Ulvac GP-1GRY User manual

No. SK00-7401-EI-004-06
MODEL GP-1GRY
( Pa/Torr )
PIRANI VACUUM GAUGE
INSTRUCTION MANUAL
This manual is for the following gauges.
Serial Nos. T0001G and higher
Read this manual before operation and keep it at your
hand for immediate reference.
ULVAC , Inc.

PRIOR TO USE
i
Prior to Use
Upon receipt of this detector, make sure that it is the correct model you ordered and that it is not damaged in
transit.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions, specifications
and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without the
consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Denotations
Safety symbols are used throughout this instruction manual to call the operator's
attention to safety. The terminology used in safety symbols is classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious damage
to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage to
worker or breakage to equipment or necessary to adjust.
✔Note
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of equipment

SAFETY CAUTIONS
ii
Safety Cautions
For safe use of this vacuum gauge, carefully read this manual and comply with the warnings and cautions
given in the manual.
Turn OFF power.
Before touching any terminal on the rear of the meter or if there is a possibility of
touching i
t, turn OFF the vacuum gauge power and the power applied to the
setpoint output terminal. Contact with the terminal, to which the voltage (
24
VDC) is applied, will cause electric shock if power is turned ON.
Turn OFF power.
If the vacuum gauge fails, immediately turn OFF the power.
Use of a failed gauge may cause fire or electric shock. For repair, contact your
local ULVAC representative or ULVAC JAPAN.
Turn OFF power.
Before touching the power terminal on the rear of the controller or if there is a
possibility of touching it, turn OFF the power to the vacuum gauge. Contact
with the terminal, to which the voltage (24 VDC
) is applied, will cause electric
shock if power is turned ON.
Turn OFF power.
If the vacuum gauge gets unusually hot or gives o
ff smoke or unusual smell,
immediately turn OFF the power. Otherwise, fire can result. For safety,
contact your local ULVAC representative or ULVAC JAPAN.
Turn OFF power.
Turn OFF the power before replacing a fuse. Replacing a fuse with the power
turned ON can cause electric shock.
Turn OFF power.
Whenever mounting the gauge, unplug the power cable.
Before operating the gauge, make sure that components are securely connected.
Use rated fuse.
Use a fuse of the prescribed rating. Do not use a
fuse other than the prescribed
one or do not short the fuse holder. Damage or fire may result.
Check line voltage.
Prior to turning ON the power, make sure that the vacuum gauge operating
voltage and the supply voltage are in agreement. Connection of
incorrect power
can cause damage to the vacuum gauge and fire.
Check connection.
The contact output capacity is 125 VAC 1
A (resistance load). If power higher
than this is opened/closed, do not use the contact of the vacuum gauge, but use a
large capacity switch in conjunction.
Check connection.
The recorder output is outputted afloat from ground potential. Always connect
the recorder input to the recorder terminal insulated from ground. If it is
connected to ground erroneously, the meter will not
indicate correct values and the
vacuum gauge may fail.
Don't disassemble.
Do not try to disassemble the vacuum gauge (meter, controller, cable and sensor
head).
Don't modify.
Do not modify the vacuum gauge (meter, controller, cable and sensor head).
If it
is modified, its functions are not warranted. Also fire or electric shock may
result.

SAFETY CAUTIONS
iii
Operating environment
Do not connect the sensor head to a test object of which pressure is in excess of
atmospheric pressure. If the pressure in the sensor he
ad exceeds atmospheric
pressure, the sensor head will be damaged or it will pop out from the connector,
causing injury to the surrounding, including human body. If the pressure exceeds
atmospheric pressure, provide an isolation valve so that the pressure
in the sensor
head does not exceed atmospheric pressure.
Operating environment
Do not use the gauge in a place where it may be splashed with water. If it is
splashed with water, failure, earth leakage or fire can result.
Ventilation
Do not plug the
air vents of the vacuum gauge controller. If the air vents are
plugged, heat will be contained inside and the gauge may be damaged.
Keep out foreign matter.
If foreign matter like metal fragments or combustibles are admitted into the
vacuum gauge throu
gh the air vents or other openings, remove them. Otherwise,
the vacuum gauge may be damaged.
Operating conditions
Operate the vacuum gauge under the environment set forth in the specifications.
Repacking for transfer
If the vacuum gauge is to be shi
pped to other site, repack it in the same way as on
delivery. If the gauge is shipped bare, it may be damaged.
Disposal
When discarding the vacuum gauge, comply with your local regulations. If the
gauge was used in an environment that can cause hazards to human body, have
it disposed of by an authorized specialist in disposal.
Customer shall be responsible for the cost relating to disinstallation.
Meter panel
Don’t long contact with chemical cleaning cloth, don’t wipe with benzene or
thinner. The pointer may become unstable due to static electricity. In the case,
apply a commercially available antistatic agent to the cover.
Connection
The contact output capacity is 100VAC/0.5A, 24VDC/1A (resistance load).
If power higher than this is opened/closed, do not use the contact of the vacuum
gauge, but use a large capacity switch in conjunction.
✔Note
Maintenance
Aluminum electrolytic capacitor is used for the electric circuit in the sensor unit.
Generally, the life expectancy of the aluminum electrolytic
capacity is limited
and the higher the surrounding temperature, the shorter the life. It is
recommended to replace the aluminum electrolytic capacitor once every five
years or at the time or repair or overhaul to prevent components from being
damaged.
✔Note
Lifetime of sensor head cable and connector
Female connector is used in the sensor head cable and detection unit. This
female connector has a lifetime. A large current load may cause a fire in the
connector connection area. Avoid the frequent insert/remove
of connector to
prevent a heavy load and loosens of the connector connection.

vi
Location of Cautionary Label
Meter
Meaning of cautionary label
Turn OFF power.
Before touching any terminal on the rear of the meter or if there is a possibility of touching it, turn OFF the
vacuum gauge power and the power applied to the setpoint output terminal. Contact with the terminal, to
which the voltage (24 VDC) is applied, will cause electric shock if power is turned ON.

vii
Revision History
Date
No.
Reason
Jun.26,2007
02
Correction of errors
Mar.3,2008
03
Safety cautions , maintenance added
Relay contact capacity, Operating humidity rang added
2-2-4 Change connection diagram
2-2-5
Change installation method to GP-H
Nov.7,2013
04
・
Change Safety symbol mark
・1-2 Standard Accessories added
・1.3 Add Measuring unit to Option
・6 Change WARRANTY
・
7 Add CERTIFICATE OF DECONTAMINATION
Jul.4,2014
05
3.3 Add about 15mV or more to the recorder output when the filament
broken
Dec.2,2019
06
Safety cautions added
Cable length added
Additional influence on meter due to static electricity

CONTENTS
Contents
Page
Prior to Use ............................................................................................................................i
Safety Denotations..................................................................................................................i
Safety Cautions.................................................................................................................... ii
Location of Cautionary Label ............................................................................................vi
Revision History.................................................................................................................. vii
1. OVERVIEW ....................................................................................................................1
1.1. Specifications ...................................................................................................1
1.2. Standard Accessories.......................................................................................1
1.3. Options..............................................................................................................1
1.3.1. Sensor head...............................................................................................1
1.3.2. Measuring unit .........................................................................................2
1.3.3. Sensor head cable .....................................................................................2
1.3.4. Others........................................................................................................2
1.4. Description of Components .............................................................................3
2. INSTALLING THE PIRANI GAUGE...........................................................................7
2.1. Preliminary Operation ....................................................................................7
2.2. Installation.......................................................................................................7
2.2.1. Installing the controller...........................................................................7
2.2.2. Installing the meter .................................................................................7
2.2.3. Installing the sensor head .......................................................................8
2.2.4. Electrical connection................................................................................8
2.2.5. A sensor head installation method to GP-H.........................................10
3. OPERATING PROCEDURE .......................................................................................11
3.1. Handling.........................................................................................................11
3.2. Meter Relay Action........................................................................................12
3.3. Recorder Output ............................................................................................13
4. TROUBLESHOOTING ................................................................................................15
5. APPENDIX ...................................................................................................................18
5.1. Principles of Operation..................................................................................
18
5.2. Types of Gas Measured and Indication........................................................19
5.3. Accuracy of Pirani Vacuum Gauge ..............................................................21
6. WARRANTY .................................................................................................................24
7. CERTIFICATE OF DECONTAMINATION...............................................................25
8. CHINA ROHS DECLARATION .................................................................................26
9. RELATED DRAWINGS...............................................................................................27

OVERVIEW
- 1 -
1. OVERVIEW
The Model GP-1GRY is a constant temperature type Pirani vacuum gauge utilizing heat conduction of
gas.
If the sensor head burns out, the meter indication will deflect off-scale to the higher pressure side
(atmospheric pressure side).
Pressure can be set at two points by meter relay and the comparator output can be taken out as setpoint
(transfer type).
1.1. Specifications
Name
Pirani vacuum gauge
Model
GP-1GRY
Measurable range
0.4 to 2700 Pa (0.003 to 20 Torr)
Measurement error
Within ± 3% of 100% full scale as converted to linear scale
(Refer to 5.3)
Power requirements
AC100
～
240V,10VA
Power cable
3m
Outlet side
：
PLUG TYPE B
Operating temperature range
10 to 40°C
Operating humidity rang
15 to 80%
（
No condensation
）
Recorder output
0 to 10 mV DC
Fuse rating
250 V, 0.5 A
Relay contact capacity
Max.AC125V/1A
、
AC250V/0.5A
、
DC30V/2A
Min. DC10
ｍ
V/10
μ
A
Outside dimensions (mm)
Controller: 90W ×140D ×100H
A-type meter: 100W ×111D ×100H
Weight
Controller: 1000g
A-type meter: 440g
Measuring unit: 35g(GP-H)
1.2. Standard Accessories
Quick manual
paper
1 pc.
1.3. Options
1.3.1. Sensor head
Sensor head
WP-01, WP-02, WP-03., WP-16
WPB-10, WPB-10-034
Connecting flange
WP-01:
φ
18 port, WP-02:
φ
15 port
WP-03:R3/8, WP-16(NW16)
WPB-10:UFC034
WPB-10-034:UFC034
Filament material
Pt
Pt
Other materials
BS/Ni-plating
Ni、Kovar、Glass、SnSbCu
SUS304
、
Cu(Gasket)
FeNiCo(Ni-plating)
、
Al2O3
Weight(g)
WP-01
：
about 26
、
WP-02
：
about 45
WP-03
：
about 63
、
WP-16
：
about 77
about 173
Internal volume(cm3)
WP-01
：
about 19
、
WP-02
：
about 17
WP-03
：
about 17
、
WP-16
：
about 22
about 18
Pressure max
※
1
< 2
×
10+5Pa(abs)
< 2
×
10+5Pa(abs)
Bakeout
※
2
80
℃
max
250
℃
max
*1:The breakdown pressure of the flange and clamp are to be considered otherwise.
*2:Bakeout temperature is a temperature of the sensor unit. Please remove the electronics(GP-H) or the
conversion cable(GP-BH).

OVERVIEW
- 2 -
1.3.2. Measuring unit
Measuring unit
GP-H
GP-BH
（
Conversion cable 2m
）
Sensor head
WP-01, WP-02, WP-03, WP-16
WPB-10, WPB-10-034
Weight 35g
GP-BH: 0.13kg
Conversion calbe: 0.2kg
*Because of its circuitry, the indication of this vacuum gauge varies with the type of sensor head.
Therefore, if the type of sensor head is changed after delivery, re-adjustment will be required. Before
operation, check the conditions at the time of shipment from the factory (type of sensor head) that are
indicated on the measuring unit.
1.3.3. Sensor head cable
Sensor head cable
2, 5, 10, 15, 20, 30, 50, 100m
Weight(kg)
0.2, 0.4, 0.7, 1.0, 1.3, 1.9, 3.9, 7.7
1.3.4. Others
Test results certificate
Calibration certificate
Calibration certificate, JCSS Calibration certificate
Because of its circuitry, the indication of this gauge varies with the type of
sensor head and sensor head cable length. Therefore, if the type of sensor
head or sensor head cable length is changed after delivery, re-adjustment will
be required.
Before operation, check the conditions at the time of shipment from the factory
(type of sensor head) that are indicated on the rear panel.

OVERVIEW
- 3 -
1.4. Description of Components
１
Fig. 1Front panel of controller
①Meter connector
Connect this connector to the meter incorporated in the controller.

OVERVIEW
- 4 -
Fig. 2Rear panel of controller
②Fuse holder
The fuse ampacity is 0.5A.
③Sensor head connector
Connect to the sensor head cable.
④Recorder output adjustment ADJ.
The recorder has been factory adjusted to an output voltage of 10 mV with the full scale. If this
value is deviated or if you want to change it, use this ADJ. potentiometer.
[Adjustable range: 0 to 20 mV (with meter full scale)]
⑤Recorder output terminal: Red terminal (+)
Black terminal (–)
Analog signal is outputted between two terminals.
The recorder output is afloat from ground potential. Always connect the
recorder input to the recorder terminal by insulating it from ground. If it
is connected to GND potential by mistake, the meter will not indicate the correct
value. Also the vacuum gauge may be damaged.

OVERVIEW
- 5 -
１
２３
４
Fig. 3Meter front panel
①Meter
Pressure indicator.
Indicates pressure by needles.
②Relay potentiometer
Sets the meter relay L.
③Relay potentiometer
Sets the meter relay H.
④Zero adjustment
Adjust the meter needle to the zero position (extreme left of scale) when power is OFF.

OVERVIEW
- 6 -
Ｍ ＋
Ｍ － ①
②
POWER
③
④
⑤⑥
⑦
⑧
ＨＬ
６ ５
Fig. 4Rear panel of Meter rear panel
⑤Setpoint output terminal
Outputs setpoint L.
⑥Setpoint output terminal
Outputs setpoint H.
The recorder output is afloat from ground potential. Always connect the
recorder input to the recorder terminal by insulating it from ground. If it
is connected to GND potential by mistake, the meter will not indicate the correct
value. Also the vacuum gauge may be damaged.

INSTALLING THE PIRANI GAUGE
- 7 -
2. INSTALLING THE PIRANI GAUGE
Turn OFF power.
Whenever mounting the gauge, unplug the power cable.
2.1. Preliminary Operation
(1) Unpack the gauge and check quantities.
(2) Check components for possible damage.
2.2. Installation
2.2.1. Installing the controller
Turn OFF power
Before touching any terminal on the rear of the meter or if there is a
possibility of touching it, turn OFF the vacuum gauge power and the power
applied to the setpoint output terminal. Contact with the terminal, to which the
voltage (24 VDC) is applied, will cause electric shock if power is turned ON.
Turn OFF power
Before touching the power terminal on the rear of the controller or if there is a
possibility of touching it, turn OFF the power to the vacuum gauge. Contact
with the terminal, to which the voltage (24 VDC) is applied, will cause electric
shock if power is turned ON.
Ventilation
Do not plug the air vents of the vacuum gauge controller. If the air vents are
plugged, heat will be contained inside and the gauge may be damaged. The
gauge will not indicate normal values either.
Keep out foreign matter
If foreign matter like metal fragments or combustibles are admitted into the
vacuum gauge through the air vents or other openings, remove them.
Otherwise, the vacuum gauge may be damaged.
Install the controller to the panel. Fig. 11 shows the panel cut drawing.
2.2.2. Installing the meter
Fig. 12 shows the panel cut drawing (A-type).
Secure a space for installing the cable on the back of the meter.
Install the meter in a position where the meter terminals do not come into contact with other
components and parts when the gauge is in operation.

INSTALLING THE PIRANI GAUGE
- 8 -
2.2.3. Installing the sensor head
Operating environment
Do not connect the sensor head to a test o
bject of which pressure is in excess of
atmospheric pressure. If the pressure in the sensor head exceeds atmospheric
pressure, the sensor head will be damaged or it will pop out from the connector,
causing injury to the surrounding, including human body.
If the pressure exceeds
atmospheric pressure, provide an isolation valve so that the pressure in the sensor
head does not exceed atmospheric pressure.
Beware of impact
Do not give an impact to the sensor head.
Install the sensor head to the gauge port of a vacuum system.
(1) Measuring position
• This gauge measures the static pressure in the position where the sensor head is connected.
If there is gas flow or an outgas source or an intense electron or ion generating source, the
measurement value will be affected. So select the measuring position carefully.
Note that if the sensor head is subjected to vibration, heat radiation, high intensity magnetic
field or intense radiation, correct pressure measurement may not be made.
• Because of its principles of operation, the Pirani vacuum gauge indication is affected by the
ambient temperature of the sensor head. Be careful that the ambient temperature deviates
considerably from the calibrating temperature (about 25°C).
(2) Installing the sensor head
• Install the gauge in such a manner that the sensor head mounting opening plane is parallel
with gas flow. See to it that gas does not enter the sensor head in the form of beam.
• The vacuum gauge filament is as thin as 25 microns in diameter. Avoid use in a place
where vibration is at a high level, if possible. Be careful in selecting the installation place
and handling the sensor because major cause of filament burnout is mechanical impact.
• To install the sensor head, use an O-ring that releases little outgas.
Use of a materiel that releases much outgas like rubber pipe or grease can be a cause of
error.
2.2.4. Electrical connection
Check connection.
Before turning on power, make sure all cables are connected correctly. If cable
connection is incorrect, damage or fire can result.
Check line voltage.
The operating voltage of this gauge is 100 to 240 VAC. Check the line
voltage before connection. If incorrect power is applied, damage or fire can
result.
• Make electrical connection after installing components.
• Fix the cable by taking care not to exert undue force to the connection between the sensor head and
sensor head cable and the connection between the controller and sensor head cable.
• Lay the sensor head cable away from power lines, if possible. Noise may occur.
• Securely fasten the connector fixing screw.

INSTALLING THE PIRANI GAUGE
- 9 -
Meter:A-Type
Meter:C-Type
Meter:B-Type
Cable length between controller and
meter (1m)
GP-1GRY Controller
Sensor head
cable (2-100m)
*
* The sensor head cable is a connector
same as the control side/measuring unit
side.
Measuring unit:GP-H
(WP-01,02,03,16)
Measuring unit:GP-BH
(WP-04,05,WPB-10)
Conversion cable WP-04,05
(2m)
Conversion cable WPB-10
(2m)
WP-01
WP-04
WPB-10-034
Power supply
cord (3m)
Fig. 5GP-1GRY connection diagram

INSTALLING THE PIRANI GAUGE
- 10 -
2.2.5. A sensor head installation method to GP-H
Caution: The installation methods of a screw for fixation are different by a sensor head.
①Install a screw for fixation
that is attached to GP-H to a
sensor head. By the kind of the
sensor head, installation
methods are different
For sensor head WP-01, 02
For sensor head WP-03, 16
It is inserted a
screw for fixation
by the vent side of
the sensor head.
②
Tighten a screw for
fixation in the main body of
GP-H, and please fix it.
Insert a screw for fixation from the
connector side of the sensor head.
Please insert it diagonally like a
figure.

OPERATING PROCEDURE
- 11 -
3. OPERATING PROCEDURE
3.1. Handling
Before operating the gauge, make sure that components are securely connected.
• Start measurement more than one minute after power is turned ON and the indication is stabilized.
• For precision measurement, wait for at least 10 minutes until temperature equilibrium of the sensor
head is established after power is turned ON. Do not turn OFF the power when a sequence of
measurements is being made.
• If the sensor head is exposed to a chemically active gas or highly adsorptive gas, its characteristics
may change.
In such a case, fill the chamber with nitrogen or inert gas, with the sensor head energized with
power, and then evacuate it. Repeat this purging operation. The sensor head may be restored to
the condition before the characteristics changed.
At this time, do not blow gas toward the opening plane of the sensor head even if the gas is inert or
dry air.
If there is no prospect of the characteristics being restored by purging operation, replace the sensor
head.
• The Pirani vacuum gauge is sensitive to all types of gas, but its sensitivity varies with the type of
gas. This gauge indicates pressure by assuming that the gas is nitrogen (N2).

OPERATING PROCEDURE
- 12 -
3.2. Meter Relay Action
Connection
The contact output capacity is 125 VAC 1
A (resistance load). If power higher
than this is opened/closed, do not use the contact of the vacuum gauge, but use a
large capacity switch in conjunction.
Range in which meter relay setting is effective
• Between 5% and 100% of the full scale with the higher limit setting (H: red needle)
• Between 0% and 95% of the full scale with the lower limit setting (L: green needle)
Meter relay cannot be set out of the measurement range.
The relay contact does not operate for about three seconds after power
is turned ON even when the measured pressure is lower than the set
pressure.
Power
Meter relay
COM-NC
COM-NO
OFF
ＬＨ
Lo
ON OFF
Hi ON OFF
ON
ＬＨ
Lo
OFF ON
Hi OFF ON
ON
ＬＨ
Lo
ON OFF
Hi OFF ON
ON
ＬＨ
Lo
ON OFF
Hi ON OFF