MKS Newport HXP100-MECA User manual

6-Axis-Parallel Ki ematic
Positio i g Systems
HXP100-MECA &
HXP100HA-MECA Hexapods
USER’SMANUAL
A698J

ii
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
Warranty
Newpor Corpora ion warran s his produc o be free from defec s in
ma erial and workmanship for a period of 1 year from he da e of
shipmen . If found o be defec ive during he warran y period, he produc
will ei her be repaired or replaced a Newpor ’s discre ion.
To exercise his warran y, wri e or call your local Newpor represen a ive,
or con ac Newpor headquar ers in Irvine, California. You will be given
promp assis ance and re urn ins ruc ions. Send he ins rumen ,
ranspor a ion prepaid, o he indica ed service facili y. Repairs will be
made and he ins rumen re urned, ranspor a ion prepaid. Repaired
produc s are warran ed for he balance of he original warran y period, or
a leas 90 days.
Limitation of Warranty
This warran y does no apply o defec s resul ing from modifica ion or
misuse of any produc or par .
This warrant is in lieu of all other warranties, expressed or implied,
including an implied warrant of merchantabilit or fitness for a
particular use. Newport Corporation shall not be liable for an indirect,
special, or consequential damages.
b Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document ma be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
information onl , and product specifications are subject to change without
notice. An change will be reflected in future publishings.
CAUTION
Warranty doe not apply to damage re ulting from:
• Incorrect u age:
– Load on the Hexapod greater than maximum pecified load.
– Carriage peed higher than pecified peed.
–Improper grounding.
¬ Connector mu t be properly ecured.
¬ When the load on the Hexapod repre ent an electrical ri k, it
mu t be connected to ground.
– Exce ive or improper cantilever load .
•Modification of the Hexapod or any part thereof.
CAUTION
Please ret rn eq ipment in
the original (or eq ivalent)
packing.
Yo will be responsible for
damage inc rred from
inadeq ate packaging if the
original packaging is not
sed.
©
2019
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HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
able of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
3.0 — Characteristics............................................................................3
3.1 Mechanical Specifications .......................................................................3
3.2 Guaranteed Specifications of the HX 100HA-MECA Version ..............4
3.3 Max. Cantilever Distance of the Load.....................................................4
3.4 Weight.........................................................................................................4
4.0 — Connection to the HXP100-ELEC-D or
HXP100HA-ELEC-D Controller...........................................5
4.1 Warnings on Controllers ..........................................................................5
4.2 Connection.................................................................................................6
4.3 Cables .........................................................................................................6
5.0 — Dimensions...................................................................................8
6.0 — Maintenance ................................................................................9
6.1 Maintenance ..............................................................................................9
6.2 Repair .........................................................................................................9
Service Form .........................................................................................................11
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HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
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v
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
HXP100-
MECA
EU Declaration of Conformity
following Annex II-1A
of Directive 2006/42/EC on machinery
The manufacturer:
MICRO-CONTROLE Spectra-Physics,
9, rue du bois sauvage
F-91055 Evry FRANCE
Hereby declares that the machinery:
yDescription: " HXP100-MECA "
yFunction: 6-Axis Kinematic Positioning System
yModels: HXP100-MECA; HXP100HA-MECA.
– the technical file of which was compiled by:
Mr Hervé LE COINTE , Quality Director,
MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29
F-45340 Beaune La Rolande France
–complies with all the relevant provisions of the Directive 2006/42/EC on machinery.
– complies with all the relevant provisions of the Directive 2014/30/EU relating to electro-
magnetic compatibility.
– complies with all the relevant provisions of the Directive 2011/65/EU relating to RoHS2.
– was designed and built in accordance with the following harmonised standards:
yNF EN 61326-1:2013 « Electrical equipment for measurement, control and
laboratory use – EMC requirements – Part 1: General requirements »
yNF EN 55011:2010/A1:2011 Class A
– was designed and built in accordance with the following other standards:
yNF EN 61000-4-2
yNF EN 61000-4-3
yNF EN 61000-4-4
yNF EN 61000-4-6
ORIGINAL DECLARATION
Done in Beaune La Rolande on 16 May 2017
Hervé LE COINTE
Quality Director
DC1-EN rev:A
EC Declaration of Conformity
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vi
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
Definitions and Symbols
The following erms and symbols are used in his documen a ion and also
appear on he produc where safe y-rela ed issues occur.
General Warning or Caution
The exclama ion symbol may appear in warning and cau ion ables in his
documen . This symbol designa es an area where personal injury or
damage o he equipmen is possible.
The following are defini ions of he Warnings, Cau ions and No es ha may
be used in his manual o call a en ion o impor an informa ion regarding
personal safe y, safe y and preserva ion of he equipmen , or impor an
ips.
WARN I N G
Warning indicate a potentially dangerou ituation which can re ult in
bodily harm or death.
CAUTION
Caution indicate a potentially hazardou ituation which can re ult in
damage to product or equipment.
NOTE
Note indicate additional information that mu t be con idered by the
u er or operator.
European Union CE Mark
The presence of he CE Mark on Newpor Corpora ion equipmen means
ha i has been designed, es ed and cer ified as complying wi h all
applicable European Union (CE) regula ions and recommenda ions.
Warning and Caution
ATTENTION
Thi tage i a Cla A device. In a re idential environment, thi device
can cau e electromagnetic interference. In thi ca e, uitable mea ure
mu t be taken by the u er.
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HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
Warnings
WARNING
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WARN I N G
Do not use this Hexapod when struts are emitting smoke or is unusua y
hot to the touch or are emitting any unusua odor or noise or is in any
other abnorma state.
Stop using the Hexapod immediate y, switch off struts power and then
disconnect the HXP contro er from power supp y.
After checking that smoke is no onger being emitted contact your
Newport service faci ity and request repairs. Never attempt to repair the
Hexapod yourse f as this can be dangerous.
WARN I N G
Make sure that this Hexapod is not exposed to moisture and that iquid
does not get into the Hexapod.
Neverthe ess, if any iquid has entered the Hexapod, switch off struts
power and then disconnect the HXP contro er from power supp y.
Contact your Newport service faci ity and request repairs.
WARN I N G
Do not insert or drop objects into this Hexapod, this may cause an
e ectric shock, or ock the drive.
Do not use this Hexapod if any foreign objects have entered the
Hexapod. Switch off struts power and then disconnect the HXP
contro er from power supp y.
Contact your Newport service faci ity for repairs.
WARN I N G
Do not p ace this Hexapod in unstab e ocations such as on a wobb y
tab e or s oping surface, where it may fa or tip over and cause injury.
If this Hexapod has been dropped or the case has been damaged, switch off
struts power and then disconnect the HXP contro er from power supp y.
Contact your Newport service faci ity and request repairs.
WARN I N G
Do not attempt to modify this Hexapod; this may cause an e ectric shock
or downgrade its performance.
WARN I N G
Do not exceed the usab e depth indicated on the mounting ho es (see
section “Dimensions”). Longer screws can damage the mechanics or
cause a short-circuit.
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HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
Caution
CAUTION
Do not pla e this Hexapod in a hostile environment su h as X-Rays, hard
UV,… or in any va uum environment.
CAUTION
Do not use the top plate for handling. This may ause it to malfun tion.
CAUTION
Do not manipulate struts. This may ause it to malfun tion.
CAUTION
Do not use the Hexapod neither up side down nor horizontally.
CAUTION
Do not pla e this Hexapod in a lo ation affe ted by dust, oil fumes,
steam or high humidity. This may ause an ele tri sho k.
CAUTION
Do not leave this Hexapod in pla es subje t to extremely high
temperatures or low temperatures. This may ause an ele tri sho k.
• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original pa kaging)
CAUTION
Do not move this Hexapod if struts power is on.
Make sure that the able to the ele troni s is dis onne ted before
moving the Hexapod. Failure to do so may damage the able and ause
an ele tri al sho k.
CAUTION
Be areful that the Hexapod is not bumped when it is being arried. This
may ause it to malfun tion.
CAUTION
When handling this Hexapod, always unplug the equipment from the
power sour e for safety.
CAUTION
Conta t your Newport servi e fa ility to request leaning and
spe ifi ation ontrol every year.
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1
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
6-Axis-Parallel Kinematic Positioning Systems
HXP100-MECA & HXP100HA-MECA Hexapods
1.0 —Introduction
This manual provides operating instructions for the Hexapod that you
have purchased.
CAU ION
Please read chapters 3.3 and 5.0 carefully before operating your Hexapod.
CAU ION
Do not use the HXP100-MECA or HXP100HA-MECA Hexapod neither up
side down nor horizontally.
CAU ION
Do not use the top
plate for handling.
CAU ION
Do not manually turn
struts.
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2
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
2.0 —Description
The HX 100-MECA 6-Axis Hexapod is a parallel kinematic motion device
that provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. The
HX 100-MECA has long travel capability and is an effective solution to
complex motion applications that demand high load capacity and
accuracy in up to six independent axes. Contrary to the image of being
complex and highly priced, the HX 100-MECA hexapod is not only
affordable but extremely easy to use. The HX 100-MECA design also
includes two programmable pivot points, enabling more flexibility to align
a sample at a particular point or points of that sample. The HX 100-MECA
Series also takes advantage of the low-runout, Right ath™ trajectory
capability. Available in the standard performance, higher precision and
vacuum versions. Order with the corresponding HX 100-ELEC controller.
To further ensure positioning performance, the High Accuracy (HA)
HX 100HA-MECA is available with guaranteed accuracy values. This
enables the use of a Newport Hexapod in positioning applications, where
position accuracy is required. In addition to accuracy along an axis, the
itch and Yaw deviations during axial motion are also monitored and
guaranteed. When the HA Hexapod is used with Right ath™, this
combination achieves positioning performance close to standard Newport
stages.
The HX 100-ELEC-D and HX 100HA-ELEC-D provide advanced features
including instrument grade I/O's, hardware based input triggers, event
triggers, high-speed on-the-fly data acquisition, fast TC /I
communication, and integrated TCL programming language for on-board
processes. All these features improve accuracy and throughput, making
the programmer’s life much easier.
A common requirement for many Hexapod motion applications is a virtual
pivot point, allowing the user to freely choose the point in space that is a
pivot point for all rotations. The Newport Hexapod can not only relocate
the pivot point, but through our advanced technology, the entire
coordinate system can be relocated. In addition, two user-definable
coordinate systems are provided, called tool (moves with the Hexapod)
and work (stationary coordinate systems). Incremental displacements are
possible in either one of these systems in user-friendly Cartesian
coordinates, and positions can be easily calculated from one system to the
other by a function call, without the need for complex external coordinate
transformations.
Absolute moves and positions a e
defined in the wo k coo dinate
system. Inc emental moves can
be done in the tool o in the wo k
coo dinate systems.
WORLD
WORK
CARRIAGE
TOOL
BASEBASEBASE
As a standa d featu e, the HXP100-ELEC-D
and HXP100HA-ELEC-D cont olle s allow
the use to choose a vi tual pivot point in
space fo all otations.
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3
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
Each hexapod (HA and non HA versions) is delivered with a dedicated
controller. It is particularly important for the HX 100HA-MECA hexapod to
verify that it is connected to the appropriate HX 100HA-ELEC-D as the
controller includes the calibration performed on the hexapod (the
Hexapod is linked with its own controller through its S/N).
3.0 —Characteristics
3.1 Mechanical Specifications
CAU ION
o reach specifications stated, stages must be fixed on a plane surface
with a flatness of:
• 50 µm for the HXP100-MECA version.
• 10 µm for the HXP100HA-MECA version.
RightPath™T ajecto y
Cont ol enables minimal
unout in linea and a c
t ajecto ies.
2.0
Z Motion (mm)
0
0.2
0.4
0.6
0.8
1.0
1.2
1.4
1.6
1.8
-30 0
-10-20 10 20
X Motion (mm)
Hexapod Trajectory
30
Standard Motion
RightPath
™
XYZU (Rx) V (Ry) W (Rz)
Tr vel r nge (1) ±27.5 mm ±25 mm ±14 mm ±11.5° ±10.5° ±19°
Minimum Increment l Motion 0.5 µm 0.5 µm 0.25 µm 0.25 mdeg 0.25 mdeg 0.5 mdeg
Uni-direction l repe t bility, typic l ±0.25 µm ±0.25 µm ±0.125 µm ±0.125 mdeg ±0.125 mdeg ±0.25 mdeg
Bi-direction l repe t bility (2), typic l ±2 µm ±2 µm ±1 µm ±1 mdeg ±1 mdeg ±2 mdeg
(±0.5 µm) (±0.5 µm) (±0.25 µm) (±0.25 mdeg) (±0.25 mdeg) (±0.2 mdeg)
M x. speed 2.5 mm/s 2 mm/s 1 mm/s 1.8 °/s 1.7 °/s 3 °/s
Rigidity 5 N/µm 5 N/µm 40 N/µm – – –
Centered lo d c p city (4) 200 N
1) Travel ranges are in erdependen . The lis ed values are max. ravels per axis when all o her axis are in heir cen ered posi ion.
2) Wi h s andard compensa ion (wi h hys eresis compensa ion).
3) For allowable can ilevered loads, refer o sec ion 3.2: “Max. Can ilever Dis ance of he Load“.
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HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
3.2 Guaranteed Specifications of the HXP100HA-MECA Version
3.3 Max. Cantilever Distance of the Load
3.4 Weight
250
Max. Load (N)
50
100
150
200
0
0 20 40 60
Radial Distance, D (mm)
Load Position: D = 0 to 140 mm; H = 0 to 200 mm
Load
80 100 120 140
H = 0
H = 100
H = 200
H
D
Weight [lb (kg)]
Hex pod (without c bles) 15.9 (7.2)
C bles 2.2 (1.0)
XYZ
Uni-direction l repe t bility ±0.25 µm ±0.25 µm ±0.125 µm
Bi-direction l repe t bility ±3 µm ±3 µm ±2 µm
Absolute ±10 µm ±10 µm ±5 µm
Pitch ±75 µr d ±75 µr d ±75 µr d
Y w ±75 µr d ±75 µr d ±75 µr d
G
U
A
R
A
N
T
E
E
D
S
P
E
C
I
F
I
C
A
T
I
O
N
S
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5
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
4.0 —Connection to the HXP100-ELEC-D or HXP100HA-ELEC-D Controller
4.1 Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize
shock hazards and are familiar with safety precautions required to avoid
possible injury. Read the controller user’s manual carefully before
operating the instrument and pay attention to all written warnings and
cautions.
WARN I N G
Disconnect t e power plug under t e following circumstances:
• If t e power cord or any attac ed cables are frayed or damaged in
any way.
• If t e power plug is damaged in any way.
• If t e unit is exposed to rain, excessive moisture, or liquids are spilled
on t e unit.
• If t e unit as been dropped or t e case is damaged.
• If you suspect service or repair is required.
• W enever you clean t e electronics unit.
CAUTION
To protect t e unit from damage, be sure to:
• Keep all air vents free of dirt and dust.
• Keep all liquids away from t e unit.
• Do not expose t e unit to excessive moisture (85% umidity).
• Read t is manual before using t e unit for t e first time.
WARN I N G
All attac ment plug receptacles in t e vicinity of t is unit are to be of
t e grounding type and properly polarized.
Contact your electrician to c eck your receptacles.
WARN I N G
T is product is equipped wit a 3-wire grounding type plug.
Any interruption of t e grounding connection can create an electric
s ock azard.
If you are unable to insert t e plug into your wall plug receptacle,
contact your electrician to perform t e necessary alterations to ensure
t at t e green (green-yellow) wire is attac ed to eart ground.
WARN I N G
T is product operates wit voltages t at can be let al.
Pus ing objects of any kind into cabinet slots or oles, or spilling any
liquid on t e product, may touc azardous voltage points or s ort out
parts.
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6
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
4.2 Connection
WARNING
Always turn the controller's power OFF before connecting to a strut.
Struts must be connected to the rear panel motor connectors labeled
“Motor…” any time prior to power-up with the supplied cable assemblies.
WARNING
Each Hexapod strut has a label that corresponds to the axis number
of the HXP100-ELEC-D or HXP100HA-ELEC-D controller. his label is
also indicated on the connector of the strut.
4.3 Cables
Each Hexapod is equipped with 3-meter cables (*) terminated with SUB-
D25M connectors and can be directly connected to the HXP100-ELEC-D
or HXP100HA-ELEC-D controller.
(*) Length from actuators. Remove 0.35m when measuring from hexapod
output.
CAU ION
Numbering of axes is important for strut connections. A mismatch will
cause fatal errors during initialization or unexpected hexapod motions.
WARN I N G
These cables are shielded correctly. For a correct operation, make s re
to lock connectors (gro nd contin ity provided by the cable).
WARN I N G
Keep the motor cables at a safe distance from other electrical cables in
yo r environment to avoid potential cross talk.
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7
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
NO E
On each strut connector, a sticker indicates the backlash, resolution and
home preset.
hese parameters have to be set into the controller for each strut. his
is done at our factory when the Hexapod is ordered with its own
HXP100-ELEC-D or HXP100HA-ELEC-D controller.
WARNING
hese Hexapods must be grounded via a threaded hole to
avoid electrical disturbances generated by ground loops.
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8
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
5.0 —Dimensions
CARRIAGE
BASE
ø7.9
(200)
8.23 ±.55 (209 ±14)
HEXAPOD AT
MIDDLE POSITION
.98
(25)
.98
(25)
– TOP VIEW –
6 HOLES M6 THD (1)
EQUIDISTANT AT 60°
ON ø4.9 (125)
3 CLR HOLES FOR M6 SCREW
EQUIDISTANT AT 120°
ON ø11.0 (280)
1.97
(50)
3.94 (100)
5.91 (150)
6 CLR HOLES
FOR M6 SCREW
EQUIDISTANT AT 60°
ON ø7.9 (200)
2 CLR HOLES
FOR 1/4 SCREW
8.0 (203.2) SPACING
4 CLR SLOTS FOR:
1/4” SCREW
ON 4.0 x 8.0 (101.6 x 203.2)
OR M6 SCREW
ON 3.9 x 7.9 (100 x 200)
4.4
(112.5)
TYP.
ø11.8
(300)
X
Y
1) DEPTH: .39 (10)
1.97
(50)
12 HOLES M6 THD (1)
3.94
(100)
4 HOLES M6 THD (1)
ON SQR 1.97 (50)
6 HOLES M6 THD (1)
EQUIDISTANT AT 60°
ON ø6.9 (175)
TOP PLATE
BASE PLATE
1 HOLE ø.394 +.006
(Ø 10 H7)
DEPTH: .31 (8)
0
1 HOLE M6 THD
DEPTH: .20 (5)
MODEL SHOWN: HXP100-MECA
DIMENSIONS IN INCHES (AND MILLIMETERS)
9.06 (230)
8.00 (203.2)
2 PINHOLES ø.197 +.006
(Ø 5 H7)
DEPTH: .39 (10)
0
A A
– A-A –
3 CLR HOLES FOR M6 SCREW
EQUIDISTANT AT 120°
ON ø11.0 (280)
2 CLR HOLES
FOR 1/4 SCREW
8.0 (203.2) SPACING
ø11.8
(300)
6 CLR HOLES
FOR M6 SCREW
EQUIDISTANT AT 60°
ON ø7.9 (200)
4 CLR SLOTS FOR:
1/4” SCREW
ON 4.0 x 8.0 (101.6 x 203.2)
OR M6 SCREW
ON 3.9 x 7.9 (100 x 200)
2 PINHOLES ø.197 +.006
(Ø 5 H7)
DEPTH: .39 (10)
0
NO E
op and base plates of the HXP100-MECA
and HXP100HA-MECA Hexapods are made
of anodized aluminum.
NOTE
The +X-axis points in the direction of the cable output
between struts #3 and #4.
Z
XY
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9
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
6.0 —Maintenance
RECOMMENDA ION
Please contact echnical Sales Support team for recommendations on
application specific maintenance.
6.1 Maintenance
The Hexapod requires no particular maintenance. Nevertheless, this is a
precision mechanical device that must be kept and operated with caution.
PRECAU IONS
he Hexapod must be used or stocked in a clean environment, without
dust, humidity, solvents or other substances.
RECOMMENDA ION
It is recommended to return the Hexapod to Newport for re-lubrication
after 2000 hours of use.
If the HXP100-MECA is mounted on a workstation and cannot be easily
removed, please contact Newport's After Sales Service for further
instructions.
6.2 Repair
CAU ION
Never attempt to disassemble a component of the Hexapod that has not
been covered in this manual.
o disassemble a non specified component can cause a malfunction of
the stage.
If you observe a malfunction in your Hexapod, please contact us
immediately to arrange for a repair.
CAU ION
Any attempt to disassemble or repair a Hexapod without prior
authorization will void your warranty.
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10
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Ki ematic Positio i g Systems
A698J0 - EDH0239En1070 - 12/19

11
Your Local Representative
Tel.:
Fax:
Name:
Company:
Addre :
Country:
P. O . N u m b e r :
Item(s) Being Returned:
Model #:
De cription:
Rea on of return of good (plea e li t any pecific problem ):
Return authorization #:
(Plea e obtain prior to return of item)
Date:
Phone Number:
Fax Number:
Serial #:
Service Form
A698J0 - EDH0239En1070 - 12/19

Visit Newport O li e at:
www. ewport.com
North America & Asia
Newport Corporation
1791 Deere Ave.
Irvine, CA 92606, USA
Sales
Tel.: (800) 222-6440
e-mail: [email protected]
Technical Support
Tel.: (800) 222-6440
e-mail: [email protected]
Service, RMAs & Returns
Tel.: (800) 222-6440
e-mail: ser[email protected]
Europe
MIC O-CONT OLE Spectra-Physics S.A.S
9, rue du Bois Sauvage
91055 Évry CEDEX
France
Sales & Technical Support
Tel.: +33 (0)1.60.91.68.68
e-mail: [email protected]
Service & Returns
Tel.: +33 (0)2.38.40.51.55
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