
page 8 of 96
Contents
Safety information!............................................................. 9
Important information! ......................................................................... 9
General information............................................................................11
Intended use.......................................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions............................................................................ 14
Operating conditions ......................................................................... 15
Safety during operation ..................................................................... 16
Maintenance and repair..................................................................... 19
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Important information: Equipment marking (ATEX)................... 21
Technical data................................................................... 23
General technical data valid for all pumps ....................................... 23
Gas inlet temperatures..................................................................... 23
Wetted parts..................................................................................... 26
Abbreviations.................................................................................... 26
Pump parts....................................................................................... 26
Use and operation ............................................................ 29
Installation ........................................................................................ 29
Vacuum connection (inlet)................................................................ 29
Connecting the outlet ....................................................................... 31
Electrical connection ........................................................................ 32
On/off switch..................................................................................... 33
During operation............................................................................... 34
Important notes regarding the use of gas ballast ............................. 37
Accessories / Spare parts................................................ 38
Troubleshooting ............................................................... 39
Replacing diaphragms and valves.................................. 41
ME 1.................................................................................................. 44
ME 1C ............................................................................................... 54
MZ 1C (Technical design 1)............................................................... 63
MZ 1C (Technical design 2)............................................................... 73
Replacing the fuses.......................................................................... 87
Repair -Maintenance -Return -Calibration ................. 90
Warranty ............................................................................ 92
Health and safety clearance form ................................... 93
EC Declaration of Conformity of the Machinery ............... 94