Ulvac G-Tran Series User manual

No.SK00-9656-EI-003-11
G-TRAN Series
Multi-Ionization gauge Sensor Unit
Standard Type Model SH2-1
Serial Communications Type Model SH2-2
Instruction Manual
(OPTION)
(OPTION)
(OPTION)
This manual is for this unit units of the following serial numbers:
SH2-1: S/N 06001 and higher.
SH2-2: S/N 03001 and higher.
Read this manual before operation and keep it at hand for
immediate reference.
Components Division,
ULVAC, Inc.
http://www.ulvac.co.jp/

あ

I
Prior to Use
Thank you for purchasing this ULVAC product.
Upon receipt of the product, verify that is the correct model ordered and that it has not been damaged
during transport.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual without
the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction manual to
third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change without
prior notice because of changes in specifications or because of product
improvements.
Safety Symbols
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with DANGER
results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life or
factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results in
serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results in
minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor damage
to worker or breakage to equipment or necessary to adjust.
✔Note
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment

II
Safety Precautions
In order to safely use the G-TRAN Series sensor unit (below, "this unit"), please read the instruction
manual and the safety precautions below.
Repair
Request repairs for this unit from the dealer where purchased, from
ULVAC Inc., or from the URL listed in this instruction manual.
Power off
If this unit is accidentally damaged, immediately turn off the power supply.
There is a risk of fire and electric shock from use in this state.
Power off
If this unit produces unusual heat, smoke, or a strange smell, immediately
turn off the power supply. There is a risk of fire from use in this state.
High temperature warning
Do not touch the surface of the gauge head during operation or after
operating ends as it reaches high temperatures. There is a risk of burns if
touched.
Power supply voltage
Before turning on the power supply, check that this unit operating voltage
and the supply power are the same. If the wrong power supply is connected,
there is a risk of damage to this unit and to devices connected to this unit and
a risk of fire. The overvoltage category is category I.
Power supply lightning surge handling
Please do not connect directly to a DC drive DC power this unit.
If the wiring is wrong, there is a risk of damage to this unit and to devices
connected to this unit and a risk of fire.
Excessive vacuum chamber pressure
Do not connect this unit in a location where the gauge head's internal
pressure exceeds atmospheric pressure. If the gauge head's internal pressure
exceeds atmospheric pressure, there is a risk of damage to the gauge head
and it may pose a hazard to its surroundings, including to people, by flying
off its connector. When exceeding atmospheric pressure, install an isolation
valve to ensure that the gauge head's internal pressure does not exceed
atmospheric pressure.
Protective grounding
Always connect this unit electrically to a grounded vacuum chamber. Use a
conductive metal clamp on the NW flange. If this unit is not correctly connected,
it will not only show the wrong pressure, there is a risk of damage to this unit and
the equipment connected to this unit and a risk of fire.
When this unit is insulated from the vacuum chamber, ground the case section
(D-sub connector shell section) with a class D (class 3) ground.
Operating environment
Avoid using this unit in locations with high humidity and condensation or in
locations exposed to water. There is a risk of malfunction, ground leakage, and
fire if water penetrates inside this unit.
Operating gas warning
Filament 1 is yttria-coated iridium. If this unit is exposed to chemically active
gases such halogen or halogenated gases, problems will occur such as filament
breaks or pressure characteristics changing.
Filament 2 is tungsten. In atmospheres with a large amount of oxygen, there is
a risk of the operating life decreasing from the filament burning out.( The life of
Air introduction 1Pa is approximately three hours.)
When using this unit in these types of environments, install an isolation valve
between this unit and the vacuum chamber and protect this unit as much as
possible so it is not exposed to these gases.

III
Gas type dependency
The pressure value and accuracy for this unit and SPU differ by the type of gas
measured. The accuracy for this unit is based on measuring nitrogen gas. Be
careful when using gases other than nitrogen.
Power off
When replacing the gauge head, always turn off the power supply. Do not turn
on the power supply until finished replacing the gauge head. If the gauge head is
attached or removed with the power on, there is a risk of damage to this unit and
to devices connected to this unit and a risk of fire.
SAU pressure reading check
Check the SAU atmospheric pressure immediately after use. Adjust the
atmospheric pressure as necessary.
Tolerance of SAU at altitude and atmospheric depression.
The atmospheric and 0 point adjustment is required at the altitude of more
than 500m around and at atmospheric depression lower than 950hPa. Without
the adjustment, pressure indication will not decrease from 1.2 x 10
+4
Pa.
Disassembly prohibited
Do not disassemble this unit. There is a risk of fire and electric shock. If
disassembled, sensor operation cannot be guaranteed.
Modification prohibited
Do not modify this unit. There is a risk of fire and electric shock. If
modified, sensor operation cannot be guaranteed.
Check power supply voltage
Before turning on the power supply, check that this unit operating voltage
and the supply voltage polarity are the same. If the wrong power supply is
connected, there is a risk of damage to this unit and to devices connected to
this unit and a risk of fire.
Operating power supply
Always connect this unit to a power supply and evaluation unit that
conforms to standards (EN61010 SELV-E) for grounded protective extra low
voltage. Install a fuse in the connection.
Voltage supply to this unit
If voltage supplied to this unit is less than DC20V, it does not show accurate
pressure. Please confirm supplied voltage to this unit as well as DC power supply
voltage.
Power on
Turn on the power supply after all the equipment, including the gauge head,
display, evaluation unit, and cables, has been connected to this unit. If the
power is supplied before connecting them, there is a risk of damage to this
unit and to devices connected to this unit and a risk of fire. There is also a risk
of breaking the filament in the gauge head.
Operating environment
Use this unit within the environment range defined by the specifications.
Condensation
Avoid using this unit in locations with high humidity and condensation or
in locations exposed to water. There is a risk of malfunction, ground leakage,
and fire if water penetrates inside this unit.
Foreign object insertion
Protect this unit so that metallic and flammable foreign objects cannot
enter the interior of this unit from the openings.
Ensure ventilation
Do not put this unit in a sealed chamber. Always install it in a location that
ensures ventilation. If sealed, there is a risk of loss of operating life when the
temperature of the electronic components inside the power supply increases.

IV
Disposal
When disposing of this unit, please follow all local laws and regulations.
In particular, if the gauge head was used in an atmosphere that can cause
harm to the human body, dispose of it through specialized waste handler.
Customers are responsible for expenses related to disposal.
Setting of set point
Output of set point and pressure signal comes from same terminal.
It may cause misreading. When you change set point value while the system is
running, please pay attention not to proceed in running mode.
Set point signal
When set point is set, external I/O output gets Lo/Hi (ON/OFF) linking flash of
LED of each set point.
✔Note
Use in a corrosive gas atmosphere
If this unit is exposed to chemically active gases including corrosive gases
and halogen or halogenated gases, problems will occur such as filament
breaks or pressure characteristics changing. When using this unit in these
types of environments, install an isolation valve between this unit and the
vacuum chamber and protect this unit as much as possible so it is not exposed
to these gases.
✔Note
Use in a CVD gas atmosphere
If this unit is exposed to gases that deposit materials including CVD
(Chemical Vapor Deposition) material gases and rotary pump oil mist,
problems will occur such as filament breaks or pressure characteristics
changing. When using this unit in these types of environments, install an
isolation valve between this unit and the vacuum chamber and protect this
unit so it is not exposed to these gases.
✔Note
In case of flammable gas using
This unit and pirani gauge SPU heats filaments by electrification.
Therefore it is recommended installing a valve between the sensor head and
chamber to prevent the explosion by flammable gas and heated
electrification.
✔Note
Magnetic field influence
The pressure reading of this unit is particularly affected (about 10%) by the
influence of magnetic fields of 0.002 T (20 Gauss). If this unit is affected by
magnetic fields, install magnetic shielding.
✔Note
Moisture and fouling
If there is a large quantity of fouling in the gauge head from the gradual
vaporization of moisture or organic matter, pressure accuracy and response speed
will be affected. Review installation locations and methods so that fouling does
not occur.
✔Note
Temperature fluctuations
The ambient temperature of the gauge head affects the measured value due to
the measurement principle of the Pirani vacuum gauge. Be careful with the
attachment location so the ambient temperature does not dramatically deviate
from the temperature during calibration (approx. 25°C).
✔Note
Gas flow in the measurement system
The pressure measurement measures the static pressure at the location where
the gauge head is connected. Take care to attach this unit in a location that is
unaffected by gas flows and emitted gas in the measurement system.
✔Note
Influence of electrons, ions, etc.
If this unit is near a strong generation source of electrons or ions, this unit will
not be able to measure pressure correctly, and there is a risk of damage to this
unit and a risk of malfunction. Take care to attach this unit in a location that is
unaffected by electrons and ions.

V
✔Note
Check wiring
Ensure that the connection cable to each pin does not contact other pins or
the case. Use caution not to mistake the pin assignments. If the wiring is
wrong, there is a risk of damage to this unit and to devices connected to this
unit and a risk of fire.
✔Note
Laying down cables
Do not wire this unit cable in proximity or parallel to electrical lines,
power lines, high voltage lines, or high frequency lines. There is a risk of
malfunction.
✔Note
Voltage drop of power cable
Due to voltage drop of power cable, voltage supplied to this unit may be lower
than DC20V, especially when the cable is thinner than AWG24.
Recommended cable length when DC power supply voltage is 24V and
environmental temperature is 20℃are the followings.
AWG26
：
10m,
AWG24
：
20m,
AWG22
：
30m
✔Note
Remote host noise resistance
Use highly noise resistant insulated-type PC and PLC (programmable
logic controller) remote hosts. There is a risk of malfunction and failure.
✔Note
Impacts
Do not expose this unit to impacts. There is a risk of breaking filaments
and damaging the attachment section by impacts.
✔Note
Transportation packaging
When transporting this unit, do so in the same state as when it was
delivered from the factory. There is a risk of damage if this unit is transported
without packaging or transported attached to the equipment.
✔Note
Maintenance
The electrical circuitry inside this unit uses aluminum electrolytic
capacitors. In general, aluminum electrolytic capacitors possess an operating
life and that operating life decreases the more the ambient temperature
increases. To prevent damage to the device, we recommend maintenance at
ULVAC about once every three years.

VI
Revision History
DATE
No.
Description
Mar. 9, 2012
00
1st version
Aug. 2, 2012
01
・
Section 13.1. Adjustment of atmospheric pressure: Corrected to pressing of
ADJ button
・Section 14.2.1.1. RS-232C wiring diagram
Wrong) SENSOR GND 11 - 7 Host GND
Correct) SENSOR GND 14 - 5 Host GND
Jan. 25, 2013
02
・Safety Precautions:
・Added the operating life of tungsten filament: the life of air introduction 1Pa
is approx. 3 hours
・
Added the following cases to CAUTION: supplied voltage of 20V or less
and voltage drop of power cable
・
Added the CAUTION that I/O output flashes in synchronization with
flashing LED when setting set point
・
Added the CAUTION that output of set point and pressure signal come
from the same terminal when setting set point
・Section 2. Specifications: Corrected the internal volume of M-34
from 34cm3 to 17cm3
・Section 9.5. Simple conversion tables: Amended pressure to
exponent, and decimal place to mantissa
・Section 16. Troubleshooting: Added the following cases: FIL LED
flashes, pressure value fluctuates, and setpoint signal is not output
・
Section 18. Corrected the content of warranty
Sep. 2, 2013
03
・Section 9. Analog output: Deleted the analog output voltage of 0.1V or less as
power supply fault
・
Section 11.3. Configuring the setpoints: Added coarse adjustment and fine
adjustment
Jan. 7, 2014
04
・Section 10.5.3．Corrected emissi
on current from Hi to Lo when SPU/SAU
operates normally. Software ver.109 and seral number greater than or equal to
01000
・Section 2.5. Changed instruction manuals to CD, added quick manual
・Section 4.6. I/O connector: Added connection signal to No.4 emission valid
・
Section 6. Mode Configurations: Amended the default to SPU combination
mode
・
Section 10.5. Added the description of emission valid signal and connection
check signal
Mar. 17, 2014
05
・Section 6. Mode Configurations: Added mode 3 and 4
Mode 1/2: Emission valid ON when SPU/SAU operates normally
Mode 3/4: Emission valid OFF when SPU/SAU operates normally
・Section 2.5. Changed gauge head as optional
・Section 4.3. Added the mode when FIL LED is Off
・Section 6. Added the description of mode setting
・Section 7.4. Added the mode when FIL LED is Off
・Section 10.5.3. Added the difference of mode setting of emission valid signal
・
Section 14.6.2. Added to CAUTION that Em.Valid OK signal varies when
reading serial communications status

VII
Jul. 8, 2014
06
Correction of errors
Apr. 15, 2015
07
・
Section 8.3. FIL 1/2 signal: Added the necessity to turn off the filament when
changing filament 1/2
May. 20, 2016
08
・
Safety Precautions: Added the Note when using in a flammable gas
atmosphere
・Section 2.1. Specifications: Added M-36
・
Section 2.1. Specifications: Added the following state to power supply
voltage: steady state, degas, and inrush current
・Section 2.4. Separately ordered products: Added M-36, test results certificate,
and calibration certificate
・Sectio
n 8.2. FIL ON/OFF signal: Added the recommendation to inject purge
gas 5 seconds after FIL OFF
・
Section 16. Troubleshooting: Added the case in which pressure reading does
not change around 1Pa
・
Correction of errors
Nov. 9, 2016
09
・Section 13. Atmospheric
and 0 point adjustment of SAU: Added 0 point
adjustment of SAU at the altitude of around 500m or more and at atmospheric
depression lower than 950hPa to avoid the case that pressure indication does not
decrease from 1.2 x 10⁺⁴ Pa
May. 10, 2019
10
・Added revision history
・Section 6. Mode Configurations: Added BMR2 compatible mode (Mode 9)
・
Correction of errors
Sep. 20, 2019
11
Added Pirani Vacuum gauge Measuring Unit SWU

VIII
Contents
Prior to Use ............................................................................................................. I
Safety Symbols........................................................................................................ I
Safety Precautions..................................................................................................II
Revision History................................................................................................... VI
Contents..............................................................................................................VIII
1. INTRODUCTION ..................... 1
1.1. G-TRAN SERIES OVERVIEW .......... 1
1.2. COMMENTARY ON PHRASING......... 1
2. SPECIFICATIONS..................... 2
2.1. SH2-1/SH2-2 SPECIFICATIONS ........ 2
2.2. SPU COMBINATION MODE KEY
SPECIFICATIONS.......................... 4
2.3. SAU COMBINATION MODE KEY
SPECIFICATIONS.......................... 4
2.4. SWU COMBINATION MODE KEY
SPECIFICATIONS.......................... 5
2.5. SEPARATELY ORDERED PRODUCTS ..... 5
2.6. UNPACKING AND QUANTITY CHECK .... 5
3. HANDLING PRECAUTIONS............ 6
3.1. POST-OPERATION CHECKS............ 6
3.2. PRECAUTIONS RELATED TO THE
OPERATING ENVIRONMENT................. 6
3.3. PRECAUTIONS RELATED TO USE ....... 7
3.4. POWER SUPPLY .................... 8
3.5. ATTACHING THIS UNIT .............. 8
3.5.1. Sensor attachment environment... 8
3.5.2. Attaching the gauge head........ 8
4. PART NAMES AND FUNCTIONS ....... 9
4.1. CONTROLLER ..................... 9
4.2. PANEL -SH2-1 STANDARD TYPE ..... 10
4.3. PANEL LEDS -SH2-1 STANDARD TYPE 11
4.4. PANEL -SH2-2 SERIAL
COMMUNICATIONS TYPE.................. 12
4.5. PANEL LEDS -SH2-2 SERIAL
COMMUNICATIONS TYPE.................. 13
4.6. I/O CONNECTOR -SH2-1 STANDARD
TYPE 14
4.7. I/O CONNECTOR -SH2-2 SERIAL
COMMUNICATIONS TYPE.................. 15
4.8. SPU I/O CONNECTOR .............. 16
4.9. SAU I/O CONNECTOR .............. 17
5. POWER SUPPLY INTERNAL CIRCUITRY18
6. MODE CONFIGURATIONS (SH2-1/SH2-2)19
7. LED STATE INDICATORS ............ 19
7.1. POWER/ERROR LED STATE INDICATOR
(SH2-1/SH2-2) ......................... 19
7.2. SPU LED STATE INDICATORS
(SH2-1/SH2-2).......................... 19
7.3. SAU LED STATE INDICATORS
(SH2-1/SH2-2).......................... 19
7.4. FIL LED STATE INDICATORS (SH2-1
ONLY)20
8. CONTROL INPUT SIGNALS........... 21
8.1. CONTROL INPUT SIGNALS (SH2-1 ONLY)21
8.2. FIL ON/OFF SIGNAL ............... 21
8.3. FIL 1/2 SIGNAL ................... 22
8.4. DEGAS ON/OFF SIGNAL ........... 22
9. ANALOG OUTPUT (SH2-1/SH2-2) ...... 23
9.1. PRESSURE CONVERSION EQUATION .... 23
9.2. SH2 INDEPENDENT MODE ANALOG
OUTPUT................................ 23
9.3. SPU COMBINATION MODE ANALOG
OUTPUT................................ 24
9.4. SAU COMBINATION MODE ANALOG
OUTPUT................................ 25
9.5. SWU COMBINATION MODE ANALOG
OUTPUT................................ 26
9.6. SIMPLE CONVERSION TABLES......... 27
9.7. BMR2 COMPATIBLE MODE (MODE 9) . 28
9.7.1. Pressure conversion equation .... 28
10. CONTROL OUTPUT SIGNALS ....... 29
10.1. CONTROL OUTPUT SIGNALS (SH2-1
ONLY)29
10.2. SERIAL COMMUNICATIONS SIGNALS
(SH2-2 ONLY).......................... 29
10.3. SENSOR ERROR SIGNAL (SH2-1 ONLY).. 30
10.3.1. SH2 independent mode......... 30
10.3.2. SPU combination mode ........ 30
10.3.3. SAU combination mode ........ 30
10.3.4. SWU combination mode........ 30
10.4. SETPOINT OPERATION SIGNAL (SH2-1
ONLY)31
10.5. EMISSION VALID SIGNAL AND
CONNECTION CHECK SIGNAL (SH2-1 ONLY).... 31
10.5.1. Emission valid signal (SH2-1 only)31
10.5.2. Connection check signal (SH2-1
only) 31
10.5.3. The difference of mode setting
(SH2-1 only) ......................... 31
10.6. FILAMENT POWER MONITOR SIGNAL
(SH2-1 ONLY).......................... 31

IX
11. CONFIGURING THE SETPOINTS
(SH2-1 ONLY) ........................... 32
11.1. SETPOINT SETTING PRESSURE ........ 32
SETPOINT SETTING PRESSURE .............. 32
11.2. SETPOINT ON/OFF PRESSURE ......... 32
11.3. CONFIGURING THE SETPOINTS........ 33
11.4. SWITCHING THE VOLTAGE MODE...... 33
11.5. PRESSURE CONVERSION EQUATION .... 33
12. FILAMENT POWER MONITOR SIGNAL34
12.1. CONFIRMATION OF THE ST2-2 ....... 34
13. ADJUSTING SAU PRESSURE ....... 34
13.1. ADJUSTING ON THE ST2-1........... 34
13.2. ADJUSTING ON THE ST2-1........... 34
13.3. ADJUSTING ON THE ST2-2........... 34
14. ADJUSTING SWU PRESSURE ....... 35
14.1. ADJUSTING ON THE SH2-1 .......... 35
14.2. ADJUSTING ON THE SH2-1 .......... 35
14.3. ADJUSTING ON THE SH2-2 .......... 35
15. USING SERIAL COMMUNICATIONS
(SH2-2 ONLY) ........................... 36
15.1. SERIAL COMMUNICATIONS SPECIFICATION36
15.2. SETTINGS ....................... 36
15.2.1. Wiring diagram .............. 36
15.2.2. Baud rate setting ............. 37
15.2.3. Address setting............... 37
15.3. BASIC DATA FORMAT .............. 38
15.3.1. Command list................ 38
15.3.2. Normal command reception..... 38
15.3.3. Abnormal command reception... 38
15.4. COMMAND ...................... 39
15.4.1. Read measurement value, status . 39
15.4.2. Write status ................. 39
15.4.3. Read status .................. 39
15.4.4. Check error details............ 39
15.4.5. SAU atmospheric adjustment
command 39
15.4.6. SAU zero adjustment command.. 39
15.4.7. SWU atmospheric adjustment
command 40
15.4.8. Check B-A gauge filament current
value 40
15.4.9. Read software version......... 40
15.4.10. Read setpoint 1 setting....... 40
15.4.11. Read setpoint 2 setting....... 40
15.4.12. Write setpoint 1 setting ...... 40
15.4.13. Write setpoint 2 setting ...... 40
15.5. CHECKSUMS...................... 41
15.6. STATUS SETTINGS LIST.............. 42
15.6.1. When writing the status ........ 42
15.6.2. When reading ................ 43
15.7. ASCII CODE CHART ................ 44
16. GAUGE HEAD REPLACEMENT...... 45
16.1. GAUGE HEAD REPLACEMENT........ 45
16.1.1. Tools ....................... 45
16.1.2. Removing the gauge head....... 45
16.1.3. Attaching the gauge head ....... 45
16.2. MESH/BAFFLE INSTALLATION AND
REMOVAL.............................. 46
16.2.1. Jig tool ..................... 46
16.2.2. Removal including mesh or baffle 46
16.2.3. Mesh/Baffle installation ........ 46
16.3. BAFFLE (OPTION).................. 46
17. TROUBLESHOOTING .............. 47
17.1. TROUBLESHOOTING ................ 47
17.2. CHECKING FOR AN INTERNAL ELECTRODE
BREAK 51
17.3. INSULATION BETWEEN THE GAUGE HEAD
PINS AND THE CASE....................... 51
18. TECHNICAL REPORT .............. 52
18.1. MEASUREMENT PRINCIPLE........... 52
18.2. MEASUREMENT GAS TYPE AND RELATIVE
SENSITIVITY FACTOR ..................... 52
19. WARRANTY ...................... 55
20. EC DECLARATION OF CONFORMITY 56
21. CERTIFICATE OF CONTAMINATION. 57
22. CHINA ROHS DECLARATION ....... 58
23. RELATED DRAWINGS ............. 59
23.1. SH2-1/SH2-2, SPU, SAU CONNECTION
DIAGRAM .............................. 59
23.2. SH2-1/SH2-2、SWU CONNECTION
DIAGRAM .............................. 60
23.3. SH2-1 DIMENSIONS ................ 61
23.4. SH2-2 DIMENSIONS ................ 62
23.5. GAUGE HEAD M-34/M-35/M-36
DIMENSIONS ............................ 63
23.6. DISPLAY UNIT CABLE ............... 64
23.7. UNIT CABLE (GUC-P) .............. 65
23.8. UNIT CABLE (GUC-A) .............. 66

1
1. Introduction
1.1. G-TRAN Series overview
There are a number of units in the G-TRAN Series vacuum gauge and these are classified as shown
below. "Sensor unit" in the text indicates all types and models of box units and sensor units. as of 2019
Unit
Major
classification
Unit
Minor
classification
Specification Type Model
Measurement
unit
Box
unit
Analog/communication
Pirani
BPR2*
Ionization
BMR2*
Sensor
unit
Analog
Pirani
SP1
Analog
CCG
SC1
Analog/communication
Pirani (atmospheric pressure)
SW1
Analog/communication Ionization, multi
SH2
ST2
SH2/ST2-dedicated
Pirani
SPU
SH2/ST2-dedicated
Pirani
SWU
SH2ST2-dedicated
Pressure sensor
SAU
Analog
Diaphragm
CCMT-D
Display
unit
1CH
Digital
24 VDC
Pirani/ionization/
CCG/diaphragm/multi
ISG1
4CH
Digital
24 VDC
Pirani/ionization/
CCG/multi
IM1R1
100 VAC
IM2R1
*: End production.
1.2. Commentary on phrasing
The phrases below in this document each have the same meaning.
Program
PROGRAM
PROG
Filament
FILAMENT
FIL
High voltage
HIGH VOLTAGE
HV
Degas
DEGAS
DEG
Zero
ZERO
ZERO
Setpoint
SETPOINT
ST
Wire break signal
ERROR
ERR
Protect (pressure protection)
PROTECT
PRT
Emission valid
Emission Valid, Em.Valid
E.V.
Communication mode
REMOTE MODE
RS-MODE
CAL function
CALCULATING FUNCTION
CAL
Pirani vacuum gauge
Pirani gauge
PG
Hot-cathode ionization gauge
Hot-cathode gauge
IG
Cold-cathode ionization gauge
Cold-cathode gauge
CCG
Diaphragm vacuum gauge
Ceramic capacitance manometer
CCM

2
2. Specifications
The SH2-1/SH2-2 has the following modes:
①②③④
SH2 independent mode
SPU Combination mode
SAU Triple Combination
mode
SWU Combination
mode
B-A gauge only
The Pirani vacuum
gauge
measuring unit
(SPU) and B-
A gauge
combination
The pressure sensor
(SAU) and the Pirani
vacuum gauge
measuring unit (SPU)
and B-
A gauge
combination
The Pirani vacuum
gauge
measuring unit
(SWU) and B-A gauge
combination
These four modes of usage can be selected. ※SAU and SWU cannot be used at the same time.
2.1. SH2-1/SH2-2 Specifications
Name
Multi-ionization gauge
Type name
Standard Type
Serial Communications Type
Model
SH2-1
SH2-2
Connectable sensors
SH2 gauge head M-34 (NW16), M-35 (NW25), M-36(UFC070): 1
SPU Pirani vacuum gauge measuring unit: 1 (option)
SAU pressure sensor unit: 1 (option)
SWU Pirani vacuum gauge measuring unit: 1 (option)
Measurement pressure
range (N2)
SH2 independent mode: 5x10-8 Pa to 1x10+1 Pa
Accuracy (N2)
SH2 independent mode: 5x10-8 Pa to 1x10+1 Pa: ±15%
Repeatability (N2)
SH2 independent mode: 1x10-6 Pa to 1x10-1 Pa: ±2%
Measurement gas type
Indicates pressure as sensitivity for N2
Emission current
1 mA (1x10-3 Pa or lower), 10 uA
DEGAS
Electron bombardment
Emission current 1 mA, grid voltage approx. 330 V, 1x10
-3
Pa or lower
Sampling time
50 ms, 5x moving average
Analog output
Output voltage: 0 to 10 VDC, LOG output: 0.75 V/1 decade
Pressure conversion equation: V=7.25+0.75*(LogP-2)
P=10^{(V-7.25)/0.75+2}
* Also combined with the output voltage for setpoint adjustment (SH2-1 only)
Update time
50 ms
Resolution
Approx 2.5 mV
Output error
±20 mV
Output impedance
1kΩ
Control input signals
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Operates with open collector input,
negative logic
Control output signals
Sensor error, setpoint 1/2/3, emission valid,
filament power monitor
Rating: 24 VMAX, 50 mAMAX, saturation
voltage 1 V
Serial communications
RS-232C, RS-485
Baud rate
9600/19200/38400 bps
LED display
POWER/ERROR: Power, error LED
SPU: SPU /SWU Pirani vacuum gauge status indicator
SAU: SAU pressure sensor status indicator

3
FIL: B-A gauge filament status indicator
SET1: Setpoint 1 LED
SET2: Setpoint 2 LED
SET3: Setpoint 3 LED
Gauge head material
Filament 1: Ir/Y
2
O
3
-coated, Filament 2: Tungsten
Others : PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating
Gauge head withstand
pressure
B-A: 2x10+5 Pa (absolute pressure)
* Take the withstand pressure for flanges, clamps, and other components into
account separately.
Gauge head internal
volume
M-34: 17 cm3, M-35: 19 cm3, M-36: 17 cm3
Operating temperature
range
10 to 50°C
Bake out temperature
Sensor head : 150decrease C (when controller SH2 is disconnected)
Flange part of sensor head : 80decrease C
(Temperature Surround controller is less than decrease C only when mounting
position is horizontal.)
※The specification and accuracy of this gauge is not guaranteed when this
sensor head is heating.
Operating humidity
range
15% to 80% RH (no condensation)
Storage temperature
-20 to 65°C (when unpowered, no condensation)
IP code
IP30
Power supply voltage
20 to 28 VDC (ripple, noise 1% or lower)
Steady state: 8W
Degas: 19W
Inrush current: 6A or lower (4ms or lower)
CE standards
Validated with SPU,
SAU connected
EN61326-2-3
Electromagnetic disturbance characteristics- Limits and methods of measurement
CISPR11:2003 Group 1 Class A
Radiated, radio-frequency, electromagnetic field immunity test
IEC61000-4-3:2002
Electrostatic discharge immunity test IEC61000-4-2:2001
Electrical fast transient/burst immunity test IEC61000-4-4:2004
Immunity to conducted disturbances induced by radio-frequency fields
IEC61000-4-6:2003
Power frequency magnetic field immunity test IEC61000-4-8:1993+A1:2000
*Less than the external I/O cable 30m
*Less than the SH2-SPU cable 2m
*Less than the SH2-SAU cable 2m
Overvoltage category
Category I: Connected to a circuit that implements measures to limit excessive
overvoltage to a sufficiently low level
I/O connector
D-sub 15-pin connector (male, 2.6 mm screws)
Sensor weight
Controller SH2: Approx. 530 g,
Gauge head M-34: 80 g, M-35: 80g, M-36: 300g
External dimensions
144 x 75 x 62 mm (approximate, controller SH2 section)

4
2.2. SPU combination mode key specifications
Measurement pressure
range
SPU : 5x10-8 Pa to 1x10+4 Pa
When pressure falling: Automatically switches from Pirani vacuum gauge to
B-A gauge at 2x10+0 Pa(SPU)
When pressure rising: Automatically switches from B-A gauge to Pirani
vacuum gauge at 3x10+0 Pa(SPU)
* B-A gauge measurements can be forced off with the control signal
Accuracy
1.0x10-1 Pa to 4.0x10-1 Pa: no accuracy guarantee
4.0x10-1 Pa to 1.0x10+0 Pa: ±30%
1.0x10+0 Pa to 1.0x10+3 Pa: ±15%
1.0x10+3 Pa to 3.0x10+3 Pa: ±30%
3.0x10+3 Pa to 1.0x10+4 Pa: no accuracy guarantee
In the overlapping pressure region of 3 Pa to 0.4 Pa, the measured pressure for
the Pirani vacuum gauge and B-A gauge is adjusted and output.
* Measurements on the Pirani vacuum gauge and the B-A gauge are
dependent on the gas type.
Be particularly aware of the difference in pressure readings when the
gauges switch.
POWER/ERROR
LED state
Blue on: Operating normally
Red on : SH2-1/2, SPU power supply abnormality, etc.
Control input signals
(Addendum)
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Operates with open collector input, negative logic
* When the FIL ON/OFF signal is low input, the B-A gauge is FIL OFF
2.3. SAU combination mode key specifications
Measurement pressure
range
5x10-8 Pa to 1x10+5 Pa
When pressure falling: Automatically switches from the pressure sensor to
Pirani vacuum gauge at 1x10+4 Pa(SAU)
When pressure falling: Automatically switches from Pirani vacuum gauge to
B-A gauge at 2x10+0 Pa(SPU)
When pressure rising: Automatically switches from B-A gauge to Pirani
vacuum gauge at 3x10+0 Pa(SPU)
When pressure rising: Automatically switches from Pirani vacuum gauge to
pressure sensor at 1x10+4 Pa(SAU)
* B-A gauge measurements can be forced off with the control signal
Accuracy
1.0x10+4 Pa to 3.0x10+5 Pa
：±
3%F.S.(
±
3x10+3Pa)
In the overlapping pressure region of 3 Pa to 0.4 Pa, the measured pressure for
the Pirani vacuum gauge and B-A gauge is adjusted and output.
* The pressure sensor measures at gauge pressure and the Pirani sensor
measures as absolute pressure, so a margin of error occurs from altitude and
air pressure.
* Measurements on the Pirani vacuum gauge and the B-A gauge are
dependent on the gas type.
Be particularly aware of the difference in pressure readings when the
gauges switch.
POWER/ERROR
LED state
Blue on: Operating normally
Red on : SH2-1/2, SPU, or SAU power supply abnormality, etc.
Control input signals
(Addendum)
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Operates with open collector input, negative logic
* When the FIL ON/OFF signal is low input, the B-A gauge is FIL OFF

5
2.4. SWU combination mode key specifications
Measurement pressure
range
5x10-8 Pa to 1x10+5 Pa
When pressure falling: Automatically switches from Pirani vacuum gauge to
B-A gauge at 2x10+0 Pa(SWU)
When pressure rising: Automatically switches from B-A gauge to Pirani
vacuum gauge at 3x10+0 Pa(SWU)
* B-A gauge measurements can be forced off with the control signal
Accuracy
1x10-1Pa
～
1x10+4Pa: ±10%
5x10-2Pa～1x10-1Pa: ±20%
1x10+4Pa～1x10+5Pa: ±20%
In the overlapping pressure region of 3 Pa to 0.4 Pa, the measured pressure for
the Pirani vacuum gauge and B-A gauge is adjusted and output.
* The pressure sensor measures at gauge pressure and the Pirani sensor
measures as absolute pressure, so a margin of error occurs from altitude and
air pressure.
* Measurements on the Pirani vacuum gauge and the B-A gauge are
dependent on the gas type.
Be particularly aware of the difference in pressure readings when the
gauges switch.
POWER/ERROR
LED state
Blue on: Operating normally
Red on : SH2-1/2, SPU, or SWU power supply abnormality, etc.
Control input signals
(Addendum)
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Operates with open collector input, negative logic
* When the FIL ON/OFF signal is low input, the B-A gauge is FIL OFF
2.5. Separately ordered products
SH2 Sensor
M-34(NW16), M-35(NW25), M-36(UFC070)
SH2 connector
D-sub 15-pin connector (female, 2.6 mm screws)
Unit cable GUC-P
0.5m, 1.0m, 1.5m (For SPU/SWU)
Unit cable GUC-A
0.5m, 1.0m, 1.5m (For SAU) * 0.5m cable is connected to SAU.
Display unit
1CH
Model ISG1 (24 VDC power supply)
4CH
Model IM1R1 (24 VDC power supply)
Model IM2R1 (100 VAC power supply)
Display cable
SH2-display unit cable 2 m, 5 m, 10 m, 15 m, 20 m, 25 m, 35 m, 40 m
Test results certificate
Calibration certificate
Calibration certificate, JCSS Calibration certificate
Traceability certificate
Calibration certificate, JCSS Calibration certificate
2.6. Unpacking and quantity check
When the product is delivered, promptly unpack and check it.
Check that the product was not damaged during shipping. Check that the proper quantity of
accessories was included with the product.
Multi-ionization gauge SH2-1/2 unit
1
Instruction manuals (CD)
1 set
Quick manual
1
B-A gauge head
(option)
SPU Pirani vacuum gauge measuring unit
(option)
WP Pirani vacuum gauge head
(option)
SWU Pirani vacuum gauge measuring unit
(option)
SWU Pirani vacuum gauge head
(option)
SAU pressure sensor
(option)
Unit cable : GUC-P
(option)
Unit cable : GUC-A
(option)

6
3. Handling Precautions
Please check this section prior to use.
3.1. Post-operation checks
SAU pressure reading check
Check the SAU atmospheric pressure immediately after use. Adjust the
atmospheric pressure as necessary.
Tolerance of SAU at altitude and atmospheric depression.
The atmospheric and 0 point adjustment is required at the altitude of more
than 500m around and at atmospheric depression lower than 950hPa. Without
the adjustment, pressure indication will not decrease from 1.2 x 10
+4
Pa.
SWU pressure reading check
Check the SWU atmospheric pressure immediately after use. Adjust the
atmospheric pressure as necessary.
Gas type dependency
The pressure value and accuracy for this unit and the SPU pirani measuring
unit differ by the type of gas measured. The accuracy for this unit is based on
measuring nitrogen gas. Be careful when using gases other than nitrogen.
3.2. Precautions related to the operating environment
Excessive vacuum chamber pressure
Do not connect this unit in a location where the gauge head's internal pressure
exceeds atmospheric pressure. It may pose a hazard to its surroundings, including
to people, if the gauge head is damaged or it flies off its connector. When
exceeding atmospheric pressure, install an isolation valve to ensure that the gauge
head's internal pressure does not exceed atmospheric pressure.
Operating environment
Avoid using this unit in locations with high humidity and condensation or in
locations exposed to water. There is a risk of malfunction, ground leakage, and
fire if water penetrates inside this unit.
Foreign object insertion
Protect this unit so that metallic and flammable foreign objects cannot enter
the interior of this unit from the openings.
Operating environment
Use this unit within the environment range defined by the specifications.
✔Note
Moisture and fouling
If there is a large quantity of fouling in the gauge head from the gradual
vaporization of moisture or organic matter, the vacuum-side pressure accuracy
and response speed will be affected. Review installation locations and methods
so that fouling does not occur.
✔Note
Use in a corrosive gas atmosphere
If this unit is exposed to chemically active gases including corrosive gases and
halogen or halogenated gases, problems will occur such as filament breaks or
pressure characteristics changing. When using this unit in these types of
environments, install an isolation valve between this unit and the vacuum
chamber and protect this unit as much as possible so it is not exposed to these
gases.
✔Note
Use in a CVD gas atmosphere
If this unit is exposed to gases that deposit materials including CVD (Chemical
Vapor Deposition) material gases and rotary pump oil mist, problems will occur
such as filament breaks or pressure characteristics changing. When using this unit
in these types of environments, install an isolation valve between this unit and the
vacuum chamber and protect this unit so it is not exposed to these gases.

7
✔Note
In case of flammable gas using
This unit and pirani gauge SPU heats filaments by electrification.
Therefore it is recommended installing a valve between the sensor head and
chamber to prevent the explosion by flammable gas and heated
electrification.
✔Note
Impacts
Do not expose this unit to impacts. There is a risk of breaking the filament and
damaging the attachment section by impacts.
3.3. Precautions related to use
Power supply voltage
Before turning on the power supply, check that this unit operating voltage and
the supply power are the same. If the wrong power supply is connected, there is a
risk of damage to this unit and to devices connected to this unit and a risk of fire.
In particular, do not apply a voltage that exceeds 30 VDC.
Power supply lightning surge handling
Please don't use this instrument with directly connected to DC distribution
network
Operating power supply
Always connect this unit to a power supply and evaluation unit that conforms
to standards (EN61010 SELV-E) for grounded protective extra low voltage.
Install a fuse in the connection.
Power on
Turn on the power supply after all the equipment, including the gauge head,
display, evaluation unit, and cables, has been connected to this unit. If the power
is supplied before connecting them, there is a risk of damage to this unit and to
devices connected to this unit and a risk of fire. There is also a risk of breaking
the filament in the gauge head.
✔Note
Check wiring
Ensure that the connection cable to each pin does not contact other pins or the
case. Use caution not to mistake the pin assignments. If the connection is wrong,
there is a risk of damage to this unit and to devices connected to this unit and a
risk of fire.
✔Note
Gas flow in the measurement system
The pressure measurement measures the static pressure at the location where
the gauge head is connected. Take care to attach this unit in a location that is
unaffected by gas flows and emitted gas in the measurement system.
✔Note
Influence of electrons, ions, etc.
If this unit is near a strong generation source of electrons or ions, this unit will
not be able to measure pressure correctly, and there is a risk of damage to this
unit and a risk of malfunction. Take care to attach this unit in a location that is
unaffected by electrons and ions.
✔Note
Magnetic field influence
The pressure reading of this unit is particularly affected (about 10%) by the
influence of magnetic fields of 0.002 T (20 Gauss). If this unit is affected by
magnetic fields, install magnetic shielding.
・Secure cables as much as possible so that force is not applied to cable connectors.
・Firmly tighten the connector locking screws.
・Fully insert the unit cables.
・Allow this unit to age for 20 minutes or longer before taking measurements.

8
3.4. Power supply
Power supply voltage
Before turning on the power supply, check that this unit operating voltage and
the supply power are the same. If the wrong power supply is connected, there is a
risk of damage to this unit and to devices connected to this unit and a risk of fire.
Voltage supply to this unit
If voltage supplied to this unit is less than DC20V, it does not show accurate
pressure. Please confirm supplied voltage to this unit as well as DC power supply
voltage.
✔Note
Voltage drop of power cable
Due to voltage drop of power cable, voltage supplied to this unit may be lower
than DC20V, especially when the cable is thinner than AWG24.
Recommended cable length when DC power supply voltage is 24V and
environmental temperature is 20℃are the followings.
AWG26
：
10m,
AWG24
：
20m,
AWG22
：
30m
3.5. Attaching this unit
3.5.1. Sensor attachment environment
Protective grounding
Always connect this unit electrically to a grounded vacuum chamber. Use a
conductive metal clamp on the NW flange. If this unit is not correctly connected,
it will not only show the wrong pressure, there is a risk of damage to this unit and
the equipment connected to this unit and a risk of fire.
When this unit is insulated from the vacuum chamber, ground the case section
(D-sub connector shell section) with a class D (class 3) ground.
・The pressure measurement measures the static pressure at the location where the gauge head is
connected. When installed in environments with a flow in the vacuum system or environments
with emitted gas sources or strong generation sources of electrons or ions, use caution in selecting
the measurement location and attach this unit in a relatively unaffected location.
3.5.2. Attaching the gauge head
・Attach this unit so that the gauge head attachment opening surface is parallel to the gas flow. In
particular, ensure that gases do not enter the gauge head interior like a beam.
・The Pirani vacuum gauge head filament is thin at φ25 µm, so avoid use as much as possible in
locations with large amounts of vibrations. The biggest cause of filament breaks is from
mechanical shock, so use caution regarding the installation location and handling.
・Use an O-ring to attach the gauge head that releases little gas. There is a risk of measurement
errors or the gauge head operating life will decrease if materials that release a large quantity of gas,
such as rubber tubing or grease, are used in the gauge head connection.

9
4. Part Names and Functions
4.1. Controller
1
2
3
Figure 4-1 Mechanical section explanatory drawing
Name Function
1. I/O connector Mating screws (M2.6 mm screws) for the I/O connector clamp hood.
(D-sub 15-pin male M2.6 mm screws)
2. POWER/ERROR
LED
Blue on: Operating normally
Red on : Error such as a filament break
Off : Power off
3. Gauge head locking
screws Screws to lock the gauge head (M3 mm screws) 2 locations