
page 8 of 56
Contents
Safety information!............................................................. 9
Important information! ......................................................................... 9
General information............................................................................11
Intended use.......................................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions............................................................................ 14
Operating conditions ......................................................................... 15
Safety during operation ..................................................................... 17
Maintenance and repair..................................................................... 19
`
Important information: Equipment marking (ATEX) ..................... 21
Technical data................................................................... 23
General technical data valid for all pumps ........................................ 23
Gas inlet temperatures..................................................................... 25
Wetted parts..................................................................................... 25
Abbreviations.................................................................................... 25
Pump parts....................................................................................... 26
Use and operation ............................................................ 28
Installing a pump in a vacuum system .............................................. 28
During operation................................................................................ 29
Important notes regarding the use of gas ballast .............................. 31
Shutdown & storage.......................................................................... 32
Accessories ...................................................................... 33
Troubleshooting ............................................................... 35
Replacing diaphragms and valves.................................. 37
Cleaning and inspecting the pump heads ........................................ 40
Replacing the diaphragm ................................................................. 41
Assembling the pump heads ............................................................ 43
Replacing the valve at the distributor (outlet side) ........................... 45
Assembling the connecting hoses.................................................... 46
Repair - Maintenance - Return - Calibration................... 47
Warranty ............................................................................ 49
Health and safety clearance form ................................... 50
EC Declaration of Conformity of the Machinery ............... 51
China RoHS....................................................................... 52