page 8 of 67
Contents
Safety information!............................................................. 9
Important information! ......................................................................... 9
General information............................................................................11
Intended use.......................................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions............................................................................ 14
Operating conditions ......................................................................... 15
Safety during operation ..................................................................... 16
Maintenance and repair..................................................................... 19
Additional safety information for ME 4R NT ..................................... 20
Important information: Equipment marking (ATEX) ..................... 22
Technical data................................................................... 24
General technical data valid for all pumps ........................................ 24
Gas inlet temperatures..................................................................... 24
Wetted parts..................................................................................... 30
Abbreviations.................................................................................... 31
Pump parts....................................................................................... 32
Use and operation ............................................................ 38
Installing a pump in a vacuum system .............................................. 38
During operation................................................................................ 42
Shutdown & storage.......................................................................... 44
Accessories ...................................................................... 45
Troubleshooting ............................................................... 46
Replacing diaphragms and valves.................................. 48
Cleaning and inspecting the pump heads ........................................ 50
Replacing the diaphragm ................................................................. 52
Assembling the pump heads ............................................................ 55
Assembling ttings
(ME 4(R, S) NT, MZ 2(D, S) NT, MD 4CRL NT)
..........
56
Replacing the fuse............................................................................ 58
Notes on return to the factory......................................... 59
Warranty ............................................................................ 62
EC Declaration of Conformity of the Machinery ............... 64