Ulvac DA-41D User manual

No．27500-2-01-7
Diaphragm Type Dry
Vacuum Pump
DA-41D, DA-81S
DA-41DK, DA-81SK
Indoor specification
Request
Please read this Instruction Manual before starting the pump in order to
use the pump effectively and safely. Please keep this Instruction Manual
carefully.
We reserve our right to change dimensions or specifications of the
motors described in this Instruction Manual for improvement of the
performance without prior notice.
ULVAC KIKO Inc.
Instruction Manual

CONTENTS
Before use············································································································01
Confirmation in unpacking························································································02
Directions to use safely····························································································03
Safety logotypes ····································································································03
Precautions about safety in operation·········································································04
1. Outline of Equipment ·····························································································1
1-1. Intended Use and Prohibitions of Equipment··························································1
1-2. Equipment Specifications ···················································································1
1-3. Protector (thermal protector) ···············································································2
2. Appearance·········································································································3
3. Installation / Storage······························································································4
3-1. Precautions in Installation / Storage······································································4
3-2 Installation / Storage and Ambient Condition during Operation····································4
3-3 Installation location ····························································································4
3-4 Verification Run in Installation ··············································································5
3-5 Piping··············································································································5
3-6 Storage ···········································································································5
4. Caution in Operation······························································································6
4-1 Caution in Operation ··························································································6
4-2 When Thermal Protector Operated········································································6
4-3 Starting in Cold Ambient ·····················································································7
5. Pump Performance ·······························································································8
5-1 Ultimate pressure ······························································································8
5-2 Exhaust velocity ································································································8
5-3 Power Required ································································································8
6. Maintenance・Inspection・Repair ··········································································9
6-1 Caution in Maintenance/Inspection/Repair·····························································9
6-2 Maintenance····································································································9
6-3 Periodic Inspection···························································································10
6-4 Replacement of Consumable Parts ·····································································11
1) Replacement of diaphragm. ··············································································12
2) Replacement of Valves·····················································································15
3) Replacement of Inlet / exhaust filter·····································································19
4) Replacement of O ring······················································································20
5) Replacement of bearing····················································································21

6-5 DA-41D(K), 81S(K) Major Parts Material Indication ···············································22
6-6Trouble Check List····························································································23
7. Conclusion·······································································································25
・Warranty········································································································25
・Usage Status Check Sheet (For use in Instruction Manual)
Drawing List
Fig. 2 -1 DA-41D, DA-81S Appearance·········································································3
Fig. 2 -2 DA-41DK, DA-81SK Appearance·····································································3
Fig. 3 -1 Piping Example for Evacuation of Container ······················································5
Table 1 -1 Equipment Specifications ············································································1
Table 6 -1 Consumable Parts List··············································································10
Table 6 -2 Inspection Positions and Guideline of Parts Replacement································11
Table 6 -3 DA-41D(K),DA-81S(K) major parts material Indication·····································22
Table 6 -4 Trouble Check List···················································································23

01
Before use
We would like to express our sincere appreciation for purchasing ULVAC pump.
This pump is designed for evacuation exclusive use. Improper handling may cause failure and
trouble. Please read this Instruction Manual carefully and use the pump in paying attention to
inspection / maintenance / safety.
Operators of this pump
This pump shall be operated by those who have read this Instruction Manual and fully understood
caution in safety, specifications and operating method of this pump.
Perusal of Instruction Manual
Please read this Instruction Manual before using the pump correctly.
Always read "Directions to use safely" in particular.
Storage of Instruction Manual
Please keep Instruction Manual carefully.
After reading, store this Instruction Manual on the location where available for reading by operators.
Prohibited copying of Instruction Manual
Any portion of this Instruction Manual cannot be copied for use by the third party without ULVAC's
consent.
Observance of laws and ordinances
When disposing this pump, please handle by observing laws and the regulations that the local
government established.
Safety control in repair
When requesting ULVAC of repair, please inform us of usage status and presence of hazardous
substance in particular for safety control of repair personnel.
In case usage status is not clear, the repair / checking may not be accepted.

02
Confirmation in unpacking
When unpack the pump from the shipping case, please check the following items.
(1) Whether the pump accords with required pump.
(2) Whether the accessories and prescribed items are accompanies.
<Standard accessories>
Instruction Manual --------------------------------------------------------------------------------1 copy
Inlet-exhaust pipe protection cap (attached to Inlet-exhaust pipe)-------------------2 pcs.
Power plug adapter (attached to power cord)---------------------------------------------------1 pcs.
(3) Whether damaged positions are found.
(4) Whether loosen external screws or inlet-exhaust pipe. Whether coming off positions are
found.
In case there is trouble by any chance, please contact vendor or ULVAC Sales Department.
Do not hold or push the tube at the top of the pump while removing it from the
packaging.
Damage to the tube may affect performance of the pump.
ATTENTION
Example of photograph:DA-41DK
※In DA-81SK, a white, half transparent connected tube is two

03
Directions to use safely
Please read this "Directions to use safely" before start using the pump and operate the pump
correctly.
Safety logotype is enumerated in this Instruction Manual and alarm indication on the pump so that
operators may understand the items to be observed.
Safety logotype is prepared to use the pump correctly and safely and to prevent injury and damage
of operators, etc. Please observe them always.
Safety logotypes
Expressions used in logotypes mean as follows.
Incorrect operation may immediately result in possibility to cause death or
heaviest injuries of users.
Incorrect operation may result in possibility to cause death or heaviest
injuries of users.
Incorrect operation may result in possibility to cause death or heaviest injuries of users.
Incorrect operation may cause right or medium injury of users or occur
damage of the instrument only.
Incorrect operation may cause damage of the instrument or hinder normal
operation.
Temperature of some part of pump surface rises higher than 60℃(140
degF) when operated.
Do not touch the pump during operation. There is a risk of burn.
Never fail to turn OFF the Power Supply of the pump when conducting the
work related to electric wiring or electric parts.
There is a risk of electric shock.
CAUTION TO
ELECTRIC SHOCK
DANGER
WARNING
CAUTION
ATTENTION
CAUTION TO HEAT

04
Precautions about safety in operation
<Application>
(1) This pump is not designed for explosion-proof construction. Do not use for exhaust of explosive
gas.
(2) Suction gas may leak out of the pump main unit from other area than exhaust vent. Do not use
for exhaust of toxic gas. When toxic gas is exhausted by any chance, internal pump may be
polluted by the toxic gas.
Please pay attention during maintenance work.
<Maintenance / repair>
(3) When requesting ULVAC overhaul, fill the type of suction gas in "Usage Status Check Sheet"
provided at the end of this Instruction Manual. In case the pump is used for exhaust of toxic gas
by any chance, internal pump unit is polluted by the toxic gas. Overhaul of some contaminated
pump cannot be made according to the type of toxic gas. Please pay enough attention.
<Installation>
(1) Do not use in explosive atmosphere. There is a risk of injury or fire.
(2) Do not place inflammables such as flammable solvent in periphery of the pump definitely. There
is a risk of fire.
(3) Do not place obstacles that likely to disturb the ventilation in periphery of the pump. There is a risk
of fire by abnormal heat generation.
<Power source>
(4) Never fail to disconnect the power cord when start inspection / repair definitely.
There is risk of electric shock or injury attributed to sudden start of the pump.
(5) Conduct wiring work correctly by observing Electric System Design Standard and the in-house
rules.
Incorrect wiring work causes a fire.
(6) Never fail to disconnect the power cord when start electric wiring work.
Do not conduct wiring work while electric current is supplied definitely. Otherwise, gets an electric
shock.
(7) Perform secure grounding of the pump definitely. It is recommended to install the dedicated
circuit breaker.
Use of the pump without connecting earth may result in electric shock when the motor is failed or
short circuit.
(8) Do not use the motor by other power voltage than rated voltage. Overload protection device may
not operate normally, and cause burning of the motor or a fire.
(9) Do not tear, process or pull the power cord. Never put substance on the power cord.
Short circuit may occur from the damaged portion causing electric shock or a fire.
(10) When inserting power cord to a wall socket, always insert the plug to the depths of wall socket.
There is a risk of electric shock.
(11) When pulling the power cord out, grab the plug definitely. There is a risk of electric shock.
(12) Do not insert or pull the power cord with wet hands. There is a risk of electric shock.
(13) When the power cord is inserted in wall socket, do not touch electric wiring portion. Otherwise,
gets an electric shock.
DANGER
WARNING

05
<Operation>
(14) This pump is not designed for explosion-proof construction. Do not use the pump near
inflammables such as flammable solvent and in explosive atmosphere. There is a risk of injury
or fire.
(15) Do not insert a finger and substances into opening of the motor. There is a risk of electric shock,
injury and a fire.
(16) There is a risk of rupture. Do not operate the pump in the status that exhaust vent is blocked or
mounting equipment that hinder gas passage in the exhaust vent side. Increased internal
pressure of the pump may cause rupture of the main unit of the pump or overload to the motor.
This pump is not designed for pressure withstanding construction. Threshold value of pump
internal pressure is 0.03 MPa (gauge pressure).
<Maintenance / repair>
(17) Do not allow other personnel than repair engineers *１to disassemble or repair the pump.
* 1 Repair engineers: Those who are trained by ULVAC technical training.
(18) Wear dust mask and gloves when conducting replacement work. A minute abrasive particle
suspends in the air, and there is a risk to go into the human body when breathing.
<Installation>
(1) This pump is a machine having precise clearance. Satisfy the following requirements when
conducting storing, installation and operation
1. Operation temperature and the humidity 0℃to 40℃in temperature, Lower than 85%
(relative humidity) in humidity
2. Others (applicable both storing and operation)
a. Level location where enough floor strength.
b. No condensation.
c. No dust.
d. Well ventilated indoor.
e. No explosive gas.
f. No direct sun rays.
g. No flammability risk.
h. When Equipment is installed, temperature in pump circumference shall not exceed
40℃
(2) There is a risk of hurting lower back. Lift the pump with both hands definitely to move and
conduct work.
(3) Abrasive particles of diaphragm may drain from the exhaust vent and pollute the room. Exhaust
it to out of the chamber by connecting pipes if necessary.
<Operation>
(4) Please do not use it to application coming in contact with human body transplant and body fluid /
a living body organization.
(5) Definitely do not touch the rotating section such as a motor, main spindle, coupling, cooling fan
while driving the pump. There is a risk of injury.
WARNING
CAUTION

06
<Operation>
(6) When the overload protection device is operated, the entire pump is hot. Do not touch the pump
by hands definitely.
There is a risk of burn.
(7) Do not touch the pump during operation or after stopped but the main unit of the pump is hot.
There is a risk of burn due to high temperature.
(8) Do not insert a finger and substances into inlet-exhaust port or look inside of the motor during
operation.
There is a risk of injury or failure.
<Maintenance / repair>
(9) When disposing of a scrapping pump, handle as the Industrial Waste observing "Wastes Disposal
and Public Cleaning Law ". Never conduce burnout disposal.
(10) When the pump failed to operate or abnormal, turn off the power supply to the pump (push
switch to ○ side) and disconnect power cable. Contact the vendor or ULVAC for inspection /
repair immediately.
(11) Expose the pump for cooling for about 30 minutes and start work after confirming the pump is
cooled down.
Internal pump is hot soon after operation and there is a risk of burn.
<Installation>
(1) Do not apply impact to the pump, and not falling sidelong.
There is a risk of failure.
(2) "DA-41DK,DA-81SK" to the customer of purchase.
Do not hold or push the tube at the top of the pump while
removing it from the packaging.
Damage to the tube may affect performance of the pump.
(3) Piping must tie to the exhaust opening whenever there
is a possibility of sucking the gas and steam that influences the human body and prevent the suck gas
from indoors diffusing.
<Application>
(4) This pump is designed for evacuation exclusive use. Do not operate long time in near the
atmospheric pressure.
There is a risk of failure.
(5) This pump is not designed for corrosion resistance specifications. Do not use the pump for gas
other than clean normal temperature air and gasses of equivalent property.
(6) Suction gas may leak out of the pump main unit from other area than exhaust vent. Do not use
for exhaust of toxic gas. When toxic gas is exhausted by any chance, internal pump may be
polluted by the toxic gas.
Please pay attention during maintenance work.
Example of photograph: DA-41DK
※In DA-81SK, a white, half
transparent connected tube is two
CAUTION
ATTENTION

07
(7) The pump may be damaged and normal operation cannot be expected. Do not suck fluid.
(8) Do not suck gas that contains trash and dust. Normal operation of the pump may be jeopardized.
In case there is possibility to such trash and dust, mount filters at inlet port to remove them to
protect a pump
(9) Corrosion-resistant plastic is used in the external covering of the DA-41D, DA-81S however it
is not resistant to all chemicals.
Ensure that the following chemicals do not come in contact with the pump. Any chemical,
including the following, which comes into contact with the pump should be wiped off
immediately.
• Acetone • Ethyl ether • Ethyl acetate • Animal fats
<Operation>
(10) Please use the pump in ambient temperature in range of 0 to 40℃.
If the temperature was over 40 degrees, put a cooling fan or similar device to cool it down to the
ambient temperature. If operated in high temperature, life of the pump shall be extremely
reduced.
(11) Do not apply back pressure in the pump exhaust side when start. Load to the motor may cause
starting operation failure.
(12) When the thermal protector is operated, the entire pump is hot. Do not touch the pump by hands
definitely.
There is a risk of burn.
(13) It is effective to clean internal pump when stopped operation in order to maintain pump
performance.
Have the pump to absorb clean air for 3 - 5 minutes and conduct idling operation.
<Maintenance / repair>
(14) This pump is a machine having precise clearance. In case there is no repair engineers, request
replacement of consumable parts that require assembling technology to ULVAC Service Section.
ATTENTION

1
1. Outline of Equipment
1-1. Intended Use and Prohibitions of Equipment
This diaphragm type dry vacuum pump performs evacuation by reciprocating motion of rubber
membrane (diaphragm).
Please take note of the following prohibitions to use Equipment correctly.
<Prohibitions>
(1) This pump is for evacuation only. Never use for pressurization.
(2) Do not do resale, repair, and remodeling that we agreed on.
(3) This pump is not made of corrosion resistant specification. Be sure to
apply it to the clean normal temperature air or gas of equivalent
characteristics.
(4) Although corrosion resistance resin for external packaging of DA-41D,
DA-81S partly, there are chemicals that erode the corrosion resistance.
Prevent splashing the following chemicals on the pump. It is
recommended to wipe off chemicals attached regardless description in
the followings.
Acetone · Ethyl ether · Ethyl acetate · Flora and fauna oil, etc.
(5) Never absorb the gas that mixed dust, dust, moisture.
(6) Do not operate long time in environment near the atmospheric pressure.
1-2. Equipment Specifications
Table 1 –1 Equipment Specifications
Model Name
DA-41D
DA-41DK
DA-81S
DA-81SK
Exhaust
velocity
(L/min)
50Hz
40
75
60Hz
46
85
Ultimate pressure(kPa)
3.3
13.3
Motor Specifications
Standard
Substandard
1φ,AC100V±10%
(50/60Hz)
1φ,AC115V±10%
(60Hz)
1φ,AC200V±10%
(50/60Hz)
1φ,AC220V±10%
(50/60Hz)
100W,4P with condenser-run, thermal protection relay (automatic reset)
Rated
current
(A)
50Hz
2.5
1.3
1.2
60Hz
2.7
2.3
1.3
1.25
Rotating
speed
(rpm)
50Hz
1370
1400
1410
60Hz
1620
1690
1690
1690
Inlet / exhaust pipe
O.D.φ12×I.D.φ8 mm(G1/4)
Weight(kg)
10.3
10.2
10.3
10.2
Operating ambient
temperature(℃)
0~40
External dimensions
(W up to inlet / exhaust
pipe tip)
157mm(W)×
336.5mm(L)×
217mm(H)
140mm(W)×
288mm(L)×
202mm(H)
181mm(W)×
336.5mm(L)×
217mm(H)
153mm(W)×
288mm(L)×
202mm(H)
WARNING
CAUTION

2
1-3. Protector (thermal protector)
1) A autoreset type thermal protector for overload protection is built in this pump.
This protector prevents motor burnout trouble by shutting the power supply to the motor
automatically when rotation stops during operation due to pump failure or current supplied to the
motor exceeded due to overload.
2) It is recommended to adopt the other protector (electromagnetic switch, short circuit breaker, etc.) in
addition to this protector.
See "Warning" (8) on P. 04.
See "Caution" (6) on P. 06.
WARNING
CAUTION

3
2. Appearance
Fig. 2 -1 DA-41D, DA-81S Appearance
Fig. 2 -2 DA-41DK, DA-81SK Appearance
Model No.
Symbols on
drawing
Dimensions
Model No.
Symbols on
drawing
Dimensions
DA-41D,81S
A
217mm
(8.5”)
DA-41DK,81SK
E
202mm
(8”)
DA-41D,81S
B
336.5mm
(13.2”)
DA-41DK,81SK
F
288mm
(11.3”)
DA-41D
C
157mm
(6.2”)
DA-41DK
G
140mm
(5.5”)
DA-81S
D
181mm
(7.1”)
DA-81SK
H
153mm
(6”)
E

4
3. Installation / Storage
3-1. Precautions in Installation / Storage
3-2 Installation / Storage and Ambient Condition during Operation
This pump is a machine having precise clearance. Satisfy the following requirements when conducting
storing, installation and operation.
(1) Altitude / temperature and humidity when operating
Lower than 1000 m (3281') 0℃to 40℃in temperature, Lower than 85% (relative humidity) in
humidity.
(2) Miscellaneous (applicable both storing and operation)
a. Level location where enough floor strength.
b. No condensation.
c. No dust.
d. Well ventilated indoor.
e. No explosive gas.
f. No direct sun rays.
g. No flammability risk.
h. When Equipment is installed, temperature in pump circumference shall not exceed 40℃
(104 degF).
3-3 Installation location
Select a location where dust and moisture are small, and install the equipment in level at the
installation location. Arrange considering work such as mounting, detachment, inspection, cleaning of
a pump.
In case building in equipment, pay enough attention to ambient temperature in particular. Loosen from
the equipment by using a rubber cushion, etc. so that no vibration may be conveyed between the
pump and equipment.
Refer "3-2 Installation / Storage and Ambient Condition during Operation" for ambient conditions.
See "Warning" (1) (2) (3) (5) (6) (7) (8) (9) (10) (11) (12) (13)
on P. 04.
See "Caution"(1) (2) (3) on P. 05.
See "Attention" (1) (2) (7) on P. 06.07.
WARNING
CAUTION
ATTENTION

5
3-4 Verification Run in Installation
1) Detach rubber screen that attached to the inlet / exhaust pipe.
2) Confirm that the pump switch is set to OFF (pushed to ○ side) and connect it to power source.
3) Turn the switch ON (push to |side) and confirm the unit is absorbing.
4) After confirmation is finished, turn the power switch OFF (pushed to ○ side) and stop the pump
operation.
3-5 Piping
1) Connect piping tightly so that no leak is found.
2) Use the pipe larger than 8 mm internal diameter for inlet / exhaust port piping.
3) In case the back pressure is inevitable, make it less than 0.03MPa.
4) Piping for evacuation of the container shall have a blocking valve as shown on Fig. 3-1 in order to
maintain vacuum status between an inlet pipe and container of the pump.
5) In case of selecting the inlet pipe and exhaust pipe that are not from our products, please select the
exhaust pipe that has same or larger inner diameter length with the inlet pipe.
6) When connecting a pipe to inlet / exhaust port, always hold the inlet / exhaust port by hands.
Also, hold the inlet / exhaust port by hands when detach the pipe.
Fig. 3 -1 Piping Example for Evacuation of Container
3-6 Storage
Make a switch of a pump OFF (be clicked by ○ side), and pull power cord, and install rubber screen in
inlet / exhaust pipe, and please archive it in a few places of moisture.
Vacuum pump
Filter
Leak valve
Blocking
valve
Container
Please use the three core power supply cable (lead wire
size 0.75mm2or more) as the extension cable, if
necessary.
CAUTION

6
4 Caution in Operation
4-1 Caution in Operation
1) It is necessary to clean internal pump when stopped operation in order to maintain the pump
performance.
Have the pump to absorb clean air for 3 - 5 minutes and conduct idling operation.
2) Consult factory in case of special application usage.
4-2 When Thermal Protector Operated
1) When a thermal protector operated, at first turn off the pump power supply (push to ○ side) and
disconnect power cable. Contact ULVAC or local agent. Temperature of the pump is very high at
this time.
Do not touch the pump by hand definitely.
2) The pump operates automatically when temperature drops. Shut-off the power supply, and
determine the cause of operation of the thermal protector.
3) When the cause of failure was corrected, start operation after confirming the motor temperature is
cooled down.
See "Danger" (1) (2) on P. 04.
See "Warning" (8) (14) (15) (16) on P. 04. 05.
See "Attention" (3) (4) (5) (6) (7) (8) on P 06.07.
See "Caution" (4) (5) (6) (7) (8) on P. 05. 06.
DANGER
WARNING
CAUTION
ATTENTION
See "Caution" (6) on P. 06.
CAUTION

7
4-3 Starting in Cold Ambient
In the cold ambient, there is a case to confront with difficulty in start because of hardened grease and
diaphragm of the bearing.
When it is difficult to start, follow the procedure described below.
1) Open the inlet port to atmosphere and repeat switch ON, OFF two or three times until the pump
starts.
If still it does not start, warm up the ambient temperature to 0℃(32 degF).
2) Operate the pump a few minutes while the inlet port is open so that the temperature of the pump
become warmer gradually.
3) When the pump is warmed up, operate the pump as usual.

8
5 Pump Performance
5-1 Ultimate pressure
"Ultimate Pressure" mentioned in Catalog and this Instruction Manual means "the lowest pressure
obtained by a pump in the status that no gas is filled from the pump inlet port (idling operation status)”.
Ulvac is measuring the pressure by connecting a film-type (diaphragm type) vacuum gauge to inlet
port of the pump.
Please note that the indicated value of the pressure may be different depend on the type of the
vacuum gauge.
Ultimate pressure of the actual vacuum devises usually higher pressure than the catalog value.
Reason of this phenomena is as follows.
(1) The mounting location of the vacuum gauge is far from the pump and steam and various kinds of
gases generated from drops of water or rust that attached to the inner wall of the equipment and
piping make the ultimate pressure higher.
(2) Ultimate pressure becomes higher in case there is resource of gas such as vacuum leakage in
the vacuum route.
5-2 Exhaust velocity
Flow rate of the diaphragm type dry vacuum pump varies according to the type and pressure of gas to
intake. Generally, it shows the maximum exhaust velocity in atmosphere introduction that becomes
lower little by little as the pressure becomes low.
In addition, the thinner diameter of piping and longer piping would make piping resistance large
resulting the slower discharge velocity.
Nominal discharge velocity of this pump shows the maximum when breathe dry air.
5-3 Power Required
Power to drive a pump is the sum of the work for rotating friction of the machine element (machine
work) and the work to compress air (work of compression). It becomes the largest in the vicinity of 2.7
x 103to 4 x 104Pa inlet pressure. When this becomes lower, work of compression is small and power
is consumed by machine work.

9
6. Maintenance・Inspection・Repair
6-1 Caution in Maintenance/Inspection/Repair
Maintenance / repair range that allowed to perform by repair engineers in the Customers are the
following 4 items. Do not conduct the other repair and remodeling other than Ulvac standard option.
1) Replacement of diaphragms
2) Replacement of valves
3) Replacement of inlet / exhaust filters
4) Replacement of O rings
6-2 Maintenance
During an operation of the vacuum pump, check the following items at least once in 3 days.
(1) Generation of abnormal noise.
(2) Abnormally hot temperature of the pump.
(3) Normal exhausting.
When there is abnormality, conduct necessary measure according to "6-4. Trouble Check List".
See "Danger" (3) on P. 04.
See "Warning" (4) (17) (18) on P. 04. 05.
See "Attention" (12) on P. 07.
See "Caution" (9) (10) (11) on P. 06.
DANGER
WARNING
CAUTION
ATTENTION

10
6-3 Periodic Inspection
Conduct periodic inspections of consumable parts in every 4,500 hours after started using and replace
parts according to "Guideline of Parts Replacement". Replacement method [6-4. refer to replacement
of consumable part]. In case there is no repair engineer, Ulvac Service Section shall be happy to
replace the parts.
Table 6 -1 Consumable Parts List
Part name
Quantity
Material
Reference life
41D(K)
81S(K)
Diaphragm
2
2
Synthetic rubber
（EPDM）
PTFE affixed
9,000hr
Valve A
3
2
PTFE
9,000hr
Valve B
1
2
PTFE
9,000hr
Valve holder A
2
2
EPDM
9,000hr
Valve holder B
1
2
SUS
9,000hr
Inlet / exhaust filter
2
3
Urethane cellular porous
medium
9,000hr
O ring (S-28)
6
6
Synthetic rubber (FPM)
9,000hr
O ring (P-10A)
2
2
Synthetic rubber (FPM)
9,000hr
Bearing
1 set
1 set
―――
15,000hr
These lives may differ according to the working conditions.
Lives may be extended by operating the pump with smaller load by observing "4-1 Caution in
Operation".
Operating the pump with smaller load means the operation at ultimate pressure (inlet port closed).
Bearings shall be replaced by Ulvac Service Section.