SPS Polos SPIN150i infinite User manual

Polos
SPIN150i/200i
infinite
for software rev. 1.11

PolosSpin150i/200i
rev.: 1.0 Operating instruction
Welcome to the POLOS spin processing system!
The Polos is a top quality spin processor engineered for ease of use, low
maintenance, and long lifetime. Designed, Engineered, and Assembled in our state-
of-the-art facility in Germany, the Polos is constructed of high purity semiconductor
grade plastics to ensure the ultimate cleanliness. No metal components are in
contact with process chemicals, or fumes. This ensures the Polos can
accommodate a wide range of process chemicals, with no risk of metals
contamination, or system damage.
The aerodynamic design of the lid interior ensures "splash back-free" processing
and a direct drain path, while the smooth curved natural polypropylene surfaces of
the lid and process chamber directly assist the easy cleaning of the unit. The
touchscreen display are chemically resistant.
The system is built using industry-proven quality components ensuring precise
repeatable performance, a long lifetime, and zero maintenance. The Polos will
perform for you whether your needs are infrequent, with simple programs,
continuous processing, or frequent changes using complex programming steps.
Operation is intuitive; programming is simple, and up to 10000 separate programs
can be stored in the system memory. (each program can have up to 999 steps!)
This is a highly flexible system, and we offer a range of chucks, adapters, and other
options to support your future requirements.
Safety features include Secure lock of Lid Latch, Lid-Open and No-Vacuum
interlocks, Dynamic Braking and in-built programming safety interlocks.
Please take the time to read this manual to familiarize with the method of operation,
and the installation requirements of your Polos system.

PolosSpin150i/200i
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SPS-Europe B.V. page 3
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Operation instruction
and safety information
Contents:
1. General information
2. Safety instruction
3. Specific safety instruction
4. Transportation and storage
5. Product description and facility requirement
6. Installation and commissioning
7. Operation instruction
8. Software instruction
9. Cleaning
10. Decommissioning, storage and disposal
11. Technical data

PolosSpin150i/200i
rev.: 1.0 Operating instruction
SPS-Europe B.V. page 4
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1 General information
This documentation is an integral part of the Polos spin processor. The system
should not be activated or operated without this documentation.
Please read completely the manual carefully prior to installation, starting and
operation of the unit.
1.1 Safety instructions
All safety instructions will be found in section 2 of these manual and following
ones.
Prior to installation, starting-up and operation of the system relevant safety
instructions have to be read carefully and considered accordingly.
In addition to the operating instructions generally applicable legal regulations
and other provisions for the prevention of accidents and environmental
protection of the relevant country apply.
In the EU directive 89/391EWG, implemented in Germany in the Ordinance
on Industrial Safety and Health (BetrSichV), Technical Rules for
Operational Safety (TRBS 1203) and Workplaces Ordinance (ArbStättV),
the legislator demands amongst others that the working appliances are
subjected to regular and competent maintenance by trained staff and
checked for operability (effectiveness).
The piping system, especially joints, must be maintained and serviced.
Regular checks for leaks must be performed on all screwing connections
especially in case of temperature-controlled recirculation systems. A sight
inspection should be performed before the beginning of each shift.
If an exhaust module is required by chemical MSDS it has to be ensured
that the quantities of incoming and outgoing air are controlled before
commissioning, i.e. pressure differences in the working range must be
adapted.
1.2 Liability
The manufacturer will not take any liability of object, person and secondary
damage caused by improper use or ignoring of safety instructions as well as
caused by the owner’s manual due to missing updating after the system or its
software have been modified, nor will the manufacturer take any liability of
damages due to loss of data. In case of later modifications of the plant or user
software by the operator liability becomes inapplicable as well.
In addition, the terms of business that are part of the order/contract will apply.
Our products are continuously modified and improved due to innovation, legal
requirements and standards. As a consequence, the information given in this
documentation may not accurately reflect every detail of the system actually
delivered.
Please contact the manufacturer in cases of uncertainty.

PolosSpin150i/200i
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SPS-Europe B.V. page 5
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The recipient may use these operating instructions as well as all additional
documents related to the system as intended only.
Products mentioned in this manual are eventually trademarks and are used for
identification purposes only.
1.3 Edition
PolosSpin150i/200i - Operating instruction
Revision: 1.0
19/08/2013
1.4 Warranty
We guarantee for the equipment as stated in the order/contract.
This warranty will expire in case of:
interference into or modification of the system without prior consent of the
manufacturer
improper use of the system
insufficient maintenance of the system
inappropriate operation of the system
negligence of correct supply requirements
application of third-part components
alteration of program or configuration without manufacturer’s consent
1.5 Service address
SPS-Europe B.V.
Midden Engweg 41
NL-3882 TS Putten
The Netherlands
Tel. [phone]
Fax. [phone]
e-mail: [email protected]

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SPS-Europe B.V. page 6
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2 Safety instruction
2.1 Intended use
The Polos is a process tool for typical spin process applications of wafers and other
substrates.
The range of applications depends on components and options installed, it includes
but it is not limited to:
Cleaning
Drying
Coating
Developing
Etching
Intended use includes:
adherence to entire instruction manuals
adherence to prescribed commissioning, operating and service instructions
adherence to prescribed inspection intervals
DANGER!
Chemicals
Customer has full responsibility and liability to assure that all wetted materials of the
system are resistant to the chemical(s) applied.
Please consult the technical data section for wet material list or contact SPS-
Europe B.V. in case of uncertainty.
DANGER!
Chemicals
Without proper protection the system is not suited for the application of explosive or
hazardous chemicals.
DANGER!
This Polos spin processor is not suited or designed for any other applications than
the ones stated above.
Any modification of the system requests manufacturer’s prior consent as well as his
confirmation in writing.
Note: Our products are continuously modified and improved due to innovation, legal
requirements and standards. As a consequence, the information given in this
documentation may not accurately reflect every detail of the system actually
delivered.
Please contact the SPS-Europe B.V. in cases of uncertainty.

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2.2 Safety instruction: general
Prior to installation, starting and operation of the system relevant safety instruction
should be read carefully and considered accordingly.
This manual contains information and warnings to be followed by the user to ensure
safe operation and to maintain the system in secure condition. It should be located
in a suitable place close to the system.
In addition to this manual all valid, legal and other local regulations concerning
prevention of accidents as well as protection of the environment are applicable.
Please consider all instructions, in particular safety instructions, in order to achieve
safe operation of the system.
Possible hazards harming the user or resulting in damage to the system are clearly
stated within appropriate chapters of this manual.
Safety instructions plus important information are marked in the following way:
DANGER!
The word “Danger!“ combined with this or a more specific symbol indicates an
immediate hazard while using the system.
Neglecting of instructions given in this documentation or on the system itself can
result in personal injury or death of the operator or of persons being close by.
The system, other equipment or the environment can be seriously damaged as well.
WARNING!
The word “Warning!“ combined with this or a more specific symbol indicates an
impending hazard or fatal unsafe practice while using the system.
Neglecting of instructions given in this documentation or on the system itself can
result in severe personal injury of the operator or of persons being close by.
The system, other equipment or the environment can be damaged as well.
CAUTION!
The word „Caution!“ combined with this or a more specific symbol indicates a
possible hazard or unsafe practice while using the system.
Neglecting of instructions given in this documentation or on the system itself can
result in personal injury of the operator or of persons being close by.
The system, other equipment or the environment can be damaged as well.
Please consider all instructions, in particular safety instructions, in order to achieve
safe operation of the system.
Note: advice contained in this chapter is intended to supplement, not to supersede,
the safety advice given in other chapters of this manual, the instructions provided by
chemicals suppliers nor the general safety code of behavior prevailing in the user’s
country.

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CAUTION!
Do not take actions on the system other than described in this manual.
CAUTION!
Do not operate the system while covers or other protective systems have been
removed.

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2.3 Symbols used on system
The following safety instructions (caution and command symbols) may be seen on
the system:
caution –risk of danger
caution –risk of electric shock
caution –risk of hand injury
caution –moving parts
caution –risk of corrosion
use eye protection
Note: The above symbols refer to SPS-Europe B.V. components and parts.
However, components and parts of sub suppliers may show other symbols, not
expressly mentioned or referred to in this manual.
DANGER!
The owner of the system is responsible to place adequate danger signals and labels
in suitable places.
This applies in particular to signals and labels concerning process chemicals used.
Irrespective of number of caution symbols and information placed on or around the
system all safety instructions of this manual have to be observed.

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2.4 Personnel training
Persons charged with transport, storing, installation, starting, operation,
maintenance and service have to know the content of this manual.
Special training is required for personnel involved in system maintenance and
calibration.
Training can be provided by SPS-Europe B.V. on customer request.
Installation, service and repair work may only be executed by SPS-Europe B.V.
service personnel or persons qualified accordingly.
WARNING!
Customer has full responsibility and liability to provide comprehensive training
regarding unit usage and chemical safety to all employees involved on system
utilization.
2.5 Personnel obligations
WARNING!
All personnel involved in system utilization must be qualified accordingly relevant
task, knowing the perils and being able to prevent them by applying suitable safety
measures.
WARNING!
The equipment must not be operated, maintained or serviced by personnel under
effect of alcohol, drugs, medicine reducing attention.
2.6 Personal protection equipment
WARNING!
All operators involved in system must wear protective clothes adequate to
chemicals used including but not limited to:
Safety glasses/goggles and/or face shields
Chemical gloves
Protective suit with long sleeves
Chemical aprons
Closed-toe shoes
Long pants
WARNING!
Customer has full responsibility and liability to provide adequate training and
personal protection equipment to all employee involved on system utilization.

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3 Specific safety instruction
3.1 System safety alarms
Depending on your system configuration one or more of following safety alarm
could be present on your system.
Interface indicators:
Unit interface provide indication, warning and alarm useful for safe utilization of the
unit.
In case of error a Warning symbol will appear on screen.
Clicking on this warning symbol, a log file will be prompted to provide detailed
information about the reason of the alarm.
CAUTION!
Above mentioned interface indicators must be observed before system start up as
well as during all process time.
WARNING!
Available indicators must be known by all personeel operating with the system.
3.2 Safety devices
Depending on your system configuration one or more of following safety device
could be present on your system:
Lid closure sensor
Lid lock sensor
Vacuum pressure sensor
Motor over-temperature sensor
External sensor(s)
Process will be interrupted in case of one or more safety device will trigger to alarm
state.
Description and location of safety devices indicated above are provided in relative
chapter of this manual.
Our products are continuously modified and improved due to innovation, legal
requirements and standards. As a consequence, the information given in this
documentation may not accurately reflect every detail of the system actually
delivered.
Note: please refer to appendixes, drawings and section technical data for
details or contact SPS-Europe B.V. in case of uncertainty.

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3.3 Specific threads to the system
WARNING!
System may never work under condition different to ones indicated in relative
chapter of this manual
WARNING!
System may never be utilized, cleaned or maintained by untrained and
unauthorized personnel.
3.4 System hazards
General hazards:
This system has been designed and manufactured considering all relevant safety
regulations. Improper use or operation by persons not qualified accordingly may
result in danger:
to life and health of the operator
to the system itself
to surroundings of the user
to performance and efficiency of the system.
General hazards of the system, depending on design or type, may arise in the
following ways:
mechanical hazard caused by squeezing, shearing and cutting, catching
and winding, stitching or by freely moving parts
thrust caused by kinetic energy of moving mass
sharp corners and edges
electrical hazard caused by touching live parts (directly or indirectly)
thermal hazard causing burns
chemical hazard causing poisoning, corrosion and explosion
toxic hazard due to inhalation of vapors and gases
gases under pressure
liquids under pressure
combination of hazards caused by
ofaulty installation
oincorrect loading of substrates / wafers
oimproper usage of chuck
obreakdown of power or media supply
obreakdown and/or incorrect arrangement of preventive measures
ocombination of escaping media
hazards caused by
ohuman misconduct
onoise
oallergies, excitations of mucous membrane, unknown effects caused by
media
oejection of parts

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odisturbance / malfunction of control system
oleaking of hoses or pipes
ocombination of atmospheres or vapors
ofire hazard
onatural hazards caused by lightning, environmental catastrophes etc.
Mechanical hazards:
DANGER!
By applying components of other manufacturers additional and unknown hazards
may arise. No liability will be taken in this case.
Use only genuine parts provided by the manufacturer of the system.
Genuine parts are constructed conforming to applicable safety regulations.
DANGER!
Moving parts may cause squeezing or cutting of extremities.
Do not touch any moving parts of the system while in operation.
DANGER!
Spin speed is to be adjusted to substrate size, thickness, shape, weight and chuck
used.
Depending on substrate to be used the maximum spin speed of your system must
be limited. Please consult the system specific datasheet or contact manufacturer for
detailed spin speed recommendation.
DANGER!
Operation of the system by several persons may cause hazards based on
misconduct or missing mutual understanding.
In case that operation of the system by two or more persons would be required, is
recommended to keep a daily logbook containing usage note such as chemical
applied, error encounter, etc.
DANGER!
The system may only be operated while all doors and safety covers are closed and
locked (where applicable) and any protection systems are properly positioned.
Function of safety covers or doors has to be assured at any time.
In case of any safety deficiencies the system has to be switched off and the service
personnel has to be informed accordingly.
DANGER!
Safety covers or doors may not be removed (unless for service purposes).
The system may not be opened during processing or after power failures.

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DANGER!
Contamination of the spin processor.
The spin processor has always to be operated with chuck and wafer/substrate.
In case of use of vacuum chuck (non etching application) always operate the
system with substrate loaded on chuck.
DANGER!
If required by processed chemical(s), the spin processor has always to be operated
with active exhaust system and providing all media required.
Whenever it is likely that the system is no longer mechanically safe, make it
inoperable and secure it against any unauthorized or unintentional operation.
Electrical hazards:
DANGER!
The system needs to be grounded in all cases. Do not remove or cut off any ground
wire of power supply or inside the system. Insufficient grounding can cause
additional electrostatic charging of plastic parts, hoses or pipes, and the system as
a whole.
DANGER!
This system operates under high voltages. Danger of high voltages exists even
when the system is switched off, but still connected to the power supply.
Capacitors within the system may be charged even in case the system is switched
off and disconnected from mains supply line.
DANGER!
While switched on, electrical connectors will be live. Opening of covers or removing
of parts may result in exposure to live parts.
DANGER!
Interchange of current-bearing wires may result in danger for health and life of
operator. Connection to the mains supply has to be effected by a qualified
electrician according to prevailing regulations. Neutral wire (blue) and ground wire
(green/yellow) have to be connected in due form.
DANGER!
Persons bearing a pacemaker may not operate, clean or service the unit.

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DANGER!
In case of emergency the stop button must be approachable immediately.
Do not position any object between operator and emergency button.
DANGER!
Due to electrical charging plastic components or wiring, solvents and process
chemicals could be ignited. Therefore, the system and its components have to be
grounded.
Note: in case of insufficient grounding or of damaged ground conductor make sure
that the system will be inoperable and secure it against unauthorized or
unintentional operation.
DANGER!
In case fuses have to be replaced make sure that only fuses of same type and
current rating will be used.
Under no circumstances use makeshift fuses or short-circuit any fuse holders.
CAUTION!
Electrostatic discharges can cause damage to parts. When handling electronic
components several precautions are essential:
Wear a grounded wrist strap or work on a grounded static-dissipating work surface.
Leave electronic components and printed circuit boards in their original packaging
until final installation.
Handle electronic components by their body or case, avoid touching of leads.
Keep electronic components and printed circuit boards away from such static
generating materials as vinyl, plastic bags, etc.
Whenever it is likely that the system is no longer electrically safe, make it
inoperable and secure it against any unauthorized or unintentional operation.
Chemicals hazards:
Chemicals are provided and applied by the user. Proper handling of chemicals is
the user’s responsibility.
Advice contained in this section is intended to supplement, not to supersede, the
safety instructions provided by chemicals suppliers nor the general safety code of
behavior prevailing in the user’s country.
DANGER!
Chemicals
Customer has full responsibility and liability to assure that all wetted materials of the
system are resistant to the chemical(s) applied.

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DANGER!
It is the user’s responsibility to mark all containers and supply lines of chemicals
(i.e. containers of media and waste) with appropriate labels and warning signs.
DANGER!
Chemicals may only be handled by personnel having the relevant knowledge and
skill.
DANGER!
When handling chemicals, please observe relevant safety regulations as well as
chemical supplier’s information (chemical safety data sheet and additional advice).
WARNING!
All operators involved in system must wear protective clothes adequate to
chemicals used including but not limited to:
Safety glasses/goggles and/or face shields
Chemical gloves
Protective suit with long sleeves
Chemical aprons
Closed-toe shoes
Long pants
DANGER!
When handling aggressive chemicals, insure proper ventilation and exhaustion of
vapors.
The Polos spin processor is designed to cooperate with facilities supplied house
exhaust which needs to be always present
Always ensure that exhaust is present working correctly before opening the system.
WARNING!
As to the outgoing air the local emission acts have to be taken into consideration
DANGER!
When handling chemicals, please observe that released chemicals may react with
each another, leading to unwanted and unknown substances. These substances
may bear major additional risks.
DANGER!
Solvents!
Inflammable, explosive, toxic

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Do not inhale its vapors (danger of suffocation and/or poisoning).
Prevent electrostatic loading.
Keep away from ignition sources.
Do not smoke.
Do not eat (danger of poisoning).
Do not touch.
DANGER!
Process chemicals !
Inflammable, explosive, toxic
Do not inhale its vapors (danger of suffocation and/or poisoning).
Prevent electrostatic loading.
Beware of ignition sources.
Do not smoke.
Do not eat (danger of poisoning).
Do not touch.
DANGER!
Corrosives
Inflammable, explosive, toxic
Do not inhale its vapors (danger of suffocation and/or poisoning).
Prevent electrostatic charging.
Beware of ignition sources.
Do not smoke.
Do not eat (danger of poisoning).
Avoid contact to eyes.
Do not touch.
DANGER!
Gases
Inflammable, explosive, toxic
Do not inhale (danger of suffocation and/or poisoning).
Prevent electrostatic charging.
Beware of ignition sources.
Do not smoke.
DANGER!
In case corrosive, gassing or noxious wet media are applied it’s at the user’s
responsibility to prevent any peril to close by staff by all means.
Whenever it is likely that the system is no longer chemically safe, make it
inoperable and secure it against any unauthorized or unintentional operation.

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3.5 System restore after emergencies
DANGER!
Reactivating of the system after an emergency stop may only be done by qualified
persons. Prior to restarting, the system has to be checked for eventual hazards.
Prior to checking of risk area operate the main switch and disconnect the system
from mains power line and media supply except exhaust.
Wait until all hot parts have reached ambient temperature.
DANGER!
In case of emergency while handling chemicals, please call immediately for a safety
expert or for a physician and act according to instructions of the data sheet of the
applied process chemical.
DANGER!
Disconnect all wires of power supply prior to opening of the system. In case work
has to be done while the system remains open (for adjustments, maintenance etc.)
it should only be done by qualified personnel, knowing all potentially dangerous
points and being able to prevent hazards by taking appropriate precautions.
Whenever it is likely that the system is no longer safe, make it inoperable and
secure it against any unauthorized or unintentional operation.
The system is likely to be unsafe if:
any damage is visible
it fails to perform according to specification
it has been subject to prolonged storage under unfavorable conditions
it has been subject to severe transport stress.
In these cases the safety state of the machine has to be checked by SPS-
Europe B.V. service personnel.
Maintenance and repair work required, but not listed in this manual, should only be
done by SPS-Europe B.V. service or by persons of equivalent qualification.

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3.6 First aid in emergency
In case of an emergency (accident with material or personal damage), please
observe the following instructions:
DANGER!
In case of emergency immediately stop the actual process and await complete
stand-still of the system within a safe distance.
DANGER!
Close all supply line (VAC, CDA, N2, DI Water, etc…) except exhaust system if
available.
DANGER!
In case of emergency while handling chemicals, please call immediately for a safety
expert or for a physician and act according to instructions of the data sheet of the
applied process chemical provided by chemical producer.

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4 Transportation and storage
4.1 Safety indication
DANGER!
Prior to operate with the unit, the installation and operating instructions have to be
thoroughly read and observed.
CAUTION!
Heavy weights
Parts included could be heavy and have to be handled properly.
4.2 Transportation
DANGER!
An overturning unit may cause serious injuries.
During transport tipping forces of the unit including its packaging have to be
considered.
CAUTION!
Before moving the Polos attention has to be paid that the unit is adapted to ambient
temperature. Due to alteration to temperature during transport unwanted length
modification may occur.
Keep the system for at least 24 hours under approved operating condition to make
the unit adapting to ambient temperature.
4.3 Storage
The system can be stored safely under following conditions:
without any liquids (process chemicals etc.)
ambient temperature - 10°C to + 60°C
ambient relative humidity max. 80%, no condensation
dust-free and protected (eventually packed up)
When removing from storage, prior to installation, keep the system for at least 24
hours under approved operating conditions.
System start up have to be performed by SPS-Europe B.V. service personnel or
persons qualified accordingly.