
page 8 of 80
Contents
Safety information!............................................................. 9
Important information! ......................................................................... 9
General information............................................................................11
Intended use.......................................................................................11
Improper use ..................................................................................... 12
Setting up and installing the equipment ............................................ 14
Ambient conditions............................................................................ 16
Operating conditions ......................................................................... 17
Safety during operation ..................................................................... 18
Maintenance and repair..................................................................... 21
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Important information: Equipment marking (ATEX)................... 24
Technical data................................................................... 26
General technical data valid for all pumps/pumping units................. 26
Gas inlet temperatures..................................................................... 27
Wetted parts..................................................................................... 30
Abbreviations.................................................................................... 31
Pump parts....................................................................................... 31
Use and operation ............................................................ 40
Installing a pump in a vacuum system .............................................. 40
During operation................................................................................ 44
Important notes regarding the use of gas ballast .............................. 46
Important notes concerning the operation of the
exhaust waste vapor condenser....................................................... 47
Shutdown & storage.......................................................................... 49
Accessories ...................................................................... 50
Troubleshooting ............................................................... 52
Replacing diaphragms and valves.................................. 54
Cleaning and inspecting the pump heads ........................................ 56
Replacing the diaphragm ................................................................. 60
Replacing the valves ........................................................................ 62
Replacing the overpressure safety relief device............................... 67
Replacing the fuse............................................................................ 68
Repair - Maintenance - Return - Calibration................... 70
Warranty ............................................................................ 72
Declarations and certicates........................................... 73