Ulvac SGT-100 User manual

Document No.43500-2-01-15
ULVAC
Inlet/Exhaust Filter for Vacuum Pump
SGT-100
SGT-200
Instruction Manual
Prior to use
For safe and efficient use of this filter, be sure to go to through
this manual before operation.
After reading the manual, keep it in your file for future
reference.
Specifications in this manual are subject to change without
notice due to future improvement.

Content
0. For safe operation …………………………………………………………………………0-1～04
1. General …………………………………………………………………………1
2. Specification …………………………………………………………………………1
3. Dimensional drawing ……………………………………………………………….1
4. Element ……………………………………………………………....2
5. Cautions in operation ………………………………………………………………2
6. Checking before operation ..……………………………………………………………..3
7. Installation ..……………………………………………………………………….3
8. How to replace the element ………………………………………………………………3
9. Maintenance ………………………………………………………………………...4
10. Caution .………………………………………………………………………………….5
11. Trouble shooting ..……………………………………………………………………….5
12. Warranty …………………………………………………………………………………..6

For safe operation
-Please read this instruction manual very carefully before using SGT –
①Before using SGT-100,200 please read this 『For safe operation』 and use it carefully.
②Ensure to observe the safe operation, preventing from the personal damage or damage to
the equipment.
③These signal words as shown in below indicates the damage differ in degree if not strictly
observed.
Danger
This note indicates a potentially hazardous situation which if not
strictly observed, could result in injury or damage the equipment.
Warning
This note indicates a potentially hazardous situation which if not
strictly observed, could result in severe personal injury.
Caution
This note indicates a potentially hazardous situation, which if not
strictly observed, could result in slight injury or damage to the
equipment.
④The safety remainder is indicated as shown below.
This note indicates a 『Prohibited』sign.
This note indicates a 『Compulsory』that should do.
⑤『The safety reminder』indicates 3items as shown below.
How to operate SGT-100,200 and element (in common usage)
How to operate SGT-100,200
How to handle the element
0-1

SGT-100,200 Replace the element (common usage)
Danger
Ensure that use the designated element and parts.
(If not, it causes the problem for gas leakage, heat and explosion.)
Ensure not to disassemble or remodeling the SGT. (If not, it cause
the problem for malfunction.)
Warning
Ensure that not to drop or damage the SGT.
(If not, it causes that problem for malfunction of the equipment.)
Ensure that not to close to the fire or put in the fire.
(If not, it causes the problem for explosion or fire.)
Ensure that do not touch to the system during operation.
When remove the SGT-100, 200 after using the poisonous, reactive
and inflammable gas from the piping system, purge with N2gas ( If
not it cause the gas leakage and explosion)
Caution
Ensure that avoiding to use the SGT in the place of moisture,
vibration, dirt, dust or place to get direct ｓｕｎｌｉｇｈｔ. If not, it cause
ｔhe problem of damaging the equipment of temperature of the
equipment becomes high.
Ensure that not to mount the SGT on the unstable rack.(If not, it
cause the problem of personal injury or accident due to falling.)
0-2

SGT-100, 200 Operations
Ensure that use the SGT at the designated place. (If not, it causes
the problem of malfunction of the equipment.)
Ensure that not to remove the SGT during operation. (If not, it
causes the problem of gas leakage, heat and explosion.)
Ensure that using designated equipment for connection. (If not, it
causes the problem of gas leakage, heat and explosion.)
Ensure that clamp parts or alike are tightened up before using it.
(If not, it causes the problem of gas leakage, heat and explosion.)
When overhaul the SGT, contact your local agency or ULVAC KIKO.
Caution
Ensure that not to wet the SGT. (If not, it causes the problem for
malfunction of the equipment due to moisture. Ensure that take
necessary measures to the equipment and place.)
0-3

How to operate the element
Danger
Ensure that this element is for the SGT-100, 200 uses only.
Warning
Ensure that not to press element. (If not, it causes the deformation of
the element fabrics.)
If failed to attach element SGT-100,200, contact your local agency or
ULVAC KIKO. (If SGT is not attached properly, it causes the problem
of deformation of the element fabrics.
Ensure that not to wet the element. (If not, it causes the problem of
deformation of the element and also affects to the operation
performance.)
When installing the element, place in hard case as cardboard and
install in a place at well ventilated and dry place. (If not, it causes
the problem of deformation of the element.
Unpacking the element just before using it. Packing is degas
processing. (If not, it takes long time for vacuuming due to
absorption of the moisture in the air.)
Ensure that the element should not be cut, bonded or processed.
(If not, element does not perform well due to deformation of the
element fabrics.)
If anything from the filtering unit got into your eyes, clean with
water. Do not rub your eyes to avoid more damage to your eyes.
Consult your doctor for future advise immediately.
0-4

1. General
SGT-100, 200 is a disposing system using ion exchange fabrics as filter element which is
chosen from our developed high quality resin group.
SGT is for purifying the system from the reaction product in the exhaust gas.
Since using the SGT-100,200, it reduces the maintenance problem from exhaust system
and reduce the overloading to the duct equipment.
2. Specification
※ Hosing and element are packed separately.
3. Dimensional
drawing
SGT-100 SGT-200
Port caliber NW25 NW40
O-ring Fluorine rubber Fluorine rubber
Pressure 1Pa ～105Pa
Wight Approx. 1.7Kg Approx. 2.0Kg
Material SUS304 SUS304
Housing
Outside
dimension
φ89.1mm x 154mm(L)
（flange:φ128）
φ89.1mm x 234mm（L）
(flange:φ128)
Type of
element SDL-250 SDL-250 x 1pce SDL-250 x 2pcs
1
≪SGT-100≫
A-A
≪SGT-200≫
A-A

4. Element
1) Specification
Type Dimension Weight Color Package
SDL-250 Outside φ65 x Insideφ25 x H80mm 20g Yellow Filled with N2gas
2) Characteristic of packaging and element
The element is packaged with N2gas, because the element has tendency to absorb the
moisture. Unpack just before installing.
3) Cautions in handling
◇ Ensure that install the element just before using it.
◇ In case of installing the SGT to the on-off operation vacuum pump, it might affects
to the vacuuming performance due to water absorbing of the element.
◇ When unpacking the element from the N2 sealed package, it will immediately start
absorbing the moisture and gases. Use the SGT immediately after unpacking. If
not, vacuum operation will be prolonged.
4) Installing the element
According to the following procedures, install the element.
1. Remove the wing nut of the housing and put the element. Close the lid again and
tighten the wing nut. (Refer to the item 8)
2. Attach the SGT to the pipe of the system and ensure that coupling and flange are
attached properly.
3. The time for installing the SGT is about 10 minutes.
4. Start vacuum operation immediately after installing the SGT.
Ensure that the designated pressure is achieved.
5. Cautions in operation
① Connect the SGT to system properly.
② Ensure that the ambient temperature is below 100℃.
③ Ensure that after using the poisonous, inflammable and ignitable gas, purge
with N2gas. If not, it causes the problem for fire or explosion.
④ Ensure that N2gas supply is available.
⑤ Periodically replacement is required after installing the element.
2

6. Checking before operation
①Ensure that install the INLET and OUTLET of the SGT properly.
②Ensure that the element is in the housing. Ensure that tighten the element properly.
③Ensure that wing nut is tightened.
④Ensure that clam for inlet and outlet are tightened.
⑤Installing the vacuum or the pressure gauge at inlet and outlet of SGT is recommended
to check the pressure difference. If the pressure difference is large, the element should be
replaced.
7. Installation
Referring to the figure in below, connect the element with care.
Ensure that there is no leakage.
･In case of installing the exhaust side, install SGT immediately after rough pump.
･In case of vacuum side, install the SGT near the roughing pump for effective use.
･Ensure that connect the SGT firmly. If not, it causes the problem for leakage.
< How to install the element>
Inlet Outlet Inlet Outlet
Installationin Installationin
Vacuumside outletside
8. How to replace the element
Replacement of the element is required if inlet pressure or exhaust pressure start rising.
Caution!
･Ensure that replacing or maintenance of the element should be done at safety place.
･Follow the local or national safety and environmental requirements when disposing the
element or any components removed from it.
Chamber SGT Vacuum pump SGT Scrubber
3

【Procedure 】
① When exhaust the poisonous gas (poisonous or inflammable), for safety reason, replace
the gas in the SGT into N2gas.
②Remove the wing nut and the lid.
③Remove the wing nut and upper support disc and replace the element.
④Before installing the new element, clean the particles and dirt staying inside of the
housing after finish replacing the element, start setting up in a reverse way from
detaching.
⑤Dispose the element according local and national safety and environment requirement.
⑥Ensure that each parts are tightened and no leakage.
9. Maintenance
The life expectancy of the element differs depending on operation process, condition, volume
of the gas and type of the gas. Make your own list and check the life expectancy of the
element. Check the pressure rise by vacuum gauge. Also checking the vacuum exhaust and
vacuum degree and use the SGT properly.
If not replacing the element in certain time, it might cause the problem of damaging the
equipment.
･Replace of the element
The time that pressure start increasing, replacement of element is required.
or periodically replacement is required.
･Guideline of the replacement time of element at the inlet side.
･Guideline of the replacement time of element at the exhaust side.
･Pressure is depending on the vacuum pump operation. Referring to the each pump’s back
pressure limit, guiding the pressure range.
General dry pump back pressure is about 0.2～0.3kg/cm.
・When replacing the element, wear the designated protection cloth, glove or goggle.
After removing the poisonous and inflammable gas with N2, replace the element.
･When disposing or cleaning the SGT, according with all local and national safety and
environmental requirements.
4