Ulvac DAU-100 User manual

No．21001-2-01-8
INSTRUCTION MANUAL
Diaphragm-type Dry Vacuum Pump
DAU-100
Request to Users
Please read this manual thoroughly to ensure safe and
effective use of the equipment.
Keep this manual in a safe place.
Due to periodic improvements in performance, the
equipment described in this manual is subject to
changes in dimensions and specifications without prior
notice.
ULVAC KIKO,Inc.

Contents
Pages with a shaded background are those which contain items related to safety.
Before Using the Equipment..............................................................................................................01
Checks When Opening Packaging.....................................................................................................02
Using the Pump Safely.......................................................................................................................03
･Safety icons...............................................................................................................................03
･Cautions for Safety in Use.........................................................................................................04
1. Product Outline...............................................................................................................................1
1.1 Purpose of Use and Prohibitions .........................................................................................1
1.2 Specifications ......................................................................................................................1
1.3 Thermal Protection Relay ....................................................................................................2
1-4 Solenoid Valve (vent valve) .................................................................................................2
2. Dimensions ....................................................................................................................................2
3. Installation and Storage..................................................................................................................3
3.1 Cautions for Installation and Storage...................................................................................3
3.2 Environmental Conditions for Installation, Storage, and Operation ......................................4
3.3 Location...............................................................................................................................4
3-4 Electrical Wiring.................................................................................................................4
3.5 Piping..................................................................................................................................4
3.6 Storage................................................................................................................................4
4. Cautions for Operation ...................................................................................................................5
4.1 Cautions for Operation.........................................................................................................5
4.2 Operation of the Thermal Protection Relay..........................................................................6
4.3 Starting in Cold Weather......................................................................................................6
5. Pump Performance.........................................................................................................................6
5.1 Pressure Achieved ..............................................................................................................6
5.2 Evacuation Rate..................................................................................................................6
5.3 Power Requirements...........................................................................................................6
6. Maintenance, Inspection, and Repair .............................................................................................7
6.1. Cautions for Maintenance, Inspection, and Repair...............................................................7
6.2 Maintenance........................................................................................................................7
6.3 Regular Inspections.............................................................................................................8
6.4 Replacing Consumables......................................................................................................9
1) Replacing Diaphragms....................................................................................................9
2) Replacing Valves.......................................................................................................... 12
3) Replacing non-return valves..........................................................................................14
4) Replacing O Rings........................................................................................................15
5) Replacing head gaskets ................................................................................................16
6) Replacing bearings........................................................................................................16
6.5 Troubleshooting List ..........................................................................................................17
7. In Conclusion................................................................................................................................18
･Warranty....................................................................................................................................18
･Usage Status Check Sheet
(used with requests for disassembly and repair)
･Product information, service bases, and contact information

Figures and Tables
Fig.2.1 DAU-100 Dimensions ........................................................................................................2
Fig.3.1 Example of Piping Used When Evacuating a Vessel .........................................................4
Table 1.1 Product Specifications (50/60 Hz) ....................................................................................1
Table 6.1 Consumables List..............................................................................................................8
Table 6.2 Locations for Maintenance and Inspection.........................................................................8
Table 6.3 Troubleshooting List ........................................................................................................17

Before Using the Equipment
Thank you for purchasing this product. Your custom is very much appreciated.
This pump is designed solely for vacuum discharge, and may malfunction or cause accidents if not
handled appropriately. Read the manual thoroughly, and pay due attention to inspections,
maintenance, and safety.
Personnel Handling the Equipment
Only persons who have read this manual thoroughly, and have sufficient understanding of
safety, pump specifications, and method of operation, may operate this pump.
Read the Manual Thoroughly
Read the manual thoroughly in order to use the equipment correctly. Read the section on
Safe Use particularly closely.
Keep This Manual in a Safe Place
After reading this manual, be sure to keep it in a safe place which is readily accessible to
others needing to use it.
Copying This Manual Is Prohibited
No part of this manual may be copied for use by a third party without the express
permission of the manufacturer.
Statutory Requirements for Disposal
Follow all statutory and local authority regulations when disposing of this pump.
Safety During Repair
Please provide a full description of the circumstances of use (particularly the use of
dangerous materials) for the safety of repair personnel when requesting the manufacturer
for repairs to the pump. Your request for repair of may be refused if these circumstances
are unclear.
01

Checks When Opening Packaging
Check the following after opening the packaging.
(1) Is the product as you requested?
(2) Are the accessories and necessary parts included?
Standard accessories
・User’s manual -------------------- x 1
・Inlet and outlet caps (fitted to inlet and outlet) -------------------- x 2
・Power plug adapter (attached to power cord) -------------------- x 1
(3) Is the pump damaged in any way?
(4) Are any external screws or inlet and outlet pipes loose? Are any components missing?
Contact your agent or the sales division of the manufacturer if there are any problems with the
pump.
02

Using the Pump Safely
To ensure that the pump is handled correctly, read this section thoroughly before use.
This manual and the warning labels on the pump include safety icons as an aid to understanding
safety requirements.
These safety icons warn the operator and others of possible dangers and damage and should
always be followed.
・Safety icons
The meanings of the safety icons are as follows.
Incorrect handling of the equipment is very likely to result in death or serious injury to the
operator.
Incorrect handling of the equipment may result in death or serious injury to the operator.
Incorrect handling of the equipment may result in light or medium injuries to the operator or
damage to the equipment.
Incorrect handling of the equipment may result in damage to the equipment and hinder its
correct operation.
!
Danger
!
Warning
!
Caution
!
Note
03

Cautions for Safety in Use
Applications
* This pump is not designed to be explosion-proof, and should therefore not be used to
discharge explosive gases.
* In addition to discharge of gas via the outlet, gas may also leak from other parts of the
pump, and it should therefore not be used with toxic gases. If toxic gas is discharged for
any reason it is important to note that the interior of the pump will be contaminated by the
gas, requiring appropriate caution during maintenance.
Installation
* Do not use the pump in an explosive atmosphere. Such use may result in injury and fire.
* Ensure that there are no inflammable materials such as solvents in the vicinity when using
the pump.
* Ensure that the motor is freely ventilated to prevent overheating which may result in fire or
burns.
Power Supply
* Always remove the power cord from the wall socket before checking or repairing the
pump. Failure to do so may result in electric shock, or the pump suddenly starting and
causing injury.
* Ensure that the relevant wiring is in accordance with technical standards for electrical
equipment and wiring regulations. Incorrect wiring may result in fire.
* Always ensure that the pump is correctly earthed. A dedicated earth leakage breaker is
recommended. Failure to earth the pump correctly may result in electric shock if a fault or
earth leakage occurs.
* Use the pump only at the rated voltage. Use at other than the rated voltage will interfere
with operation of the overload protection device, and this may result in the motor burning
out, or fire.
* Do not damage, modify, pull the power cord, or place objects on it. Damage to the cord
may result in electric shock or fire.
* Always fully insert the power cord into the socket. Partial insertion may result in electric
shock.
* Remove the cord from the socket while holding the plug. Failure to do so may result in
electric shock.
* Touching the power cord with wet hands may result in electric shock.
* Touching electrical wiring etc while inserting the power plug may result in electric shock.
!
Danger
!
Warning
04

Operation
* Inserting fingers or objects into the motor inlet may result in electric shock, injury, or fire.
* Operating the pump with the discharge outlet blocked, or with a device which prevents
passage of gas to the discharge outlet, may result in rupture of the pump. The internal
pressure of the pump rises and the pump body may rupture and the motor become
overloaded.
This pump is not designed to be pressure-resistant. The internal pressure of the pump is
limited to 30 kPa (gauge pressure).
Maintenance and Repair
* The pump should be dismantled or repaired only by a repair technician trained by the
manufacturer.
* To prevent ingestion of microscopic particles resulting from wear of components, use a
dust mask and gloves when replacing diaphragms, and valves.
Installation
* To prevent back injuries, always use at least two people when lifting and moving the
pump.
* Microscopic particles resulting from wear of components are discharged from the outlet
and contaminate the room. If necessary, connect a pipe from the discharge outlet to the
outside of the building.
* The fine clearances used in this pump require that the following conditions be satisfied
during storage, installation, and operation.
1. Ambient temperature of 7°C ~40°C and maximum relative humidity of 85% during
operation.
2. Other conditions for storage and operation.
a) Level floor of sufficient strength.
b) No condensation
c) Dust-free environment
d) Well ventilated
e) Environment free of corrosive or explosive gas.
f) Not subject to direct sunlight.
g) No danger of fire.
h) Maximum ambient temperature of 40°C during assembly of pump.
Operation
* Touching rotating components (eg motor, main shaft, axial joints) while the pump is in
operation may result in injury.
* Touching the motor while the pump is in operation or while it is still hot immediately after
having been switched off may result in burns.
* Do not insert fingers or objects into, or peer into, the inlet or outlet during operation.
Maintenance and Repair
* If the pump ceases operation, turn power OFF (set switch to O) immediately to prevent
accidents, remove the power cord from the wall outlet, and contact your dealer or the
manufacturer for inspection and repair.
!
Caution
!
Warning
05

1
1.Product Outline
1.1 Purpose of Use and Prohibitions
This product is a dry vacuum pump which employs reciprocating motion of a rubber
diaphragm for vacuum discharge.
Observe the following prohibitions to ensure normal operation of the pump.
Prohibitions
(1) This pump employs only vacuum operation, and must not be pressurized.
(2) Do not re-sell, repair, or modify this pump without the approval of the manufacturer.
(3) This pump is not designed to be corrosion-proof. Use it only with clean air at normal
temperature, or gases of equivalent characteristics.
(4) Do not attempt to discharge gases containing particles, dust, water, or corrosive gases.
(5) Do not operate the pump for long periods at near-atmospheric pressure.
1.2 Specifications
Table 1.1 Product Specifications
Model
DAU-100
Discharge
rate
50Hz
100 L/min
60Hz
110 L/min
Pressure achieved
266 Pa
Motor
AC100V
1φ,300W,4P, condenser run
AC200V
1φ,300W,4P, condenser run
Rated current
6.2/5.5 A
3.15/2.90A
Speed
1400/1680 r/min
1410/1700 r/min
Weight
24 kg
Inlet/outlet piping
NW16
Air temperature
7℃~ 40℃
Dimensions
190mm(W)×437mm(L)×310mm(H)
!
Warning
!
Note

2
1.3 Thermal Protection Relay
1) This pump is fitted with an automatic reset thermal protection relay for overload protection.
This device shuts off the motor power supply circuit automatically to prevent burn-out if the
motor temperature rises due to a pump fault which prevents rotation, or if load becomes
excessive.
2) It is recommended that additional protective devices (eg. earth leakage breaker) be fitted.
* Use only at the rated voltage for the motor. Use at other voltages will interfere
with normal operation of the overload protection relay, and may result in motor
burnout or fire.
* When the overload protection relay operates the pump will be extremely hot.
Touching the pump in this condition may result in burns.
1-4 Solenoid Valve (vent valve)
This pump incorporates a solenoid valve (vent valve).
This valve functions to introduce air into the pump chamber, thus eliminating the pressure
difference between the pump chamber and atmosphere, and permitting the pump to be
restarted smoothly.
Note that low voltage, or the timing with which the pump was stopped, may prevent starting of
the pump.
2. Dimensions
Fig.2-1. DAU-100 External Dimensions
!
Warning
!
Caution

3
3. Installation and Storage
3.1 Cautions for Installation and Storage
* Do not use the pump in an explosive atmosphere. Such use may result in injury and
fire.
* Ensure that the vicinity of the motor and pump is completely free of inflammable
materials (e.g. inflammable solvents). Use in the presence of such materials may
result in fire.
* Operating the pump with the discharge outlet blocked, or with a device which
prevents passage of gas to the discharge outlet, may result in rupture of the pump.
The internal pressure of the pump rises and the pump body may rupture and the
motor become overloaded.
This pump is not designed to be pressure-resistant. The internal pressure of the
pump is limited to 30 kPa (gauge pressure).
* Ensure that the vicinity of the pump is free of objects which may obstruct the flow of
air in the vicinity of the cooling fan. Such obstructions may result in overheating,
causing burns and fire.
* Ensure that the relevant wiring is in accordance with technical standards for
electrical equipment and wiring regulations. Incorrect wiring may result in fire.
* To eliminate the possibility of electric shock, remove the power cord from the outlet
before joining electrical wiring. Do not undertake such work on live wires under any
circumstances.
* Always ensure that the pump is correctly earthed. A dedicated earth leakage
breaker is recommended. Failure to earth the pump correctly may result in electric
shock if a fault or earth leakage occurs.
* Use the pump only at the rated voltage. Use at other than the rated voltage will
interfere with operation of the overload protection device, and this may result in the
motor burning out, or fire.
* Do not damage, modify, pull, or place objects on the power cord. Earth leaks may
occur at damaged points on the cord, resulting in electric shock or fire.
* Always fully insert the power cord into the socket. Partial insertion may result in
electric shock.
* Always grip the plug when removing it from the outlet. Pulling on the power cord
may result in electric shock.
* Inserting or removing the power cord with wet hands may result in electric shock or
fire.
* Take care not to touch electrical wiring when inserting the plug into the outlet. Any
contact with electrical wiring may result in electric shock.
* To prevent back injuries, always use at least two people when lifting and moving
the pump.
* Application of physical shock to, or tipping of, the pump may result in a
malfunction.
!
Warning
!
Caution
!
Note

4
3.2 Environmental Conditions for Installation, Storage, and Operation
The fine clearances used in this pump require that the following conditions be satisfied during
storage, installation, and operation.
1. Ambient temperature of 7°C ~40°C and maximum relative humidity of 85% during
operation.
2. Other conditions (during storage and operation).
a) Level floor of sufficient strength.
b) No condensation
c) Dust-free environment
d) Well ventilated
e) Environment free of corrosive or explosive gas.
f) Not subject to direct sunlight.
g) No danger of fire.
h) Maximum ambient temperature of 40°C during assembly of pump.
3.3 Location
The pump should be installed level in a location with minimal dust and humidity. This location
should be selected in consideration of ease of installation and removal, inspection, and
cleaning.
Particular attention should be paid to ambient temperature when fitting the pump to equipment.
Use anti-vibration rubbers to isolate the pump from vibrations in the equipment. See 3.2
Environmental Conditions for Installation, Storage, and Operation for details.
3.4 Wiring
1) Remove the caps from the inlet and outlet pipes before using the pump
2) The wiring is already connected to the pump. Check that the pump switch is set to 'O', and
connect the power supply.
3) Set the pump switch to 'I' and check for vacuum.
4) Set the pump switch to 'O' to stop the pump.
5) Attachment of the motor breaker is recommended.
3.5 Piping
1) Install piping carefully to prevent leaks.
2) Use only a very short hose on the inlet. Use of a long hose will reduce exhaust
performance. Ensure that the hose has an internal diameter of at least 10mm.
3) Ensure that piping connected to the outlet does not cause back pressure. Maximum back
pressure is 30 kPa (gauge pressure).
4) In case of selecting the inlet pipe and exhaust pipe that are not from our products, please
select the exhaust pipe that has same or larger inner diameter length with the inlet pipe.
5) When evacuating a vessel, ensure that a shut-off valve is placed between the pump inlet
pipe and the vessel (see Fig.3.1).
Fig.3-1 Piping Example with Vessel and Vacuum Exhaust
3.6 Storage
Set the pump switch to 'O', remove the power cord from the outlet, place the caps over the
inlet and outlet, and store the pump in an area of low humidity.
Vacuum pump
Filter
Leak valve
Shut-off valve
Vessel

5
4. Cautions for Operation
4.1 Cautions for Operation
* This pump is not designed to be explosion-proof, and should therefore not be used to
discharge explosive gases.
*In addition to discharge of gas via the outlet, gas may also leak from other parts of the
pump, and it should therefore not be used with toxic gases. If toxic gas is discharged
for any reason it is important to note that the interior of the pump will be
contaminated by the gas, requiring appropriate caution during maintenance.
* Operating the pump with the discharge outlet blocked, or with a device which
prevents passage of gas to the discharge outlet, may result in rupture of the pump.
The internal pressure of the pump rises and the pump body may rupture and the
motor become overloaded.
This pump is not designed to be pressure-resistant. The internal pressure of the
pump is limited to 30 kPa (gauge pressure).
* Use the pump only at the rated voltage. Use at other than the rated voltage will
interfere with operation of the overload protection device, and this may result in the
motor burning out, or fire.
* This pump is not designed to be explosion-proof. Ensure that the vicinity of the motor
and pump is completely free of inflammable materials (e.g. inflammable solvents).
Use in the presence of such materials may result in fire.
* During operation, or immediately after it has stopped, the pump will be extremely hot.
Touching the pump in this condition may result in burns.
* Ensure that the pump is used at an ambient temperature of 7 °C ~40 °C . Operation
of the pump at high ambient temperatures will dramatically reduce its operating life.
* The pump is not designed to be corrosion-proof. Use only with clean air at normal
temperature, or gases of equivalent characteristics.
* The pump will not operate normally if damaged. Do not use with corrosive gases,
organic solvents, liquids, or condensable gases (eg. steam).
* Use of the pump with gases containing particles, dust, water, or corrosive gases will
interfere with normal operation.
* Application of loads at the inlet and outlet when starting the pump may overload the
motor and prevent starting.
* This pump is designed solely for vacuum discharge. Operation for long periods at
near-atmospheric pressure may result in a malfunction.
Consult the manufacturer for details of use in special applications other than the above.
!
Danger
!
Warning
!
Caution
!
Note

6
4.2 Operation of the Thermal Protection Relay
1) When the thermal protection relay operates, immediately set the power switch to 'O',
remove the power cord from the outlet, and contact the manufacturer. Note that the motor
will be very hot and should not be touched.
2) Once the cause of the fault has been removed, wait until the motor cools and restart
operation.
When the thermal protection relay operates the pump will be extremely hot. Touching the
pump in this condition may result in burns.
4.3 Starting in Cold Weather
Cold weather will increase the viscosity of bearing grease and harden diaphragms, resulting in
the pump being difficult to start. Follow the procedure below in such conditions.
1) Turn the switch ON/OFF 2~3 times with the inlet open to atmosphere until the pump starts.
If the pump still does not start, raise the ambient temperature to beyond 7°C.
2) With the inlet open to atmosphere, run the pump for a few minutes to warm it.
3) Commence normal operation once the pump has warmed.
5.Pump Performance
5.1 Pressure Achieved
The term “pressure achieved” as employed in the catalogue and in this manual is defined as
“the minimum pressure obtained by the pump without introduction of gas from the pump inlet
(i.e. the no-load condition)”.
The manufacturer measures pump inlet pressure using a Baraton vacuum gauge (Absolute
Pressure Transducer 626A).
Note that the indicator values for pressure may differ between types of vacuum gauges.
The pressure achieved in practice is higher than that noted in the catalogue for the following
reasons.
1) The fact that the vacuum gauge is mounted a distance from the pump, the steam
generated by water droplets and rust etc on the inside walls of the pump and piping, and a
variety of gases present in the system result in increased pressure.
2) Leaks into the vacuum system introduce other gases, resulting in increased pressure.
5.2 Evacuation Rate
The rate of evacuation for diaphragm-type dry vacuum pumps varies with the type of gas
entering the inlet, and its pressure. The maximum rate of evacuation is reached when air is
introduced, and decreases slightly as pressure is reduced.
The resistance of the piping system increases with small bore piping which extends over long
distances, and this reduces the rate of evacuation.
The declared rate of evacuation for this pump is the maximum value achieved with dry air.
5.3 Power Requirements
The power required to drive the pump is the total of the work required to overcome the
rotational resistance of the pump (mechanical work), and the work required to compress the
air (compression work), and is at a maximum at an inlet pressure of 2.7 x 104 ~4 x 104 Pa. At
pressures below 500Pa, compression work is considerably reduced and power is expended in
mechanical work.
!
Caution

7
6. Maintenance, Inspection, and Repair
6.1 Cautions for Maintenance, Inspection, and Repair
When requesting the manufacturer’s service division for disassembly and repair,
always enter the details of the type of gas used in the pump on the Pump Usage
Checksheet. If the pump has been used for discharge of a toxic gas it will be
contaminated, and may not be able to be disassembled and repaired in some cases.
* Ensure that the pump is dismantled and repaired only by qualified repair technicians.
+1 A qualified repair technician has received the appropriate training from the
manufacturer.
* The customer is able to conduct only the following maintenance and repairs. Do not
conduct any other repairs, or modifications other than the manufacturer's standard
options.
1) Replacing diaphragms
2) Replacing valves
3) Replacing non-return valves
4) Replacing O-rings
5) Replacing head gaskets
* Always remove the power cord before replacing consumables.
* When replacing diaphragms and valves, always wear a dust mask and gloves to
prevent ingestion of fine particles resulting from wear of the components.
* This pump operates with extremely fine clearances, and therefore requires
considerable skill in assembly. If a qualified repair technician is not available,
replacement of consumables should be left to the manufacturer's service division.
6.2 Maintenance
The following checks are required at least once every three days during operation.
1) Check for abnormal noises.
2) Check for abnormal heating of the pump.
3) Check that gas is discharged normally.
If a problem is found, take the measures described in 6.5 Troubleshooting List.
!
Danger
!
Warning
!
Note

8
6.3 Regular Inspections
Inspect consumables after the first 4000 hours of operation, and replace in accordance with
the Replacement Guide on the following page. Refer to 6.4 Replacing Consumables for
procedures.
Request replacement by the manufacturer’s service division if a repair technician is not
available.
<Consumables List> Table 6.1 Consumables List
Components
Quantity
Material
Average life
Diaphragms
4
Synthetic rubber
(NBR)
4000~6000 h
A valve
12
Synthetic rubber
(NBR)
4000~6000 h
Non-return valves
1
Synthetic rubber
(CR)
6000~8000 h
O rings (P-18)
1
Synthetic rubber
(NBR)
6000~8000 h
O rings (P-10)
7
Synthetic rubber
(NBR)
6000~8000 h
Head gaskets
4
Synthetic rubber
(NBR)
6000~8000 h
Bearings
1 Set
Approximately
15000 h
Note that the average life for a component varies with the conditions of use.
Bearings are replaced by the manufacturer’s service division.
<Replacement Guide>
Diaphragms : Replace if cracked, worn, hard, or deformed.
Valves : Replace if deformed, hard, or cracked.
Non-return valves : Replace if deformed, hard, or cracked.
O-rings : Replace if hard, cracked, or stretched.
Head gaskets : Replace if hard, cracked, or stretched.
Bearings : Request manufacturer for repair if abnormal noises or abnormal motor
vibration is noted.
<Locations for Maintenance and Inspection>
Table 6.2 Locations for Maintenance and Inspection
Period of
operation
Inspection item
Inspection details
Method of
inspection
4000 hours
Diaphragms
Wear, hard, or cracked
Visual
inspection
Valves
Deformed, hard, or cracked
Visual
inspection
Non-return valves
Deformed, hard, or cracked
Visual
inspection
O rings
Hard, cracked, or stretched
Visual
inspection
Head gaskets
Hard, cracked, or stretched
Visual
inspection
Bearings
Abnormal noises
Listen

9
6.4 Replacing and Cleaning Consumables
Use the following tools, and refer to the photographs, when replacing cleaning components.
Contact the manufacturer’s service division for this work if the necessary tools are not
available.
1. Cross head screwdriver : No.2
2. Slotted screwdriver : Minimum blade width 5.5mm, 50mm or longer
3. Spanners : For 4 and 5 mm nuts.
4. Torque wrench : With 4 mm socket. Ensure that it is capable of being set to 3, 4,
and 5 N.m torque.
5. Torque wrench : With 5 mm socket. Ensure that it is capable of being set to 16
and 18 N.m torque.
6. Torque driver : Cross head No.2, set to 5Nm torque
7. Spanners : For 14, 26, and 29mm nuts, or equivalent adjustable spanner.
8. Thread lock : Loctite ®.242
9. Vacuum grease
10.Paper towels, ethyl alcohol
1) Replacing Diaphragms
Use tools 1, 3, 5, 6, 8, 9 and 10 listed above
(1) Remove the four truss head screws (M4 x 6L) ①in the top panel, and remove the
panel.
(2) Remove the four Faston terminals connected to the rear of the switch.
(3) Turn the unit upside-down, remove the eight truss head screws (M4 x 6L) ②in the
bracket, and remove the pump from the baseplate.
(4) Remove the four truss head screws (M4 x 6L) ③in the bottom of the front and rear
panels, and remove the panels.
Front panel
②
Baseplate
③
Bracket
Rear panel
①
Top panel
Faston terminal
Switch

10
(5) Turn the unit upright, remove the two truss head screws (M4 x 6L) ④in the top of the
front panel, and remove the front panel.
(6) Remove the cross pan head screws (M4 x 16L) ⑤holding the terminal block and
power cord earth wire (green), and remove the earth wire.
(7) Remove the two truss head screws (M4 x 6L) ⑥in the top of the rear panel, lift as
shown in the photo, and remove the Faston terminal on the red wire connected to the
cooling fan. Remove the rear panel.
(8) Remove the four hexagon socket head cap screws (M6 x 22L) ⑧in the pump head,
and remove the pump head.
(9) Remove the four hexagon socket head cap screws (M5 x 30L) ⑦holding the base,
and remove the base.
(10) Remove the four countersunk screws (M5 x 12L) ⑨in the diaphragm retainer, and
remove the diaphragm retainer and diagram.
Note: Take care not to damage the cross recess in the top of the countersunk screws.
⑨
Diaphragm retainer
Diaphragm
⑧
⑦
Pump head
Base
Earth
⑤
④
Termi
nal
block
Cooling fan
Colored wire
⑥
Rear panel

11
(11) Clean the top of the connecting rod, top of the casing, diaphragm retainer, and inside
of the pump head by wiping with ethyl alcohol.
Note: Take care not to leave any scraps of paper towel when wiping these
components.
(12) Set the eccentric shaft as shown in the photo, and fix so that the connecting rod is at
the highest position. Place the diaphragm on the connecting rod and adjust so that the
gap between the periphery and the inside of the casing is equal in the front-rear and
left-right directions.
(13) Apply a small amount of Loctite®242 (or equivalent) to the four cross head
countersunk screws (M5 x 20L) ⑨, and tighten equally in diagonally opposite pairs to
ensure that the diaphragm retainer held firmly in place.
Note: Tighten three times to 5Nm with a torque driver to prevent damaging the cross
recess in the countersunk screws.
(14) Place the pump head on the casing, and fix in place in the same position as the
connecting rod ⑫. Tighten the four hexagon socket head cap screws (M6 x 22L) ⑧
equally to 16Nm with a torque wrench.
(15) Place the pump head gasket and pump head cover on the pump head in that order,
and tighten the six hexagon socket head cap screws (M5 x 16L) equally in diagonally
opposite pairs to 5Nm with a torque wrench.
(16) Assemble components other than the baseplate in the reverse order to disassembly.
Note: Apply a small amount of Loctite®242 (or equivalent) to the screws holding the
panel in place.
(17) Fit the rubber cap to the inlet pipe, run the pump continuously for a period of two hours,
and then switch power off.
Note: If the pump moves due to vibration during continuous operation, transfer it to a
stable location.
(18) Re-tighten the four hexagon socket head cap screws (M6 x 22L) ⑧in each pump
head to 18Nm with a torque wrench.
(19) Fit the baseplate.
Note: Apply a small amount of Loctite®242 (or equivalent) to the screws holding the
baseplate in place.
Connecting
rod
Casing
Eccentric
shaft
Make gaps
equally.
Make gaps
equally.

12
2) Replacing Valves
It is recommended that these valves be replaced at the same time as the diaphragms.
Use tools 1, 3, 4, 8, and 10 listed above.
(1) Remove up to the baseplate in accordance with steps (1)~(3) for replacement of the
diaphragm.
(2) Remove the six hexagon socket head cap screws (M5 x 16L) ⑩in the head cover.
(3) Remove the head cover and head gasket.
(4) Remove the two hexagon socket head cap screws (M5 x 16L) ⑪in each valve
retainer (inlet and outlet), fit a hexagon socket head cap screw in the center of the inlet
and outlet valve retainers, pull the valve retainers upwards, and remove. Remove the
valves as well.
(5) After disassembly, clean the various components with a paper towel soaked in ethyl
alcohol.
Note: Take care not to leave any scraps of paper towel when wiping these
components.
⑩
Head gasket
Valve retainer
⑪
Inlet valve retainer
Outlet valve retainer
Valve
Inlet
Outlet
Alignment mark
Alignment mark