Ulvac G-Tran Series User manual

No.SK00-9656-EI-003-11
G-TRAN Series
Multi-Ionization gauge Sensor Unit
Standard Type Model SH2-1
Serial Communications Type Model SH2-2
Instruction Manual
(OPTION)
(OPTION)
(OPTION)
This manual is for this unit units of the following serial numbers:
SH2-1: S/N 06001 and higher.
SH2-2: S/N 03001 and higher.
Read this manual before operation and keep it at hand for
immediate reference.
Components Division,
ULVAC, Inc.
http://www.ulvac.co.jp/

あ

I
Prior to Use
Thank you for purchasing this ULVAC product.
Upon receipt of the product, verify that is the correct model ordered and that it has not been damaged
during transport.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without
the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Symbols
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage
to worker or breakage to equipment or necessary to adjust.
✔Note
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment

II
Safety Precautions
In order to safely use the G-TRAN Series sensor unit (below, "this unit"), please read the instruction
manual and the safety precautions below.
Repair
Request repairs for this unit from the dealer where purchased, from
ULVAC Inc., or from the URL listed in this instruction manual.
Power off
If this unit is accidentally damaged, immediately turn off the power supply.
There is a risk of fire and electric shock from use in this state.
Power off
If this unit produces unusual heat, smoke, or a strange smell, immediately
turn off the power supply. There is a risk of fire from use in this state.
High temperature warning
Do not touch the surface of the gauge head during operation or after
operating ends as it reaches high temperatures. There is a risk of burns if
touched.
Power supply voltage
Before turning on the power supply, check that this unit operating voltage
and the supply power are the same. If the wrong power supply is connected,
there is a risk of damage to this unit and to devices connected to this unit and
a risk of fire. The overvoltage category is category I.
Power supply lightning surge handling
Please do not connect directly to a DC drive DC power this unit.
If the wiring is wrong, there is a risk of damage to this unit and to devices
connected to this unit and a risk of fire.
Excessive vacuum chamber pressure
Do not connect this unit in a location where the gauge head's internal
pressure exceeds atmospheric pressure. If the gauge head's internal pressure
exceeds atmospheric pressure, there is a risk of damage to the gauge head
and it may pose a hazard to its surroundings, including to people, by flying
off its connector. When exceeding atmospheric pressure, install an isolation
valve to ensure that the gauge head's internal pressure does not exceed
atmospheric pressure.
Protective grounding
Always connect this unit electrically to a grounded vacuum chamber. Use a
conductive metal clamp on the NW flange. If this unit is not correctly connected,
it will not only show the wrong pressure, there is a risk of damage to this unit and
the equipment connected to this unit and a risk of fire.
When this unit is insulated from the vacuum chamber, ground the case section
(D-sub connector shell section) with a class D (class 3) ground.
Operating environment
Avoid using this unit in locations with high humidity and condensation or in
locations exposed to water. There is a risk of malfunction, ground leakage, and
fire if water penetrates inside this unit.
Operating gas warning
Filament 1 is yttria-coated iridium. If this unit is exposed to chemically active
gases such halogen or halogenated gases, problems will occur such as filament
breaks or pressure characteristics changing.
Filament 2 is tungsten. In atmospheres with a large amount of oxygen, there is
a risk of the operating life decreasing from the filament burning out.( The life of
Air introduction 1Pa is approximately three hours.)
When using this unit in these types of environments, install an isolation valve
between this unit and the vacuum chamber and protect this unit as much as
possible so it is not exposed to these gases.

III
Gas type dependency
The pressure value and accuracy for this unit and SPU differ by the type of gas
measured. The accuracy for this unit is based on measuring nitrogen gas. Be
careful when using gases other than nitrogen.
Power off
When replacing the gauge head, always turn off the power supply. Do not turn
on the power supply until finished replacing the gauge head. If the gauge head is
attached or removed with the power on, there is a risk of damage to this unit and
to devices connected to this unit and a risk of fire.
SAU pressure reading check
Check the SAU atmospheric pressure immediately after use. Adjust the
atmospheric pressure as necessary.
Tolerance of SAU at altitude and atmospheric depression.
The atmospheric and 0 point adjustment is required at the altitude of more
than 500m around and at atmospheric depression lower than 950hPa. Without
the adjustment, pressure indication will not decrease from 1.2 x 10
+4
Pa.
Disassembly prohibited
Do not disassemble this unit. There is a risk of fire and electric shock. If
disassembled, sensor operation cannot be guaranteed.
Modification prohibited
Do not modify this unit. There is a risk of fire and electric shock. If
modified, sensor operation cannot be guaranteed.
Check power supply voltage
Before turning on the power supply, check that this unit operating voltage
and the supply voltage polarity are the same. If the wrong power supply is
connected, there is a risk of damage to this unit and to devices connected to
this unit and a risk of fire.
Operating power supply
Always connect this unit to a power supply and evaluation unit that
conforms to standards (EN61010 SELV-E) for grounded protective extra low
voltage. Install a fuse in the connection.
Voltage supply to this unit
If voltage supplied to this unit is less than DC20V, it does not show accurate
pressure. Please confirm supplied voltage to this unit as well as DC power supply
voltage.
Power on
Turn on the power supply after all the equipment, including the gauge head,
display, evaluation unit, and cables, has been connected to this unit. If the
power is supplied before connecting them, there is a risk of damage to this
unit and to devices connected to this unit and a risk of fire. There is also a risk
of breaking the filament in the gauge head.
Operating environment
Use this unit within the environment range defined by the specifications.
Condensation
Avoid using this unit in locations with high humidity and condensation or
in locations exposed to water. There is a risk of malfunction, ground leakage,
and fire if water penetrates inside this unit.
Foreign object insertion
Protect this unit so that metallic and flammable foreign objects cannot
enter the interior of this unit from the openings.
Ensure ventilation
Do not put this unit in a sealed chamber. Always install it in a location that
ensures ventilation. If sealed, there is a risk of loss of operating life when the
temperature of the electronic components inside the power supply increases.

IV
Disposal
When disposing of this unit, please follow all local laws and regulations.
In particular, if the gauge head was used in an atmosphere that can cause
harm to the human body, dispose of it through specialized waste handler.
Customers are responsible for expenses related to disposal.
Setting of set point
Output of set point and pressure signal comes from same terminal.
It may cause misreading. When you change set point value while the system is
running, please pay attention not to proceed in running mode.
Set point signal
When set point is set, external I/O output gets Lo/Hi (ON/OFF) linking flash of
LED of each set point.
✔Note
Use in a corrosive gas atmosphere
If this unit is exposed to chemically active gases including corrosive gases
and halogen or halogenated gases, problems will occur such as filament
breaks or pressure characteristics changing. When using this unit in these
types of environments, install an isolation valve between this unit and the
vacuum chamber and protect this unit as much as possible so it is not exposed
to these gases.
✔Note
Use in a CVD gas atmosphere
If this unit is exposed to gases that deposit materials including CVD
(Chemical Vapor Deposition) material gases and rotary pump oil mist,
problems will occur such as filament breaks or pressure characteristics
changing. When using this unit in these types of environments, install an
isolation valve between this unit and the vacuum chamber and protect this
unit so it is not exposed to these gases.
✔Note
In case of flammable gas using
This unit and pirani gauge SPU heats filaments by electrification.
Therefore it is recommended installing a valve between the sensor head and
chamber to prevent the explosion by flammable gas and heated
electrification.
✔Note
Magnetic field influence
The pressure reading of this unit is particularly affected (about 10%) by the
influence of magnetic fields of 0.002 T (20 Gauss). If this unit is affected by
magnetic fields, install magnetic shielding.
✔Note
Moisture and fouling
If there is a large quantity of fouling in the gauge head from the gradual
vaporization of moisture or organic matter, pressure accuracy and response speed
will be affected. Review installation locations and methods so that fouling does
not occur.
✔Note
Temperature fluctuations
The ambient temperature of the gauge head affects the measured value due to
the measurement principle of the Pirani vacuum gauge. Be careful with the
attachment location so the ambient temperature does not dramatically deviate
from the temperature during calibration (approx. 25°C).
✔Note
Gas flow in the measurement system
The pressure measurement measures the static pressure at the location where
the gauge head is connected. Take care to attach this unit in a location that is
unaffected by gas flows and emitted gas in the measurement system.
✔Note
Influence of electrons, ions, etc.
If this unit is near a strong generation source of electrons or ions, this unit will
not be able to measure pressure correctly, and there is a risk of damage to this
unit and a risk of malfunction. Take care to attach this unit in a location that is
unaffected by electrons and ions.

V
✔Note
Check wiring
Ensure that the connection cable to each pin does not contact other pins or
the case. Use caution not to mistake the pin assignments. If the wiring is
wrong, there is a risk of damage to this unit and to devices connected to this
unit and a risk of fire.
✔Note
Laying down cables
Do not wire this unit cable in proximity or parallel to electrical lines,
power lines, high voltage lines, or high frequency lines. There is a risk of
malfunction.
✔Note
Voltage drop of power cable
Due to voltage drop of power cable, voltage supplied to this unit may be lower
than DC20V, especially when the cable is thinner than AWG24.
Recommended cable length when DC power supply voltage is 24V and
environmental temperature is 20℃are the followings.
AWG26
：
10m,
AWG24
：
20m,
AWG22
：
30m
✔Note
Remote host noise resistance
Use highly noise resistant insulated-type PC and PLC (programmable
logic controller) remote hosts. There is a risk of malfunction and failure.
✔Note
Impacts
Do not expose this unit to impacts. There is a risk of breaking filaments
and damaging the attachment section by impacts.
✔Note
Transportation packaging
When transporting this unit, do so in the same state as when it was
delivered from the factory. There is a risk of damage if this unit is transported
without packaging or transported attached to the equipment.
✔Note
Maintenance
The electrical circuitry inside this unit uses aluminum electrolytic
capacitors. In general, aluminum electrolytic capacitors possess an operating
life and that operating life decreases the more the ambient temperature
increases. To prevent damage to the device, we recommend maintenance at
ULVAC about once every three years.

VI
Revision History
DATE
No.
Description
Mar. 9, 2012
00
1st version
Aug. 2, 2012
01
・
Section 13.1. Adjustment of atmospheric pressure: Corrected to pressing of
ADJ button
・Section 14.2.1.1. RS-232C wiring diagram
Wrong) SENSOR GND 11 - 7 Host GND
Correct) SENSOR GND 14 - 5 Host GND
Jan. 25, 2013
02
・Safety Precautions:
・Added the operating life of tungsten filament: the life of air introduction 1Pa
is approx. 3 hours
・
Added the following cases to CAUTION: supplied voltage of 20V or less
and voltage drop of power cable
・
Added the CAUTION that I/O output flashes in synchronization with
flashing LED when setting set point
・
Added the CAUTION that output of set point and pressure signal come
from the same terminal when setting set point
・Section 2. Specifications: Corrected the internal volume of M-34
from 34cm3 to 17cm3
・Section 9.5. Simple conversion tables: Amended pressure to
exponent, and decimal place to mantissa
・Section 16. Troubleshooting: Added the following cases: FIL LED
flashes, pressure value fluctuates, and setpoint signal is not output
・
Section 18. Corrected the content of warranty
Sep. 2, 2013
03
・Section 9. Analog output: Deleted the analog output voltage of 0.1V or less as
power supply fault
・
Section 11.3. Configuring the setpoints: Added coarse adjustment and fine
adjustment
Jan. 7, 2014
04
・Section 10.5.3．Corrected emissi
on current from Hi to Lo when SPU/SAU
operates normally. Software ver.109 and seral number greater than or equal to
01000
・Section 2.5. Changed instruction manuals to CD, added quick manual
・Section 4.6. I/O connector: Added connection signal to No.4 emission valid
・
Section 6. Mode Configurations: Amended the default to SPU combination
mode
・
Section 10.5. Added the description of emission valid signal and connection
check signal
Mar. 17, 2014
05
・Section 6. Mode Configurations: Added mode 3 and 4
Mode 1/2: Emission valid ON when SPU/SAU operates normally
Mode 3/4: Emission valid OFF when SPU/SAU operates normally
・Section 2.5. Changed gauge head as optional
・Section 4.3. Added the mode when FIL LED is Off
・Section 6. Added the description of mode setting
・Section 7.4. Added the mode when FIL LED is Off
・Section 10.5.3. Added the difference of mode setting of emission valid signal
・
Section 14.6.2. Added to CAUTION that Em.Valid OK signal varies when
reading serial communications status

VII
Jul. 8, 2014
06
Correction of errors
Apr. 15, 2015
07
・
Section 8.3. FIL 1/2 signal: Added the necessity to turn off the filament when
changing filament 1/2
May. 20, 2016
08
・
Safety Precautions: Added the Note when using in a flammable gas
atmosphere
・Section 2.1. Specifications: Added M-36
・
Section 2.1. Specifications: Added the following state to power supply
voltage: steady state, degas, and inrush current
・Section 2.4. Separately ordered products: Added M-36, test results certificate,
and calibration certificate
・Sectio
n 8.2. FIL ON/OFF signal: Added the recommendation to inject purge
gas 5 seconds after FIL OFF
・
Section 16. Troubleshooting: Added the case in which pressure reading does
not change around 1Pa
・
Correction of errors
Nov. 9, 2016
09
・Section 13. Atmospheric
and 0 point adjustment of SAU: Added 0 point
adjustment of SAU at the altitude of around 500m or more and at atmospheric
depression lower than 950hPa to avoid the case that pressure indication does not
decrease from 1.2 x 10⁺⁴ Pa
May. 10, 2019
10
・Added revision history
・Section 6. Mode Configurations: Added BMR2 compatible mode (Mode 9)
・
Correction of errors
Sep. 20, 2019
11
Added Pirani Vacuum gauge Measuring Unit SWU

VIII
Contents
Prior to Use ............................................................................................................. I
Safety Symbols........................................................................................................ I
Safety Precautions..................................................................................................II
Revision History................................................................................................... VI
Contents..............................................................................................................VIII
1. INTRODUCTION ..................... 1
1.1. G-TRAN SERIES OVERVIEW .......... 1
1.2. COMMENTARY ON PHRASING......... 1
2. SPECIFICATIONS..................... 2
2.1. SH2-1/SH2-2 SPECIFICATIONS ........ 2
2.2. SPU COMBINATION MODE KEY
SPECIFICATIONS.......................... 4
2.3. SAU COMBINATION MODE KEY
SPECIFICATIONS.......................... 4
2.4. SWU COMBINATION MODE KEY
SPECIFICATIONS.......................... 5
2.5. SEPARATELY ORDERED PRODUCTS ..... 5
2.6. UNPACKING AND QUANTITY CHECK .... 5
3. HANDLING PRECAUTIONS............ 6
3.1. POST-OPERATION CHECKS............ 6
3.2. PRECAUTIONS RELATED TO THE
OPERATING ENVIRONMENT................. 6
3.3. PRECAUTIONS RELATED TO USE ....... 7
3.4. POWER SUPPLY .................... 8
3.5. ATTACHING THIS UNIT .............. 8
3.5.1. Sensor attachment environment... 8
3.5.2. Attaching the gauge head........ 8
4. PART NAMES AND FUNCTIONS ....... 9
4.1. CONTROLLER ..................... 9
4.2. PANEL -SH2-1 STANDARD TYPE ..... 10
4.3. PANEL LEDS -SH2-1 STANDARD TYPE 11
4.4. PANEL -SH2-2 SERIAL
COMMUNICATIONS TYPE.................. 12
4.5. PANEL LEDS -SH2-2 SERIAL
COMMUNICATIONS TYPE.................. 13
4.6. I/O CONNECTOR -SH2-1 STANDARD
TYPE 14
4.7. I/O CONNECTOR -SH2-2 SERIAL
COMMUNICATIONS TYPE.................. 15
4.8. SPU I/O CONNECTOR .............. 16
4.9. SAU I/O CONNECTOR .............. 17
5. POWER SUPPLY INTERNAL CIRCUITRY18
6. MODE CONFIGURATIONS (SH2-1/SH2-2)19
7. LED STATE INDICATORS ............ 19
7.1. POWER/ERROR LED STATE INDICATOR
(SH2-1/SH2-2) ......................... 19
7.2. SPU LED STATE INDICATORS
(SH2-1/SH2-2).......................... 19
7.3. SAU LED STATE INDICATORS
(SH2-1/SH2-2).......................... 19
7.4. FIL LED STATE INDICATORS (SH2-1
ONLY)20
8. CONTROL INPUT SIGNALS........... 21
8.1. CONTROL INPUT SIGNALS (SH2-1 ONLY)21
8.2. FIL ON/OFF SIGNAL ............... 21
8.3. FIL 1/2 SIGNAL ................... 22
8.4. DEGAS ON/OFF SIGNAL ........... 22
9. ANALOG OUTPUT (SH2-1/SH2-2) ...... 23
9.1. PRESSURE CONVERSION EQUATION .... 23
9.2. SH2 INDEPENDENT MODE ANALOG
OUTPUT................................ 23
9.3. SPU COMBINATION MODE ANALOG
OUTPUT................................ 24
9.4. SAU COMBINATION MODE ANALOG
OUTPUT................................ 25
9.5. SWU COMBINATION MODE ANALOG
OUTPUT................................ 26
9.6. SIMPLE CONVERSION TABLES......... 27
9.7. BMR2 COMPATIBLE MODE (MODE 9) . 28
9.7.1. Pressure conversion equation .... 28
10. CONTROL OUTPUT SIGNALS ....... 29
10.1. CONTROL OUTPUT SIGNALS (SH2-1
ONLY)29
10.2. SERIAL COMMUNICATIONS SIGNALS
(SH2-2 ONLY).......................... 29
10.3. SENSOR ERROR SIGNAL (SH2-1 ONLY).. 30
10.3.1. SH2 independent mode......... 30
10.3.2. SPU combination mode ........ 30
10.3.3. SAU combination mode ........ 30
10.3.4. SWU combination mode........ 30
10.4. SETPOINT OPERATION SIGNAL (SH2-1
ONLY)31
10.5. EMISSION VALID SIGNAL AND
CONNECTION CHECK SIGNAL (SH2-1 ONLY).... 31
10.5.1. Emission valid signal (SH2-1 only)31
10.5.2. Connection check signal (SH2-1
only) 31
10.5.3. The difference of mode setting
(SH2-1 only) ......................... 31
10.6. FILAMENT POWER MONITOR SIGNAL
(SH2-1 ONLY).......................... 31