Ulvac MS120A User manual

YO20-0938-DI-001-00
Prepared on: April 5, 2022
INSTRUCTION MANUAL
Dry Vacuum Pump
ULVAC INC, Components Division
Original Instructions

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YO２０-0938-DI-001-00
Before Use of This machine
Dry Pumps from ULVAC, Inc. (hereinafter referred to as "Our Company"): MS series (hereinafter referred to as
"this machine")
Upon receipt of the machine, please confirm the contents included are the same as you ordered and check the
machine for any damage attributed to transportation etc. just in case.
This instruction manual (hereinafter, "this manual") describes appropriate handling and maintenance
procedures to safely use this pump and to maximize its performance. Read this document in advance to
properly use this pump.
Install and operate this machine according to the local and national safety laws and regulations (such as fire
laws and electric wiring code). It is required to take a training for general safety of the country and the local area
where this machine will be used. Do not use this machine without any training.
The operator is required to have taken such trainings. In addition, the operator must have expertise, skills,
qualifications in electrics, mechanics, cargo handling, vacuum, etc.
This pump has been designed to conform to the rules in place when this document was created. Conformity is
not guaranteed because the applicable standards may change in the future.
Performance and safety may not be ensured if equipment connected to this pump does not conform to the
same rules or if the pump is altered. In such cases, we cannot guarantee (take responsibility for) performance
or safety. Product alterations made by the customer are not covered by the warranty, and we cannot take
responsibility for them.
Before installing or removing this machine, separate all energy sources (including power and cooling water)
from the product.
None of this pump's parts may continue to be used permanently while maintaining the performance upon
delivery. Performance inevitably degrades after a certain amount of time elapses, thus increasing the likelihood
of product problems even in assumed common usage scenarios. We ask that our customers perform preventive
maintenance to avoid problems in accordance with their usage scenarios. By performing preventive
maintenance measures, you can lower the probability of problems with this pump due to parts failures caused
by parts becoming worn out as well as the probability of other risks, such as downtime caused by pump
problems, fire, or effects on other processes. From the viewpoint of preventive maintenance, we also ask our
customers to prepare maintenance and inspection plans and to replace parts and perform overhauls according
to such plans.
If you have any questions about handling or other matters, please contact our nearest sales office or dealer.

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YO20-0938-DI-001-00
Signal words and symbol marks are used in the warning indications contained in this document and on the
product so that the user can understand the matters to be observed. Their meanings are as follows.
▶ Definition of signal words:
The terms that signify the warning level for safety are referred to as "Signal Words."
Indicates an imminent possibility that incorrect handling may lead to the
user’s death or serious injury.
Indicates a possibility that incorrect handling may lead to the user's death
or serious injury.
Indicates a possibility that incorrect handling may lead to the user
suffering a medium-level injury.
Indicates important information not related to human injury.
▶ Definition of pictograms:
Indicates potential risks related to human injury.
Indicates potential risks related to electrical shock.
Indicates potential risks related to high temperature.
Indicates the matters "Prohibited" or must not to do.
Indicates the matters "Compulsory" or must to do.
Indicates that a protective gloves must be worn.
Indicates that a protective glasses must be worn.
Indicates that the instruction manual must be referred.
NOTE
S
Safety Indications

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A warning label is attached onto a warning location on the machine. Before operating this pump, be sure to
confirm the warning contents.
▶ Warning Label Types and Descriptions
Parts with this warning label have a risk of electrical shock.
Turn off the primary power supply before starting wiring or maintenance.
During operation or for a while after operation stops, do not touch the unit as
each portion is at a very high temperature. Touching it may cause burns.
Do not operate this pump while equipment is attached that prevents gas from
moving to the exhaust port (e.g., that blocks the exhaust port). The pump's
internal pressure may rise, causing the casing or level gauge to rupture, oil
leakage, or motor overload. Explosive or flammable gas, gas that increases the
susceptibility of substances to fire, or other gas may ignite inside the pump, thus
increasing the pump's internal pressure.
Do not exhaust gas that has these characteristics.
Before pumping such a gas, dilute it sufficiently to the extent that the risk of
explosion and ignition is eliminated.
Before use, read through the instruction manual and fully understand its
contents.
Warning Label Types and Display Positions

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▶ Warning Label display position
Figure 1 Warning label pasting position （MS-120A）
MS120A
[For Installation of Silencer]

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YO２０-0938-DI-001-00
Although this pump undergoes our stringent internal inspection before shipment, if there are any failures
attributable to us such as a manufacturing defect or accident during shipping, contact our nearest sales
office or dealer. We will repair or replace it free of charge.
▶ Warranty Product
(a) Dry pump MS-Series (MS120A)
▶ Warranty Period
(a) Transactions in Japan: One year from the shipment date
(b) Direct export transactions: One year from the B/L date
▶ Warranty Scope
The warranty applies only to this pump. If a failure or accident occurs during air or nitrogen exhaust due
to our design or a manufacturing defect, we will repair the pump free of charge if within one year of
delivery.
▶ Disclaimer
The warranty does not cover the product failures listed below or those due to one of the following
causes; we will charge for such repairs even during the warranty period.
・ Failures or defects due to influence of corrosion or generated gas or product that are attributed to
the process environment.
・Failures or defects caused by consumables.
・When the power voltage or frequency of the power supply used differs from what was specified at
the time of order.
・Failures or defects caused by natural disasters such as fires, floods, earthquakes, or lightning, or
force majeure such as war.
・Failures or defects caused by handling errors or incorrect usage.
・Products modified/disassembled/repaired without our permission.
・Failures or defects caused by use in an abnormal environment including strong electromagnetic
fields, radioactive environments, high temperatures, high humidity, flammable gas atmospheres,
corrosive gas atmospheres, and dust.
・Failures or defects due to noise.
・Secondary damage incurred by the customer caused by product defects or claims from third parties
on violation of patents.
・When our engineers judge that the failures or defects are caused under the conditions of use
inappropriate to this product or not satisfied.
・Products for which the warranty period has elapsed
Warranty Terms

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YO20-0938-DI-001-00
▶ Response
(a) Transactions in Japan:
We will send a substitute product, or repair the product returned to us or our nearest ULVAC
TECHNO office.
If on-site action is required, contact our nearest sales office or dealer separately.
(b) Direct export transactions:
We will send a substitute product, or repair the product returned to us or our nearest service center.
▶ Others（Warranty Terms）
(a) If there are individual contracts and memorandum related to specifications in addition to this
document, the contents in those documents prevail.
(b) Before exporting this pump from Japan, contact us and perform the necessary procedures
according to the provisions of export-related laws such as the Foreign Exchange and Foreign
Trade Law.
(c) For any questions and consultation on this machine, confirm the model and manufacturing
number and then contact our nearest sales office or dealer.
https://www.ulvac.co.jp/support_info/
(d) Note that the contents in this document is subject to change without notice.

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● To ensure this machine remains usable for a long time, before installing, operating, inspecting, or
maintaining it, be sure to read this manual and fully understand the safety notes as well as the pump's
specifications and operating procedures.
● Note that the specifications, prices, and other contents in this manual are subject to change without
notice for improvement or other reasons. Changes are released as a revision that updates the
document number listed on the top-right corner of the instruction manual's cover.
● Be sure to give this document to the end user who uses the product.
● Copying this instruction manual in whole or in part for third parties without our permission is strictly
prohibited.
● This document is intended for users whose native language is Japanese. If users whose native
language is not Japanese perform work related to this machine, thoroughly provide safety training and
handling instructions under your own responsibility.
This manual applies to MS120A.
Symbols and numbers used for models have the following meanings.
About this Manual
Applicable Model
Model Revision
MS120
Naming
N
－
A
Model ：Design Displacement
120 : 120 m3/hr
Revision
A ： Latest revision symbol
Naming
N ：Normal specifications
Pump head option
2 1
－
① ②
①Sealing material
2：Fluoro-rubber
4：Perfluoroelastomer
②Voltage
1：200V class
2：400V class

TOC-１
YO20-0938-DI-001-00
Table of Contents
Before Use of This machine ....................................................................................... i
Safety Indications ........................................................................................................................................... ii
▶ Definition of signal words: ......................................................................................................... ii
▶ Definition of pictograms: ............................................................................................................ ii
Warning Label Types and Display Positions ........................................................................................ iii
▶ Warning Label Types and Descriptions ............................................................................... iii
▶ Warning Label display position .............................................................................................. iv
Warranty Terms ............................................................................................................................................... v
▶ Warranty Product ......................................................................................................................... v
▶ Warranty Period ........................................................................................................................... v
▶ Warranty scope ............................................................................................................................ v
▶ Disclaimer ...................................................................................................................................... v
▶ Response ...................................................................................................................................... vi
▶ Others（Warranty terms） .......................................................................................................... vi
About this Manual ........................................................................................................................................ vii
Applicable Model .......................................................................................................................................... vii
1. For Safety Use ......................................................................................................... 1
1.1 Handling of this Machine ................................................................................................................ 1
1.2 Acceptance/Transfer/Storage ......................................................................................................... 2
1.2.1 Acceptance .............................................................................................................................. 2
1.2.2 Transfer ..................................................................................................................................... 3
1.2.3 Storage ..................................................................................................................................... 3
1.3 Installation/Operation ........................................................................................................................ 3
1.4 Disposal ................................................................................................................................................. 4
1.5 Protective Device ................................................................................................................................ 4
1.6 Safety Measures and Waring Risk................................................................................................ 4
1.6.1 Vacuum pumping and exhaust of hazardous gases or substances ...................... 4
1.6.2 Transfer of heavy object ...................................................................................................... 5
1.6.3 Electrical shock ...................................................................................................................... 5
1.6.4 High temperature ................................................................................................................... 5
1.6.5 Ruptures ................................................................................................................................... 6
1.6.6 Leakage of high-temperature cooling water ................................................................. 6
1.7 Safety Data Sheet ................................................................................................................................. 7
2. Product Overview .................................................................................................. 8
2.1 Application ............................................................................................................................................ 8
2.2 Naming ................................................................................................................................................... 8

TOC-２
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2.3 Performance Curve ............................................................................................................................ 9
2.3.1 Pumping speed .......................................................................................................................... 9
2.3.2 Power consumption.................................................................................................................. 9
2.4 Name and Function of Parts ....................................................................................................... 10
2.5 Description of Controller ............................................................................................................... 11
2.6 System Configuration ...................................................................................................................... 14
3. Installation .............................................................................................................. 15
3.1 Before Installation ............................................................................................................................. 15
3.1.1 Responsibility for Work from Shipping to Startup ...................................................... 15
3.1.2 Storage environment requirements ............................................................................... 16
3.1.3 Environmental requirements for installation and operation .................................... 16
3.2 Unpacking ........................................................................................................................................... 17
3.2.1 Precautions for unpacking ................................................................................................ 17
3.2.2 Confirmation after unpacking ........................................................................................... 17
3.3 Transfer................................................................................................................................................ 18
3.3.1 How to hoist using crane ................................................................................................... 19
3.3.2 How to transport using pallet truck................................................................................. 20
3.4 Installation ........................................................................................................................................... 21
3.4.1 Leveling................................................................................................................................... 21
3.4.2 Earthquake countermeasures ......................................................................................... 21
3.5 Piping and Wiring ............................................................................................................................. 23
3.5.1 Inlet/Exhaust Port Piping ................................................................................................... 23
3.5.2 Dedicated silencer (Separately packed) ......................................................................24
3.5.3 Cooling water piping ........................................................................................................... 25
3.5.4 Purge Gas .............................................................................................................................. 27
3.5.5 Drain ........................................................................................................................................ 28
3.6 Electric Wiring .................................................................................................................................... 29
3.6.1 Electric wiring ........................................................................................................................ 29
3.6.2 Wiring for remote control ................................................................................................... 31
4. Operation ................................................................................................................34
4.1 Precautions on operation ...............................................................................................................34
4.2 Preparation for Operation .............................................................................................................. 36
4.2.1 Pre-Operation Check .......................................................................................................... 36
4.2.2 How to switch between LOCAL (manual) and REMOTE (remote) ...................... 36
4.3 How to Start/Stop ............................................................................................................................. 37
4.3.1 LOCAL operation ................................................................................................................. 37
4.3.2 REMOTE operation ............................................................................................................. 37
4.4 Monitor Display ............................................................................................................................... 38

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4.4.1 How to operate monitor display ...................................................................................... 38
4.5 Parameter List ................................................................................................................................... 39
4.5.1 U3: Alarm history ................................................................................................................. 39
4.5.2 U4: Operation monitor ........................................................................................................40
5. Maintenance and Inspection ............................................................................ 41
5.1 Daily Inspection ................................................................................................................................. 41
5.2 Inspection after Long-Term Storage ........................................................................................... 41
5.3 Overhaul ..............................................................................................................................................42
5.4 Notes on Transportation .................................................................................................................42
6. Troubleshooting ....................................................................................................43
6.1 Trouble with Basic Operation........................................................................................................43
6.2 Alarm Status and Measures......................................................................................................... 44
6.3 How to restart the pump after an alarm .....................................................................................49
7. Specifications ........................................................................................................ 50
7.1 Performance Specifications .......................................................................................................... 50
7.2 External Dimensions ....................................................................................................................... 51
Appendix ......................................................................................................................... 52
Major Replacement Parts .......................................................................................................................... 52

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1. For Safety Use
This chapter describes how to reduce risks as well as which dangerous behaviors must be avoided for each
work item.
1.1 Handling of this Machine
If you need an overhaul or repair or if you have a problem, contact our nearest service center.
This manual assumes that this pump's interlock system or control system has
been integrated into the host equipment.
Connect the pump's power line to the host equipment's EMO system.
This pump can exhaust inert gas (air, nitrogen, or argon).
If the pump exhausts other gas (toxic, combustible, corrosive, or explosive gas,
or gas that increases the susceptibility of substances), such gas may leak from
the pump's main unit or ignite or explode inside the pump. Therefore, do not
use this pump to exhaust such gases. If to use this machine, dilute such a gases
sufficiently to the extent that the risk of explosion and ignition is eliminated
before pumping.
Install this pump in a ventilated room indoors.
If nitrogen or argon leaks, the lack of oxygen may cause suffocation.
Before installing or removing this pump, separate all energy sources (including
power and cooling water) from it.
When toxic gases were pumped, not only this machine but also the oil becomes
toxic. Please be careful during maintenance.
Install appropriate traps, such as filters, separators and/or condensers to
prevent the ingress of liquid and solid particles to this pump.
● This machine has been designed to conform to the rules in place when this manual was created.
Conformity is not guaranteed because the applicable standards may change in the future.
● Performance and safety may not be ensured if equipment connected to this pump does not conform
to the same rules or if the pump is altered. In such cases, we cannot guarantee (take responsibility
for) performance or safety.
● Do not handle this pump if you have not undergone publicly recognized general safety training
(including on electrical and loading safety) in your country. The operator must attend such training.
● Install and operate this pump according to the safety-related laws and regulations (such as fire
prevention laws and electrical wiring regulations) in your country.
NOTE
S

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● If the details of dangerous substances to be used is not disclosed, or the substances difficult to undergo a
detoxification processing are discharged, we may reject the maintenance and other related handlings.
If you entrust us of an overhaul, maintenance, or repair etc., enter the necessary information in the
"Declaration of Contamination" attached to the end of this manual and submit it to a service center.
● Before exporting this machine from Japan, it must undergo screening according to the Foreign Exchange
and Foreign Trade Law as well as government ordinances, ministerial ordinances, notices, and other
orders based on said law. Contact our nearest sales office or dealer.
【List of sales offices】
https://www.ulvac.co.jp/support_info/sales_office/
1.2 Acceptance/Transfer/Storage
1.2.1 Acceptance
Never get under this machine
This machine may fall or topple if a forcible operation is performed or if the
equipment is not sufficiently maintained. Never get under this machine.
Ask a specialist company to perform disassembly.
This machine comes packaged in a wooden crate, cardboard box, or other
material. Ask a specialist company to perform disassembly. Workers may cut
their hands on nails or wooden chips during work. Instruct those who
disassemble the machine to wear leather gloves and to use an appropriate bar
or other disassembly tool.
Use a crane or other cargo-handling equipment
Give instructions to hoist and transfer this machine using a crane or other
cargo-handling equipment and eyebolts on the top of this machine when
unpacking or hoisting it. Before using the eyebolts, confirm that there are no
abnormalities.
Certified persons must perform loading work and operate the cargo-
handling machine.
Never perform loading work or operate the cargo-handling machine if you do
not have the appropriate certifications.
After unpacking, make sure that there are no missing items or damage
After unpacking, make sure that there are no missing, damaged, or abnormal
items. If there are any problems, do not perform installation work.
NOTE
S

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1.2.2 Transfer
Do not use the casters as a transportation device or a means of
equipment support.
Although this pump is equipped with casters, do not use them as a
transportation device or a means of equipment support.
For transport, use cargo-handling equipment or a pallet truck.
To transport this machine, a load higher than the safety standards is required.
Therefore, manually transporting may cause lower back pain or injury. For
transport, hang this machine with cargo-handling equipment (such as a mobile
crane) or fix it on a pallet and then transport it by pallet truck.
1.2.3 Storage
Respect the environmental conditions
This machine has a precise clearance. Confirm the storage location and
satisfies the requirements listed in "3.1.2 Storage environment requirements."
1.3 Installation/Operation
Do not remove the face panel
Never remove the face panel. Failure to observe this instruction may lead to
burns or electrical shock.
Do not remove the casters
Do not remove the casters, and do not install this pump directly on the ground.
Do not apply shock to this machine or put in at an incline, position it
sideways, or stand it up or reverse it.
Do not apply shock to this machine or put in at an incline, position it sideways,
or stand it up or reverse it. Doing so will degrade the pump's operation. Install
this machine in a horizontal position to be leveled.
Operate this machine
after its temperature reaches the operational
ambient temperature
If this machine was stored outside the range of the operational ambient
temperature, operate it after its temperature reaches the operational ambient
temperature.
Install this machine in a horizontal position to be leveled
After moving to the installation location, adjust the four adjusters within the
range of 0 to 10 mm and install this machine horizontally on the main unit. If you
operate with casters, vibration may be transmitted to the floor. In addition, this
machine may move itself and collide with surrounding equipment.
NOTE
S
NOTE
S
NOTE
S
NOTE
S

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Respect the environmental conditions
This machine has a precise clearance. Confirm the storage location and satisfies
the requirements listed in "3.1.3 Environmental conditions during installation
and operation."
1.4 Disposal
Ask a waste disposal specialist to dispose of this pump if you have used
it to exhaust harmful gas that may endanger human health.
Ask a waste disposal specialist to dispose of this pump if you have used it to
exhaust harmful gas that may endanger human health.
Dispose of this pump according to the laws and ordinances issued by your local government.
Particularly if you have used this pump to exhaust harmful gas, ask a waste disposal specialist to
dispose of this pump. The customer must incur any disposal-related costs.
1.5 Protective Device
Be sure to install an earth leakage circuit breaker.
If no earth leakage circuit breaker is installed, then equipment burnout, fire, or
electrical shock may occur.
This pump is not equipped with a power interrupter and leak detector.
When selecting a ground-fault interrupter, refer to "3.6 Electric Wiring."
1.6 Safety Measures and Waring Risk
1.6.1 Vacuum pumping and exhaust of hazardous gases or substances
Do not
exhaust toxic gas, combustion gas, flammable gas, corrosive gas,
explosive gas, or gas containing fine powder
It is extremely dangerous to exhaust toxic gas, combustion gas, flammable gas,
corrosive gas, explosive gas, or gas containing fine powder. Furthermore, if
these gases were pumped into the machine, it is extremely dangerous as they
may ignite or explode due to residual gases or products not only during
operation but also after the machine stops. Do not discharge gases with these
properties. When exhausting such gas, dilute it sufficiently to the extent that the
risk of explosion and ignition is eliminated, before exhausting.
Wear protective equipment
During work such as inspection, wear protective equipment suitable for toxic
substances for use.
NOTE
S

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Ask a waste disposal specialist to dispose of this pump.
To dispose of this pump, ask a waste disposal specialist authorized by the
government.
Ask for entrust to a specialized processor for detoxification processing.
For an overhaul or disposal, entrust a processor specialized in waste disposal
to do the detoxification processing.
1.6.2 Transfer of heavy object
Never get under this pump.
The pump may fall or topple if a forcible operation is performed or if the equipment
is not sufficiently maintained. Never get under this pump.
Certified persons must perform loading work and operate the cargo
-
handling machine.
Never perform loading work or operate the cargo-handling machine if you do not
have the appropriate certifications.
Failure to observe this instruction may lead to accident or injury.
1.6.3 Electrical shock
Before connecting the power, turn off the primary power supply.
Be sure to turn off the primary power supply before connecting the power.
Before inspection or relocation, turn off the primary power supply.
Be sure to turn off the primary power supply before inspection or relocation.
Be sure to connect the ground terminal.
A certified electrical worker must embed grounding or connect the ground line.
Incomplete grounding incurs the risk of electrical shock.
1.6.4 High temperature
Do not remove the face panel.
Never remove the face panel. This pump becomes very hot during operation and
remains hot for a while after operation stops. Touching it may lead to burns.

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Do not touch the pump's main unit, motor, or piping during operation.
Do not touch the pump's main unit, motor, or piping during operation because
they are very hot. Failure to observe this instruction may lead to burns.
Wait until the pump temperature drops.
The pump is hot immediately after operation stops. Wait a while until the pump
temperature drops and then perform inspection. Failure to observe this
instruction may lead to burns.
1.6.5 Ruptures
Do not increase the pressure on the pump's exhaust side to 0.03 MPaG or
higher.
Measure the pressure on the pump's exhaust side. If the pressure is 0.03 MPaG
(0.3kg/cm2G) (gauge pressure) or higher, remove any objects that prevent gas on
the exhaust port side from passing.
If the pump's internal pressure exceeds 0.03 MPaG, the pump may rupture.
1.6.6 Leakage of high-temperature cooling water
If this machine is operated without water supply, stop immediately and
keep away from it
If this machine is operated without water supply, stop immediately and keep away
from it. Hot steam may blast out of the pump's cooling water port.
Install an interlock on the cooling water pathway.
Install a flowmeter on the cooling water pathway, and install an interlock so that
this pump stops if supply of cooling water stops. If you operate this pump without
flowing cooling water, hot steam may blast out of the pump's cooling water port.
Wait until the pump temperature drops.
Remove and inspect after stopping this machine and confirming that the
temperature has dropped.