Pfeiffer Vacuum ONF 025 User manual

Translation of the original instructions
Operating Instructions
EN
PK 0117 BEN/J (1310)
ONF 025/040, ONF 025/040 C
Oil Mist Filter

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.1 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
5.1 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
5.2 Installing the operating fluid return line . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
7 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
7.1 Draining the operating fluid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
7.2 Changing the filter element. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
7.3 Inspecting and cleaning ORF 005. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
8 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
9 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
10 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
10.1 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
11 Spare parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
11.1 Spare parts packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
12 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

About this manual
3
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
Pictogram definitions
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Prohibition of an action or activity in connection with a source of danger,
the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents

4
Safety
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used ONF: Oil mist filter
KAS: Condensate separator
C version: Corrosive gas version
ORF: Oil return device
2Safety
2.1 Safety precautions
Before carrying out any work read and observe the operating and safety instructions
of the pumping station and the individual components.
Observe the safety and accident prevention regulations.
Check regularly that all safety precautions are being complied with.
When returning the components to us please note the instructions in the Service sec-
tion.
2.2 Proper use
Only use the oil mist filter to filter oil mist from the gas flow of rotary vane pumps.
Simply mount the ONF onto the exhaust port of rotary vane pumps.
Use the ONF in accordance with the corresponding approved pumping speed.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
connection to pumps or units which are not suitable for this purpose according to their
operating instructions
connection to units which have exposed voltage-carrying parts
use of accessories or spare parts, which are not named in this manual
Important information about the product or this document
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.

Transport and storage
5
3 Transport and storage
3.1 Storage
The ONF 025/040, ONF 025/040 C should be stored dry and protected from moisture.
The filter inserts can absorb moisture, and the lubrication properties of the oil and hence
the ultimate pressure can be negatively influenced in pumps with an oil return unit.
4 Product description
4.1 Product identification
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
●Model and model number
●Date of manufacture
Fig. 1: Product identification on the rating plate (example)
Variants In addition to the standard version the oil mist filters are also supplied in a helium-tight
version and a corrosive gas version.
The oil mist filters are supplied with a relief pressure valve standard.
Mod.:
Mod.-No.:
Made in Germany 2012/03
ONF 025
PK Z40 406 A
D-35614 Asslar
Type Versions Characteristics
ONF 025
ONF 040
Standard model ONF as standard model
ONF 025 C
ONF 040 C
Corrosive gas model Differences to the standard model:
●Leak rate of housing pL< 1 10-5 hPa l/s
●Sight glass 16 of PCTFE
●Operating fluid drain screw 15 of stainless steel
●Seals 9 and 19 of elastomer
●Filter elements 12 of other materials
●Relief pressure valve with small flange connection
ONF 025
ONF 040
Helium-tight gas model Differences to the standard model:
●Leak rate of housing pL< 1 10-5 hPa l/s
●Seals 9 and 19 of elastomer
●Relief pressure valve with small flange connection

6
Product description
4.2 Function
The oil mist filter is mounted on the exhaust port of rotary vane pumps. It filters oil mist
particles from the conveyed gas flow and thus reduces the escape of operating fluid mist.
The filter elements are installed in a corrosion-resistant aluminum casing and consist of
a cylindrical filter made from glass/polyester fleece in the standard and helium-tight ver-
sions, or from sintered carbon in the corrosive gas version. A baffle is also fitted over the
filter insert. An integrated pressure relief valve opens when the filter elements are exces-
sively contaminated, so that the maximum operating pressure of 1500 hPa (absolute) is
not exceeded. The volume of filtered operating fluid can be viewed through a sight glass
and drained via a drain screw.
To return the filtered operating fluid from the ONF into the pump without interrupting the
pump operation, an operating fluid return (optional) can be used.
Fig. 2: ONF 025
Operatingfluidreturn
line If the operating fluid accumulated in the ONF reaches a specified level, the operating flu-
id is channeled via differential pressure back into the rotary vane pump. Condensate con-
centrates underneath the oilpan and has to be drained when necessary so as not to im-
pair the operation of the pump
16 Sight glass
X Connection flange
(exhaust flange of
rotary vane pump)
X
16

Installation
7
5 Installation
5.1 Assembly
To install the ONF in a vacuum system, an ISO small flange or ISO clamp flanges are
provided on the input side and output side. The flanges are provided with protective caps
when delivered to protect the seals.
If gases are pumped that may not enter the atmosphere, an exhaust line must be con-
nected to the small flange on the pressure relief valve.
If large amounts of vapour arise during operation, it is recommendable to install a con-
densate separator between the rotary vane pump and ONF so that condensate is re-
moved in the KAS, and only oil mist enters the ONF.
Remove the protective caps from the connection flanges.
Place the ONF on the exhaust side of the rotary vane pump with the sight glass facing
downward, and fasten it with the clamping ring (accessory) or bracket screws (acces-
sory) if clamp flanges are used.
Lay exhaust line from the ONF sloping downward so that no condensate can flow
back.
– If an air trap is created in the system, then a device for draining condensation water
must be provided at the lowest point.
In case of corrosive gas and helium-tight models, connect an additional exhaust hose
to the flange of the overpressure valve to safely remove the exhaust.
WARNING
Poisonous substances exit from the exhaust!
There is a poisoning hazard from discharged gases or vapors that can be hazardous
and/or polluting during use.
Install and run the exhaust line so that overpressure cannot build up inside it.
Follow the vacuum pump installation instructions in the respective operating instruc-
tions.
NOTICE
Risk of the filter elements becoming blocked with resin!
When pumping gases and vapors with a tendency towards polymerization, the ONF fil-
ter elements can become resinified.
Observe the corresponding safety devices such as the saturation indicator or pres-
sure relief valve.
NOTICE
Preservation of sealing capacity
Observe the following to preserve sealing capacity:
Touch seals only with gloves.
Make sure sealing lips are undamaged.

8
Installation
5.2 Installing the operating fluid return line
Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if neces-
sary.
Unscrew operating fluid drain screw 15.
Drain off operating fluid.
Separate the operating fluid from the condensate.
– If the drained operating fluid is free of contamination, it can be fed back to the rotary
vane pump.
ONF 025, ONF 025 C Screw in reducing piece 224 and fitting 225 at the ONF in place of the operating drain
screw; pay attention to O-ring 144.
Remove gas ballast valve 42 from the pump and absorb the operating fluid under-
neath.
Re-fit the gas ballast valve 42 with intermediate flange 45 and screw tight with longer
screws 183; take care with O-ring 148.
Screw fitting/hose nipple 220 into intermediate flange 45; pay attention to O-ring 138.
Fit operating fluid return hose 28 at both sides.
Fasten hose clip 223.
Tighten the union nut of the fitting 225.
Fig. 3: ONF 025 with operating fluid return line
NOTICE
Make sure that the return for the operating fluid works.
Operating fluid is only sucked in and returned starting from a minimum quantity of ope-
rating fluid in the ONF.
Top up with operating fluid in order to ensure the return of operating fluid at the start
of the evacuation phase.
15 Operating fluid drain screw
28 Hose
42 Gas ballast valve
45 Intermediate flange
138 O-ring
144 O-ring
148 O-ring
220 Fitting
223 Hose clip
224 Reducing piece
225 Fitting
ONF 025
ONF 025 C
28
220/138
223
42
45/148
224/144
225
15

Installation
9
ONF 040, ONF 040 C Prior to conversion work check the pump's ultimate pressure to get a reference value.
For this purpose, measure the ultimate pressure at the intake side with a vacuum gauge
(e.g. Pirani).
Fig. 4: ONF 040 with ORF 005 installed at DUO 35/65
Shorten small flange 20 by 20 mm at the pipe end.
Screw in small flange 20 (DN 10) inplace of the operating fluid drain screw 15; take
care with O-ring 32.
Fit ORF 005 on the small flange 20 using the tension ring 46; take care with the cen-
tering ring 48.
Unscrew and remove locking screw 142 on the support.
Screw in small flange 4.1 (DN 10) at the support stand inplace of the locking screw
142; take care with O-ring 4.2.
Fit small flange 24 with centering ring 49 and clamping ring 46 at the screw in flange
4.1.
Screw in banjo fitting 14 at the small flange 24.
Mount operating fluid return hose 28 between ORF 005 and the pump's 14 banjo fit-
ting.
– Install the hose as short as possible and fasten if necessary.
Check the pump's ultimate pressure to ensure a leakproof assembly;
– compare the measurement result with the previously determined ultimate pressure.
3 ORF 005
4 Support stand
4.1 Screw in flange
4.2 O-ring
14 Banjo fitting
15 Operating fluid drain screw
20 Small flange
28 Operating fluid return hose
32 O-ring
46 Clamping ring
48 Centering ring
49 Centering ring
63 O-ring
142 Locking screw
ONF 040
ONF 040 C
15
32
20
46
142
3
46
14
28
63
48
24
49
4.1/
4.2 4

10
Operation
6Operation
7 Maintenance
7.1 Draining the operating fluid
If the accumulated operating fluid in the ONF is above the top edge of the sight glass 12,
the operating fluid must be drained.
The intervals at which the operating fluid is drained depends on the operating conditions.
Check the operating fluid level in the sight glass.
Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if neces-
sary.
Ensure that the exhaust line is depressurized.
NOTICE
Damage to the pump due to condensate in the operating fluid!
Returned condensate generated by vapors or by temperature differences between the
oil mist filter and pump impairs the quality of the operating fluid and negatively impacts
the pump's final vacuum.
Drain operating fluid built up with condensate in a time manner.
NOTICE
Risk of the filter elements becoming blocked with resin!
When pumping gases and vapors with a tendency towards polymerization, the ONF fil-
ter elements can become resinified.
Observe the corresponding safety devices such as the saturation indicator or pres-
sure relief valve.
CAUTION
Discharge of process gases and oil mist!
To protect the pump for overpressure, the pressure relief valve opens when the working
pressure of the filter elements exceeds the max. permissible value of 1500 hPa (abso-
lute).
Provide appropriate exhaust pipes to prevent process gases from entering the envi-
ronment.
WARNING
Operating fluid may contain toxic substances from the pumped media!
Danger of poisoning from the emission of harmful substances from the operating fluid.
Wear suitable protective clothing and respirators.
Dispose of operating fluid according to the local regulations
WARNING
Toxic vapours!
Danger of poisoning when igniting and heating synthetic operating fluids (e.g. F4/F5)
above 300 °C.
Observe the application instructions.
Do not allow operating fluid to make contact with tobacco products; observe safety
precautions when handling chemicals.

Maintenance
11
Unscrew operating fluid drain screw 15.
Drain off operating fluid.
Separate the operating fluid from the condensate.
– If the drained operating fluid is free of contamination, it can be fed back to the rotary
vane pump.
Screw in operating fluid drain screw 15; pay attention to O-ring.
Dispose of condensate according to the respectively valid legal requirements.
Operatingfluidreturn
line Due to the automatic operating fluid return, it is not necessary to drain the operating fluid
manually.
In order to prevent condensate that may have settled in the oilpan from eventually reach-
ing the pump via the operating fluid return line, the oil mist filter and oil feedback unit
should be drained occasionally.
Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if neces-
sary.
Dismantle the oil return unit 005 and empty the operating fluid via the inlet flange.
– Condensate-free operating fluid can be resupplied to the rotary vane pump.
Unscrew the small flange on the oil mist filter and drain the operating fluid.
– Condensate-free operating fluid can be resupplied to the rotary vane pump.
Dispose of condensate according to the respectively valid legal requirements.

12
Maintenance
7.2 Changing the filter element
The filter insert must be exchanged or cleaned when the exhaust pressure increases un-
til the pressure relief valve 31 opens and oil mist exits.
ONF 025
Fig. 5: ONF 025
ONF 040
Fig. 6: ONF 040
Dismantling Carry out preliminary work as described before.
Unscrew screws 8.
Carefully loosen cover 6 from the housing 1.
Remove cover 6 along with filter elements 12 from the housing.
1 Housing
2 Valve housing
3 Adjusting nut
4 Compression spring
5 Sealing element
6 Cover
8Screw
9 Cover seal
10 Deflector
12 Filter insert
14 O-ring
15 Drain plug
16 Sightglass
17 O-ring
18 Vane
19 Seal
31 pressure relief valve
31
2 5 4 3
14 15 12 9 6 8
19 1 10
17
16
18
1 Gehäuse
2 Ventilgehäuse
3 Einstellmutter
4 Druckfeder
5 Dichtelement
6 Deckel mit Überdruckventil
8 Schraube
9 Deckeldichtung
10 Prallblech
12 Filtereinsätze
14 O-Ring
15 Ablassschraube
16 Schauglas
17 O-Ring
18 Scheibe
19 Dichtung
20 O-Ring
31 Überdruckventil
31.1 Überdruckventil, C-Version
5 4 2 3
14 5 4 2 3
14 15 19 12 9 8 6
18
20
16
17
31 31.1
10
1

Maintenance
13
Replace cover seal 9, mind that the sealing surfaces are not damaged.
Loosen deflector 10 if required.
Remove washer 18, pay attention to seal 19.
Replace seals 19 and O-rings 20 (if existing).
Replace filter elements 12; cleaning is not recommended in most cases.
Clean Use organic solvents to clean them (not water-soluble agents such as soda).
Let the filter inserts 12 remain for approx. 12 h in solvent.
Use air under slight pressure to eject the solvent from the filter inserts, and then dry
them.
Installation Once the filters are exchanged or cleaned, they can be remounted in the manner oppo-
site that in which they were removed.
Tighten the filter elements at a torque of 3 ... 5 Nm.
WARNING
Explosion hazard
The use of volatile or combustible cleaning agents in vacuum systems can lead to ex-
plosive vapour-air mixtures.
After cleaning ventilate and let dry completely.
NOTICE
Do not change the setting of the pressure relief valve 31!
The pressure relief valve 31 is set at 1.5 bar (absolute pressure) in the factory.
Do not change the setting of the adjusting nut 3. It is locked with Loctite.

14
Maintenance
7.3 Inspecting and cleaning ORF 005
Maintenance is reduced to cleaning and changing of the elastomere parts.
Fig. 7: ORF 005 inspecting and cleaning
Unscrew screws 44 from the casing 4.
Remove cover 4; be careful with O-ring 34.
Check the sealed surface of sealing nipple 12; replace if necessary.
– When assembling lightly oil sealing nipple 12 and ensure the correct seating in the
housing 4.
Clean all other parts, inspect for wear and exchange if necessary.
Assembling is carried out in reverse order.
Fill in additional operating fluid in order to ensure the return of operating fluid.
Check the pump's ultimate pressure to ensure a leakproof assembly;
– compare the measurement result with the previously determined ultimate pressure.
2 Housing
4 Cover
6 Floater
8 Sight glass
12 Sealing nipple
14 Banjo fitting
16 Clamping plate
28 Operating fluid return line
32 O-ring
34 O-ring
40 Cylinder bolt
42 Cylinder head screw
44 Cylinder head screw
48 Centering ring,
DN 16 ISO-KF
82
32
48
42 16
6
40
28
4
44
14
12 34

Service
15
8 Service
Pfeiffer Vacuum offers first-class service!
●Maintenance/repairs on site by Pfeiffer Vacuum field service
●Maintenance/repairs in a nearby service center or service point
●Fast replacement with exchange products in mint condition
●Advice on the most cost-efficient and quickest solution
Detailed information and addresses at: www.pfeiffer-vacuum.com (Service).
Maintenance and repairs in Pfeiffer Vacuum ServiceCenter
The following steps are necessary to ensure a fast, smooth servicing process:
Download the forms "Service Request" and "Declaration on Contamination".1)
Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum
service address.
Include the confirmation on the service request from Pfeiffer Vacuum with your ship-
ment.
Fill in the contamination declaration and enclose it in the shipment (required!).
Dismantle all accessories.
Drain operating fluid/lubricant.
Drain cooling medium, if used.
Send the pump or unit in its original packaging if possible.
Sending of contaminated pumps or devices
No units will be accepted if they are contaminated with micro-biological, explosive or ra-
dioactive substances. “Hazardous substances” are substances and compounds in ac-
cordance with the hazardous goods directive (current version). If pumps are contaminat-
ed or the declaration on contamination is missing, Pfeiffer Vacuum performs
decontamination at the shipper's expense.
Neutralise the pump by flushing it with nitrogen or dry air.
Close all openings airtight.
Seal the pump or unit in suitable protective film.
Return the pump/unit only in a suitable and sturdy transport container and send it in
while following applicable transport conditions.
Service orders
All service orders are carried out exclusively according to our repair conditions for vacu-
um units and components.
9 Accessories
1) Forms under www.pfeiffer-vacuum.com
Oil return unit ONF 025
ONF 025 C
ONF 040
ONF 040 C
Oil return unit from ONF 025 C to DUO 5 MC, oil return unit from
ONF 025 C to DUO 10 MC, oil return unit from ONF 025 C to
DUO 20 MC, corrosive gas version
PK 196 177 -T
Oil return unit, ORF 005, standard version PK Z90 065
further required order parts: Screw in flange:
PF 141 214 -T
Clamping ring:
PF100316 -T

16
Technical data
10 Technical data
10.1 Dimensions
Fig. 8: ONF 025 C, ONF 040 C
Parameter ONF 025
ONF 025 C
ONF 040
ONF 040 C
Degree of separation 98 % 98 %
Flange (in) DN 25 ISO-KF DN 40 ISO-KF
Flange (out) DN 25 ISO-KF DN 40 ISO-KF
Pressure max. (absolute) 1500 hPa 1500 hPa
For pumping speed 24 m3/h 70 m3/h
Capacity 0.2 l 0,80 l
Capacity ONF with ORF 0.05 l 0,5 l
Weight 1.8 kg 8,4 kg
Parameter ORF 005
Weight 1.4 kg
G
E
B
D
F
A
DN 1
DN 2
C
DN 16 ISO-KF
(C-Version)
22
Dimensions ONF 025,
ONF 025 C
ONF 040
ONF 040 C
A 198 mm 336 mm
B 140 mm 230 mm
C94mm178mm
D 100 mm 166 mm
E40mm60mm
F90mm160mm
G 54,5 mm 101,5 mm
DN1 DN 25 ISO-KF DN 40 ISO-K
DN2 DN 25 ISO-KF DN 40 ISO-K

Spare parts
17
11 Spare parts
The spare parts packages listed here are only applicable for standard models.
Please state all information on the rating plate when ordering spare parts. Other spare
parts than those described in this manual must not be used without the agreement of
Pfeiffer Vacuum.
11.1 Spare parts packages
ONF 025
Fig. 9: ONF 025
Spare parts package Model Version No. Consisting of
Maintenance kit ONF 025 standard PK E17 002 -T 9, 12, 19
C version PK E17 005 -T 9, 12, 19
helium-tight PK E17 004 -T 9, 12, 19
ONF 040 standard PK E07 004 -T 9, 12, 19, 20
C version PK E07 006 -T 9, 12, 19, 20
helium-tight PK E07 005 -T 9, 12, 19, 20
Overhaul kit ONF 025 standard PK E17 006 -T 6, 9, 12, 14, 16, 17, 19,
set of seals
C version PK E17 009 -T 5, 9, 12, 14, 16, 17, 19,
31.1, set of seals
helium-tight PK E17 008 -T 5, 9, 12, 14, 16, 17, 19,
31.1, set of seals
ONF 040 standard PK E07 007 -T 6, 9, 12, 14, 16, 17, 19, 20
set of seals
C version PK E07 009 -T 9, 12, 14, 16, 17, 19, 20
31.1, set of seals
helium-tight PK E07 008 -T 9, 12, 14, 16, 17, 19, 20
31.1, set of seals
1 Housing
2 Valve housing
3 Adjusting nut
4 Compression spring
5 Sealing element
6 Cover with pressure
relief valve
8Screw
9 Cover seal
10 Deflector
12 Filter insert
14 O-ring
15 Drain screw
16 Sight glass
17 O-ring
18 Washer
19 Seal
20 O-ring
31 Pressure relief valve
31.1 Pressure relief valve, c version
31
2 5 4 3
31.1
2 5 4 3
14 12 9 6 8
19 1 10 10
17
16
18

18
Disposal
ONF 040
Fig. 10: ONF 040
12 Disposal Products or parts thereof (mechanical and electrical components, operating fluids, etc.)
may cause environmental burden.
Safely dispose of the materials according to the locally applicable regulations.
1 Housing
2 Valve housing
3 Adjusting nut
4 Compression spring
5 Sealing element
6 Cover with pressure
relief valve
8Screw
9 Cover seal
10 Deflector
12 Filter insert
14 O-ring
15 Drain screw
16 Sight glass
17 O-ring
18 Washer
19 Seal
20 O-ring
31 Pressure relief valve
31.1 Pressure relief valve, c version
5 4 2 3
14 5 4 2 3
14 15 19 12 9 8 6
18
20
16
17
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Are you looking for a
perfect vacuum solution?
Please contact us
Pfeiffer Vacuum stands for innovative and custom
vacuum solutions worldwide, technological perfection,
competent advice and reliable service.
From a single component to complex systems:
We are the only supplier of vacuum technology
that provides a complete product portfolio.
Benefit from our know-how and our portfolio of training
opportunities! We can support you with your plant layout
and provide first-class on-site-service worldwide.
Vacuum solutions
from a single source
Complete range
of products
Competence in
theory and practice
Pfeiffer Vacuum GmbH
Headquarters • Germany
T +49 6441 802-0
www.pfeiffer-vacuum.com
This manual suits for next models
3
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