MKS 907 Series User manual

Analog Convection Transducer
Instruction manual part number 109070001
Revision D - May 2020
Series 907
Instruction Manual

© 2020 MKS Instruments, Inc. All rights reserved.
mksinstTM is a trademark of MKS Instruments, Inc. All other trademarks and registered
trademarks are the properties of their respective owners.
Instruction Manual
Series 907
This instruction manual is for use with Series 907 Analog
Convection Transducer. A list of applicable catalog
numbers is provided on the following page.
Analog Convection Transducer
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [email protected]
Visit our website at www.mksinst.com

Series 907 Analog Convection Transducer (ACT)
Catalog numbers for Series 907 Analog Convection Transducer
Transducer Assembly
Analog Convection Transducer, Single Set-Point, NW16, CE 109070010CE
Analog Convection Transducer, Dual Set-Point, NW16, CE 109070019CE
Analog Convection Transducer, Single Set-Point, NW25, CE 109070027CE

Series 907 Analog Convection Transducer
Instruction Manual - #109070001
5
Chapter 1 General Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1 Receiving Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2 International Shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.3 Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.4 Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.5 Customer Service / Technical Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Chapter 2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.1 Safety Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.2 Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.3 Grounding Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.4 High Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.5 Over Pressure Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.6 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Chapter 3 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.2 Intended Use / Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.2.1 Improper Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.3 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Chapter 4 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.1 Transducer Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.2 Connect the Transducer to the Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.3 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.3.1 Input/Output Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.3.2 Inductive Loads and Arc Suppression . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Chapter 5 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.2 Typical Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.3 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.3.1 Measurement Limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.4 Reading Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5.5 Using the Series 907 Transducer with Other Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.5.1 Nitrogen Equivalent Pressure and Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.5.2 Calibrating for Gases Not Shown in the Graph or Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.5.3 Calibrating for Other Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.6 Using the Series 907 Transducer with Computers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Chapter 6 Service & Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.2 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.3 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.4 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
6.5 Calibrating for Zero and Atmosphere . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
6.6 Adjusting the Set Point . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
6.7 Leak Detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
6.8 Clean the Transducer Case and Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
6.9 Test the Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
6.10 Replace the Sensor Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
6.10.1 Calibrate the New Sensor Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
6.10.2 Reassemble the Electronics Subassembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
6.11 Bakeout the Sensor Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
6.12 Accessories/ Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Chapter 7 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Table of Contents

6Series 907 Analog Convection Transducer
Instruction Manual - #109070001

1 General Information
7
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
Chapter 1
1General Information
1.1 Receiving Inspection
On receipt of the equipment, inspect all material for damage. Confirm that the shipment includes
all items ordered. If items are missing or damaged, submit a claim as stated below for a domestic or
international shipment, whichever is applicable.
If materials are missing or damaged, the carrier that made the delivery must be notified within 15
days of delivery, or in accordance with Interstate Commerce regulations for the filing of a claim.
Any damaged material including all containers and packaging should be held for carrier inspection.
Contact MKS Instruments, Inc. Customer Support for assistance if your shipment is not correct for
reasons other than shipping damage.
1.2 International Shipment
Inspect all materials received for shipping damage and confirm that the shipment includes all items
ordered. If items are missing or damaged, the airfreight forwarder or airline making delivery to the
customs broker must be notified within 15 days of delivery. The following illustrates to whom the
claim is to be directed.
• If an airfreight forwarder handles the shipment and their agent delivers the shipment to customs,
the claim must be filed with the airfreight forwarder.
• If an airfreight forwarder delivers the shipment to a specific airline and the airline delivers the
shipment to customs, the claim must be filed with the airline.
Any damaged material including all containers and packaging should be held for carrier inspection.
Contact MKS Customer Support for assistance if your shipment is not correct for reasons other than
shipping damage.
1.3 Warranty
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new
MKS Products. The MKS Instruments, Inc. General Terms and Conditions of Sale provides the
complete and exclusive warranty for MKS products. This document is located on our web site at
www.mksinst.com, or may be obtained by contacting an MKS Customer Service Representative.
1.4 Certification
MKS Instruments, Inc. certifies that this product met its published specifications at the time of
shipment from the factory.

1 General Information
8Series 907 Analog Convection Transducer
Instruction Manual - #109070001
1.5 Customer Service / Technical Support
Some minor problems are readily corrected on site. If the product requires service, contact the MKS
Technical Support Department at [phone]. If the product must be returned to the factory
for service, request a Return Material Authorization (RMA) from MKS. Do not return products
without first obtaining an RMA. In some cases a hazardous materials disclosure form may be
required. The MKS Customer Service Representative will advise you if the hazardous materials
document is required.
When returning products to MKS, be sure to package the products to prevent shipping damage.
Shipping damage on returned products as a result of inadequate packaging is the Buyer's
responsibility.
For Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [email protected]
Visit our website at: www.mksinst.com

2 Safety
9
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
Chapter 2
2Safety
2.1 Safety Introduction
START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here
for your convenience and repeated with additional information at appropriate points throughout
this instruction manual.
These safety alert symbols in this manual or on the Product mean caution - personal safety, property
damage or danger from electric shock. Read these instructions carefully.
This product was designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
Danger indicates a hazardous situation which, if not
avoided, will result in death or serious injury.
Warning indicates a hazardous situation which, if not
avoided, could result in death or serious injury.
Caution indicates a hazardous situation or unsafe
practice which, if not avoided, may result in minor or
moderate personal injury.
Indicates a situation or unsafe practice which, if not
avoided, may result in equipment damage.
Notice
These instructions do not and cannot provide for every contingency that
may arise in connection with the installation, operation, or maintenance of
this product. If you require further assistance, contact MKS.
Safety Precautions
Failure to comply with these instructions may result in serious
personal injury, including death, or property damage.
Always observe and follow all safety notices that are
provided throughout this instruction manual and on the
product.

2 Safety
10 Series 907 Analog Convection Transducer
Instruction Manual - #109070001
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument. MKS
disclaims all liability for the customer's failure to comply with these requirements.
•Read Instructions – Read all safety and operating instructions before operating the product.
•Retain Instructions – Retain the Safety and Operating Instructions for future reference.
•Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
•Follow Instructions – Follow all operating and maintenance instructions.
•Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.
2.2 Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal ordinances,
regulations, and laws applicable to the installation, operation and service of this equipment.
It is the responsibility of the end user to provide sufficient lighting at work to meet local regulations.
Operation and Service of this equipment in strict accordance with the methods and procedures
supplied by MKS is the responsibility of the Customer.
MKS assumes no liability, whatsoever, for any personal injuries or damages resulting from the
operation or service of this equipment in any manner inconsistent or contrary to the methods
supplied in MKS literature including, but not limited to, manuals, instructions, bulletins,
communications, and recommendations.
For emergencies and for product safety related matters, contact the MKS Customer Service
Department. See Section 1.5 or Section 6.2 for detailed information regarding how to contact MKS
Customer Service Representatives.
Electrical Shock or Personal Injury
The service and repair information in this manual is for the use
of Qualified Service Personnel. To avoid possible electrical
shock or personal injury, do not perform any procedures in
this manual or perform any servicing on this product unless
you are qualified to do so.
Electrical Shock or Fire
To reduce the risk of fire or electric shock, do not expose this
product to rain or moisture.
Objects and Liquid Entry - Never push objects of any kind into
this product through openings as they may touch dangerous
voltage points or short out parts that could result in a fire or
electric shock. Be careful not to spill liquid of any kind onto the
products.

2 Safety
11
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
2.3 Grounding Requirements
See Grounding, Section 4.2 in the Installation chapter for more detailed requirements regarding
gauge and system grounding.
Grounding is very important! Be certain that ground circuits are correctly used on your ion gauge
power supplies, gauges, and vacuum chambers, regardless of their manufacturer. Safe operation of
vacuum equipment requires grounding of all exposed conductors of the gauges, the controller and
the vacuum system. LETHAL VOLTAGES may be established under some operating conditions
unless correct grounding is provided.
Ion producing equipment, such as ionization gauges, mass spectrometers, sputtering systems, etc.,
from many manufacturers may, under some conditions, provide sufficient electrical conduction via
a plasma to couple a high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly grounded, they may attain a
potential near that of the high voltage electrode during this coupling. Potential fatal electrical shock
could then occur because of the high voltage between these exposed conductors and ground.
Proper Grounding
All components of a vacuum system used with this or any
similar high voltage product must be maintained at Earth
ground for safe operation.
Be aware that grounding this product does not guarantee that
other components of the vacuum system are maintained at
Earth ground.
Verify that the vacuum port to which the Series 907 Transducer
is mounted is electrically grounded. It is essential for personnel
safety as well as proper operation that the envelope of the
gauge be connected to a facility ground. See Section 4.2 for
detailed grounding instructions.
Connect power cords only to properly grounded outlets or
sources.

2 Safety
12 Series 907 Analog Convection Transducer
Instruction Manual - #109070001
2.4 High Voltage
High Voltage is present in the unit when electrical power is applied to the electronics enclosure.
Hazardous voltages may still be present for some time after disconnecting power to the electronics
enclosure. Refer to the Installation and Service chapters for more information.
High Voltage
Be aware that when high voltage is present in any vacuum
system, a life threatening electrical shock hazard may exist
unless all exposed conductors are maintained at Earth ground.
This hazard is not unique to this product.
High Voltage
All conductors in, on, or around the vacuum system that are
exposed to potential high voltage electrical discharges must
either be shielded at all times to protect personnel or must be
connected to Earth ground at all times.
High Voltage
Be aware that an electrical discharge through a gas may
couple dangerous high voltage directly to an ungrounded
conductor almost as effectively as would a copper wire
connection. A person may be seriously injured or even killed
by merely touching an exposed ungrounded conductor at high
potential.
This hazard is not unique to this product.
Do not connect or disconnect any electrical connectors while
power is applied to the equipment (hot swapping). Doing so
may cause damage to the equipment or severe electrical shock
to personnel. This hazard is not unique to this product.

2 Safety
13
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
2.5 Over Pressure Conditions
Danger of injury to personnel and damage to equipment exists on all vacuum systems that
incorporate gas sources or involve processes capable of pressuring the system above the limits it
can safely withstand.
For example, danger of explosion in a vacuum system exists during backfilling from pressurized gas
cylinders because many vacuum devices such as ionization gauge tubes, glass windows, glass
belljars, etc., are not designed to be pressurized.
Install suitable devices that will limit the pressure from external gas sources to the level that the
vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture
disks that will release pressure at a level considerably below that pressure which the system can
safely withstand.
Suppliers of pressure relief valves and pressure relief disks can be located via an online search.
Confirm that these safety devices are properly installed before installing and operating the
product.
Ensure the following precautions are complied with at all times:
(1) the proper gas cylinders are installed,
(2) the gas cylinder valve positions are correct on manual systems,
(3) and the automation is correct on automated gas delivery systems.
Explosive Environment
Do not use the Series 907 Transducer in an environment of
explosive or combustible gases or gas mixtures. Operation of
any electrical instrument in such an environment constitutes a
definite safety hazard. Do not use the product to measure the
pressure of explosive gases or gas mixtures.
Potential Automatic Operation
It is the installer's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.
Vacuum Chamber High Pressures
Where an equipment malfunction could cause a hazardous
situation, always provide for fail-safe operation. As an
example, in an automatic backfill operation where a
malfunction might cause high internal pressures, provide an
appropriate pressure relief device.

2 Safety
14 Series 907 Analog Convection Transducer
Instruction Manual - #109070001
2.6 Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel
under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions.
Adjust only those controls that are covered by the operation instructions. Improper
adjustment of other controls may result in damage and will often require extensive work
by a qualified technician to restore the product to its normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for
service.
See Service Guidelines, Section 1.5 for detailed information regarding how to contact MKS
Customer Service Representatives.
Vacuum gauges with compression fittings may be forcefully
ejected if the vacuum system is pressurized.
Notice
Do not substitute parts or modify the instrument.
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the product.
Return the product to a service facility designated by MKS for service and
repair to ensure that safety features are maintained. Do not use this
product if it has unauthorized modifications.
Notice
Safety Check - Upon completion of any service or repairs to this product,
ask the Qualified Service Person to perform safety checks to determine that
the product is in safe operating order.

3 Specifications
15
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
Chapter 3
3Specifications
3.1 General Description
The MKS Series 907 Analog Convection Transducer is a compact, modular, convection enhanced
Pirani vacuum sensor/pressure switch with an integrated electronic control circuit.
The 907 Transducer is designed for applications which require pressure control in the range of
10+3 to 10-3 Torr. Its rapid response and wide measurement range provide the equipment designer
with maximum flexibility. Because it can operate autonomously or as part of a control system, it is
adaptable to many roles, including that For process control, the 907 Transducer is available with
one or two relay set points, each independently adjustable with its own potentiometer. LEDs
indicate the status of the set points.of a monitor or an alarm.
For process control, the 907 Transducer is available with one or two relay set points, each
independently adjustable with its own potentiometer. LEDs indicate the status of the set points.
Pressure and set points are read with a standard digital voltmeter or analog-to-digital converter and
computer.
3.2 Intended Use / Applications
• Measuring foreline and roughing pressures generated by mechanical vacuum pumps
• Controlling valves and pumps to automate system pump down using the relay setpoint(s)
• Sensing abnormal pressure and taking appropriate security measures using the relay setpoint(s)
• Controlling system pressure using the analog output as input to an automatic pressure controller
• Starting or stopping system processes using the relay setpoint(s)
• Measuring pressures of backfilled gases in the range of 10-3 to 10+3 Torr
• Activating high vacuum gauges in their operating range
3.2.1 Improper Use
• Removal of any factory installed components
• Modifying any factory installed components
• Removal of any labeling or warranty seals
• Operation of this device in any condensing vapor or liquid, or explosive environment
3.3 Storage
• Store the Mini-Ion gauge assembly indoors between -40 oC to +70 oC (-40 0F to 158 0F).
• Bag the assembly in a sealed or shrink wrapped bag with desiccant.
• All of the components should be bagged and boxed together along with the instructions for
future reference.

3 Specifications
16 Series 907 Analog Convection Transducer
Instruction Manual - #109070001
3.4 Specifications
1. Measurements will change with different gases and mixtures. Correction parameters must be used for gases
other than N2or Air.
Table 3-1 Specifications for the Series 907 Analog Convection Transducer
Parameter Specification
Performance
Measurement Range for N2/ Air (1)
Do NOT use this product with
flammable or explosive gases.
Torr: 1.0 x 10-3 to 1.0 x 10+3
mbar: 1.3 x 10-3 to 1.3 x 10+3
Pascal: 1.3 x 10-1 to 1.3 x 10+5
Useful setpoint range Torr: 5.0 x 10-3 to 1.0 x 10+3
mbar: 6.5 x 10-3 to 1.3 x 10+3
Pascal: 6.5 x 10-1 to 1.3 x 10+5
Calibration Gas Air/nitrogen
Physical
Display LED indicators for set points and power
Operating Power 12 to 30 Vdc, 0.2A
Output Voltage 0.38 to 5.66 Vdc, 1kΩmaximum output impedance
Controls 1 or 2 nonvolatile, independent relay set points; atmospheric
adjustment; zero adjustment
Relay Contact Rating SPDT, 1 A @ 24 VAC/DC, resistive
Relay Response 150 msec maximum
Vacuum Connection KF 16, KF 25
Electrical Connection 9 pin sub-miniature “D” type
Case Material ABS Plastic (with conductive coating for CE marked model)
Materials exposed to vacuum 304 stainless steel, platinum, glass, nickel
Weight (with CF Flange) 2.3 lb (1.04 kg)
Insulation Coordination Pollution Degree 2
Dimensions (W x D x H) 4½" x 1¾" x 2¾" (114 mm x 44 mm x 71 mm)
Internal volume 2.0 in.3 (33.0 cm3) maximum
Typical Weight (with KF Flange) 0.7 lb (0.3 kg)
Vacuum Connection KF 16
KF 25
Mounting Orientation Horizontal ONLY
Altitude 2000 m (6561 ft) maximum
Operating Temperature 0 ° to 40 °C (32 ° to 104 °F)
Operation Humidity 80% maximum for temperatures less than 31°C, decreasing
linearly to 50% maximum at 40°C
Bake out Temperature 200 °C (392 °F) or 100 °C (212 °F) CE marked model; without
electronics
CE Certification EMC Directive
General Product Safety Directive
Specifications and dimensions are subject to change without notice.

4 Installation
17
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
Chapter 4
4Installation
4.1 Transducer Location
Locate the 903 Transducer where it can measure process chamber or manifold pressure. Install it
away from pumps, other vibration sources, and gas sources to give the most representative values.
Locate and orient the Sensor where contamination is least likely. If it is installed directly above a
diffusion pump, for example, oil vapor could contaminate the cathode, anode, or other vacuum
exposed components, causing the calibration to shift.
Install the 907 Transducer with the body set horizontally to work effectively in the convection
region. Convection is an effective heat transfer process at pressures above 200 Torr of nitrogen.
Install it in the direction indicated on the body of the sensor.
4.2 Connect the Transducer to the Vacuum System
Mount the Transducer to a grounded vacuum system.
Notice
Install the Transducer on the vacuum chamber where it is protected from
physical damage and high heat.
See Section 2.5, Over Pressure Conditions, for important safety information
before mounting the gauge.
Proper Grounding
Improper grounding could cause product failure or personal
injury.
• Follow ground network requirements for the facility.
• Maintain all exposed conductors at Earth ground.
• Make sure the vacuum port to which the gauge is mounted is
properly grounded.

4 Installation
18 Series 907 Analog Convection Transducer
Instruction Manual - #109070001
Connect the Transducer to the vacuum system flange using the appropriate gasket and mounting
hardware.
Orient the Transducer to prevent condensation of process vapors on the internal surfaces through
line-of-sight access to its interior. Use a screen or porous filter at the port if necessary (see Section
6.12, Accessories).
For an NW16KF or NW25KF flange:
The NW##KF style flange requires a self-centering O-ring between mating flanges. Use a metal
clamp and tighten the clamp to compress the mating flanges together. Do Not use a plastic clamp.
See the Grounding Requirements.
Attach the Transducer to the mating NW-style connector on the vacuum chamber. Use a new seal
and the appropriate tools to tighten the metal clamp.
4.3 Electrical Connections
Connect a user-supplied cable to the Transducer using a mating 9-pin D-sub connector with strain
reliefs to ensure proper electrical connection and to reduce stress on the connectors.
Connect the cable to the Transducer and to the Controller before turning ON the system. Tighten
the thumb screw on top of the cable to make sure it is securely in place.
4.3.1 Input/Output Wiring
Connect a user-supplied cable to the 907 Transducer using a mating 9-pin or 15-pin D-sub
connector with strain reliefs to ensure proper electrical connection and to reduce stress on the
connectors. Table 4-1identifies the pins the pinout of the D-sub connectors.
Notice
A solid electrical connection between the sensor tube and the grounded
vacuum system must be used to shield the electronics from external power
sources.
Do not use a compression mount/quick connect fitting for
positive pressure applications.
Do not connect or disconnect any electrical connectors while
power is applied to the equipment (hot swapping). Doing so
may cause damage to the equipment or severe electrical shock
to personnel. This hazard is not unique to this product.

4 Installation
19
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
The power supply input may range from 12 to 30 Vdc. The positive side (+) of the power supply is
connected to pin 3 and the minus side (-) is connected to pin 4 of the D-sub connector.
Damage will occur if the polarity of the power supply input is reversed.
Figure 4-1: Power Connections
Connect the Analog Outputs to a differential input voltmeter or an analog-to-digital (A/D) converter
with a differential input in a system controller.
Do not connect the negative side of the analog output to the
negative side of the power supply input or to any other
ground. Half of the power current would flow through this
wire. Measurement errors in the output voltage may be seen
due to the voltage drop from this current. The longer the cable,
the worse the error will be.
•Access the set point relay voltage on
pin 9 of the connector. Measure this
voltage during a start-up check to be
sure that it is adjusted correctly.
• Connect pin 7 to the power supply input
(-), pin 4, to disable the set point relay on
the single set point model.
•Access the set point relay voltage on
pin 9 of the connector. Measure this
voltage during a start-up check to be
sure that it is adjusted correctly.
• Connect pin 7 to the power supply input
(-), pin 4, to disable the set point relay on
the single set point model.
Do not connect the set point relay terminals to the analog output.

4 Installation
20 Series 907 Analog Convection Transducer
Instruction Manual - #109070001
4.3.2 Inductive Loads and Arc Suppression
If the set point relay is used to switch inductive loads, e.g., solenoids, relays, transformers, etc., the
arcing of the relay contacts might interfere with controller operation or reduce relay contact life.
Therefore an arc suppression network is recommended. The values of the capacitance C and the
resistance R can be calculated by the equations,
C = I2/(1 x 107) and R= E/Ia
where,
Cis in farads
R is in ohms
Iis DC or ACpeak load current in amperes
Eis DC or ACpeak source voltage in volts
a= 1 + (50/E)
Note that:
Rmin = 0.5 and Cmin = 1.0 x 10-9 F.
Figure 4-2: Relay Arc Suppression Network