Ulvac UTM-MS Series User manual

SK00-2200-AI-145-00(263-13238W)
INSTRUCTION MANUAL
Turbo Molecular Pump
UTM-MS Series
Model
UTM300A-MS
UTM400A-MS
ULVAC KIKO, Inc.
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.

No Text

i
Introduction
Introduction
Thank you for choosing the ULVAC KIKO Turbo Molecular Pump.
Please read the instruction manual carefully before using turbo molecular pump, and
save the instruction manual for future reference.
Copyrights and Disclaimers
This document is copyrighted by ULVAC KIKO, Inc. Please refrain from reproducing or copying
part or all of this document without permission from ULVAC KIKO.
In an effort to improve the product, this document may be revised in the future without notice.
Every effort has been made to prepare an accurate and complete manual, but if an error or
omission should be discovered, revisions might not be possible immediately.
ULVAC KIKO does not take responsibility for any effects that may result from the use of this
manual.

ii
Introduction
Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies
with the following safety warning symbols.
Indicates a potentially hazardous situation which, if not avoided, could
result in serious injury or possibly death.
Indicates a potentially hazardous situation which, if not avoided, may
result in minor to moderate injury or equipment damage.
Emphasizes additional information that is provided to ensure the proper
use of this product.
Turbo molecular pump repair and/or controller repair can be very hazardous.
Only trained technicians who are authorized by ULVAC KIKO may do service of products.
Neither overhaul nor modify the pump proper and controller without admission.
Doing so would impair safety of the pump proper, or cause injury by electrical shock.
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary. The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.
WARNING
WARNING
WARNING
WARNING
CAUTION
NOTICE

iii
Introduction
Do not operate the turbo molecular pump until safety is confirmed.
・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
・The method to fix the pump is different depending on the pump model and the size of inlet
flange of the pump.
・Host equipment should be fixed to the floor so as not to move. Host equipment should be
designed to have enough margins in strength, in preparation for an emergency accident.
Ensure that no oil mist or hazardous substances are present in process line as safe ducting
procedure when turbo molecular pump is installed to host equipment.
Do not remove or do maintenance the turbo molecular pump, before safety has been
confirmed.
・Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by ULVAC KIKO. In the event removal of the turbo molecular pump
from an application is required, full protective measures including purging of the turbo
molecular pump with an inert gas and/or apparel are recommended when the turbo molecular
pump has been used in applications that required the use of corrosive, reactive, stimulative, or
toxic gasses.
・Please take an adequate safety precaution based on the result of risk assessment of
explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.
・Please execute the maintenance task of the turbo molecular pump after shutting power off by
following proper procedure and confirming that the rotor has stopped completely.
WARNING
WARNING
WARNING

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Introduction
If the equipment is used in a manner not specified by the manufacturer, the protection provided
by the equipment may be impaired.
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may
result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by
stopping the pump and dispersal of parts.
Avoid to install the pump at the following places.
(1)Place where the pump is inevitably exposed to significant vibration and impact.
(2)Unstable place.
(3)Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation. This pump is not connected to ground. Please provide PE
(Protective earth) connection to the chassis of pump in final application. This pump is not an
explosion-proof product. This pump is not intended to be used in a potentially explosive
atmosphere.
The pump surface may get hot, there are risk of burn.
Prevent the installation, operation, maintenance, and service personnel from contacting the
pump surface easily in all tasks that they are intended to perform.
WARNING
CAUTION
CAUTION
CAUTION

v
Introduction
When pump is removed from a equipment, drain the water from water pipe. If remained water
leak from water pipe, pump body will be corroded.
After the water drained, shut water pipe by the cap which is attached at shipment.
The following "CAUTIONS" are to prevent operation anomalies.
○Operating Precautions
(1)Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
(2)Do not connect or disconnect the turbo molecular pump control cable during the time the
controller is "ON".
(3)Protect the pump from any and all types of impact during operation.
(4)Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces
electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo
molecular pumping system (pump, controller, cables, etc.).
(5)This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.).
(6)Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.
(7)Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or
fluorine.
(8)When using the variable speed function to change the pump rotation rate, use a rotation
rate that does not cause resonance with other devices installed at the site.
(9)Be careful to prevent a rapid pressure rise or air rush during operation.
CAUTION
CAUTION

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Introduction
○Explanation of Label
(1) HOT SURFACE Label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) INSTALL PUMP Label
Incidental accident will cause the pump to drop out
and to make a catastrophe if the pump is fixed by
insufficient method.
Fix the pump to host equipment according to
Section 5.1.2 "Installation of the Pump".
(3) SECURITY Seal
This label certificates that the product was made
or maintenanced by ULVAC KIKO or by ULVAC KIKO
authorized facility.
In case "this label is removed" or "there is a mark
showing once this label has been removed",
ULVAC KIKO warranty shall not be applied to the
product.

vii
Introduction
○Location of Label

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Introduction
○Installation Precautions
Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.
Abnormal loads may cause cable disconnection.
(1) Do not pull the turbo molecular pump control cable by the connector or plug.
(2) Do not allow any electrical cables to be in tension or to have very tight bending radii.
(3) Unbend the turbo molecular pump cable not to make any kink during connection.
○ Part Replacement
The lifetime of parts are specified as below.
The request for changing parts exceeding the estimated lifetime should be made to
ULVAC KIKO or an approved service company in order for safety and adequate performance
of the pump and controller.
Table 1 Estimated Part Life
Part list Estimated part life
Cooling fan 5 years
240mm

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Introduction
○ Air Cooled Turbo Molecular Pump
For the air cooled turbo molecular pumps, it is necessary to clean the cooling fan periodically
because of the cooling fan collecting dust, debris, etc. ULVAC KIKO recommends removal of the
cooling fan for all methods of cleaning (compressed air, etc.) to prevent the particles, cleaning
debris, from accumulating in or on the turbo molecular pump. Please refer to Fig. 1 how to change fan.
Fig. 1 How to Change the Cooling Fan Unit

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xi
Table of contents
Introduction
Copyrights and Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i
Precautions for Safe Operation . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . .ii
○Operating Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v
○Explanation of Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
○Location of Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . vii
○Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii
○Part Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii
○Air Cooled Turbo Molecular Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .ix
Table of contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . .. . xi
Section 1 OUTLINE AND DESCRIPTIONS
1.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .2
1.2 Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .3
1.2.1 Outside Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . .3
1.2.2 Standard Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . .7
Section 2 IDENTIFICATION AND FUNCTION
2.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .10

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Section 3 CONSTRUCTION AND PRINCIPLE
3.1 Pump Construction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12
3.2 Principle of Turbo Molecular Pumping . . . . . . . . . . . . . . . . . . . . . . . . . . . .12
Section 4 SPECIFICATIONS
4.1 Standard Specifications for Pump Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . .16
Section 5 INSTALLATION
5.1 Installation . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
5.1.1 Pump Mounting Direction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . 20
5.1.2 Installation of the Pump . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . .. .. 21
5.1.3 Example of Piping Connection. . . . .. . . . . . . . . . . . . . . . . . . . . . .. . 25
5.1.4 Center of Gravity of the Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . .26
5.2 Connection of the Pump to the controller . . . . . . . . . . . . . . . . . . . . . . . . . . .27
5.3 Interlock for Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .28
5.4 Notes on Transportation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .28
Section 6 OPERATION
6.1 Outline . .. . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .30
6.1.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . .. . . 30
6.2 Start-up Preparation . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .31
6.2.1 Start-up Preparation. . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . .. . . 31
6.3 Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .31
6.3.1 Start-up Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . 31
6.4 Shutting Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .32
6.5 Baking Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .33

xiii
Section 7 GAS PURGE
Section 8 TURBO MOLECULAR PUMP RECONDITION
8.1 Recommended Maintenance Intervals. . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.2 Turbo Molecular Pump Decontamination. . . . . . . . . . . . . . . . . . . . . . . . . .39
8.3 Touch-down Bearing Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .39
8.4 Check of the Rotor Blades.. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .39
8.5 Turbo Molecular Pump Return Request . . . . . . . . . . . . . . . . . . . . . . . . . . .40
Section 9 TROUBLESHOOTING
9.1 Vacuum Pressure Rise. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .44
9.2 Abnormal Noise and/or Vibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .44

xiv
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1.1 Outline
1.2 Descriptions
1.2.1 Outside Drawing
1.2.2 Standard Accessories
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OUTLINE AND
DESCRIPTIONS
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2
SECTION 1 OUTLINE AND DESCRIPTIONS
1.1 Outline
The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a
backing vacuum pump to create a high vacuum in a vacuum chamber.
Typical Applications; Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.
The turbo molecular pump (one standard set) consists of the following items.
・Pump Unit 1 pc
・Controller 1 pc
・Control Cable 1 pc
・Fan Cable 1 pc (for Air cooled type)
・Standard Accessories 1 Set
This instruction manual explains the operation of the pump unit. For more detailed instructions
regarding the controller, please refer to the controller Instruction Manual.

3
1.2 Descriptions
1.2 Descriptions
1.2.1 Outside Drawing
1.2.1.1 Outside Drawing of UTM300A-MS series
Inlet flange
A
B
C
φ
D
φ
E
n
-
φ
d
F
H
VG100 272 197 142 φ185 φ160 8-φ12 220 12
ICF152 279 204 149 φ152 φ130.3 16-φ8.4 227 20
Fig.1-1 UTM300A-MS（Air cooled）

4
SECTION 1 OUTLINE AND DESCRIPTIONS
Inlet flange
A
B
C
φ
D
φ
E
n
-
φ
d
F
H
VG100 272 197 224 φ185 φ160 8-φ12 220 12
ICF152 279 204 231 φ152 φ130.3 16-φ8.4 227 20
Fig.1-2 UTM300A-MS（Water cooled）