MKS 910-11000-0016 User manual

P/N: 100017557
REV: A, June 2012
Connector: 15 pin SubD
Output: 33 (685 emulation 1VDC/decade)
RoHS Compliant
Measuring range (N2and Air): 1×10-5 to 1500 Torr
MP Accuracy 5×10-4 to 1×10-3 Torr: ± 10% of reading
1×10-3 to 100 Torr: ± 5% of reading
100 to atm. ± 25% of reading
PZa Accuracy(1) 10 to 1000 Torr: ± 0.75 % of reading
1 to 10 torr: ± 1 % of reading
MP Repeatability (2) 1×10-3 to 100 Torr: ± 2% of reading
Supply Voltage: 9 –30 VDC
Power consumption: < 1.2 Watt
Fuse (thermal recoverable): 200 mA
Analog output: (100 Ω impedance): 1 V/decade (1-9 VDC)
Analog output resolution: 16 bit
Materials exposed to vacuum: 304 Stainless steel, Silicon
SiO2, Si3N4, gold, Viton®
Low outgassing Epoxy resin
Internal volume: KF16 flange 2.8 cm3
Flange and Housing material: Stainless steel 304
Weight (910 with KF16): 170 g
Climate category: IP40
Operating temperature: 0 to 40 oC
Bakeout temperature (Power off): 85 oC
(1) Refer to Operation and Installation manual for Piezo accuracy details.
(2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at
ambient temperature after zero adjustment.
MKS Instruments HPS Products
www.mksinst.com

The 910-11000-0016 transducer package contains these items:
1 pcs. 910 Transducer
1 pcs. Short form manual (P/N: 100017557)
1 pcs. Documentation & Software DVD (P/N: 100017096)
If any items are missing contact MKS customer service.
This short form manual provides the basic information for simple use and
setup. For system integration and advanced setup refer to Operation and
Installation manual and demo software on the supplied Documentation &
Software DVD.
The 910 DualTrans vacuum transducer offers a wide measuring range from
1×10-5 to 1500 Torr. It is based on measurement of thermal conductivity
MEMS sensor and an absolute Piezo sensor.
RS232 digital interface
Analog voltage output
Standalone use or with PDR900 controller
The user switch can used to perform measurement adjustments. Refer to
Operation and Installation manual before pressing the user switch.
The transducer is factory calibrated when delivered. Additional adjustment is
normally not required. Refer to Operation and Installation manual for
calibration and adjustment recommendations.
Install the 910 away from pumps and gas sources and where vibration is
minimized to give the most representative pressure measurement.
The 910 can be mounted in any orientation, without compromising accuracy
and performance.
The 910 is not intended for use in corrosive or explosive
environments. Refer to materials exposed to vacuum for
process compatibility.
Refer to Operation and Installation manual for installation specifications and
recommendations.

Use a cable with a female 9 pin D-sub connector with strain reliefs to ensure
proper electrical connection and to reduce stress on the connectors.

Ensure a low impedance electrical connection between the
910 transducer body and the grounded vacuum system to
shield the sensor from external electromagnetic sources.
To comply with EN61326-1 immunity requirements, use a braided, shielded
cable. Connect the braid to the metal hoods at both ends of the cable with
the end for power supply connected to earth ground.
910 I/O Connector (9 pin)
PIN
Description
1
Relay, Common
2
Relay, Normally open
3
Power + (9-30VDC)
4
Power return -
5
Analog Output +
6
Relay, Normally closed
7
RS232 Transmit
8
Analog Output -
9
RS232 Receive
910 Electrical connection (9pin sub D)
(1) Selected by hardware option

The analog pressure output (16 bit resolution) is based on the digital
pressure reading (PR3). Connect the signal to a differential input.

Do not connect the negative side of the analog output to
the power supply return or to any other ground. The
voltage drop from supply current will produce errors in the
analog output.
Converting voltage to pressure:
Torr and mbar unit setup: Pressure = 10 (Vout - 4)
Vout vs. Pressure (Torr / mbar, N2setup)
Gas dependence
The combined sensor output provides a gas independent measurement from
10 to 1500 torr. The MicroPirani™ sensor is based on measurement of
thermal conductivity and consequently its reading depends on gas type and
gas concentration. Refer to Operation and installation manual for gas
dependency data.
US & ASIA:
MKS Instruments, Inc., HPS™
Products, Inc.,
5330 Sterling Drive, Boulder, CO
80301, USA,
Phone: [phone]
EUROPE:
MKS Denmark ApS
Ndr. Strandvej 119G
DK3150 Hellebaek, Denmark
Phone: [phone],
Email: [e-mail]