Ulvac G-Tran Series User manual

No. SK00-8431-EI-023-03
G-TRAN SERIES
SENSOR UNIT
MODEL SC1 COLD-CATHODE ION GAUGE
INSTRUCTION MANUAL
This manual is for the SC1 cold-cathode ion gauges
of the following serial numbers.
Serial No. 02300G and higher
Read this manual before operation and keep it at
hand for immediate reference.
Components Division,
ULVAC , Inc.
2500 Hagizono, Chigasaki City, Kanagawa-ken, Japan
http://www.ulvac.co.jp/

I
Prior to Operation
Upon receipt of this gauge, make sure that it is the correct model you ordered and that it is
not damaged in transit.
Read this instruction manual before installing, operating,
inspecting, or maintaining the product and fully understand the safety
precautions, specifications and operating procedures regarding the
product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual
without the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction
manual to third parties without the express written consent of ULVAC
Inc.
The contents described in this instruction manual are subject to
change without prior notice because of changes in specifications or
because of product improvements.
Safety Denotations
Safety symbols are used throughout this instruction manual to call
the operator's attention to safety. The terminology used in safety
symbols is classified below.
Indicate status of urgency of danger when failure to comply with
DANGER results in serious personal injury or death
The work ignoring this warning will lead to serious damage to
human life or factory facility (including this equipment) at a high
probability.
Indicate status of danger when failure to comply with WARNING
results in serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to
serious damage to human life or factory facility (including this
equipment)
Indicate status of danger when failure to comply with WARNING
results in minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor
damage to worker or breakage to equipment or necessary to adjust.
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment
✔Note

II
Safety Precautions
For safe use of this vacuum gauge, carefully read this manual and comply with the safety
precautions given in this manual.
Request repairs for this unit from the dealer where purchased, from
ULVAC Inc., or from the URL listed in this instruction manual.
Repair
If this unit is accidentally damaged, immediately turn off the power
supply. There is a risk of fire and electric shock from use in this state.
Power off
If this unit produces unusual heat, smoke, or a strange smell,
immediately turn off the power supply. There is a risk of fire from use
in this state.
Power off
Turn off the power to the vacuum gauge before conducting
maintenance. The anode of the sensor head is energized with a voltage
of 2.6 kV DC. You may receive electric shock if you touch it.
Turn off power.
Always connect this unit electrically to a grounded vacuum chamber.
Use a conductive metal clamp on the NW flange. If this unit is not
correctly connected, it will not only show the wrong pressure, there is a
risk of damage to this unit and the equipment connected to this unit
and a risk of fire.
Protective grounding
When this unit is insulated from the vacuum chamber, ground the
case section (D-sub connector shell section) with a class
D (class 3)
ground.
Do not disassemble the vacuum gauge.
Don't disassemble.
Do not modify the vacuum gauge. If it is modified, its functions are
not warranted. Also fire or electric shock may result.
Don't modify.
Do not
connect the sensor head to a test object in which pressure is in
excess of atmospheric pressure. If the pres
sure in the sensor head
exceeds atmospheric pressure, the sensor head will be damaged or it
will pop out from the connector, causing injury to the surrounding,
including human body. If the pressure exceeds atmospheric pressure,
provide an isolation valve so that the pressure in the sensor head does
not exceed atmospheric pressure.
Operating environment
If this unit is exposed to
chemically active gases including corrosive
gases and halogen or halogenated gases, problems will occur such as
pressure characteristics changing. When using this unit in these types
of environments, install an isolation valve between this unit and the
vac
uum chamber and protect this unit as much as possible so it is not
exposed to these gases.
Use in a corrosive gas atmosphere

III
If this unit is exposed to gases that deposit materials including CVD
(Chemical Vapor Deposition) material gases and rotary pump oil mist,
problems will occur such as pressure characteristics changing. When
using this unit in these types of environments, install an isolation
valve between this unit and the vacuum chamber and protect this unit
so it is not exposed to these gases.
Use in a CVD gas atmosphere
If there is a large quantity of fouling in the gauge head from the
gradual vaporization of moisture or organic matter, pressure accuracy
and response speed will be affected. Review installation locations and
methods so that fouling does not occur.
Moisture and fouling
The pressure value and accuracy for this unit differ by the type of gas
measured. The accuracy for this unit is based on measuring nitrogen
gas. Be careful when using gases other than nitrogen.
Gas type dependency
Prior to turning ON the power, make sure that the vacuum gauge
operating voltage and the supply voltage are in agreement.
Connection of incorrect power can damage the vacuum gauge and
cause fire.
Check line voltage.
If there is a possibility of the operator touching the anode terminal of
the sensor head during operation, shut off the power. The anode
terminal of the sensor head is energized with a discharge voltage of 2.6
kV DC. If you touch it when this gauge is actuated, you will get electric
shock.
Shut off power
Do not use the gauge in a place where it may be splashed with water.
If wetted, it may fail or electric leak or fire can result.
Operating environment
If foreign matter like metal fragments or combustibles are admitted
into the vacuum gauge through the openings in the gauge, remove
them. Also keep intact the connecting terminals at the top of the
gauge. Otherwise, the vacuum gauge may be damaged.
Keep out foreign matter.
The magnetic flux density at the center of the sensor head is about 0.1
T. It will be attracted by or attract a metal part nearby with high
magnetic force. Be careful in maintenance that a screwdriver or a
metal part will be attracted with high magnetic force.
Beware of magnetic field
See to it that the power cable does not come into contact with other
conducting parts.
Check connection.
When you discard a vacuum gauge, please process according to the
regulations of each local government. Especially the sensor head that
used it in the atmosphere which may exert danger on a human body
needs to process through a special processing contractor.
Discarding
Use this vacuum gauge in the environment set forth by the
specifications.
Operating conditions

IV
If the vacuum gauge is to be shipped to other site, repack it in the
same way as on delivery. If the gauge is shipped bare, it may be
damaged.
Repacking for transfer
The sensor for this product contains strong magnetic material.
Therefore, please seal th
e interior of the packaging material with
metal plate (more than 0.5mm thickness).
Warning for Air transportation Packaging
The magnetic force from the item packaged by above method is less
than .418A/m(0.00525gauss) at 4.6m distance from any given point, or
less than 0.159A/m(0.002gauss) at 2.1m distance from any given point,
qualifying IATA packaging standard 902 or UN-2807.
Handle the internal electrode with clean gloves. If the internal
electrode is stained with oil or contaminant, the pressure indication
may be affected by outgas.
Wear clean gloves.
Such an impact may cause leak. Do not bend the anode pin nor give
an impact to the black glass portion.
Impact to the anode pin and glass part.
Polishing can cause leak. Polish the pin using care not to apply load
on the glass portion.
Do not polish the glass portion of the anode.
The pressure indication may be abnormal (higher than actual or no
change of indication) or components may fail if the insulation
resistance of the anode is not higher than 10,000 M
Ω
.
Insulation resistance of anode
After reassembly, make sure that the anode pin is at the center of the
magnetic pole 2. There is a possibility of contact with the magnetic pole
or low pressure indication.
Check center axis of anode
These can cause leak. Make sure that the O-rings and the O-ring
groove are free of scars and dust.
Scar and dust on O-ring and O-ring groove
After cleaning, dry up electrode parts. If they are not dry, components
may be damaged by poor insulation.
Dry parts
Do not touch the sensor head and anode during insulation resistance
check. If the anode and sensor head body are shorted, a high voltage of
2.6 V DC will be applied to the sensor head.
Do not touch the sensor head
When turning on the high voltage to this gauge under atmospheric
pressure, avoid a combustible gas atmosphere. If a higher voltage of
about 2.6 kV DC
is applied, sparks will be produced and may cause
fire.
Do not conduct inspection in combustible gas atmosphere.
Aluminum electrolytic capacitor is
used in the electric circuit of this
instrument. The life of the aluminum electrolytic capacitor becomes
shorter with increase of the ambient temperature, To prevent devices
from being damaged, it is recommended to conduct maintenance about
once every 3 years.
Maintenance

V
Contents
Page
Prior to Operation I
Safety Denotations I
Safety Precautions II
Contents V
1. INTRODUCTION....................................................................................................1
1.1. Overview of G-TRAN SERIES.................................................................................... 1
1.2. Terminology ................................................................................................................. 1
2. FEATURES OF SC1 Ion Gauge .............................................................................2
3. SPECIFICATIONS AND COMPONENTS............................................................3
3.1. Key Specifications........................................................................................................ 3
3.2. Standard Accessories .................................................................................................. 4
3.3. Options ......................................................................................................................... 4
3.4. Service Parts................................................................................................................ 4
4. NOMENCLATURE AND FUNCTIONS OF COMPONENTS.............................5
4.1. Assembly ...................................................................................................................... 5
4.2. Front Panel .................................................................................................................. 6
4.3. Input/Output Connector.............................................................................................. 7
5. INSTALLATION .....................................................................................................8
5.1. Preparations ................................................................................................................ 8
5.2. Installation................................................................................................................... 8
5.2.1. Installing the sensor head to the sensor unit.................................................. 8
5.2.2. Installing the sensor unit.................................................................................. 8
5.2.3. Electrical connection.......................................................................................... 9
6. CAUTIONS IN HANDLING ................................................................................10
7. OUTPUT SIGNALS ..............................................................................................11
7.1. Control Operation...................................................................................................... 11
7.1.1. High Voltage ON/OFF [HV ON/OFF] ............................................................ 11
7.2. Output Signals........................................................................................................... 11
7.2.1. Setpoint actuating signal [SET-1 ON/OFF][SET-2 ON/OFF] ...................... 11
7.2.2. Discharge valid signal [Discharge OK/NG] ................................................... 11
8. SETTING OF SETPOINT ....................................................................................12
9. FUNCTIONS .........................................................................................................13
9.1. Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF] ........................................................... 13
9.1.1. Setpoint ............................................................................................................ 13
9.1.2. Setting of setpoint............................................................................................ 13
9.1.3. Setpoints of measuring unit and display unit ............................................... 13
9.2. Measurement Value Output..................................................................................... 14
9.2.1. Measurement value voltage output form....................................................... 14
9.2.2. Measurement value outputs in each condition.............................................. 15
10. MAINTENANCE...................................................................................................16
10.1. Preparation of Tools and Others .............................................................................. 16
10.2. Necessary Tools and Others ..................................................................................... 16
10.3. Necessary Equipment ............................................................................................... 16
10.4. Removing the Sensor Unit and Sensor Head.......................................................... 17
10.4.1. Removing Screws............................................................................................. 17
10.4.2. Removing the Sensor Head............................................................................. 17
10.5. Disassembling the Sensor Head............................................................................... 18
10.5.1. Exploded View of Sensor Head ....................................................................... 18
10.5.2. Removing the Internal Electrode ................................................................... 19
10.6. Cleaning the Electrode in the Sensor Head ............................................................ 22
10.6.1. Insulation Check of Anode .............................................................................. 22

VI
10.6.2. Cleaning the Anode ......................................................................................... 22
10.6.3. Cleaning Magnetic Poles 1 and 2 ................................................................... 23
10.6.4. Cleaning the Spacer......................................................................................... 24
10.6.5. Cleaning the main body .................................................................................. 25
10.6.6. Cleaning the O-ring and O-ring Groove......................................................... 25
10.6.7. Cleaning Parts ................................................................................................. 25
10.7. Reassembling the Sensor Head ................................................................................ 26
10.7.1. Reassembly....................................................................................................... 26
10.7.2. Checking the Anode Position .......................................................................... 26
10.8. Insulation Check........................................................................................................ 27
10.8.1. When a insulation resistance tester is available at hand............................. 27
10.8.2. If a insulation resistance tester is not available at Hand ............................ 27
10.9. Leak Test.................................................................................................................... 29
10.10. Installing the Sensor Unit and Sensor Head...................................................... 30
10.11. Maintenance.......................................................................................................... 30
11. TROUBLESHOOTING.........................................................................................31
12. WARRANTY ..........................................................................................................33
13. Certificate of Contamination................................................................................34
14. China RoHS Declaration.......................................................................................35
15. APPENDIX
............................................................................................................36
15.1. Pressure-Measurement Value Voltage Table (Pa).................................................. 36
15.2. Pressure-Measurement Value Voltage Table (Torr)............................................... 39
15.3. Related Drawings ...................................................................................................... 42
15.3.1. Compatible Sensor Heads ............................................................................... 42

VII
Attached Drawings
Page
Fig. 4-1 Assembly ................................................................................................................5
Fig. 4-2 Front panel.............................................................................................................6
Fig. 4-3 Input/output connector pin assignment...............................................................7
Fig. 5-1 Installing SC1........................................................................................................8
Fig. 5-2 Equivalent circuit in the power supply................................................................9
Fig. 7-1 Signal input internal circuit diagram................................................................11
Fig. 7-2 Signal output internal circuit diagram..............................................................11
Fig. 9-1 Pressure-measurement value output graph (Pa)..............................................14
Fig. 9-2 Pressure-measurement value output graph (Torr)...........................................15
Fig. 10-1 Bottom view of sensor unit ...............................................................................17
Fig. 10-2 Sensor head and sensor unit ............................................................................17
Fig. 10-3 Exploded view of sensor head...........................................................................18
Fig. 10-4 Removing the cap screw....................................................................................19
Fig. 10-5 Removing the cap screw....................................................................................19
Fig. 10-6 Removing the anode ..........................................................................................20
Fig. 10-7 Removing the O-ring .........................................................................................20
Fig. 10-8 Magnetic pole 1, spacer and magnetic pole 2 pushed out ..............................21
Fig. 10-9 Insulation check of anode .................................................................................22
Fig. 10-10 Anode................................................................................................................22
Fig. 10-11 Polishing the anode (example)........................................................................23
Fig. 10-12 Magnetic poles .................................................................................................23
Fig. 10-13 Magnetic poles 1 and 2 before and after polishing .......................................23
Fig. 10-14 Spacer...............................................................................................................24
Fig. 10-15 Spacer before and after polishing (example).................................................24
Fig. 10-16 Rounding the spacer........................................................................................24
Fig. 10-17 Inside view .......................................................................................................25
Fig. 10-18 O-ring and O-ring groove................................................................................25
Fig. 10-19 Anode position after reassembly ....................................................................26
Fig. 10-20 Insulation check ..............................................................................................27
Fig. 10-21 Check with the sensor unit connected ...........................................................28
Fig. 10-22 Check with the sensor unit connected (wiring example)..............................28
Fig. 10-23 Leak check position .........................................................................................29
Fig. 10-24 Installing the sensor unit and sensor head ...................................................30
Fig. 10-25 Maintenance kit...............................................................................................30
Fig. 14-1 Compatible sensor heads ..................................................................................42
Fig. 14-2 Dimensional drawing ........................................................................................43
Fig. 14-3 Connection reference drawing (1) ....................................................................44
Fig. 14-4 Connection reference diagram (2) ....................................................................45

1
1. INTRODUCTION
1.1. Overview of G-TRAN SERIES
The component units of the G-TRAN series vacuum gauge are varied and include the
following types and models.
In this manual, "Measuring unit" means all types and models of box unit and sensor
unit.
Current as of 2011
Series
Name
Unit
Major
classification
Unit
Minor
classification
Specification Type Model
G-TRAN
Measurement
unit
Box
unit
Analog/
communication
Pirani
BPR2
Ionization
BMR2
Sensor
unit
Analog
Pirani
SP1
Analog
CCG
SC1
Analog/
communication
Pirani (atmospheric
pressure)
SW1
Analog/
communication
Ionization, multi SH2
SH2-dedicated
Pirani
SPU
SH2-dedicated
Pressure sensor
SAU
Analog
Diaphragm
CCMT-D
Display
unit
1CH
Digital
24 VDC
Pirani/ionization/
CCG/diaphragm/multi
ISG1
4CH
Digital
24 VDC
Pirani/ionization/
CCG/multi
IM1R1
100 VAC
IM2R1
1.2. Terminology
In this manual, the following terms have the same meanings.
Setpoint
SETPOINT
SET
High voltage
High Voltage
H. V.
Pressure protection (signal)
PROTECT
PRT
Communication mode
Remote mode
RS-MODE
CAL function
CALCULATING FUNCTION
CAL