Ulvac DOP-40D User manual

No.23400-2-01-12
INSTRUCTION Manual
Oscillating Piston Dry Vacuum Pump
DOP-40D
DOP-80S
Request to Users
Please read this manual thoroughly to ensure safe and
effective use of the equipment.
Keep this manual in a safe place.
Due to periodic improvements in performance, the
equipment described in this manual is subject to
changes in dimensions and specifications without prior
notice.
ULVAC KIKO,Inc.

Contents
Pages with a shaded background are those which contain items related to safety.
Before Using the Equipment.................................................................................................. 01
Checks When Opening Packaging ........................................................................................ 02
Using the Pump Safely........................................................................................................... 03
•Safety icons....................................................................................................................... 03
•Cautions for Safety in Use................................................................................................. 04
1. Product Outline....................................................................................................................1
1.1 Purpose of Use and Prohibitions.................................................................................1
1.2 Specifications..............................................................................................................1
1.3 Thermal Protection Relay............................................................................................1
2. Dimensions..........................................................................................................................2
3. Installation and Storage.......................................................................................................3
3.1 Cautions for Installation and Storage ..........................................................................3
3.2 Environmental Conditions for Installation, Storage, and Operation.............................3
3.3 Location.......................................................................................................................3
3.4 Electric Wiring .............................................................................................................3
3.5 Fluctuations in the power voltage and frequency ........................................................4
3.6 Checking Operation After Installation..........................................................................4
3.7 Piping.......................................................................................................................... 5
3.8 Storage........................................................................................................................5
4. Cautions for Operation.........................................................................................................5
4.1 Cautions for Operation ................................................................................................ 5
4.2 Operation of the Thermal Protection Relay................................................................. 5
4.3 Starting in Cold Weather .............................................................................................6
5. Pump Performance..............................................................................................................6
5.1 Pressure Achieved......................................................................................................6
5.2 Evacuation Rate.......................................................................................................... 6
5.3 Power Requirements...................................................................................................6
6. Maintenance, Inspection, and Repair .................................................................................. 7
6.1 Cautions for Maintenance, Inspection, and Repair...................................................... 7
6.2 Maintenance................................................................................................................7
6.3 Regular Inspections..................................................................................................... 7
6.4 Replacing and Cleaning Consumables .......................................................................8
1) Replacing Gaskets...................................................................................................9
2) Replacing O Rings (S-67・P-10)............................................................................9
3) Replacing Cup packing .........................................................................................10
4) Replacing suction and exhaust valves ..................................................................11
6.5 Troubleshooting List.................................................................................................. 13
7. In Conclusion.....................................................................................................................14
•Warranty ........................................................................................................................14
•Usage Status Check Sheet
(used with requests for disassembly and repair)
• Product information, service bases, and contact information

Figures and Tables
Fig.2.1 DOP-40D Dimensions.................................................................................................2
Fig.2.2 DOP-80S Dimensions................................................................................................. 2
Fig.3-1 Instillation Method of Earth Screw................................................................................ 3
Fig.3.2 Change region of the voltage and frequency ...............................................................4
Fig.3.3 Example of Piping Used When Evacuating a Vessel ................................................... 5
Fig.6.1 Cup packing attachment figure.................................................................................... 10
Fig.6.2 Suction and exhaust valves attachment figure............................................................... 11
Fig.6.3 Exploded View (DOP-80S)......................................................................................... 12
Table 1.1 Product Specifications............................................................................................1
Table 6.1 Consumables List...................................................................................................7
Table 6.2 Locations for Maintenance and Inspection............................................................. 8
Table 6.3 Troubleshooting List............................................................................................. 13

Before Using the Equipment
Thank you for purchasing this product. Your custom is very much appreciated.
This pump is designed solely for vacuum discharge, and may malfunction or cause accidents if not
handled appropriately. Read the manual thoroughly, and pay due attention to inspections,
maintenance, and safety.
Personnel Handling the Equipment
Only persons who have read this manual thoroughly, and have sufficient understanding of
safety, pump specifications, and method of operation, may operate this pump.
Read the Manual Thoroughly
Read the manual thoroughly in order to use the equipment correctly. Read the section on
Safe Use particularly closely.
Keep This Manual in a Safe Place
After reading this manual, be sure to keep it in a safe place which is readily accessible to
others needing to use it.
Copying This Manual Is Prohibited
No part of this manual may be copied for use by a third party without the express
permission of the manufacturer.
Statutory Requirements for Disposal
Follow all statutory and local authority regulations when disposing of this pump.
Safety During Repair
Please provide a full description of the circumstances of use (particularly the use of
dangerous materials) for the safety of repair personnel when requesting the manufacturer
for repairs to the pump. Your request for repair of may be refused if these circumstances
are unclear.
01

Checks When Opening Packaging
Check the following after opening the packaging.
(1) Is the product as you requested?
(2) Are the accessories and necessary parts included?
Standard accessories
・Instruction manual -------------------- x 1
・Inlet and outlet caps (fitted to inlet and outlet) -------------------- x 1
(3) Is the pump damaged in any way?
(4) Are any external screws or inlet and outlet pipes loose? Are any components missing?
Contact your agent or the sales division of the manufacturer if there are any problems with the pump.
1. Ensure that the tube on the side of the pump is not gripped or bent when removing the
pump from the packaging. Holding the pump by this tube may damage it, thus
reducing pump performance.
2. Always remove the vent plug before using the pump.
3. Fit an inlet filter if there is a possibility of foreign matter or dust particles entering the
pump.
!
Note
Tube
02

03
Using the Pump Safely
To ensure that the pump is handled correctly, read this section thoroughly before use.
This manual and the warning labels on the pump include safety icons as an aid to understanding
safety requirements.
These safety icons warn the operator and others of possible dangers and damage and should
always be followed.
・Safety icons
The meanings of the safety icons are as follows.
Incorrect handling of the equipment is very likely to result in death or serious injury to the
operator.
Incorrect handling of the equipment may result in death or serious injury to the operator.
Incorrect handling of the equipment may result in light or medium injuries to the operator or
damage to the equipment.
Incorrect handling of the equipment may result in damage to the equipment and hinder its
correct operation.
Some components reach surface temperatures in excess of 60ºC during pump operation.
Burns may result if these components are touched during operation.
Always switch off the main power supply before installing electrical wiring or performing
any electrical work on the pump. Failure to do so may result in electric shock.
!
Danger
!
Warning
!
Caution
!
Note
High Temperatures
Electric Shock

04
・Cautions for Safety in Use
Applications
(1) This pump is not designed to be explosion-proof, and should therefore not be used to
discharge explosive gases.
(2) In addition to discharge of gas via the outlet, gas may also leak from other parts of the pump,
and it should therefore not be used with toxic gases. If toxic gas is discharged for any reason
it is important to note that the interior of the pump will be contaminated by the gas, requiring
appropriate caution during maintenance.
Maintenance and Repair
(3) When requesting the manufacturer’s service division to dismantle and repair the pump,
always note the gas which the pump has been used with on the Usage Check Sheet. Note
that if it has been used to discharge toxic gas for any reason it will be contaminated. Please
be aware that use with some gases will preclude dismantling and repair.
Installation
(1) Do not use the pump in an explosive atmosphere. Such use may result in injury and fire.
(2) Ensure that there are no inflammable materials such as solvents in the vicinity when using
the pump.
(3) Ensure that the motor is freely ventilated to prevent overheating which may result in fire or
burns.
Power Supply
(4) Always switch off the main power supply, and make sure that the pump has stopped, before
carrying out inspection and repair.
(5) Ensure that the relevant wiring is in accordance with technical standards for electrical
equipment and wiring regulations. Incorrect wiring may result in fire.
(6) Always switch off the main power supply before installing electrical wiring. Carrying out work
on the pump while the power is connected may result in electric shock.
(7) Always ensure that the pump is correctly earthed. A dedicated earth leakage breaker is
recommended. Failure to earth the pump correctly may result in electric shock if a fault or
earth leakage occurs.
(8) Use the pump only at the rated voltage. Use at other than the rated voltage will interfere with
operation of the overload protection device, and this may result in the motor burning out, or
fire.
(9) Do not damage, modify, pull the power cord, or place objects on it. Damage to the cord may
result in electric shock or fire.
(10) Ensure that the power cord used for the pump is appropriate for the rated voltage and
current. With each core wire having a cross-section area of 1.0mm2or more.
(11) Switch off the main power supply, before disconnecting the power cord from the pump.
Failure to do so may result in electric shock.
(12)Touching the power cord with wet hands may result in electric shock.
(13)Touching electrical wiring etc while inserting the power cord may result in electric shock.
!
Danger
!
Warning

05
Operation
(14)This pump is not designed to be explosion-proof. When using the pump, ensure that there
are no inflammable materials such as solvents, or explosive gases, in the vicinity. Use under
such conditions may result in injury or fire.
(15)Inserting fingers or objects into the motor inlet may result in electric shock, injury, or fire.
(16)Operating the pump with the discharge outlet blocked, or with a device which prevents
passage of gas to the discharge outlet, may result in rupture of the pump. The internal
pressure of the pump rises and the pump body may rupture and the motor become
overloaded.
This pump is not designed to be pressure-resistant. The internal pressure of the pump is
limited to 0.03 MPa (gauge pressure).
Maintenance and Repair
(17)The pump should be dismantled or repaired only by a repair technician trained by the
manufacturer.
(18)To prevent ingestion of microscopic particles resulting from wear of components, use a dust
mask and gloves when replacing cup packing, inlet and outlet valves, and gaskets.
Installation
(1) Microscopic particles resulting from wear of components are discharged from the outlet and
contaminate the room. If necessary, connect a pipe from the discharge outlet to the outside of
the building.
(2) The fine clearances used in this pump require that the following conditions be satisfied during
storage, installation, and operation.
(3) 1. Ambient temperature of 7~40°C and maximum relative humidity of 85% during operation.
2. Other conditions for storage and operation.
a) Level floor of sufficient strength.
b) No condensation.
c) Dust-free environment.
d) Well ventilated.
e) Environment free of corrosive or explosive gas.
f) Not subject to direct sunlight.
g) No danger of fire.
h) Maximum ambient temperature of 40°C during assembly of pump.
i）There is a space which is sufficient for pump surroundings, the pump cooling fan part is
not covered.
Operation
(4) Touching rotating components (eg motor, main shaft, axial joints, cooling fan) while the pump is
in operation may result in injury.
(5) The overload protector operates when the pump becomes excessively hot. Touching it in this
condition may result in burns.
(6) Touching the motor while the pump is in operation or while it is still hot immediately after having
been switched off may result in burns.
(7) Do not insert fingers or objects into, or peer into, the inlet or outlet during operation.
!
Warning
!
Caution

06
Maintenance and Repair
(8) If the pump ceases operation, turn power OFF immediately to prevent accidents, remove the
power cord from the wall outlet, and contact your dealer or the manufacturer for inspection and
repair.
(9) Leave the pump for at least 30 minutes until it has cooled, and begin operation again. Touching
the pump immediately after it has stopped may result in burns.
Installation
(1) The pump may malfunction if it is subjected to shocks or tipped over on its side.
(2) Do not grip or bend the tube on the side of the pump. Any damage to this tube may reduce the
performance of the pump.
(3) Fit an inlet filter if there is a possibility of foreign matter or dust particles entering the pump.
(4) Use ventilation holes, and fit a cooling fan, to reduce the temperature in the vicinity of the
pump. Ensure that the pump cooling fan inlet is not blocked. Ensure that a space of at least
100mm is available on all sides of the pump.
Application
(5) This pump is not designed to be corrosion-resistant. It should only be used with clean air at
normal temperatures, or gases with equivalent characteristics.
(6) This pump is only for vacuum pumping.
(7) In addition to discharge of gas via the pump outlet, gas may leak from the pump itself. Do not
use the pump to evacuate toxic gases. If the pump is used to evacuate toxic gas, appropriate
care is required during maintenance.
(8) The pump will not often operate normally if it is used with corrosive gases, organic solvents,
liquids, or condensed gases (eg steam).
(9) The pump will not often operate normally if it is used with gases containing particles or dust
etc. Always fit a filter to the inlet.
Operation
(10)Use the pump at an ambient temperature of 7 –40°C. The life of the pump will be severely
reduced if it is operated at high temperatures.
(11)Application of back pressure at the pump outlet will overload the motor and may prevent the
pump starting.
(12)When the thermal protection relay operates the pump will be extremely hot. Touching the
pump in this condition may result in burns.
Maintenance and Repair
(13) The fine clearances used in this pump require skill in its assembly. If a repair technician is
unavailable, replacement of all consumables should be left to the manufacturer’s service
division.
!
Caution
!
Note

1
1.Product Outline
1.1 Purpose of Use and Prohibitions
This product is a piston dry vacuum pump employing reciprocating motion of cup packing.
Observe the following prohibitions to ensure normal operation of the pump.
Prohibitions
(1) This pump is only for vacuum pumping, and must not be pressurized.
(2) Do not re-sell, repair, or modify this pump without the approval of the manufacturer.
(3) This pump is not designed to be corrosion-proof. Use it only with clean air at normal
temperature, or gases of equivalent characteristics.
(4) Do not attempt to evacuate gases containing particles, dust, water, or corrosive gases.
1.2 Specifications Table 1.1 Product Specifications
Model
DOP-40D
DOP-80S
Discharge
rate
50Hz
40 L/min
80 L/min
60Hz
44 L/min
88 L/min
Pressure achieved
1.20 kPa
5.33 kPa
Motor
1φ, 210W, 4P , capacitor operation
Rated
current
50Hz
3.2A
3.15A
1.6A
1.4A
60Hz
3.9A
3.42A
1.7A
1.4A
Rated Voltage
100V
115V
200V
220V
Speed
1400 / 1680 r/min
Weight
7 kg
Inlet and outlet piping
D.O.φ9 ×I.D.φ5 (R1/4)
Air temperature
7 ～40 ℃
Dimensions
160(W) ×270(L) ×179(H)
1.3 Thermal Protection Relay
1) This pump is fitted with an automatic reset thermal protection relay for overload protection.
This device shuts off the motor power supply circuit automatically to prevent burn-out if the
motor temperature rises due to overloading, or there is a pump fault which prevents rotation.
Thermal protection relay specifications : Operation temperature 120℃±5℃
2) Always fit other protective devices (eg earth leakage breaker, motor breaker) in addition to
the overload protection relay.
See Warning (8), P04
See Caution (5), P05
!
Warning
!
Caution
!
Warning
!
Note

2
2.Dimensions
Fig.2.1 DOP-40D Dimensions
Fig.2.2 DOP-80S Dimensions

3
3.Installation and Storage
3.1 Cautions for Installation and Storage
See Warning
(1)(2)(3)(5)(6)(7)(8)(9)(10)(11)(12)(13), P04
See Caution (1)(2)(3), P05
See Note (1)(2)(3)(4), P06
3.2 Environmental Conditions for Installation, Storage, and Operation
The fine clearances used in this pump require that the following conditions be satisfied during
storage, installation, and operation.
1. Ambient temperature of 7~40°C and maximum relative humidity of 85% during operation.
2. Other conditions (during storage and operation).
a) Level floor of sufficient strength.
b) No condensation
c) Dust-free environment
d) Well ventilated
e) Environment free of corrosive or explosive gas.
f) Not subject to direct sunlight.
g) No danger of fire.
h) Maximum ambient temperature of 40°C during assembly of pump.
i) There is a space which is sufficient for pump surroundings, the pump cooling fan part is not
covered.
3.3 Location
The pump should be installed level in a location with minimal dust and humidity. This location
should be selected in consideration of ease of installation and removal, inspection, and
cleaning.
Particular attention should be paid to ambient temperature when fitting the pump to equipment.
Use anti-vibration rubbers to isolate the pump from vibrations in the equipment. See 3.2
Environmental Conditions for Installation, Storage, and Operation for details.
3.4 Electric Wiring
(1) The wire diameter of power cord must be φ1.0mm or more.
(2) We recommend end-user to equip protection device such as earth leakage breaker motor
breaker on electric wiring to prevent from motor burnout which may occur by overcurrent.
(3) Be sure to ground to the screw next to the earth mark.
Please attach earth terminal as shown in Fig.3-1
(4) The electric wire which will be connected to the earth must be a green colored insulating
coating wire, with or without yellow stripes. Its wire diameter must be φ1.0mm or more.
Notice: Before operating wire connection, be sure to unplug the power plug.
!
Warning
!
Caution
!
Note
Ｍ４×８＋ＳＷ＋ＰＷ
Pump
Earth Attaching Portion
Toothed Lock
Washers.
Ｍ４
Round Shape Earth Terminal.
Please have it prepared by customer
Fig.3-1 Instillation Method of Earth Screw

4
3.5 Fluctuations in the power voltage and frequency
Standard: Rotation electricity machine general rules
JIS C 4034-1:1999，JEC-2137-2000
To the voltage change and frequency change in Domain A, in main rated values, it operates
continuously, and can be used practically convenient, and to the voltage change and frequency
change in Domain B, it shall operate with main rated values and shall be used practically
convenient.
However, operation with "it is convenient and safe is maintained on "practical use, it means not
resulting in the grade which shortens a life remarkably, and the characteristic, a temperature
rise, etc. do not apply correspondingly in the state of rating. Moreover, main rating shows rated
torque (N･m).
Fig. 3.2 Change region of the voltage and frequency
3.6 Checking Operation After Installation
1) Remove the rubber cap and vent plug on the inlet pipe.
2) Switch power ON, check the direction of rotation, and check for suction.
3) When checks are complete, switch off the main power supply and stop the pump. Check that
the pump has stopped.
Caution: Use cable, with each core wire having a cross-section area of 1.0 mm2or more.

5
3.7Piping
1) Ensure that all piping is installed without leaks, and fit a filter on the pump inlet.
2) Use inlet piping with an internal diameter of 5 mm or more.
3) Ensure that piping connected to the outlet does not cause back pressure. Maximum back
pressure is 0.03 MPa (gauge pressure).
4) In case of selecting the inlet pipe and exhaust pipe that are not from our products, please
select the exhaust pipe that has same or larger inner diameter length with the inlet pipe.
5) When evacuating a vessel, ensure that a shut-off valve is placed between the pump inlet pipe
and the vessel (see Fig.3.3).
Fig.3.3 Example of Piping Used When Evacuating a Vessel
3.8 Storage
Switch off the main power supply and check that the pump has stopped.
Remove the power cord connected to the pump, place the rubber caps over the inlet and outlet,
and store in a location with low humidity
4.Cautions for Operation
4.1 Cautions for Operation
See Danger (1)(2), P04
See Warning (8)(14)(15)(16), P04,P05
See Caution (4)(6)(7), P05
See Note (3)(4)(5)(6)(7)(8)(9)(10)(11), P06
4.2 Operation of the Thermal Protection Relay
1) If the thermal protection relay operates, switch off the main power supply immediately and
contact the manufacturer. The motor will be extremely hot and should not be touched under
any circumstances.
2) When the cause of the problem has been eliminated, check that the motor has cooled, switch
on the main power supply, and check that the pump is operating.
See Caution (5), P05
See Note (12),P06
Vacuum pump
Filter
Leak valve
Shut-off valve
Vessel
!
Warning
!
Caution
!
Note
!
Caution
!
Danger
!
Note

6
4.3 Starting in Cold Weather
The bearing grease and cup packing may harden under cold conditions, and the pump may be
difficult to start. Use the following procedure in this case.
1) Open the inlet to atmosphere, and switch power ON-OFF two or three times until the pump
starts. If the pump still does not start, raise the ambient temperature above 7°C.
2) With the inlet open to atmosphere, run the pump for a few minutes to warm it.
3) Commence normal operation once the pump has warmed.
5.Pump Performance
5.1 Pressure Achieved
The term “pressure achieved” as employed in the catalogue and in this manual is defined as
“the minimum pressure obtained by the pump without introduction of gas from the pump inlet
(i.e. the no-load condition)”.
Note that the indicator values for pressure may differ between types of vacuum gauges.
The pressure achieved in practice is higher than that noted in the catalogue for the following
reasons.
(1)The fact that the vacuum gauge is mounted a distance from the pump, the steam generated
by water droplets and rust etc on the inside walls of the pump and piping, and a variety of
gases present in the system result in increased pressure.
(2)Leaks into the vacuum system introduce other gases, resulting in increased pressure.
5.2 Evacuation Rate
The rate of evacuation varies with the type of gas used, and its pressure. The maximum rate of
evacuation is reached when air is introduced, and slowly decreases as pressure is reduced.
The resistance of the piping system increases with small bore piping which extends over long
distances, and this reduces the rate of evacuation.
The declared rate of evacuation for this pump is the maximum value achieved with dry air.
5.3 Power Requirements
The power required to drive the pump is the total of the work required to overcome the rotational
resistance of the pump (mechanical work), and the work required to compress the air
(compression work), and is at a maximum at an inlet pressure of 4 x 104~6 x 104Pa. If
pressure drops below this level, compression work is considerably reduced and power is
expended in mechanical work.

7
6.Maintenance, Inspection, and Repair
6.1. Cautions for Maintenance, Inspection, and Repair
See Danger (3), P04
See Warning (4)(17)(18), P04,P05
See Caution (8)(9), P06
See Note (13), P06
Customer repair technicians are able to perform the following maintenance and repairs. Other
repairs and modifications (except for the standard options available from the manufacturer)
should not be performed by the customer.
1) Replacing cup packing
2) Replacing suction and exhaust valves
3) Replacing gaskets
4) Replacing suction valve rubber separator
6.2 Maintenance
The following checks are required at least once every three days during operation.
(1)Check for abnormal noises.
(2)Check for abnormal heating of the pump.
(3)Check that gas is discharged normally.
If a problem is found, take the measures described in 6.5 Troubleshooting List.
6.3 Regular Inspections
Inspect consumables after the first 3000 hours of operation, and replace and clean in
accordance with the " Guidelines for Replacement and Cleaning "on the following page. Refer to
6.4 Replacing Consumables and Cleaning for procedures.
Request replacement by the manufacturer’s service division if a repair technician is not
available.
Table 6.1 Consumables List
Components
Quantity
Material
Average life
Cup packing
2
PTFE
5,000 Hr
Suction valves
2
SUS
5,000 Hr
Exhaust valves
2
SUS
5,000 Hr
Gaskets (for 40D)
2
NBR
5,000 Hr
Gaskets (for 80S)
2
FPM
10,000 Hr
O ring (for 40D)
4
NBR
5,000 Hr
O ring (for 80S)
6
FPM
10,000 Hr
Bearing
2
-
15,000 Hr
Suction valve rubber
separator
2
Q
5,000 Hr
Note that the average life for a component varies with the conditions of use.
Always follow 4.1 Cautions for Operation, and remember that life is extended by running the
pump at minimal load (running the pump at minimal load is operation at the achieved pressure
(inlet closed)).
Bearings are replaced by the manufacturer’s service division.
!
Danger
!
Warning
!
Caution
!
Note

8
< Guidelines for Replacement and Cleaning >
Replace or clean components if performance is reduced and/or the following symptoms appear.
Cup packing: Replace in the event of abnormal wear, hardening, or cracking.
Suction and exhaust valves:
Replace in the event of deformation, hardening, or chipping.
Bearings: Contact the manufacturer for repair in the event of abnormal noises or
abnormal motor vibration (chattering).
Suction valve rubber separator:
Replace in the event of deformation, wear, hardening, or cracking.
Connecting tubes: Replace in the event of deformation, wear, hardening, or cracking.
Gaskets: Replace in the event of deformation, hardening, or cracking.
Electric Wiring: Replace in the event of cracking.
Tighten in the event of slack terminal.
Table 6.2 Locations for Maintenance and Inspection
Period of
operation
Inspection item
Inspection details
Method of
inspection
Every 3000
hours
Cup packing
Abnormal wear, hardening,
cracking.
Visual
inspection
Suction and exhaust
valves
Deformation, hardening, chipping.
Visual
inspection
O ring
Deformation, Abnormal wear
hardening, cracking.
Visual
inspection
Gaskets
Deformation, hardening, cracking.
Visual
inspection
Bearings
Abnormal noises.
Listen
Suction valve rubber
separator
Deformation, wear, hardening,
cracking.
Visual
inspection
Electric Wiring
Cracking (power cord)
Visual
inspection
Slack (terminal)
Tighten
6.4 Replacing and Cleaning Consumables
See Warning (17),(18),P05
See Caution (9),P06
See Note (13),P06
!
Warning
!
Caution
!
Note
(1) The interior of the pump is extremely hot immediately after operation. After stopping
the pump, leave it for 30 minutes or more and begin replacing consumables and
cleaning only after checking that it has cooled sufficiently.
(2) To prevent ingestion of microscopic particles in the air, use a dust mask and gloves
when replacing components and cleaning.
(3) To prevent injury, wear gloves when replacing consumables.

9
Prepare the following tools, and refer to photographs, before replacing components and
cleaning. Contact the manufacturer's service division if the required tools are not available.
* Tools
・Hexagonal Allen wrench 4 mm diameter across flats
・Phillips screw driver
・Torque wrench 4 mm diameter across flats Wrench which can fasten at 5 N･m
・Torque driver (+) Driver which can be fastened at 0.8 N･m and 3 N･m
・Sealing/anti-loosening agent for screws
Replacing Cup packing ：NK-4 or LOCTITE 242 or LOCTITE 243
Replacing suction and exhaust valves：LOCTITE 242 or LOCTITE 243
・Vacuum grease
1) Replacing Gaskets
Remove the four hexagonal socket bolts (M5×20) ⑯from the pump head covers②(total of 8
bolts).
There is one black gasket ⑪inside each of the pump head covers. Remove these and
replace with new gaskets.
Tighten the M5×20 bolts orthogonally to fix the pump head covers back in place at torque of
5.0 N･m.
* Make sure the gaskets are securely inside the pump head cover gasket grooves and that
there is no biting between the pump head covers and plates.
2) Replacing O Rings (S-67・P-10)
Remove pump head plates ③according to the procedure provided for gasket replacement.
Replace the O-rings (S-67) ⑩are inserted into the top of cylinders ④.
In addition, there are 2 O-rings (P-10) in each of the Connecting tubes which connect the
pump head covers to each other. (*80S：4 O-rings, 40D：2 O-rings) Replace with new O-rings
(P-10) coated with vacuum grease using a cloth.
Tighten the M5×20 bolts orthogonally to fix the pump head covers back in place at torque of
5.0N･m.
* When attaching the Connecting tubes to the pump head covers, make sure the O-rings are
coated with vacuum grease, and be careful not to damage the O-rings when inserting.
Photo 1: Pump head cover removal
Photo 2: Gasket removal
Photo 4: O-ring (S-67) attachment
Photo 3: O-ring (S-67) removal
Photo 5: O-ring (P-10) removal
Photo 6: O-ring (P-10) attachment

10
3) Replacing Cup packing
Cup packings ⑦are inserted in between connecting rods ⑤and retainer ⑥Suction
valve rubber separator ⑭. First, remove the 3 (total of 6) flat countersink screws (M4×8) ⑰
and then remove the retainer , Suction valve rubber separator , cup packings and cylinder ④.
* Carefully remove debris from cylinder and retainer.
Next, set the cleaned cylinder into casing ①and line up centers of the new cup packings
with the centers of cup packing attachment position on the connecting rod and insert the
cylinder by hand. Place the retainer with the newly attached Suction valve rubber separator
on top of the cup packings and fasten sealing/anti-loosening agent for screws (NK-4 or
LOCTITE 242 or LOCTITE243)-coated flat countersink screws (M4×8) with a torque of
3.0 N･m.
*Cup packing attachment direction
DOP-40D: Facing downwards DOP-80S: Facing upwards
Photo 8: DOP-80S
Connecting rod
Retainer
Suction
valve rubber
separator
Flat
countersink
screws
Cup packing
(*Refer to photo 7,8 for
attachment direction.)
Photo 7: DOP-40D
Photo 10: Retainer attachment
Photo 9: Cup packing attachment position
Fig.6.1 Cup packing attachment figure

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4) Replacing suction and exhaust valves
A single exhaust valve ⑬is located on the front of the pump head plates ③and a single
suction valve ⑧on the back of the pump head plates.
First loosen the small cap head screws (M3×5) ⑱and remove the exhaust valve clamp ⑫
and exhaust valve .
Wipe the pump head plates clean, and replace the exhaust valves with new valves.
Lay the exhaust valve clamps ⑫on the pump head plates and fasten them in place by
tightening the small cap head screws (M3×5) coated with LOCTITE 242 or LOCTITE 243
anti-loosening agent at 0.8 N･m torque.
Next loosen the small cap head screws (M3×5) and remove the suction valve and flat
washers.
Wipe the pump head plates clean, and replace the suction valves with new valves.
Lay the flat washers on the pump head plates and fasten them in place by tightening the
small cap head screws (M3×5) coated with LOCTITE 242 or LOCTITE 243 anti-loosening
agent for screws at 0.8 N･m torque.
*Make sure to attach suction and exhaust valves so that they completely cover the suction and
exhaust holes.
Exhaust
valve clamps
Exhaust
valve
Flat washer
Pump head plate
Suction valve
*Coat the bottom 2-3 threads of
the screws completely
* Do not coat the tip surface
LOCTITE coating amount
Fig.6.2 Suction and exhaust valves
attachment figure