Ulvac G-Tran Series User manual

YK06-0044-EI-003-16
G-TRAN Series
1-Channel Display Unit
Model ISG1
Instruction Manual
This manual is for the display units of the
following serial numbers:
Serial Nos. 09501 and higher.
Read this manual before operation and keep it at
hand for immediate reference.
Model
Serial numbers
ST2-1 Multi Ionization Gauge
00901
～
SH2-1 Multi Ionization Gauge
06001
～
SC1 Cold-Cathode Ion Gauge
02300G
～
SW1-1 Pirani Vacuum Gauge
00001
～
SWU Pirani Vacuum Gauge
00001
～
SP1 Pirani Vacuum Gauge
00001
～
CCMT-D series Ceramic Capacitance Manometer
00001
～
Components Division,
ULVAC, Inc.

i
Prior to Operation
Upon receipt of this detector, make sure that it is the correct model you ordered and that it is not
damaged in transit.
Read this instruction manual before installing, operating, inspecting, or
maintaining the product and fully understand the safety precautions,
specifications and operating procedures regarding the product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction manual
without the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this instruction
manual to third parties without the express written consent of ULVAC Inc.
The contents described in this instruction manual are subject to change
without prior notice because of changes in specifications or because of
product improvements.
Safety Notations
Safety symbols are used throughout this instruction manual to call the
operator's attention to safety. The terminology used in safety symbols is
classified below.
Indicate status of urgency of danger when failure to comply with
DANGER results in serious personal injury or death
The work ignoring this warning will lead to serious damage to human life
or factory facility (including this equipment) at a high probability.
Indicate status of danger when failure to comply with WARNING results
in serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to serious
damage to human life or factory facility (including this equipment)
Indicate status of danger when failure to comply with WARNING results
in minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to minor
damage to worker or breakage to equipment or necessary to adjust.
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment
✔Note

ii
Safety Precautions
For safe operation of this unit, read this manual and the following safety precautions.
Servicing
For repair and servicing, contact your local ULVAC representative or
Components Division, ULVAC, Inc., Japan.
Turn OFF power.
If the unit fails, immediately turn off the power.
Use of a failed unit may cause a fire or electric shock.
Turn off power.
If the unit gets unusually hot or gives off smoke or unusual smell,
immediately turn OFF the power. Otherwise, fire can result.
Power supply
Before turning on the power to this instrument, make sure that the
operating voltage and supply power are in agreement. If incorrect power
is connected, this instrument and devices connected to this instrument may
fail or fire may result. The over-voltage comes under Category 1.
Protective grounding
Ground the sensor with class D (class 3) grounding. If the sensor is not
correctly connected, it will not only show the wrong pressure, there is a
risk of damage to the sensor and the equipment connected to the sensor
and a risk of fire.
Power supply
The unit may only be connected to supply and measurement units that
conform to the requirements of a grounded protective extra-low voltage
(SELV-E according to EN 61010). The connection to the gauge has to be
fused.
Power cable
The power cable is not packed in the same case. Use a cable having a
sufficient current capacity.
Installing an external switch in the power line
This unit has no power switch. Install an external switch, breaker and
over-current protector.
Check connection
See to it that the connection cables do not come into contact with other
conducting parts.
Do not disassemble
Do not disassemble this unit.
Do not modify
Do not modify this unit. If modified, its actions are not warranted. Also
fire or electric shock can result.
Be careful of operating environment.
Do not use the unit in a place where it may be splashed with water. If it
is wetted, trouble, electric leak or fire can result.
Laying cables
Before turning on power, install the display cable, sensor unit, sensor,
and others.
Keep out foreign objects
If any foreign objects, such as metals or combustibles, are admitted into
the unit through an opening, remove them. Also keep foreign objects away
from the terminals on the rear panel of the unit. Otherwise, the unit may
be damaged.
Discarding
If this unit is discarded, follow the regulations of your local government.
Incidentally, expenses for disposing of this unit are on the user’s account.

iii
Operating conditions
Use this unit within the scope of the environment set forth in the
specification.
Maintenance
The electric circuit in this instrument uses aluminum electrolytic
capacitors. Generally speaking, the life of the aluminum electrolytic
capacitor
becomes short as the ambient temperature rises. To prevent
components from damage, it is recommended to conduct maintenance at
ULVAC about once every 3 years.
Cautions in shipping the unit
If the unit is to be shipped back to ULVAC, pack it in the original
condition. If it is shipped bare, it may be damaged.

iv
Revision History
DATE
No.
Reason
Apr. 4, 2008
03
S/N:00001～first version
Aug. 25, 2009
04
・
Added CCMT-1000D/100D/10D/1D
・Section 2.1, added output impedance to specifications.
・Chapter 22, added EC DECLARATION OF CONFORMITY.
・
Chapter 18, added Interlock function.
July 27, 2011
05
・
Changed A5 version to B6 version.
・
Added multi-ionization gauge SH2
Mar. 1, 2012
06
S/N:01482～
Added SH2 (SPU combination mode), SH2 (SAU triple combination mode)
June 1, 2012
07
Corrected an error.
June 12, 2012
08
Corrected an error.
Sept. 10, 2013
09
・
BMR2 and BPR2 were discontinued.
・Chapter 10, added that in SC1 when it is lower than the measuring lower limit,
“HuF” is displayed and the output voltage is 10V.
Jun. 7, 2014
10
S/N:04050～
・Added connection check in combination mode of SH2.
Notice: SH2 before S/N:01000 does not output a set point.
・Chapter 5, displayed the sensor which is set in the program mode
・Chapter 6, added 『nc』which means that the sensor is not set and the setting is
factory default to the sensor unit selection.
July 7, 2014
11
Corrected an error.
Oct. 9, 2015
12
Added multi-ionization gauge ST2.
Nov. 21, 2017
13
Added the explanation of CALCULATION function to the pressure conversion
expression of each sensor.
Apr.20.2018
14
Added the Measurement units function.
Jul.3.2018
15
Added the Measurement display range function.
Oct.10.2019
16
Added Pirani Vacuum gauge Measuring Unit SWU
Corrected an error.

v
Contents
Page
Prior to Operation..................................................................................................................... i
Safety Notations....................................................................................................................... i
Safety Precautions................................................................................................................... ii
Revision History......................................................................................................................iv
Contents ..................................................................................................................................v
1. GETTING STARTED................................................................................................1
1.1. Overview of G-Tran Series..........................................................................................................1
1.2. Terminology..................................................................................................................................1
1.3. Features of This Unit....................................................................................................................2
2. SPECIFICATIONS AND COMPONENTS................................................................3
2.1. Specifications ................................................................................................................................3
2.2. Standard Accessories....................................................................................................................5
2.3. Options...........................................................................................................................................5
2.4. Dimensional Drawings DIN panel size......................................................................................6
2.5. Installation DIN panel ..................................................................................................................7
2.6. Dimensional Drawings JIS panel size.....................................................................................8
3. NAMES OF COMPONENTS AND DESCRIPTION OF FUNCTIONS .....................9
3.1. Front Panel Lights.........................................................................................................................9
3.2. Front Panel Switch Program Mode...........................................................................................10
3.3. Front Panel Switch Measurement Mode..................................................................................11
3.4. Rear Panel....................................................................................................................................12
3.5. Sensor Connector (D-sub 15 pin connector female, M2.6mm screw)..................................13
3.6. I/O Connector (D-sub 15 pin connector male, M2.6mm screw)...........................................14
3.7. Power Supply Connector (Phoenix Model MSTB2.5/3-STF, 08)........................................15
4. INSTALLATION.....................................................................................................16
4.1. Preparations.................................................................................................................................16
4.2. Installation...................................................................................................................................16
4.2.1. Installing the display unit.......................................................................................................................16
4.2.2. Circuit in the power supply....................................................................................................................16
4.2.3. Installation ...............................................................................................................................................17
5. FRONT PANEL OPERATION................................................................................18
5.1. Description of Front Panel Keys...............................................................................................18
5.1.1. Program mode.........................................................................................................................................18
5.1.2. Key operation in measurement..............................................................................................................18
6. SELECTION OF SENSOR UNIT............................................................................19
6.1. Selection of Sensor Unit.............................................................................................................19
6.2. Reset the unit to the factory default settings.............................................................................20
6.3. Factory set values........................................................................................................................20
7. SETPOINT ..............................................................................................................21
7.1. What is Setpoint?........................................................................................................................21
7.2. Setpoint Setting Range...............................................................................................................21
7.3. How to set Setpoint.....................................................................................................................21
7.3.1. How to set setpoint from front panel.....................................................................................................22
7.3.2. How to set setpoint from RS485...........................................................................................................23
8. Connection with External Devices:..........................................................................24
8.1. Output signal ...............................................................................................................................24
8.2. Input signal..................................................................................................................................25
8.2.1. RS485 communication...........................................................................................................................25
9. Pirani Gauge SW1 ...................................................................................................26
9.1. Sensor Unit Setting: “SP2”........................................................................................................26
9.2. Front Panel...................................................................................................................................26

vi
9.2.1. Pressure display state..............................................................................................................................26
9.2.2. Description of front panel keys..............................................................................................................26
9.3. Setting Operation........................................................................................................................26
9.3.1. RS485 communication operation setting “L1”, “L2”.........................................................................26
9.3.2. Front panel, external I/O operation setting: “AJ”................................................................................27
9.3.3. Method of setting....................................................................................................................................27
9.4. Connection with Sensor Unit.....................................................................................................28
9.5. Connection to External Device..................................................................................................28
9.6. Various Signals...........................................................................................................................28
9.6.1. Output voltage.........................................................................................................................................28
9.6.2. Filament burnout signal..........................................................................................................................29
9.6.3. ADJ adjustment.......................................................................................................................................29
9.6.4. Setpoint....................................................................................................................................................29
9.6.5. RS485 communication...........................................................................................................................29
9.7. Zero Point Adjustment and Atmospheric Pressure Adjustment............................................29
9.7.1. Adjusting Method...................................................................................................................................29
10. COLD CATHODE GAUGE SC1.............................................................................30
10.1. Setting the Sensor Unit...............................................................................................................30
10.2. Front Panel...................................................................................................................................30
10.2.1. Pressure display.......................................................................................................................................30
10.2.2. Front panel key description....................................................................................................................30
10.3. Settings Operation.......................................................................................................................30
10.3.1. RS485 communication operation setting “L1”, “L2”.........................................................................30
10.3.2. Front panel, external I/O operation setting: “Hi”.................................................................................30
10.3.3. Operation setting method.......................................................................................................................31
10.4. Connection to the Sensor Unit: “SENSOR” Connector.........................................................32
10.5. Connection with External Devices: “I/O” connector..............................................................32
10.6. Signals..........................................................................................................................................32
10.6.1. Output voltage.........................................................................................................................................32
10.6.2. HV ON signal: Pin 5...............................................................................................................................33
10.6.3. Discharge check signal: Pin 4................................................................................................................33
10.6.4. Setpoint: Pins 3, 7, 11.............................................................................................................................33
10.6.5. RS485 communication: Pins 10, 12......................................................................................................33
11. Pirani Gauge BPR2, SP1..........................................................................................34
11.1. Sensor Unit Setting: “SP1”........................................................................................................34
11.2. Front Panel...................................................................................................................................34
11.2.1. Pressure display.......................................................................................................................................34
11.2.2. Description of front panel keys..............................................................................................................34
11.3. Setting Operation........................................................................................................................34
11.3.1. RS485 communication operation setting “L1”, “L2”.........................................................................34
11.3.2. Operation setting method.......................................................................................................................35
11.4. Connecting to the Sensor Unit...................................................................................................36
11.5. Connection with External Devices............................................................................................36
11.6. External Input/Output Signal.....................................................................................................36
11.6.1. Output voltage.........................................................................................................................................36
Burnout signal.............................................................................................................................37
11.7.1. Setpoint....................................................................................................................................................37
11.7.2. RS485 communication...........................................................................................................................37
12. Hot Cathode Gauge BMR2 ......................................................................................38
12.1. Sensor Unit Setting: “Sn1” ........................................................................................................38
12.2. Front Panel...................................................................................................................................38
12.2.1. Pressure display.......................................................................................................................................38
12.2.2. Description of front panel keys..............................................................................................................38
12.3. Setting Operation........................................................................................................................38
12.3.1. Setting Overview ....................................................................................................................................38
12.3.2. RS485 communication operation setting “L1”, “L2”.........................................................................39
12.3.3. Front panel, external I/O operation setting...........................................................................................39
12.3.3.1. Filament operation setting “F1” ......................................................................................................39

vii
12.3.3.2. Degas operation setting “dE”...........................................................................................................39
12.3.3.3. Filament changeover setting “FL”..................................................................................................39
12.3.4. Operation setting method.......................................................................................................................39
12.4. Connection with the Sensor Unit ..............................................................................................41
12.5. Connection with External Devices............................................................................................41
12.6. Various Signals...........................................................................................................................41
12.6.1. Output voltage.........................................................................................................................................41
12.6.2. Filament ON signal.................................................................................................................................42
12.6.3. Degas ON signal.....................................................................................................................................42
12.6.4. Filament 1/2 changeover signal.............................................................................................................42
12.6.5. Pressure protection signal.......................................................................................................................42
12.6.6. Emission valid signal..............................................................................................................................42
12.6.7. Setpoint....................................................................................................................................................43
12.6.8. RS485 communication...........................................................................................................................43
13. Multi-Ionization Gauge SH2/ST2 ............................................................................44
13.1. Sensor Unit Setting: “Sh2” ........................................................................................................44
13.2. Front Panel...................................................................................................................................44
13.2.1. Pressure display.......................................................................................................................................44
13.2.2. Description of front panel keys..............................................................................................................44
13.2.3. Setting Operation....................................................................................................................................44
13.2.3.1. Setting Overview ..............................................................................................................................44
13.2.3.2. RS485 communication operation setting “L1”, “L2”...................................................................45
13.2.4. Front panel, external I/O operation setting...........................................................................................45
13.2.4.1. Filament operation setting “Fi”........................................................................................................45
13.2.4.2. Degas operation setting “dE”...........................................................................................................45
13.2.4.3. Filament changeover setting “FL”..................................................................................................45
13.3. Operation setting method...........................................................................................................45
13.4. Connection with the Sensor Unit ..............................................................................................47
13.5. Connection with External Devices............................................................................................47
13.6. Various Signals...........................................................................................................................47
13.6.1. Output voltage.........................................................................................................................................47
13.6.2. Filament ON signal.................................................................................................................................48
13.6.3. Degas ON signal.....................................................................................................................................48
13.6.4. Filament 1/2 changeover signal.............................................................................................................48
13.6.5. Pressure protection signal.......................................................................................................................49
13.6.6. Emission valid signal..............................................................................................................................49
13.6.7. Setpoint....................................................................................................................................................49
13.6.8. RS485 communication...........................................................................................................................49
14. Multi-Ionization Gauge SH2/ST2(SPU Combination mode) ....................................50
14.1. Sensor Unit Setting: “SPU”.......................................................................................................50
14.2. Front Panel...................................................................................................................................50
14.2.1. Pressure display.......................................................................................................................................50
14.2.2. Description of front panel keys..............................................................................................................50
14.3. Setting Operation........................................................................................................................51
14.3.1. Setting Overview ....................................................................................................................................51
14.3.2. RS485 communication operation setting “L1”, “L2”.........................................................................51
14.3.3. Front panel, external I/O operation setting...........................................................................................51
14.3.3.1. Filament operation setting “Fi”........................................................................................................51
14.3.3.2. Degas operation setting “dE”...........................................................................................................51
14.3.3.3. Filament changeover setting “FL”..................................................................................................51
14.3.4. Operation setting method.......................................................................................................................51
14.4. Connection with the Sensor Unit ..............................................................................................53
14.5. Connection with External Devices............................................................................................53
14.6. Various Signals...........................................................................................................................53
14.6.1. Output voltage.........................................................................................................................................53
14.6.2. Filament OFF signal...............................................................................................................................54
14.6.3. Degas ON signal.....................................................................................................................................54
14.6.4. Filament 1/2 changeover signal.............................................................................................................55

viii
14.6.5. Sensor error signal ..................................................................................................................................55
14.6.6. Emission Valid signal.............................................................................................................................55
14.6.7. Setpoint....................................................................................................................................................55
14.6.8. RS485 communication...........................................................................................................................55
15. Multi-Ionization Gauge SH2/ST2(SAU Triple Combination mode).........................56
15.1. Sensor Unit Setting: “SAU” ......................................................................................................56
15.2. Front Panel...................................................................................................................................56
15.2.1. Pressure display.......................................................................................................................................56
15.2.2. Description of front panel keys..............................................................................................................56
15.3. Setting Operation........................................................................................................................57
15.3.1. Setting Overview ....................................................................................................................................57
15.3.2. RS485 communication operation setting “L1”, “L2”.........................................................................57
15.3.3. Front panel, external I/O operation setting...........................................................................................57
15.3.3.1. Filament operation setting “Fi”........................................................................................................57
15.3.3.2. Degas operation setting “dE”...........................................................................................................57
15.3.3.3. Filament changeover setting “FL”..................................................................................................57
15.3.4. Operation setting method.......................................................................................................................57
15.4. Connection with the Sensor Unit ..............................................................................................59
15.5. Connection with External Devices............................................................................................59
15.6. Various Signals...........................................................................................................................59
15.6.1. Output voltage.........................................................................................................................................59
15.6.2. Filament OFF signal...............................................................................................................................60
15.6.3. Degas ON signal.....................................................................................................................................60
15.6.4. Filament 1/2 changeover signal.............................................................................................................61
15.6.5. Sensor error signal ..................................................................................................................................61
15.6.6. Emission Valid signal.............................................................................................................................61
15.6.7. Setpoint....................................................................................................................................................61
15.6.8. RS485 communication...........................................................................................................................61
16. Multi-Ionization Gauge SH2/ST2(SWU Combination mode)...................................62
16.1. Sensor Unit Setting: “SAU” ......................................................................................................62
16.2. Front Panel...................................................................................................................................62
16.2.1. Pressure display.......................................................................................................................................62
16.2.2. Description of front panel keys..............................................................................................................62
16.3. Setting Operation........................................................................................................................63
16.3.1. Setting Overview ....................................................................................................................................63
16.3.2. RS485 communication operation setting “L1”, “L2”.........................................................................63
16.3.3. Front panel, external I/O operation setting...........................................................................................63
16.3.3.1. Filament operation setting “Fi”........................................................................................................63
16.3.3.2. Degas operation setting “dE”...........................................................................................................63
16.3.3.3. Filament changeover setting “FL”..................................................................................................63
16.3.4. Operation setting method.......................................................................................................................63
16.4. Connection with the Sensor Unit ..............................................................................................65
16.5. Connection with External Devices............................................................................................65
16.6. Various Signals...........................................................................................................................65
16.6.1. Output voltage.........................................................................................................................................65
16.6.2. Filament OFF signal...............................................................................................................................66
16.6.3. Degas ON signal.....................................................................................................................................66
16.6.4. Filament 1/2 changeover signal.............................................................................................................67
16.6.5. Sensor error signal ..................................................................................................................................67
16.6.6. Emission Valid signal.............................................................................................................................67
16.6.7. Setpoint....................................................................................................................................................67
16.6.8. RS485 communication...........................................................................................................................67
17. CCM Series Ceramic Capacitance Manometer.........................................................68
17.1. Sensor Unit Setting.....................................................................................................................68
17.2. Front Panel Display....................................................................................................................68
17.2.1. Pressure display.......................................................................................................................................68
17.2.2. Front Panel Operation ............................................................................................................................68
17.3. Operation setting.........................................................................................................................68

ix
17.3.1. RS425 communication operation setting “L1”, “L2”.........................................................................68
17.3.2. Front panel and external I/O operation setting “AJ”...........................................................................68
17.3.3. Setting method ........................................................................................................................................69
17.4. Connection to sensor unit...........................................................................................................70
17.5. Connection to external device ...................................................................................................70
17.6. Signals..........................................................................................................................................70
17.6.1. Output voltage.........................................................................................................................................70
17.6.2. Setpoint....................................................................................................................................................71
17.6.3. RS485 communication...........................................................................................................................71
17.7. ZERO point adjustment .............................................................................................................71
17.7.1.Operation Front panel.............................................................................................................................71
17.7.2. Operation external I/O............................................................................................................................71
17.7.3. RS485 communication...........................................................................................................................71
18. CALCULATING FUNCTION.................................................................................72
18.1. Display pressure value in CAL function ..................................................................................72
18.2. Output Voltage in CAL Function mode...................................................................................72
18.3. Change Pressure unit..................................................................................................................72
18.4. CAL value of measurement unit...............................................................................................72
18.5. Setting CAL value ......................................................................................................................72
19. INTERLOCK FUNCTION.......................................................................................74
19.1. Interlock setting...........................................................................................................................74
20. MEASUREMENT UNITS FUNCTION...................................................................75
20.1. Measurement units setting .........................................................................................................75
21. MEASUREMENT DISPLAY RANGE SETTING ...................................................76
21.1. Measurement display range rA setting.....................................................................................76
22. RS485......................................................................................................................78
22.1. Communication Specifications .................................................................................................78
22.1.1. Standard specifications...........................................................................................................................78
22.1.2. Communication setting..........................................................................................................................78
22.2. Setting ..........................................................................................................................................78
22.2.1. RS485 communication setting “L2”.....................................................................................................78
22.2.2. Baud rate setting......................................................................................................................................78
22.2.3. Address setting........................................................................................................................................78
22.2.4. Setting the checksum collating function...............................................................................................78
22.2.5. Setting the terminator .............................................................................................................................79
22.2.6. Setting method ........................................................................................................................................79
22.3. Standard Data Format.................................................................................................................82
22.3.1. Command list..........................................................................................................................................82
22.3.2. When received normally........................................................................................................................82
22.3.3. When receiving is faulty ........................................................................................................................82
22.4. Command ....................................................................................................................................83
22.4.1. Reading the measurement value/status.................................................................................................83
22.4.2. Writing status ..........................................................................................................................................83
22.4.3. Reading a status.......................................................................................................................................83
22.4.4. Reading the software version.................................................................................................................83
22.4.5. Reading setpoint 1 value........................................................................................................................83
22.4.6. Reading the setpoint 2 value..................................................................................................................83
22.4.7. Reading the setpoint 3 value..................................................................................................................84
22.4.8. Writing the setpoint 1 set value .............................................................................................................84
22.4.9. Writing the setpoint 2 set value .............................................................................................................84
22.4.10. Writing the setpoint 3 set value .............................................................................................................84
22.4.11. SW1 ZERO point adjustment command .............................................................................................84
22.4.12. SW1 atmospheric pressure adjustment command ..............................................................................84
22.4.13. SW1 zero point, atmospheric pressure adjustment correction reset command................................84
22.4.14. CCM zero point adjustment command.................................................................................................85
22.4.15. Zero point, atmospheric pressure adjustment correction reset command.........................................85
22.5. Checksum....................................................................................................................................85
22.5.1. Example: when reading the measurement value of address 11 and status........................................85

x
22.6. Status Setting List .......................................................................................................................86
22.6.1. When writing...........................................................................................................................................86
22.6.2. When reading..........................................................................................................................................87
22.6.3. in reading .................................................................................................................................................88
22.7. ASCII Code Table......................................................................................................................89
23. TROUBLESHOOTING ...........................................................................................90
24. WARRANTY ..........................................................................................................92
25. China RoHS Declaration..........................................................................................93
26. EC DECLARATION OF CONFORMITY................................................................94
27. Certificate of Decontamination................................................................................95

1
1. GETTING STARTED
1.1. Overview of G-Tran Series
Units of the G-TRAN series vacuum gauges are varied in type and include the following
types.“Sensor Unit” indicates all models and types of box units and sensor units throughout this
manual. as of 2019
Unit
Major
classification
Unit
Minor
classification
Specification Type Model
Measurement
unit
Box
unit
Analog/communication
Pirani
BPR2*
Ionization
BMR2*
Sensor
unit
Analog
Pirani
SP1
Analog
CCG
SC1
Analog/communication
Pirani (atmospheric
pressure)
SW1
Analog/communication Ionization, multi
SH2
ST2
SH2/ST2-dedicated
Pirani
SPU
SH2/ST2-dedicated
Pirani
SWU
SH2/ST2-dedicated
Pressure sensor
SAU
Analog
Diaphragm
CCMT-D
Display
unit
1CH
Digital
24 VDC
Pirani/ionization/
CCG/diaphragm/multi
ISG1
4CH
Digital
24 VDC
Pirani/ionization/
CCG/multi
IM1R1
100 VAC
IM2R1
*: End of sale.
1.2. Terminology
The following terms have the same meanings throughout this manual.
Program
PROGRAM
PROG
Filament
FILAMENT
FIL
High voltage
HIGH VOLTAGE
HV
Degas
DEGAS
DEG
Zero
ZERO
ZERO
Setpoint
SETPOINT
ST
Error signal
ERROR
ERR
Protection (pressure)
PROTECT
PRT
Emission valid
Emission Valid, Em.Valid
E.V.
Communication mode
Remote mode
RS-MODE
CAL function
CALCULATING FUNCTION
CAL
Pirani vacuum gauge
Pirani gauge
PG
Hot cathode ionization vacuum
gauge
Hot cathode gauge
IG
Cold cathode ionization vacuum
gauge
Cold cathode gauge
CCG
Diaphragm vacuum gauge
Ceramic capacitance
manometer
CCM

2
1.3. Features of This Unit
• This display unit is for exclusive use with G-TRAN series:
Pirani gauge sensor unit SP1
Pirani gauge box unit BPR2 (end of sale)
Atmospheric pressure Pirani vacuum gauge SW1
Cold cathode gauge SC1
Hot cathode gauge BMR2 (end of sale)
Multi-Ionization SH2
Multi-Ionization SH2 (SH2+SPU Combination mode)
Multi-Ionization SH2 (SH2+SPU+SAU Triple Combination mode)
Multi-Ionization SH2 (SH2+SWU Combination mode)
Multi-Ionization ST2
Multi-Ionization ST2 (ST2+SPU Combination mode)
Multi-Ionization ST2 (ST2+SPU+SAU Triple Combination mode)
Multi-Ionization ST2 (ST2+SWU Combination mode)
CCM series ceramic capacitance manometer
• By connecting the sensor unit, measured pressure can be easily displayed, setpoint and other
operations can be performed easily, and the operating state can be checked at a glance.
• Measurement can be made by remote operation via a display unit.
• Two independent pressure setpoints are available
• Compact size compatible with DIN standards (48 ×96)
• Serial communication RS485 is included.
• CE marking
• Environment-friendly display compatible with RoHS directives.

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2. SPECIFICATIONS AND COMPONENTS
2.1. Specifications
Name
1-channel digital display unit ISG1
Number of sensor units
connected
1 pc.
Sensor unit
G-Tran
series
Pirani sensor unit SP1
4.0 ×10-1 to 3.0 ×10+3 Pa
Pirani box unit BPR2
Pirani sensor unit SW1-1
5.0 ×10-2 to 1.2 ×10+5 Pa
Cold cathode ionization
gauge SC1
1.0 ×10-5 to 1.0 ×10+0 Pa
Hot cathode ionization
gauge BMR2
5.0 ×10-8 to 9.9 ×10+0 Pa
Multi-Ionization SH2
5.0 ×10-8 to 1.0 ×10+1 Pa
Multi-Ionization SH2
(SPU Combination
mode)
5.0 ×10-8 to 1.0 ×10+4 Pa
Multi-Ionization SH2
(SAU Triple
Combination mode)
5.0 ×10-8 to 1.0 ×10+5 Pa
Multi-Ionization SH2
(SWU Combination
mode)
5.0 ×10-8 to 1.0 ×10+5 Pa
Multi-Ionization ST2
1.0 ×10-5 to 1.0 ×10+1 Pa
Multi-Ionization ST2
(SPU Combination
mode)
1.0 ×10-5 to 1.0 ×10+4 Pa
Multi-Ionization ST2
(SAU Triple
Combination mode)
1.0 ×10-5 to 1.0 ×10+5 Pa
Multi-Ionization ST2
(SWU Combination
mode)
1.0 ×10-5 to 1.0 ×10+5 Pa
Ceramic
capacitance
manometer
CCMT-1000A/1000D
0.0×10+1～1.3×10+5 Pa *1
CCMH-1000A
CCMT-100A/100D
0.0×10+0～1.3×10+4 Pa *1
CCMH-100A
CCMT-10A/10D
0.0×10-1～1.3×10+3 Pa *1
CCMH-10A
CCMH-1A
0.0×10-2～1.3×10+2 Pa *1
CCMT-1D
Analog input Reading the analog signal (voltage) from the sensor
Update time
70 ms
Internal
processing
5 times moving average
Resolution
0.2 mV
Display
Digital display of mantissa part 2 digits, exponential part 1 digit
□.□ ×10
□
Unit
Pa (Pascal), Torr, mbar
Pressure range
Pressure range of each sensor unit
Update time
200 ms
Accuracy
±2% ±1 digit against the pressure value from the measurement unit
* CCM series: 1/10 or less of the full scale ±4 digits
Analog output
0 V to 10 V DC pseudo-log. output, log, linear output
Note: The output differs with each unit.
Update time
70 ms
Resolution
1 mV

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Analog output
Output error
±10mV
Impedance
100Ω
Accuracy
±10 mV against the voltage converted value of pressure display
Control input signal
Actuated by open collector input, negative logic
Filament, etc. ON/OFF signal, zero point adjustment signal, etc.
Control output signal
Open collector output, negative logic
[Rating: 40 VMAX, 90 mAMAX,. 70 mW]
Signal of error, filament and other on signal and others
Setpoints 1, 2, 3
Communication
RS-485
Baud rate
9600/19200/38400 bps
Number of nodes
32 (including host)
Distance
1200 m
Memory function
Set value by communication is backed up by EEPROM.
CAL function
Arbitrary value [1.0 ×10-3 to 1.0 ×10+3] is multiplied by the
measurement value and displayed.
LED display
ERROR
ST-1
DGS
ST-2
ZERO
ST-3
Line voltage
24 VDC ±1 V Ripple and noise below 1%
Current consumption
2 W (display unit alone) Maximum 30 W (when BRM2 is used)
Note: Power consumption by other interfaced units is to be added.
CE standard
Low voltage directive EN61010-1:2001(2nd Edition)
Radiation field intensity measurement:
EN55011:2007, A2:2007 group1 ClassA (Radiated)
Radiation electromagnetic field test: EN61000-4-3:2006
Static electricity test: EN61000-4-2:1995, A1:1998,A2:2001
Transient burst test: EN61000-4-4:2004
Lightening surge test: EN61000-4-5:2006
Conduction test: EN61000-4-6:2007
Commercial magnetic field test: EN61000-4-8:1993, A1:2001
Over-voltage category
Category I: Connected to a circuit that holds down transient over-
voltage at a sufficiently low level
I/O connector
Sensor unit side
D-sub15 pin connector female, M2.6mm screw
Control host side
D-sub15 pin connector male, M2.6mm screw
Power supply
Phoenix Model MSTB2.5/3-GF-5.08
Connected cable length
Length of cable from this unit to the sensor unit, calculated with
24AWG.
Pirani sensor unit SP1
up to 50 m
Pirani box unit BPR2
up to 100 m
Pirani gauge SW1
up to 100 m
Cold cathode ion gauge SC1
up to 100 m
Hot cathode ion gauge BMR2
up to 10 m
Multi Ionization SH2/ST2
up to 20 m
Multi Ionization SH2/ST2 (SPU /SWU Combination)
up to 20 m
Multi Ionization SH2/ST2 (SAU Triple Combination)
up to 20 m
Ceramic capacitance manometer CCMT series
up to 100 m
Ceramic capacitance manometer CCMH series
up to 15 m
Operating temperature
range
10 to 40°C
Operating humidity range
15 to 80% (not condensing)
Storage
-20 to 65°C (non-operating, not condensing)
Weight
250 g

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Outside dimensions
DIN 48 ×96 mm, basic unit 70 mm deep
JIS rack size 50
×
100mm is also available as option.
*1: Pressure display of CCM series: The minimum digit are 1.0, 2.0 …9.0, the decimal point is not
displayed.
2.2. Standard Accessories
Power connector
MSTB 2.5/3-STF-5.08 made by PHOENIX
1 pc.
DIN panel fixing tools
fitting
2 pcs.
Quick manual
1 pc
Instruction manual
CD
1 pc
2.3. Options
JIS rack size type
Display unit cable
2, 5, 10,15,20,25,30,35,40 m long
(between the basic unit and sensor unit)
Sensor unit, sensor head
Refer to the applicable sensor units below.
D-sub15 pin connector female
M2.6mm screw, for sensor connector
D-sub15 pin connector male
M2.6mm screw, for I/O connector
JCSS alibration certificate
Only combination with sensor unit
General proofreading test
Only combination with sensor unit
Inspection certificate
Calibration certificate

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2.4. Dimensional Drawings DIN panel size
91
92
45
PANEL CUT
48
96
83
44.5
70
10
ST1 ST2 ST3
ERROR
DEG
ZERO
ZERO DEG FILPRO
G
SENSOR
I / O
DC24V FG
-
+
10 11 12 14 15139
1 2 3 4 76 85
1 2 3 4 76 85
10 11 12 14 15139
(60) (100)
(R50)
(105)

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2.5. Installation DIN panel
Panel thickness: <4mm

8
2.6. Dimensional Drawings JIS panel size
2-M4
49.5
25
92
86
PANEL CUT
45.583
2-φ4.5
92
50
12.5
100
70
5
9 13 1514121110
5 86 74321
5 86 74321
9 13 1514121110
+
-
FG
DC24V
I / O
SENSOR
PRO
G
FIL
DEG
ZERO
ZERO
DEG
ERROR
ST3
ST2
ST1
(60) (100)
(R50)