Ulvac G-Tran Series User manual

No.SK00-9664-EI-013-00
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Vacuum Gauge
Instruction Manual
G-TRAN series
Multi Ionization Gauge Sensor unit
Analog Output Type Model ST200-A
Serial Communication Type Model ST200-R
(Option)
(Option)
This manual is intended for products with serial numbers below or later.
ST200-A: S/N 00001～
ST200-R: S/N 00001～
Please read this manual before using this product and keep it in a
safe place so that you can use it at any time.
ULVAC,Inc. Components Division
https://www.ulvac.co.jp/en/

II
Before using this product
Thank you very much for purchasing our product.
When you receive the product, please check that the product you received is the
correct one, and check for any damages caused by transportation.
To ensure many years of use from the product, please read the instruction manual
and fully understand the safety precautions, specifications, and operating
instructions before installing, operating, inspecting, or servicing the product.
The copyright of the instruction manual belongs to ULVAC, Inc.
No part of the instruction manual may be copied without our permission.
Also, the instruction manual may not be disclosed or transferred to any third
party without our written consent.
Please note that the instruction manual contents are subject to change or
revision without any notice due to changes in specifications and improvement of
the product.
Safety symbol marks
This
instruction manual uses the safety symbol marks as the warning indications for
the operator to understand the matters that must be observed. The terms of the
safety symbol marks are as follows:
*WARNING*
It indicates a hazardous situation that could cause death or serious
injury if the warning is ignored.
Ignoring this warning may cause serious damage to the operator's
life or the plant facilities (Also include this product).
*CAUTION*
It indicates a dangerous situation that could cause minor or
moderate injury when the caution is ignored.
Ignoring this caution may cause minor injury to the operator,
product damage, or situations that require product adjustment.

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Safety precautions
To use the G-TRAN series sensor unit (hereinafter referred to as this unit) safely,
please be sure to read the instruction manual and the following safety precautions:
*WARNING*
Power shutoff
If this unit is damaged, shut off the power immediately. Failure to do so may
cause fire or electric shock.
*WARNING*
Power shutoff
If this unit generates abnormal heat, smoke, or unusual smells, shut off the
power immediately. Failure to do so may cause a fire.
*WARNING*
High-temperature warning
Do not touch the sensor unit during and immediately after the operation because
its surface is hot. Touching it may cause burns.
*WARNING*
Power supply voltage
Before turning on the power supply, make sure that this unit's operating voltage
and the power supply are correct. If the wrong power supply is connected, it may
damage this unit and the equipment connected to it or cause a fire. In particular,
do not apply a voltage exceeding DC28V. The overvoltage category is Category I.
*WARNING*
Power supply with lightning surge protection
Use a power supply with lightning surge protection.
If the power supply does not have lightning surge protection, it may damage this
unit and the equipment connected to it or cause a fire.
*WARNING*
Excess pressure in a vacuum chamber
Do not connect the sensor unit to a place where the pressure inside the sensor
unit exceeds the atmospheric pressure. If the pressure inside the sensor unit
exceeds the atmospheric pressure, the sensor unit may be damaged, or the sensor
unit may fly out from the connection, causing harm to the surrounding, including
the human. If the pressure inside the sensor unit exceeds the atmospheric
pressure, install an isolation valve to prevent the pressure inside the sensor
unit from exceeding the atmospheric pressure.
*WARNING*
Protective earth
This unit must be electrically connected to a grounded vacuum chamber. Use a
conductive metal clamp
for the NW flange. If failing to ground properly, it cannot
indicate the correct pressure. It may also damage this unit and the equipment
connected to it or cause a fire.
If insulation from the vacuum chamber is required, the case part (the shell part
of the D-sub connector) needs to be D-type-grounded (class 3).
*WARNING*
Operating environment (Condensation, Humidity)
Do not use this unit in a place where humidity is high, and condensation occurs
or where this unit is exposed to water. If water enters inside this unit, it may
cause a failure, electrical leakage, or fire.
Also, operating this unit outside the temperature range of the specification may
cause failure and fire.
*WARNING*
Turn off the power supply when replacing the sensor
Be sure to turn off the power supply when replacing the sensor unit. DC330V may
be applied to the grid, which may cause fire or electric shock.
*WARNING*
Disassembly is prohibited
Do not disassemble this unit. Disassembling this unite may cause fire or electric
shock. The operation is not guaranteed if the unit is disassembled.
*WARNING*
Modification is prohibited
Do not modify this unit. Modifying this unite may cause fire or electric shock.
The operation is not guaranteed if the unit is modified.

IV
*WARNING*
Check power supply polarity
Before turning on the power supply, ensure that the polarities of this unit's
operating voltage and the supply voltage are correct. If the wrong polarities are
connected, it may damage this unit and the equipment connected to it or cause a
fire.
*WARNING*
Turn on the power supply
Turn on the power supply after connecting all components, including the sensor
unit, displays, PLC(Programmable Logic Controller), cables. Failure to do so may
damage this unit and the equipment connected to it or cause a fire. Also, the
filament of the sensor unit may break.
*WARNING*
Condensation
Do not use this unit in a place where humidity is high, and condensation occurs
or where this unit is exposed to water. If water enters inside this unit, it may
cause a failure, electrical leakage, or fire.
*WARNING*
Foreign matters entering the sensor
Protect this unit from foreign matters such as metals and flammable materials
from entering through its opening. Foreign matters may damage this unit or cause a
fire.
*WARNING*
Check wiring
Make sure that the connection cable to each pin does not touch other pins or the
case. Also, be careful with the ping assignments. Incorrect wiring may damage this
unit and the equipment connected to it or may cause a fire.
*CAUTION*
Cable installation
Avoid installing cables close to or parallel to electric power lines, power
lines, high voltage lines, high-frequency lines. Doing so may cause malfunction.
*CAUTION*
Remote host with noise resistance
Use an isolation type with high noise resistance for remote hosts such as PCs
and PLCs. Otherwise, it may cause malfunction or failure.
*CAUTION*
Parts with life span
The electric circuit in this unit uses an aluminum electrolytic capacitor.
Generally, an aluminum electrolytic capacitor has a life span, and the higher the
ambient temperature, the shorter the life. To prevent damage to this unit, we
recommend that you have this unit serviced at our service site about once every
three years.

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Revision history
Date
Number
Reason
2021/03/03 00 First edition