Ulvac PVD-180 User manual

SK00-4167-DI-002-07
INSTRUCTION MANUAL
OIL SEALED ROTARY VACUUM PUMP
PVD-180，PVD-180B
PVD-360，PVD-360B
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/

SK00-4167-DI-002-07
Contents-1
Table of Contents
Types and Descriptions of Warning Labels Displayed on The Pump and Displayed Positions................ 1
ⅠPump Outline ........................................................................................................................................ 3
ⅡPreparation............................................................................................................................................ 6
1. Inspection ........................................................................................................................................ 10
2. Mounting.......................................................................................................................................... 10
3. Lubrication....................................................................................................................................... 10
4. Electrical Connection .......................................................................................................................11
5. Connection with Vacuum System ................................................................................................... 13
Ⅲ Operation........................................................................................................................................... 15
1. Pump Start ...................................................................................................................................... 15
2. Pump Stop....................................................................................................................................... 15
3. Gas-ballast Valve ............................................................................................................................ 16
4. Vacuum Pump Oil ULVOIL R-42 for Winter Use............................................................................. 16
5. Oil mist trap (Option) ....................................................................................................................... 17
Ⅳ Pump Performance ........................................................................................................................... 17
1. Ultimate Pressure............................................................................................................................ 17
2. Pumping Speed............................................................................................................................... 18
3. Power Requirements....................................................................................................................... 19
Ⅴ Maintenance and Check ................................................................................................................... 20
1. Maintenance.................................................................................................................................... 20
2. Regular Check................................................................................................................................. 20
2-1 Check and Replace Vacuum Pump Oil .................................................................................... 20
2-2 Check and Replace V-belt........................................................................................................ 21
2-3 Oil Leak Check ......................................................................................................................... 23
2-4 Checking Gas Ballast Function ................................................................................................ 23
2-5 Checking Metal Mesh at the Suction Inlet................................................................................ 23
2-6 Checking Noise and Abnormal Vibration.................................................................................. 23
2-7 Checking Oil Mist Trap (option)................................................................................................ 23
3. Main replacement parts................................................................................................................... 24
4. Trouble Shooting ............................................................................................................................. 25
5. Warranty Clauses............................................................................................................................ 29
5-1 Warrantable Items .................................................................................................................... 29
5-2 Duration of guarantee............................................................................................................... 29
5-3 Warrantee scope ...................................................................................................................... 29

SK00-4167-DI-002-07
Contents-2
5-4 Response procedure ................................................................................................................ 29
5-5 Disclaimer................................................................................................................................. 30
5-6 Others ....................................................................................................................................... 30
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER
Tables and Illustrations
Fig. 1 Display positions of Labels ............................................................................................................ 2
Fig. 2 Dimensional drawing PVD-180...................................................................................................... 6
Fig. 3 Dimensional drawing PVD-360...................................................................................................... 6
Fig. 4 Dimensional drawing PVD-180B ................................................................................................... 7
Fig. 5 Dimensional drawing PVD-360B ................................................................................................... 7
Fig. 6 Dimensional drawing PVD-180-H＋RF-1＋RF-7........................................................................... 8
Fig. 7 Dimensional drawing PVD-360-H＋RF-3＋RF-8........................................................................... 8
Fig. 8 Dimensional drawing PVD-180-H＋RF-2 ...................................................................................... 9
Fig. 9 Dimensional drawing PVD-360-H＋RF-5 ...................................................................................... 9
Fig. 10 Oil filling ..................................................................................................................................... 10
Fig. 11 Electrical wiring diagram for Vac. Lock Valve ............................................................................ 12
Fig. 12 Connection with Vacuum System for PVD-180, PVD-360 ........................................................ 13
Fig. 13 Connection 1 with Vacuum System for PVD-180B, PVD-360B................................................. 14
Fig. 14 Connection 2 with Vacuum System for PVD-180B, PVD-360B................................................. 14
Fig. 15 Connection with Vacuum System for PVD-180-H, PVD-360-H................................................. 14
Fig. 16 Mount the oil mist trap to the pump ........................................................................................... 17
Fig. 17 Pumping speed curves .............................................................................................................. 18
Table 1 Details model list ......................................................................................................................... 3
Table 2 Optional specifications and gasket material/oil type comparison table ...................................... 4
Table 3 Performance specifications ......................................................................................................... 5
Table 4 Rated current for the standard motor.........................................................................................11
Table 5 Standard motor terminal size and protection circuit selection criteria....................................... 12
Table 6 PVD-180, PVD-180B, PVD-360, PVD-360B Main replacement parts list.............................. 24
Table 7 PVD-180-H, PVD-360-H Main replacement parts list ............................................................ 24
Table 8 Performance specifications ....................................................................................................... 25
Table 9 Making format for names and contents of hazardous substances or elements ......................... A

SK00-4167-DI-002-07
1
Types and Descriptions of Warning Labels Displayed on The Pump and
Displayed Positions
Warning labels are attached on the warning locations in this system.
Be sure to check them before starting operation of the Pump.
1
Before use, read through the instruction manual and fully
understand its contents.
2
・
You may get an electric shock in the area around a portion with
this warning label. Before maintenance or wiring, be sure to turn
off the primary power supply.
・
Be sure to close the lid of the terminal box before operating this
unit. Never open it during operation.
3
During operation or for a while after operation stops, do not touch
the unit as each portion is at a very high temperature. -
If a human
body touches the unit, it may get burned.
4
・This product is not made as the withstand pressure structure.
Ensured pressure value of the Pump shall be 0.03MPaG
(0.3kg/cm2G) (Gauge pressure).
・Do not run the Pump on blocking the Exhaust outlet or putting
any device that might hamper gas passage onto the outlet. There
is a risk that the pressure inside the vacuum pump rises up to
cause break the casing or Oil level gauge resulting in overload of
the motor.
・Following gases cannot be evacuated because these gases may
cause the
pump inner pressure to increase due to internal combustion.
1) explosive gas
2) flammable gas
3) gas which increases the susceptibility of substances to burn.
Long term storage of the Vacuum pump without operation might
possibly cause trouble in operation caused by rust i
f you kept the
Pump long time without
operating it, ask a closest Service Center
for the check.
Indoor Use Only
Mount at least 100mm from side walls.