Ulvac G-20DA User manual

P8114-2~01-12
ULVAC
INSTRUCTION MANUAL
OIL ROTARY VACUUM PUMP
MODEL
MODEL
MODEL
MODEL
G-20DA
G-25SA
G-50DA
G-50SA
Before Use
For safe and efficient use of this pump, please read this manual
carefully before operation.
After reading the manual, keep it
in yourfile for future reference.
Specifications
in this manual are subject to change without notice
due
to future improvement.
ULVAC KIKO, Inc.
Bjj
G-20DA
G-25SA
G-50DA
G-50SA
No. P8114-2-01-12
ULVAC
Note: Except for these pages, this
manual reads from back to front.

No. 62400-2-02-4
Sales, service agency, and the where to make contact
<Sales Office>
Sales Division &Overseas Division &Yokohama Branch
1-10-4, Kitashinyokohama, Kohoku-ku, Yokohama-shi, Kanagawa Prf. Japan
Yokohama branch:
TEL [phone]
Overseas Division:
TEL [phone]
Osaka Branch
FAX [phone]
FAX [phone]
3-3-31 Miyahara, Yodogawa-ku, Osaka-shi, Osaka-tu Japan
TEL[phone] FAX[phone]
Nagoya Branch
3-11-31 Sakae, Naka-ku, Nagoya-shi, Aichi Prf. Japan
TEL[phone] FAX[phone]
<Service Office>
Yokohama Branch
1-10-4, Kitashinyokohama, Kohoku-ku, Yokohama-shi, Kanagawa Prf. Japan
TEL[phone] FAX[phone]
Miyazaki Branch
291-7 Chausubaru, Saito-shi, Miyazaki Prf. Japan
TEL[phone] FAX[phone]
ULVAC GmbH
Parkring 11, 85748, Garching, Germany
TEL[phone] FAX[phone]
ULVAC KIKO.Inc.
www.ulvac-kiko.com
HEAD OFFICE/ Miyazaki Plan
291-7 Chausubaru, Saito-shi, Miyazaki Prf. Japan
TEL: [phone]
FAX: [phone]
Usage Status Check Sheet (for use in Operation Manual)
• Forthe purpose of safety control of repair personnel, fill in within the heavy line frame and attach the sheet to
the item
of which repair is requested.
• In case this sheetwere not attached orfilled in, your request
of repair and service may notbe accepted.
* In accordance with the Private Information Protection Law, the provided information will be used only for
determining the cause of failure and whether detoxifying washing should be conducted. Itwill never be provided
to any third person.
Model Name: ______ _ Manufacturer's Serial No.:
______ _
1. Inhaled Gas * Please be sure to fill in.
(1) Whether there is harmful effect on human bodies
below.)
(2) Whether there
is unusual smell
Yes No
Yes No
(3) Type and Name ofGas:
____________ _
(Sing your name
* Industrial Safety and Health Law designates particular substances as the materials to
be notified.
2. Usage Status
Operation Method: Approx. ( ) hours per day, ( ) years
and ( ) months
o Continuous Operation o Intermittent Operation
Usage:. ______________ _
3. Failure Status oUnusual Noise
oOil Leakage oAbnormal Pressure oAbnormal Actuation Other
Symptoms:.
____________ _
4. Detail
of Request oRepair (Overhaul) oRegular Checks
5. Others:. ____________ _
Company Name: Personnel
in charge:
Address:
Tel: Fax: E-mail:
Agent Name: Personnel
in charge:
Address:
Tel: Fax:
* In case you do not have any direct transaction with us, please be sure to fill in the agent
name.
6. Confirmation
The gas and substance used
in this pump or unit is harmless to human bodies, or it is not
contaminated by any substance harmful to human bodies.
Signed. _____________ (seal) Date:
---------
• In orderto avoid a trouble during transportation, please evacuate oil from any oil pump before shipping.
• You are requested to ship the package to our Service Division (CS Center}. (See the attached list
of addresses.}

Date Prepared: January 28, 2013
2JE
J. As evaluations
on hazards are not necessary satisfactory, special attention should be paid for use.
2. This MSDS, summarizing matters to be attended to, is required for proper use
of the product and is intended for
normal use.
3. Referring to this MSDS, properly use and handle this product onthe user's own responsibility.
4. The contents of this MSDS are based on information available as of today and our knowledge. The information,
data, and evaluations herein are not guaranteed, and in addition, may be revised due to revision
of laws or
knowledge newly obtained.
717
Germ Cell Mutagenicity
Carcinogenicity
Reproductive Toxicity
STOT/Systemic Toxicity -
Single Exposure
STOT/Systemic
Toxicity-
Repeated Exposure
Date Prepared: January 28, 2013
2JE
Information is not classified as Germ Cell Mutagenicity.
Information is not classified
as Carcinogenicity.
Information is not classified as Reproductive Toxicity.
Information is not classified as Specific Target Organ Toxicity/
Systemic Toxicity (Single Exposure).
Information is not classified as Specific Target OrganToxicity/
Systemic Toxicity (Repeated Exposure).
AspirationHazard Aspiration Hazard Information is
not classified as Aspiration Hazard.
12. Ecological Information
Ecotoxicity
Persistence and Degradability
Bioaccumulative Potential
Mobility in Soil
OtherAdverse Effects
Environmental Criteria
13. Disposal Considerations
Waste Residues
Contaminated Containers
and Packaging
14. Transport Information
International Regulation
UN Classification
Special Precautions
15. Regnlatory Information
EEC directive
USA directive
16. Other Information
Information is not classified as Aquatic Toxicity.
No information available
No information available
No information available
No information available
No information available
Dispose the waste according to national and local regulations.
Do not dump.
Contaminated
or empty container/packaging are to be disposed according to
national and local regulations.
Not applicable
Load the containers in a manner that they are certain
not to result in direct
sunlight exposure, damage, corrosion, leak, while being transported.
Do notplace heavy load on top of the container.
on ELINCS inventory
on TSCA inventory
References:
I) Recommendation of Occupational Exposure Limits by Japan Society for Occupational Health
2) Thresholds limit values for chemical substances and physical agents and biological exposure
indices byACGIH
3) MSDS
of raw materials
617

Date Prepared: January 28, 2013
2JE
protective equipment.
Do not eat, drink or smoke when using this product.
--------------------------------------------------------------------------------------------------------------- ---- -
9. Physical and Chemical Properties
Physical State:
Appearance
Color
Odor
pH
Melting/Freezing Point
Boiling Point
Flash Point
Explosive Range (Explosive Limits)
Vapor Pressure
Vapor Density (air= I)
Specific Gravity (Density)
Solubility
Partition Coefficient: n-octanol/water
Auto-ignition Temperature
Pore point
Volatility
Kinematic viscosity
Liquid
Light yellow
Slight Oily odor
Not applicable
Not applicable
165°C/O.lmmHg
~200°C(COC)
Upper limit: 7% Lower limit: 1% (estimated value)
No data available
No data available
0.88g/cm3 (15°C)
Insoluble in water
No data available
No data available
-l5°C
None (at room temperatures)
45mm2
Is (40°C)
-----------------------------------------------------------------------------------------------------------
-------------------------------------
IO. Stability and Reactivity
Stability
Possibility
of Hazardous Reactions
Conditions to Avoid
Incompatible Materials
Hazardous Decomposition Products
Stable
Reacts with strong oxidizer.
No data available (Hazardous reactions will not occur under normal
use)
Strong oxidizer
None
------------------------------------------------
-------------------------------------------------------------------------------- ---------
11. Toxicological Information
Acute Toxicity:
Oral
Dermal
Inhalation
Skin Corrosion/Irritation
Serious Eye Damage/Eye Irritation
Respiratory or Skin Sensitization
Information is not classified as Acute Toxicity (Oral).
Information is not classified as Acute Toxicity (Dermal).
Information is not classified as Acute Toxicity (Inhalation).
Information is not classified as Skin Corrosion/Irritation.
Information is not classified as Serious Eye Damage/Eye Irritation.
Information is not classified as Respiratory or Skin Sensitization.
5/7
Date Prepared: January 28, 2013
2JE
Precautions for Safe Handling Obtain special instructions before use.
Storage:
Technical Measures
Incompatible Materials
Conditions for Safe Storage
Do not handle until all safety precautions have been read and
understood.
Be cautious notto use any naked fire.
As vapors released from petroleum products are heavier than air,
they are liable to stagnate.
Wash hands thoroughly after handling.
Use only outdoors or in a well-ventilated area.
Do not eat, drink
or smoke when using this product.
Do notpress an empty container.
It may explode under pressure.
Do not drink.
Keep out
of reach of children.
Avoid heat, sparks, flames, and static electricity.
Keep container tightly closed.
Refer to '10. Stability and Reactivity'.
Store in a well-ventilated area.
Store avoiding exposure to direct sunlight.
Store away from oxidizer.
Store locked up.
Materials for Containers/Packaging When replacing the container, use metal or glass container. Some
kinds of resin-treated container may melt.
Use airtight, anti-breakage type containers.
8. Exposnre Controls/Personal Protection
Permissible Concentration (Exposure Limit, a biological exposure index):
Japan Society for Occupational Health (2010): 3mg/m3 (mineral oil mist)
IJ
ACGIH (2010): TWA 5mg/ m3 (mineral oil mist) 2>
Standards for Allowable Density of Hazardous Substances in Labor OperationAir: Not established
Engineering Controls:
Personal Protective Equipment
Respiratory Protection:
Hand Protection:
Eye Protection:
Skin and Body Protection:
Hygienic Precautions:
When mist and vapors are produced, seal off sources or provide exhaust
ventilation. Facilities for rinsing eyes and washing a body are required near the
workplace.
Wear appropriate respiratory protection.
If necessary, wear oil-resistant protective gloves.
If diffusion is possible, wear eye protection.
If necessary, wear protective clothing and face protection.
Wash hands thoroughly after handling.
Regularly inspect protective equipment according to the inspection table
of
4/7

6. Accidental Release Measures
Personal Precautions, Protective
Equipment and Emergency Procedures
Environmental Precautions
Collection/Neutralization
and Methods/Materials for Containment
Prevention
of Secondary Hazards
Date Prepared: January 28, 2013
2JE
If skin or eye contact is possible, wear protective equipment. If mist
is produced, wear respiratory protective equipment to avoid
inhalation.
Take up as much
as possible to avoid soil contamination and water
pollution.
Avoid release to the environment.
Eliminate the source of ignition of the surrounding.
In the case
of a large amount: Dike ahead of liquid spill area to
minimize migration and then sweep into 8.n empty container for
disposal in a safe place. After disposal, wash away with plenty of
water. In doing so, take care to prevent the high concentration of
wastes from entering public watercourses such as rivers.
In the case of a small amount: Take up into an empty container by
absorbing the spill with earth and sand
or rags, and furthermore sop
up with rags thoroughly.
Remove all the ignition sources immediately. (Do not smoke nearby
and keep away from sparks and flames.)
Report to the related organs for help.
-----------------------------------------------------------------------------------------------------------------
7. Handling and Storage
Handling:
Technical Measures
Local Exhaust Ventilation/
Full Ventilation System
Avoiding Contact
Before repairing machinery with remnant oils on, remove them
thoroughly in a safe place. Take precautionary measures against
static discharge and wear electro conductive clothing and shoes.
As vapors released from petroleum products are heavier than air,
they are liable to stagnate.
Due to it, attention should be paid to ventilation and fire.
Handle at room temperatures, paying attention to moisture and to
impurities not to mix with.
If skin or eye contact is possible, wear protective equipment. If mist
is produced, wear respiratory protective equipment to avoid
inhalation.
Use a pump and the like to take out
of container.
Do not suck through a tube.
Do not weld, heat, hole, and cut
off the container. Residues may
ignite involving explosion.
Refer to '8. Exposure Controls/Personal Protection'.
Refer
to' 10. Stability and Reactivity'.
317
[Disposal]
None
Date Prepared: January 28, 2013
2JE
3. Composition/Information on Ingredients
Distinction between Substance and Mixture : Substance
Petro-hydrocarbons
Not identified
Chemical Name/Generic
Name:
Chemical Formula:
Ingredient and Concentration
4. First-Aid Measures
Inhalation:
Skin Contact:
Eye Contact:
Ingestion:
Expected Acute and
Delayed Symptoms, and
Most Important Symptoms/
Effects:
5. Fire-Fighting Measures
Suitable Extinguishing Media
Unsuitable Extinguishing Media
Specific Hazards
Specific Fire-Fighting Measures
Special Protective Actions for
Fire-Fighting
Mineral oil (Highly-refined oil) 100%
Remove victim to fresh air and let him rinse mouth thoroughly with water.
Wrapping a blanket and the like around him to keep warm for a rest, call a
doctor/physician immediately.
Rinse skin with soap and water.
Immediately rinse eyes with clean water for at least
15 minutes. Remove
contact lenses if present. Continue rinsing. If eye irritation persists, get medical
attention.
Call a doctor/physician immediately. Do not induce vomiting.
If affected, the mouth should be rinsed out thoroughly with water.
If swallowed, may suffer from diarrhea and vomiting.
May cause inflammation if in eyes.
May cause inflammation if on skin.
May feel unwell
if mist is inhaled.
Foggy reinforcing agent, foam, powder, or carbon dioxide
Jet water
Currently there is no useful information.
Shut offthe fire source.
Use powder or carbon dioxide extinguishers at the beginning of fire.
It is effective to intercept the air from a big fire with foam
extinguishers. Use
of water may cause spreading of fire.
Cool the surrounding facilities with water spray.
Evacuate non essential personnel around the fire.
Wearing protective glasses, protective clothing, and
if necessary,
respiratory protective equipment, start to fight fire on the windward
side.
217

Material Safety Data Sheet
Date Prepared: January 28, 2013
2JE
------------------------------------------------------------------------------ ------
1. Identification of the Substance/Preparation and of the Company
ProductName
Product Code
Supplier
Address
Manufacturer
Address
Emergency Telephone Number
Recommended Use and
Restrictions
on Use
SMR-100
00001
ULVAC KIKO, Inc.
291-7, Chausubaru, Saito-city,Miyazaki, Japan
Tel: [phone] FAX: [phone]
MORESCO Corporation.
5-5-3, Minatojima-minarnimachi, Chuo-kn, Kobe-city, Hyogo, Japan
Functional Fluids Sales Department Sales Section
Tel: [phone] FAX: [phone]
Functional Fluids Sales Department Tokyo Sales Section
Tel: [phone] FAX: [phone]
Lubricating Oils Manufacturing DepartmentTechnology Section
Tel: [phone]
Customer Center
Tel: [phone]
FAX: [phone]
FAX: [phone]
EmailAddress: [email protected]
Vacuum Pump Oil
---------------------------------------------------------------------------------- -
2. Hazard Identification
GHS Classification:
Physical Hazards
Health Hazards
Environmental Hazards
Hazardous to Aquatic Environment
Label Elements:
Pictograrns/Symbols
Signal Word
Hazard Statements
Precautionary Statements
None
None
None
[Prevention]
None
[Response]
None
[Storage]
None
Not applicable to the GHS Classification
Not applicable to the GHS Classification
Not applicable to the GHS Classification
1/7
Warranty
(1) The warranty for this pump (this equipment) extends for a period of one yearfrom the date of
shipment.
(2) Any malfunctions ordefects which occur under normal usage conditions during the warranty
period will be repaired free
of charge.
Note, the warranty stated here is an individual warranty covering the pump. In addition, the
scope
of the warranty coverage concerning repairs is limited to the repair and/or replacement
of parts.
Normal usage conditions refer to the following:
a) Ambient temperature and humidity during operation: 7 - 40°C, below 85% RH
b) Operation
in accordance with the user manual
(3) Repair fees will incur during the warranty period for the following cases:
a) Malfunctions due to a natural disaster
or fire.
b) Malfunctions caused by special atmospheric conditions, such as salt damage,
inflammable gas, corrosive gas, radiation
or pollution.
c) Malfunctions caused by usage conditions that differfrom those stated
in the usermanual
(performance specifications, maintenance and inspection, etc.).
d) Malfunctions caused by modifications or repairs carried out by a party other than the
manufacturer, or by a service company not approved by the manufacturer.
e) Malfunctions caused by noise (electric disturbance).
f) Malfunctions that occurwhen not using a rated powersupply.
g) Malfunctions that occurwhen there is an abnormal rise
in internal pressure due to the
pump exhaust outlet being blocked during operation, etc.
h) Malfunctions that occur, when the pump is damaged as a result
of being dropped or
falling, etc.
i) Malfunctions which are determined by the manufacturer's technical personnel
to be
caused by conditions that do not comply with the usage conditions for this vacuum pump.
j) Malfunctions due to the replacement of consumables.
(4) Disclaimer
a) We shall not be liable for any malfunctions
of our products caused by the customer,
regardless
if the malfunction does not fall within the warranty period, nor shall we be liable
for any loss
of opportunity for the customer's clients orfor compensation for any damages
to other products, laborcosts, production loss, transportation expenses and other related
work.
b) We shall not be liable for any claims and patent infringements, including secondary
damages, filed a claim by a third party against the customer.

Fig-11 o·
isassembl D .
y raw1ng of G-25SA
Fig-12 o·
isassembly D .raw1ng of G-50SA
-28 --27 -

8. Main Expendable parts
8. 2 Disassembly Drawing 8. 1
Main Expendable Parts List
Table-4 Main Expendable Parts List
Location No Parts Name Standard & Dimension Materials
Q' ty
Coupling
1
Spider
PU 1
Oil seal
2 Oil seal HTC!l-25-7
NBR 1
housing 3
0-Ring
S-29 NBR
1
4
0-Ring S-15
NBR 1
Casing
Common 5
0-Ring
S-120. 9
NBR 1
Suction port 6
0-Ring
JIS B 2401 P-18
NBR 1
No. 1 pump room 7
Oil seal
SC12-25-7
NBR 1
8
Oil level gauge KW-No. OA
PC 1
Front cover 9
0-Ring
JIS B 2401 P-8 NBR
1
Pomp room 10 Discharge valve 9X24Xt0. l SUS
3
11
Vane spring
<I> 2. 4X24 SWP 3
G-20DA
Rotor 12
Vane, 1 ST
20Xl3Xt4 S45C 2
13
Vane, 2N°
13Xl1Xt4
S45C 2
Pomp room 14 Discharge valve
9X24Xt0. 1
SUS 2
15 Vane spring cp 2. 4X24
SWP 2
G-25SA
Rotor
16 Vane
20Xl3Xt4
S45C 2
Side cover 17
Ball bearing 6900open
SUJ
1
Pomp room 18 Discharge valve 9X24Xt0. l SUS
4
19 Vane
spring cp 2. 4X24
SWP 3
G-50DA
Rotor 20
Vane, 1 ST
45 X 13X t4
S45C 2
21
Vane, 2N°
13X11Xt4
S45C 2
22 Discharge
valve q,6. 2X cp 11X6
FPM 3
Pomp room
Discharge valve
23 spring
cp7Xl5
SWP 3
24
Vane spring
<I> 2. 4X24 SWP 2
Rotor
25 Vane
45X 13 X t4
S45C 2
G-50SA 26
Oil seal
VCI0-20-4
NBR 1
Side cover
27 Ball bearing 6900open SUJ 1
Adverse
28
Oil supply valve cp4Xcp5X7.3
FPM 1
current
29
0-Ring S-4
NBR
1
prevention
Fig-10 Disassembly Drawing of G--20DA,50DA valve
30
0-Ring S-18
NBR 2
-25 -
-26 -

7.Product Disposal
Check and
dispose the pump in accordance with laws and regulations
When disposing the pump,
by the local administration.
_& GAUT ION _____________ -:-1
When evacuating toxic gases which present hazardous situations to the human body
entrust the pump should be disposed with authorized professional specialist.
· 24 ·
Trouble
@
®
@)
Unusual sound
CD
®
®
@
@
@
(J)
Abnormal high
CD
temperature on
the
pump surface
R.T>+50°C
®
®
@
Oil spouting from
CD
exhaust port
®
Oil leak
out of the
CD
pump
Cause
Leakage from the tube
connection with the pump
Applying no specified oil
No circulating oil.
Clogging the oi 1 aperture of
the pump
cover
Abnormal
input voltage
Inferior motor
Coming different objects into
the pump
Insufficient
quantity of the
oil
broken the spider of coupling
No circulating oi 1. Clogging
oi 1 aperture of the pump cover
Internal parts damaged
Continuous operating
at
high
suction pressure
Insufficient quantity of
the oi 1 (Oi 1 shortage, low
cooling effect)
High temperature
evacuating gases
No circulating oil.
Clogging
the oi 1 aperture of the
pump
cover
Too sufficient oil
quantity for the specified
level
Continuous operating at
igh suction pressure
a-rings or oil seals of the
case or the cover
· 23 ·
Procedure
Note
@ Detect leakage by the
leak
detector, and stop 1 eakage
® Charge specified oil after
overhauling or repairing
6. 3
@)
Overhauling and repairing,
clean the oil aperture
CD
Adjust input voltage
within
3. 5
±10%
®
Replace motor
®
Eliminate different
objects
then overhaul and repair the
pump
@
Fill
the oil up to the
3. 2
specified quantity
@ Change
the spider of coupling
6. 4
@
Overhauling and repairing,
clean the oil aperture
(J)
Overhauling and repairing
(Replace parts)
CD
Temperature of the pump
surface wi 11 be so°C
during continuous
operation, but no problem
happened
®
Fill the oil up to
the 3. 2
specified quantity
®
Set the gas cooling unit
on
suction side
@
Overhauling and repairing,
clean the
pump aperture
CD
Drain the oil to the 3. 2
specified
level
®
Set oi 1 mist-trap on 4. 6
exhaust side
CD
Inspect and replace o-ring
6. 2
or oil seals

6.5 Trouble Check List
Trouble
No rotating pump
Table-3 Trouble Check List
Cause
CD No connecting power
® Power switch off
® Abnormal input voltage
® Over load relay operated
@
Inferior motor
® High
oil viscosity at low
temperature
C'IJ
Sticking the rotor
by coming
different objects into the
pump
®
Generating rust inside the
pump by evacuating water
vapor or sol vent
®
After evacuating reactive
gases,
reacted materials
deposited inside the pump
@)
Internal parts damaged
Procedure
CD Connect power cord
® Turn on power switch
@ Adjust input voltage within
±10%
® Reset button switch
@
Replace motor
®
Warm atmosphere
above +7°C
C'IJ
Overhaul and repair
(change cylinder or rotor)
@
Overhaul and repair
(change cylinder or rotor)
®
Overhaul and repair
(clean and eliminate
any
reacted materials inside
the
pump)
@) Overhaul and repair
(change the parts)
Note
3. 4
4. 2
3. 5
4. 5
6. 2
6. 2
Irregular rotation of CDAbnormal input voltage
the pump
CD Adjust input voltage within
±10%
3. 5
® Inferior wire connect
the pump
@High oil viscosity at
temperature
ion to ®Connect wire again to the
pump
low ® Warm atmosphere above +7°C
@Coming different objects into @Eliminate different objects
the pump then overhaul and repair the
pump
No pressure reduction CD Low pumping capacity for CD Re-select the pumping
vacuum vessel volume capacity
3. 4
4. 5
5.2
® Vacuum pressure measuring is ® Measure the vacuum pressure 5. 1
not correct correctly
® Inadequate applying vacuum ® Apply the corrected vacuum
gauge
@ Small diameter and long
suction tubing
@ Clogged
the different objects
on the mesh filter inside the
inlet port
®
Insufficient quantity of the
oil
C'IJ
Oil deteriorated
-22 -
gauge
adapted to measuring
pressure range
® Connect same diameter tubing 5. 1
with inlet port (suction) and
short distance to the vacuum
vessel
@
®
C'IJ
Disconnect the suction
tubing, clean the mesh
filter
6. 2
Fill the oil up to the 3. 2
specified quantity
Change the oi 1 6. 3
6.4 Replacement of Spider in Coupling
The spider (made of rubber) is used between the pump head and the motor. It
is recommended
that it be checked once a year and replaced if found defective.
If the pump is started and
stopped hundreds of times per day, it is necessary to check it within a shorter time. To remove
the spider, please remove the 4 bolts, which time the coupling, will be visible.
To have the pump reassembled after overhauling, fit the spider to the coupling, (as shown by
Fig-9), adjust the direction of indented part of the pump head (female) and that of the motor
(male), fit them tightly together, and tighten the bolts firmly to the motor.
Motor
ing
Fig-9 Replacement of Spider in Coupling
-21 -

& DANGER
When evacuating toxic gases, the pump body and the pump oil may cause toxic. Pay
attention certainly.
&CAUTION~~~~~~~~~~~~~~~~-,
CD Wear suitable protector (rubber gloves, goggles).
® Before charging the oil, read the r1. 2 Material Safety Data Sheet (MSDS) J
When the contaminated oil touched skin or came into eye accidentally, follow
the first-aid-treatment of r1. 2 Material Safety Data Sheet (MSDS) J .
&NOTE~~~~~~~~~~~~~~-,
Do not apply the different type of vacuum pump oil besides our recommended. If
applying the different type of vacuum pump oil, it may cause the performance
deterioration or shortening the lifetime of the pump.
[Oil Change Procedure]
(1) Unplug the inlet port and operate the pump for 5 sec. We can discharge the remained oil
inside the pump, effectively.
(2) Disconnect the standard exhaust pipe, unplug the drain port, and then drain off the oil.
(3) Plug the drain port; charge the recommended new oil as fixed quantity from the exhaust
port. (see Fig-4)
(4) If the oil contamination is heavy, operating the pump for several minutes with the new
pump oil will be necessary for cleaning the pump inside. Several cleaning procedures should
be necessary for very heavy contamination.
(5) After warming up the pump by operating with the new pump oil, confirm the ultimate pressure.
(6) When depositing the oil sludge on the pump bottom as heavily contaminated oil, the
specified ultimate pressure is difficult to obtain. Overhauling and repairing should be
needed.
-20 -
(6) Inspecting the spider of coupling
When broken the spider of coupling. Change the spider of coupling by r6. 4 Replacement
of Spider in CouplingJ .
(7)
Inspecting the oil mist trap
When applying the oil mist trap instead of the standard vacuum tubing, pay attention for
clogging of the mesh filter of the oil mist trap. Heavy clogging may cause increasing
inside pressure or bursting out the oil level gauge. Also, it may cause oil leakage from
shaft seals or drain plug seals.
The maximum pressure inside this pump is 0. 03 MPa (GAUGE).
Besides the inspecting items mentioned above, overhaul is useful when continuing the
operation for long term or observing heavy contaminated oils.
Please contact your local ULVAC KIKO, Inc. Sales and Service Center.
& DANGER
When requesting overhaul or repair the pump, inform the sort of evacuated gases
on the 'Check sheet for repair' attached at end of this manual, and submit the
sheet by all means. When evacuating toxic gases, the pump body and the oil may
cause toxic. We cannot overhaul or repair the pump evacuated some sort of toxic
gases.
6.3 Oil change
Oil deterioration may cause the operating pressure rising. Confirm the specked ultimate
pressure by plugging the pump inlet port. If observing the high ultimate pressure, change the
pump oil. If mixing volatile contents (water, solvent) in the pump oil or precipitated sludge
on the pump bottom, several times oil changing procedures should be necessary. The oil
deterioration may be caused not only by oil contamination due to evacuated gases but also by
oil performance change depending on long operating time. We recommend periodical oil change
by
the Table-2 "Scheduled Inspection".
- 19 -

Table-2 Scheduled Inspection
Inspect cycle
Inspect Itern
Inspect content
Action i tern
Specified oil level
Recharge oi 1
Oil
quantity
Reddish brown or milky
Oil
contamination
whi te----?abnormal Change
oi 1
Black-mot abnormal
Tighten bolts/nuts
or
Every 3 days
Unusual sound & Unusual
Contact your local
Sound & Vibration
vibration
Representative
Confirm over current
Motor current
Specified rating
source or Contact your
local Representative
Confirm over heat
Surface
temperature
)45°C UP -->abnormal
source or Contact your
rising
local Representative
Weekly Change
seals,
0
rings
Oi 1 leak
from seals or or
Contact your
local
Oil leak
plugs
Representative
Mesh
filter,
inlet
Dust clogging
Clean the mesh
filter
Every 3000hr or
port
Every half year
Pump
oil
Inspect oil certainly
Change
oil
Every year
Spider
Broken spider
Change
spider
(2) Inspecting the pump oil quantity
Recharge the specified pump oil as oil level is always in the range (red circle marking)
of oil gauge during operating.
(3) Inspecting the pump oil leakage
When happening the oi 1 leakage from shaft seals or drain-plug seals, repair must be needed.
As our service center provides the specified 0-rings or seals, please contact your local
ULVAC KIKO, Inc. service center.
(4) Inspecting the mesh filter in the inlet port
Any dust included in evacuated gases may cause clog the mesh filter and down pumping
efficiency.
(5) Inspecting the abnormal noise or vibration
Check up any loose screws and nuts.
- 18 -
6.Maintenance, Inspection, Repair
6. 1 Maintenance
Check and confirm the following items at least every 3 days while operating.
(1) Oil level is in red ring marking of oil gauge.
(2) Change
in color of the oil.
(3) Usual sound or not?
(4) Motor current, normal or not?
(5) Oil leak from oil seal assembly.
If detecting any problems, take an action needed by r6. 5 Trouble Check ListJ .
6.2 Scheduled Inspection
The inspection items should be changed for operational conditions of the pump. Inspecting the
following items will be effective to avoid any troubles or to extend the pump life.
~CAUTION~~~~~~~~~~~~~~~~~
(D Turn off power switch certainly before inspection. Never turn on power switch
for inspection. It may cause personal injuries.
® Directly after stopping the pump, the pump body is high temperature. Wait until
it will be cooled down, and inspect it. Burning hazard.
(1) Periodical changing the pump oil
Pump oil should be deteriorated with operating time. After checking the oil contamination
and viscosity, change the oil quickly. Periodical changing the pump oil can suppress the
performance deterioration, also elongate the pump life.
If continuing the pump operation in the situation with much water, the ultimate pressure
comes up to higher pressure. Then the pump motion become dull by mechanical friction,
the pump may cause damage. Change the pump oil by r6. 3 Oil ChangeJ .
- 17 -

Q
w
w
a.
'"
"'
~
"-
:;:
;:,
n
(Lio In)
10
2
f>lllHIH S~Hd(JlS 3!:1916)
'0
~~::, ·~~~%~K~
1
:1~·;:\
0
~;r~ t=t:1+m11==:i=:i=R=rn+i=--++H++ttt-+-t-tiiittt::-=::t=t::ttJ:Jtl:1J
i,,~aif'lrtol G&~u
--···!!:HlHd
II
)j
I
(;-500A r
I I -" -
G-2GDA I /
r/
/I
I
---- --
l G 5 CSA I
I
--=...-,::::::· , .. -- -
I G-25SA
I
[__J_JLJlJJDlJ[__L__Jjll_Ul]l_O _ _l__J__Llu_:u1~o''_j_JLJ__lljJJ~\00,,-l_LJ_LLll~!DD''-L--l--L--LI-~105(P~)
I G-
1
PRESSURE
Fig-7 Characteristics of Vacuum pumping speed
~
om~Et(J-FR!;~Gt:'1.E
i;-2C:lA G-2"!iH i-5~D~ G-~D!iA
190\l l
iOM
UL~~C !{ [KO
G-50SA
G--50DA
G-25St..
JLLJJJlD4==~l=t=l=l~fl===l=A+mM==t=4=H=J=M#===J=4=ttrttr G- 2 GO A
o ,Lo __ -, J_J_Jj_illfil_J_J__JJJlill" ____ LLJ_JJLJ1U1 :a,,,-LLJLLW~1 ;::o '' -1--1__1_u~,';;o'' ---1---1_1_-LL~1 os (Pa)
PRES SU HE
Fig-8 Characteristics of Motor power
- 16 -
5.Specification
5. 1 Ultimate Pressure
The IUl timate PressureJ described in the catalog or this manual means obtainable minimum
pressure by vacuum pumping at inlet port without conducting gas (no load operating), Our ULVAC
KIKO, Inc. applies the specified pump oil and measures the pressure at inlet port attached the
sensor of only the Pirani gauge.
Pirani gauge indicates 5~10 times higher pressure reading than by the McLeod gauge. This means
condensable contents (almost water vapor), included in the gas, could not be measured by the
McLeod gauge,
In actual vacuum system, the ultimate pressure reading will be higher than the catalog
description. This reason will be shown as follows.
CD When the vacuum sensing head location is far from the pump, any water vapor or gas, generated
from any water droplet or any rust adhered to the inside surface of the vacuum vessel or
the vacuum tubing may cause high ultimate pressure.
(?) Any volatile contents dissolved into the pump oil will vaporize and it may cause higher
ultimate pressure.
@ If there is any leakage or gas source in the vacuum tubing, the ultimate pressure will
be high,
5.2 Pumping Speed
Pumping speed of the oil rotary pump must be changed with sort of gases. Generally, pumping
speed will be max in high-pressure range, and will be proportional to vacuum pressure reduction.
The standard pumping speed of this pump shows the maximum speed when pumping dry air. Inlet
pressure Vs pumping speed is shown in Fig-7.
5.3 Required Electricity
Driving power for motor is totaled mechanical work based on rotor friction and air compression
work It wi 11 be maximum at 4 X 10
4
~2. 7 X 10
4 Pa. At
lower pressure than 13. 3Pa, compression
work is small and almost power will be mechanical work consumption. Fig-8 shows minimum power
required operating the pump.
- 15 -

4.5 Start up procedures in cold climate
In winter-season, when operating the pump in cold environment, it will be difficult to start
up the pump. It is called over-load operation because of high viscosity of the pump oil at
low temperature.
If the pump does not restart, warm up the pump oil, or try to keep the pump within the operating
temperature for a little while and then turn on the power again.
In the case of the pump stoppage after several second operating, continuous operating will
be possible by opening the pump vent valve. After warming up the pump, close the pump vent
valve, and operate normally.
4.6 Set up oil mist trap (option)
Oil mist trap OMT-050A for G-20DA, 25SA, 50DA, SOSA can be equipped for trapping oil mist out
of the pump. After eliminating the standard exhaust pipe, equip the oil mist trap to the exhaust
port. This can reduce oil mists and exhausting noise.
Read the instruction manual of OMT-050A in detail.
4. 7 Restriction in an operation of the oil mist trap (option)
When using oil mi st trap, the following i terns should be restricted in an operation.
When the filter clogged with oil, change the filter.
The maximum pressure inside this pump is 0. 03MPa (GAUGE).
For pressure reading excess 0. 03MPa (GAUGE) in exhaust port, change the fi 1 ter.
~ WARNING~~~~~~~~~~~~~~~~~-,
Explosion hazard. Keep the operational restriction in setting the oil mist trap.
When the filter clogged with oil, change the filter.
-14 -
4.3 Shut down Operation
Close shut off valve (A), open pump vent valve (B), then turn off power switch of the pump (see
Fig-5). If stopping the pump by no opening pump vent valve, the oil will be filled inside the
pump cylinder within several minutes. This may cause back flowing oil to the vacuum vessel.
For next operation, restarting the pump will be difficult because of not so smooth rotation,
thermal protector operating, motor firing by over loading.
When stopping the pump operation by electric stoppage, close shut off valve (A) quickly and
then open pump vent valve (B).
Do not stop and restart this equipment repeatedly. When restarting this
equipment, make sure that the pump (motor) has stopped completely before turning
on the power. If the pump (motor) has not stopped completely and the equipment
is restarted, the pump' s (motor) current rises and either the protection device
is activated or the motor may become damaged.
Firing hazard. As the surface of the pump body is higher temperature (70 ~80°
C) during operation, do not touch it until cooled down after stopping the pump.
4.4 Oil shut off valve
Oil shut off valve is built in G-50SA. It is very effective to prevent back flowing oil from
the pump. This valve is provided for emergency as electric stoppage. For normal case, operate
r4. 3 Shut down OperationJ .
~NOTE~~~~~~~~~~~~~~~~~~~-
CD After closing shut off valve (A) and opening pump vent valve (B), stop the
pump. If this procedure is not performed, pump oil must be filled inside the
pump. It may cause difficulty on restarting or damage the pump, also back
flowing oil to the vacuum vessel.
@ If the shut off valve (A) is not closed for shut down operation, this may cause
air leakage through inside the pump to the vacuum vessel.
- 13 -

4.2 Start up Operation
Close the pump vent valve (B) ; open the shut-off valve (A) to inlet port of the pump, then
turn on the power switch to start operation. The pump begins running(see Fig-5).
_& GAUT I ON-----------------~
<D Firing hazard. Do not touch the motor or the pump body as these surface
temperature should be higher (70~80° C).
® Operating the pump at high-pressure region must be generated oil mist from
exhaust port. Attach the oil mist trap or connect the duct to exhaust oil mist
If the pump rotation is not so smooth, take action needed as described below.
<D Check oil quantity, and charge proper quantitative oil.
® When stopping the pump for long term (3days or more) at low temperature, pump
oil will come into the pump cylinder. (At end of former operation, vented air
into the pump may also cause same situation) If restarting the pump at this
condition, over load protector may be operated. Then, carry out several
start-stop operations in a short time cycle.
After operating the pump for several hours, oil temperature inside the pump may
be risen up to 70 ~80' C. If the temperature is over this, the pump may have
troubles. Maintain the pump, or contact ULVAC KIKO , Inc.
- 12 -
4.0perating Instructions
4. 1 Operating precautions
_& WARNING
~~~~~~~~~~~~~~
Explosion hazard. Do not plug the exhaust port or place any materials inside of
the exhaust port, because it will reduce pumping speed during operation. Pump
explosion, oil level gauge bursting, or over loading of the motor are consequences
of excessive pressure inside the pump. This pump is not a compressor.
The
maximum pressure inside this pump is 0. 03 MPa (GAUGE).
Do not stop and restart this equipment repeatedly. When restarting this
equipment, make sure that the pump (motor) has stopped completely before turning
on the power. If the pump (motor) has not stopped completely and the equipment
is restarted, the pump' s (motor) current rises and either the protection device
is activated or the motor may become damaged.
_& NOTE
----------------~
<D In manufacturing process of semi-conductor, pump oil will be contaminated in
a very short term. First oil changing should be done within 10 days. Then,
after checking oil contamination, it should be recommended to decide the
interval for changing oil.
® When evacuating much quantity of water moisture, change oil frequently. If
operating pump a long term as taking water moisture into the pump, this may
cause deterioration of oil lubricity, corrosive acceleration of parts inside
the pump, also trouble of the pump.
® When evacuating chemicals (acid or like), change the pump oil after stopping
the pump immediately to prevent operational impossibility owing to rusting
while stopping it for one night.
© When evacuating solvents, change the pump oil after stopping the pump to
prevent deterioration of oil lubricity and trouble cause (sticking, etc).
® Continuous running at suction presser higher than 1. OkPa may cause high
consumable rates of pump oil and oil shortage. And too oil shortage may also
cause parts consumption and sticking, therefore supply pump oil without fail.
- II -

3.5 Fluctuations in the power voltage and frequency
Standard: Rotation electricity machine general rules
JIS C 4034-1: 1999, JEC-2137-2000
To the voltage change and frequency change in Domain A, in main rated values, it operates
continuously, and can be used practically convenient, and to the voltage change and frequency
change in Domain B, it shall operate with main rated values and shall be used practically
convenient.
However, operation with "it is convenient and safe is maintained on vpractical use, it means
not resulting in the grade which shortens a life remarkably, and the characteristic, a
temperature rise, etc. do not apply correspondingly in the state of rating. Moreover, main
rating shows rated torque (N · m).
Rated Point
0 . 95
0,98
DomainB
Voltage
P. U.
1.10,1-----~
1. 00 I . 02
0. 91
0. 93
. 90
DomainA
Frequency
.03
P. U.
Fig-6 Change region of the voltage and frequency
- IO -
3.4 Electric wiring
(1) This pump has performed beforehand electric wiring by the side of a pump.
(2) Plug the power wire cord in the power outlet of lOOV, single phase.
(3) The over-load protector (thermal protector, manual reset type) is provided for this pump.
It will cause a serious damage or movement failure to the motor in case of
impressing the inverter controlled pressure is given towards the motor itself.
Please carefully be noted and do not take the above action.
Switch off power before electric wiring. Never connect electric wire cord when
power
line is hot. This may cause electric shock.
Perform electric wiring correctly in accordance with the "Electric Equipment
Technical Standard" and "Internal Wiring Regulation. " Incorrect wiring will
result in fire.
- 9 -

3.3 Vacuum Tubing
(1) Clean inner surfaces of vacuum vessel, tubing and valve. Then, after eliminating water
moisture, small particle, dust or rust carefully, connect tube to the pump.
If evacuating small size powder or dust particle, vacuum pump may cause trouble.
(2) Install the shut off valve (A) and the pump vent valve (B) in between the pump inlet port
and the vessel as shown in Fig-5.
Vent valve
CB)
(A)
Pump
Shut off valve
Fig-5 Vacuum Pumping System Diagram
(3) Vacuum tubing between inlet port and another port is provided with vacuum rubber hose.
Do not eliminate mesh-filter for preventing different objects come into the inlet
port of the pump.
- 8 -
Exaust Por
8
Suet on pi
0
level
Oil level gauge
Oran plug
Fig-4 Oil Charge to Rotary Vacuum Pump
&_ CAUTION
~~~~~~~~~~~~~~~~~~~~~~
CD Wear protective rubber gloves or goggles.
@ Before charging oils , read the r1. 2 Material Safety Data Sheet (MSDS) J . When
the contaminated oil touching the skin or coming into the eye accidentally,
follow the i tern first-aid-treatment of rMaterial Safety Data Sheet (MSDS) J .
Do not apply other vacuum pump oils besides our recolillilended. If applying other
vacuum pump oils, it may cause the performance deterioration or shortening the
lifetime of the pump.
- 7 -

3. Setting up
3. 1 Installation
Installation must be done at a place of low moisture, low dust particle, and also level. The
layout arrangement should be considered for setting up, overhaul, checking, or cleaning the
pump. When setting up the pump in any systems, pay attention to temperature in atmosphere.
Mount rubber isolator to absorb vibration from the pump. On the environmental condition, refer
to ro. 4. 2 Store of ProductJ.
Do not tilt, lay its side, or operate up side down. It may cause damage. The pump
must be placed on a level place in an upright position as shown in Fig-1, 2, 3.
3.2 Oil charging
Remove the oil-filling plug, and then fill the oil (one time charge) to the pump or recommended
oil (SMR-100) up to specified quantity through the oil filling port. In first oil charging,
pour the oil up to maximum scale of oil gauge. Then, attach the exhaust port. (see Fig-4)
Oil quantity must be checked or adjusted to keep the oil quantity is always in the range of
oil gauge during operating the pump.
Improper oil quantity may cause the performance deterioration of the pump, and also may cause
damage. When oil quantity is out of gauge scale ultimate pressure become higher, and it may
cause bubbling sound like "poko poko".
- 6 -
·-· Mo lo r
Therm.al
Pro I ec I or
Motor
Weight
Rvbber leg Besa
port
:t..fA,t,t(JW~!I
OI I l eve I
'/tV'.1171/
Dre In p Lug
...
Su0;tlon Pipe
'"
Singhle phase, 100V(50/60Hz), 200\V, 4Poles, Split phase starting
11. Okg(G-50DA·50SA : with motor)
Fig-3 General Assembly Drawing of G-50DA·50SA
- 5 -

2.2 Dimensional Drawings
Motor
Weight
29'5.6
Rubber I efl
Basa
25 Vilt
156
u•
Sucilon pipe
Single phase, lOOV (50/60Hz), lOOW, 4Poles, Split phase starting
9. 0 kg(with motor)
Fig-1 General Assembly Drawing of G-20DA
...
2!5 \SI
Rubber le11 Base
...
Motor
Weight
Singhle phase, lOOV (50/60Hz), lOOW, 4Poles, Split phase starting
8. 5kg(with motor)
Fig-2 General Assembly Drawing of G-25SA
- 4 -
2.General Description of the Pump
2. 1 Principal Features
This oil rotary vacuum pump is a sliding vane type (so called Gaede type), with direct driven
motor. As it is a small sized, lightweight, and simple structure, it is easy to maintain or
over-haul.
Table-1 Specification
Model G-20DA
G-25SA G-50DA G-50SA
Type
Sliding vane Sliding vane Sliding vane Sliding vane
2
stages 1
stages
2
stages
1
stages
Pumping speed
50Hz 20 20 50 50
L/min
60Hz 24 24
60 60
Ultimate pressure Pa 1. 3 9. 3 1. 3
9. 3
Motor
w,
(Poles)
100 (4) 200 (4)
50Hz
3. 7
5. 6
Full
load current
A
60Hz 3. 0 4. 8
Motor revolution
50Hz
1, 450
1, 440
r /min
60Hz
1, 740
1, 730
Recommended
SMR-100
Pump oil
Capacity,
(mL)
180 230 260 360
Note 1. Ultimate pressure indication by Pirani gauge.
2. Vapor pressure, viscosity, or characteristics of vacuum pump oils are different
respectively. Our recommended oil is SMR-100.
- 3 -

1. 1. 3 ,& WARNING Explosion
Cause
Pump explosion is consequence of
excessive pressure inside the pump.
1. 1. 4 &
CAUTION High Temperature
Cause
Burn
at high temperature.
1.2 Material Safety Data Sheet (MSDS)
Preventive Procedure
The maximum pressure inside the pump is 0. 03
MPa (GAUGE).
If in] et pressure of the pump is higher than
0. 03 MPa (GAUGE), eliminate any objects which
may cause obstruct gas flowing to the inlet
port. When using oil mist trap, exchange or
clean them to avoid gas flowing.
Preventive Procedure
CD Temperature of the pump is high as shown
below
pump body
motor
70
70
80 °C
80 °C
@ High temperature surface of the pump may
cause to burn as a result of direct skin
contact by accident. Do not touch the pump
body during operation. Inspection should be
carried out after stopping and cooling down
the pump.
The chemical material, which is applied or possible to contact when operating this pump are
described. Read this manual carefully to understand characteristics of the chemical material
(vacuum pump oil) which is described on MSDS sheet. When applying other vacuum pump oils besides
the description in this manual, contact your local ULVAC KIKO, Inc. Sales and Service Center.
MSDS presents the reference information of hazardous chemical material to keep
safety precautions. When handling the pump oil, it is necessary to take proper
and practical treatments, which are adapted handling the oil. After understanding
the above mention, these treatments must be done. Therefore, MSDS is a not safety
warranty.
- 2 -
1.For Safety Operation
1. 1 Hazardous of Product and Safety Precautions
Before operating or inspecting the pump, read this manual carefully. And pay attention to
ascertain the detail of potential hazardous and preventive procedure so that must be operated
or inspected the pump.
& DANGER
1. 1. 1 Leakage of hazardous gases and materials
Cause
Leakage of toxic or inflammable gases. =}
Preventive Procedure
Before evacuating gases to the pump inlet,
dilute them to safety level.
Injuries of skin by direct contact with =} CD After wearing suitable protector for
contaminated oils or adhered hazardous
materials of the pump body when
checking or disposing dispose the
pump.
1. 1. 2
,& WARNING
Electric shock
evacuating hazardous materials, check or
abolish the pump.
@ Before checking or disposing the pump,
non-hazardous treatment must be requested
for the authorized professional
specialist, then check or the pump.
® Disposal must be requested for the
professional specialist authorized by the
administration.
Cause Preventive Procedure
Electric shock by touching electrical =} CD Switch off power certainly before electric
bare portion of the motor when electric
power is on.
wiring Connect electrical wire cords to
ground potential terminals tightly.
® Switch off power before inspection or
removing.
@ Do not insert objects, fingers, or any thin
bars into the inlet port.
-1-