Trumpf TruPlasma RF 1001 User manual

Operator's manual
TruPlasma RF 1001 to 1003
(G2/13)
Technical specifications and operator's manual

Operator's manual
TruPlasma RF 1001 to 1003
(G2/13)
Technical specifications and operator's
manual
Original operator's manual
Edition 2017-06-26

Order Information Please specify when ordering this document:
Operator's manual
TruPlasma RF 1001 to 1003 (G2/13)
Edition 2017-06-26
Document number A04-0115-00.BKEN-001-07
Address for orders TRUMPF Hüttinger GmbH + Co. KG
Technische Redaktion
Bötzinger Straße 80
D-79111 Freiburg
Fon: [phone] - 0
Fax: [phone] - 1299
Internet: http://www.trumpf-huettinger.com
E-Mail: [email protected]
For "partly completed machinery" in accordance with the EC
Machinery Directive, this document corresponds to the
assembly instructions.
© TRUMPF Hüttinger GmbH + Co. KG

Before you proceed ...
Provide the serial number when you contact the Service depart-
ment. The serial number can be found on the name plate of the
device.
How to reach our Service department:
[phone]
[phone]
[email protected]
1 Serial number
Name plate of the generator Fig. 10520
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2017-06-26 Before you proceed ... I
Need help?
Telephone
Fax
E-mail
Position of the serial
number

II Before you proceed ... 2017-06-26 A04-0115-00.BKEN-
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Table of contents
Safety
1 Safety 1‐3
1.1 For your own safety 1‐3
1.2 Warning signs and danger signs 1‐3
2 Using the generator 1‐5
3 Authorized personnel 1‐6
4 Warning signs on the generator 1‐7
5 What you must know as an operator 1‐8
6 Dangers from high voltages 1‐9
6.1 Protective measures taken by the manufacturer 1‐9
7 Dangers from electromagnetic fields 1‐10
7.1 Protective measures taken by the manufacturer 1‐10
8 Hazard from weight 1‐12
9 Hazard from aggressive cooling water 1‐13
10 What you must note as an operator: 1‐14
10.1 Ensuring safe operation of the generator 1‐14
10.2 Safety inspection in accordance with
IEC 61010-1
1‐14
Performing a high-voltage test of the cus-
tomer system
1‐14
11 Emergency measures 1‐15
11.1 In the event of an emergency, immediately
take the following measures
1‐15
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Chapter 1

Description
1 Fields of application 2‐3
1.1 Typical fields of application 2‐3
2 Property rights 2‐4
3 Function description 2‐5
3.1 Operation options 2‐6
3.2 Interlock 2‐6
4 Construction of the generator 2‐7
4.1 Front 2‐7
4.2 Rear side 2‐7
5 Device variants, options, accessories 2‐9
5.1 Device variants 2‐9
5.2 Options 2‐9
5.3 Accessories 2‐9
6 Identifying the generator features 2‐11
Technical specifications
1 RF output 3‐3
2 Accuracy of the output power 3‐4
2.1 Accuracy of the output power for digital control 3‐4
2.2 Accuracy of the output power for analog con-
trol
3‐4
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Chapter 2
Chapter 3

3 Dynamic behavior of the power signal at
50 Ω load
3‐5
4 Mains connection data 3‐6
5 Clock 3‐7
5.1 Clock mode 3‐7
5.2 Clock input 3‐7
5.3 Clock output 3‐7
6 Clock offset mode 3‐8
6.1 Phase coupling of the output power at the
internal or external clock signal (CEX)
3‐8
6.2 Frequency offset 3‐8
7 Frequency agility (optional) 3‐9
8 Pulse 3‐10
8.1 Pulse mode 3‐10
8.2 Pulse input 3‐10
8.3 Pulse output 3‐10
9 Arc synchronization 3‐11
9.1 Arc synchronization input 3‐11
9.2 Arc synchronization output 3‐11
10 Communication interfaces 3‐12
11 Housing 3‐13
12 Dimensional drawing 3‐14
13 Environmental conditions 3‐15
14 Cooling requirements 3‐16
14.1 Cooling water specification 3‐16
Requirements for a functioning cooling cir-
cuit
3‐16
Preparing cooling water 3‐16
Cooling water parameter 3‐17
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Air pressure value, dew point diagram 3‐17
Interfaces
1 RS-232/RS-485 interface 4‐6
1.1 RS-232/RS-485 standard interface 4‐6
View standard interface 4‐6
Standard connection 4‐6
Standard pin assignment 4‐6
Cable requirement sub-D RS-232/RS-485
connection cable
4‐7
1.2 RS-232 interface customer variant 4‐8
View customer variant 4‐8
Connection customer variant 4‐8
Customer variant pin assignment 4‐8
Cable requirement Sub-D RS-232 connec-
tion cable
4‐8
1.3 Description of the communication 4‐9
1.4 Parameters of the RS-232/RS-485 interface 4‐9
1.5 Telegram examples 4‐25
Telegram: Get control 4‐26
Telegram: Preset Pi value (600 W) 4‐27
Telegram: Read Pi value 4‐29
Telegram: Release control 4‐30
2 AD interface 4‐32
2.1 View 4‐32
2.2 Cable requirement 4‐32
2.3 Connection 4‐32
2.4 Meaning of the signals 4‐32
2.5 AD interface – standard version 4‐33
Pin assignment 4‐33
Signal description of the AD interface 4‐33
Specification of inputs and outputs 4‐36
2.6 AD interface – variant 1 4‐37
Pin assignment 4‐37
Signal description of the AD interface 4‐37
Specification of inputs and outputs 4‐40
2.7 AD interface – variant 2 4‐41
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Chapter 4

Pin assignment 4‐41
Signal description of the AD interface 4‐42
Specification of inputs and outputs 4‐44
2.8 AD interface – variant 3 4‐45
Pin assignment 4‐45
Signal description of the AD interface 4‐46
Specification of inputs and outputs 4‐48
3 Profibus (optional) 4‐50
3.1 View 4‐50
3.2 Connection 4‐50
3.3 Pin assignment 4‐50
3.4 Profibus features of the generator 4‐50
3.5 Configuration with the Profibus master 4‐51
3.6 Module overview 4‐51
Take control of generator 4‐51
Module 1 4‐52
Module 2 4‐52
Module 3 4‐53
Module 4 4‐53
Communication for module 2 and module 3 4‐53
Communication for module 4 4‐53
3.7 Structure of the modules 4‐54
Module 1 4‐54
Module 2 4‐55
Module 3 4‐56
Module 4 4‐57
Bit-coded commands 4‐58
3.8 Status bytes 4‐58
3.9 Return code 4‐59
3.10 Profibus commands 4‐59
4 DeviceNet (optional) 4‐66
4.1 Position 4‐66
4.2 Connection 4‐66
4.3 Pin assignment 4‐66
4.4 Status LEDs 4‐66
LED Net DeviceNet: network status 4‐67
DeviceNet LED Mod: module status 4‐67
4.5 ODVA DeviceNet 4‐67
4.6 Protocol 4‐68
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4.7 Explicit messages 4‐68
Device supervisor / Class 0x30 4‐68
Analog sensor / Class 0x31 4‐69
Single stage controller / Class 0x33 4‐70
Analog actuator / Class 0x32 4‐71
Selection / Class 0x2E 4‐72
Register / Class 0x07 4‐72
Bit coded values / Class 0x65 4‐73
4.8 Poll messages 4‐74
Instance overview 4‐74
Assembly instance 1 (default output) 4‐74
Assembly instance 2 (default input) 4‐74
Assembly instance 3 (output) 4‐75
Assembly instance 17 (input) 4‐75
Assembly instance 18 (input) 4‐75
Assembly instance 19 (input) 4‐76
Assembly instance 117 (output) 4‐76
Assembly instance 118 (input) 4‐79
Assembly instance 121 (output) 4‐80
Assembly instance 122 (input) 4‐81
Assembly instance 123 (output) 4‐82
Assembly instance 124 (input) 4‐83
Assembly instance 125 (output) 4‐84
Assembly instance 126 (input) 4‐86
5 EtherCAT (optional) 4‐89
5.1 View 4‐89
5.2 Connection 4‐89
5.3 Cable requirement 4‐89
5.4 EtherCAT objects 4‐90
5.5 Vendor ID and ESI file 4‐90
5.6 Data communication 4‐90
5.7 Meaning of EtherCAT indicator elements
(LEDs)
4‐91
5.8 Objects 4‐92
Identification area 4‐92
PDO mapping 4‐92
Input area (generator → master control) 4‐94
Output area (master control → generator) 4‐96
Configuration area 4‐97
Exception handling 4‐102
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Manufacturer-specific objects 4‐103
6 Service interface 4‐108
6.1 View 4‐108
6.2 Connection 4‐108
6.3 Description 4‐108
7 Clock input/clock output (phase synchroni-
zation)
4‐109
7.1 View 4‐109
7.2 Connection 4‐109
7.3 Cable requirement 4‐109
8 Sync input/sync output (arc synchronization
or pulse mode)
4‐110
8.1 View 4‐110
8.2 Connection 4‐110
8.3 Cable requirement 4‐110
9 Matchbox connection (optional) 4‐111
9.1 View 4‐111
9.2 Connection 4‐111
9.3 Description 4‐111
9.4 Cable requirement 4‐111
10 LEDs Device status 4‐112
10.1 View 4‐112
10.2 Description of LEDs Device status 4‐112
11 Mains input 4‐113
11.1 View 4‐113
11.2 Connection 4‐113
11.3 Pin assignment 4‐113
12 RF output 4‐114
12.1 View 4‐114
12.2 Connection 4‐114
12.3 Cable requirement 4‐114
13 Cooling water 4‐115
13.1 View 4‐115
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13.2 Connection 4‐115
14 ASIP (Advanced Serial Interface Protocol) 4‐116
14.1 Introduction 4‐116
14.2 RS-232/RS-485 interfaces 4‐116
Bit transmission (physical layer) 4‐116
Settings/standards 4‐117
Framing (data link layer) 4‐118
Addressing for RS-232 and RS-485 opera-
tion:
4‐118
14.3 Data transmission (application layer) 4‐120
Timeout behavior 4‐121
Structure of the data unit 4‐121
Specific commands of the application 4‐126
Appendix 4‐149
Standards and directives
1 CE certification 5‐3
1.1 EU declaration of conformity 5‐4
TruPlasma RF 1001 to 1003 5‐4
2 Classification according to EN 55011 5‐5
3 SEMI standards 5‐6
3.1 SEMI S2 5‐6
3.2 SEMI S8 5‐6
3.3 SEMI S9 5‐6
3.4 SEMI S10 5‐6
3.5 SEMI F47 5‐6
4 NRTL safety certification 5‐7
5 FCC 47 CFR Part 18 5‐8
6 Radio Wave Act (South Korea) 5‐9
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Chapter 5

Installation
1 After receiving the generator 6‐4
1.1 Inspecting the delivery 6‐4
2 Unpacking 6‐5
2.1 Disposing of packaging material 6‐5
3 Transport, storage 6‐6
3.1 Transport 6‐6
3.2 Storage conditions 6‐6
4 Requirements for the site 6‐7
4.1 Installing external mains separation device 6‐7
4.2 Selecting a suitable location 6‐7
4.3 Position during operation 6‐7
5 Installation 6‐8
5.1 Module fastening 6‐8
6 Connection order 6‐9
6.1 Connecting the generator 6‐9
7 Cooling water 6‐10
7.1 Connecting the cooling water 6‐10
7.2 Connecting cooling water pipes 6‐10
7.3 Connecting an adapter 6‐12
7.4 Checking for leaks 6‐13
7.5 Definition of open/closed system 6‐14
7.6 Requirements for a functioning cooling water
circuit
6‐14
7.7 Preparing cooling water 6‐14
7.8 Cooling water parameter 6‐15
7.9 Cooling water additives 6‐16
7.10 Easy-Kits 6‐17
7.11 Utilization and apportionment 6‐18
7.12 Cleaning and care 6‐19
7.13 Overview of cooling water additives 6‐19
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Chapter 6

8 Control lines 6‐20
8.1 Connecting the control lines 6‐20
9 RF output 6‐21
9.1 Connecting RF output 6‐21
10 Supply voltage 6‐22
10.1 Connecting the mains cable 6‐22
10.2 Mains connection for TruPlasma RF 1001 to
1003
6‐23
11 Matchbox (optional) 6‐24
11.1 Connection principle of a matchbox 6‐24
12 Dismantling 6‐25
12.1 Dismantling the generator 6‐25
13 Shipping 6‐26
13.1 Packing the generator 6‐26
14 Disposal 6‐27
14.1 Disposal of generator 6‐27
Operation
1 Activating interface and changing active
interface
7‐5
1.1 Activating interface 7‐5
1.2 Changing active interface 7‐5
1.3 Displaying the active interface 7‐5
2 Operation with TruControl Power 7‐7
2.1 Installing TruControl Power 7‐7
2.2 Setting up connection via RS-232 interface 7‐7
2.3 Disconnecting 7‐8
2.4 Taking and releasing control 7‐8
2.5 Connection status 7‐8
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Chapter 7

2.6 Status display 7‐9
2.7 Messages 7‐10
2.8 Switching power on and off 7‐10
2.9 Main menu and submenu 7‐11
Selecting submenu items 7‐12
2.10 TruControl Power menu structure 7‐12
3 Operating via RS-232/RS-485 interface 7‐14
3.1 Switching between RS-232 and RS-485 7‐14
3.2 Setting slave address for RS-485 7‐14
3.3 Setting the watchdog 7‐15
4 Operation via AD interface 7‐16
4.1 Scaling analog inputs and outputs 7‐16
5 Operation via Profibus interface (optional) 7‐17
5.1 Setting Profibus address 7‐17
6 Operation via DeviceNet interface (optional) 7‐18
6.1 Setting the baud rate and node address 7‐18
7 Operation via EtherCAT interface (optional) 7‐19
7.1 Setting node address 7‐19
7.2 Displaying EtherCAT states 7‐19
8 Power regulation 7‐21
8.1 Switching power on 7‐21
8.2 Regulating power 7‐21
8.3 Generic regulation channel (GRC) 7‐23
Use generic regulation channel 7‐23
8.4 External current / voltage regulation 7‐24
Use external current / voltage regulation 7‐24
9 Clock modes 7‐25
9.1 Phase offset (CEX mode) 7‐25
9.2 Clock signal from an external source 7‐26
Making settings for clock signal from exter-
nal source
7‐26
9.3 Clock signal generated internally in the genera-
tor
7‐27
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Making settings for generator-internal clock
signal
7‐27
9.4 Frequency offset 7‐28
Select frequency deviation 7‐28
9.5 Choosing between frequency offset and phase
shift without the "Clock offset mode" selection
field
7‐28
10 Frequency agility (optional) 7‐30
10.1 Activate frequency agility 7‐30
10.2 Description of the frequency agility function 7‐30
11 Pulse mode 7‐35
11.1 Setting pulse mode 7‐35
11.2 Pulse increase 7‐35
11.3 External pulse source 7‐36
11.4 Pulse output 7‐36
11.5 Triggered pulse mode 7‐36
11.6 Simmer operation 7‐37
12 Regulation characteristic 7‐38
12.1 Setting the regulation characteristic 7‐39
13 Timer 7‐40
13.1 Setting timer 7‐40
14 Joule mode 7‐41
15 Ramp function 7‐42
15.1 Setting the ramp function 7‐42
15.2 Regulate power to 0 W with downward ramp 7‐43
16 Arc management (optional) 7‐44
16.1 Condition for arc detection 7‐44
16.2 Arc detection modes 7‐45
16.3 Arc handling 7‐51
16.4 Arc handling settings 7‐51
16.5 Single pulse 7‐52
16.6 Pulse packet 7‐53
16.7 Limiting repetition of the pulse packet 7‐54
16.8 Behavior after an arc 7‐55
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17 Run-time monitoring (watchdog) 7‐57
18 Matchbox operation 7‐58
19 User limit configuration 7‐60
20 Mixed Mode 7‐61
20.1 Activate mixed mode 7‐61
21 Factory setting 7‐63
21.1 Resetting to factory settings 7‐63
21.2 Default values 7‐63
22 Time synchronization 7‐67
22.1 Synchronizing time 7‐67
23 Diagnostics 7‐68
23.1 Displaying messages in TruControl Power 7‐68
23.2 Monitoring 7‐69
Displaying the temperature 7‐69
Displaying the operating time 7‐69
23.3 Identification 7‐69
Displaying identification 7‐69
24 Data logging 7‐70
24.1 Performing trending 7‐70
24.2 Setting trigger conditions for oscilloscope 7‐70
24.3 Operating the oscilloscope 7‐71
Maintenance
1 Maintenance work 8‐2
1.1 Performing software updates 8‐2
1.2 Checking cooling water circuit 8‐2
1.3 Cooling water parameter 8‐2
1.4 Utilization and apportionment 8‐3
1.5 Cleaning and care 8‐4
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Chapter 8

1.6 Overview of cooling water additives 8‐4
Troubleshooting
1 Warning and alarm messages 9‐2
2 Messages 9‐3
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Chapter 9