thermal conductivity and consequently its reading depends on gas type and
gas concentration. Refer to Operation and installation manual for gas
dependency data.
US & ASIA:
MKS Instruments, Inc., HPS™
Products, Inc.,
5330 Sterling Drive, Boulder, CO
80301, USA,
Phone: [phone]
EUROPE:
MKS Denmark ApS
Ndr. Strandvej 119G
DK3150 Hellebaek, Denmark
Phone: [phone],
Email: [e-mail]