
page 8 of 72
Contents
Safety information!............................................................. 9
Important information! ......................................................................... 9
General information............................................................................11
Intended use.......................................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions............................................................................ 15
Operating conditions ......................................................................... 15
Safety during operation ..................................................................... 17
Maintenance and repair..................................................................... 19
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Important information: Equipment marking (ATEX)................... 22
Technical data................................................................... 24
Wetted parts..................................................................................... 25
Gas inlet temperatures..................................................................... 26
Abbreviations.................................................................................... 26
Pump parts....................................................................................... 26
Replacing the device fuse (only MD 1 C/US).................................... 30
Replacing the fuse on the circuit board (only MD 1 VARO-SP) ........ 31
Use and operation ............................................................ 33
Installation ........................................................................................ 33
Vacuum connection (inlet)................................................................ 33
Connecting the outlet ....................................................................... 35
Electrical connection ........................................................................ 36
Controlling the MD 1 VARIO-SP....................................................... 38
During operation............................................................................... 43
Shutdown & storage......................................................................... 45
Accessories ...................................................................... 46
Troubleshooting ............................................................... 47
Replacing diaphragms and valves.................................. 49
Checking diaphragms and valves .................................................... 52
Replacing the diaphragm ................................................................. 55
Replacing the valves and assembling the pump heads ................... 58
Repair -Maintenance -Return -Calibration ................. 62
Warranty ............................................................................ 64
Health and safety clearance form ................................... 65
EC Declaration of Conformity of the Machinery ............... 66
China RoHS....................................................................... 70