Varian Turbo-V 81-AG User manual

87-900-986-01 (C)
JULY 2006
(I) MANUALE DI ISTRUZIONI
(D) BEDIENUNGSHANDBUCH
(F) NOTICE DE MODE D’EMPLOI
(E) MANUAL DE ISTRUCCIONES
(P) MANUAL DE ISTRUÇÕES
(NL) BEDRIJFSHANDLEIDING
(DK) ISTRUKSTIONSBOG
(S) BRUKSANVISNING
(N) INSTRUKSJON MANUAL
(FIN) OHJEKÄSIKIRJA
(GR) Ο∆ΗΓΙΕΣ ΧΡΗΣΕΩΣ
(Η) FELHASZNÁLÓI KÉZIKÖNYV
(PL) PODRECZNIK INSTRUKCJI
(CZ) NÁVOD K POUŽITÍ
(SK) NÁVOD NA OBSLUHU
(SLO) PRIROČNIK ZA NAVODILA
(GB) INSTRUCTION MANUAL
Turbo-V 81-AG
Rack Controller
Model 969-8988
Model 969-8989
Model 969-8990
vacuum technologies

Turbo-V 81-AG
Rack Controller

ISTRUZIONI PER L’USO.............................................................................................. 1
GEBRAUCHSANLEITUNG........................................................................................... 5
MODE D’EMPLOI.......................................................................................................... 9
INSTRUCCIONES DE USO.......................................................................................... 13
INSTRUÇÕES PARA O USO ....................................................................................... 17
GEBRUIKSAANWIJZINGEN......................................................................................... 21
BRUGSANVISNING...................................................................................................... 25
BRUKSANVISNING...................................................................................................... 29
BRUKERVEILEDNING.................................................................................................. 33
KÄYTTÖOHJEET.......................................................................................................... 37
ODHGIES CRHSEWS ........................................................................................................ 41
HASZNÁLATI UTASÍTÁS ….......................................................................................... 45
INSTRUKCJA UZYTKOWANIA ..................................................................................... 49
PŘÍRUČKA K POUŽITÍ ......................................................................................……… 53
NÁVOD K POUŽITIU .........................................................................................………. 57
NAVODILA ZA UPORABO ............................................................................................ 61
INSTRUCTIONS FOR USE .......................................................................................... 65
TECHNICAL INFORMATION........................................................................................ 69
TURBO-V 81 RACK CONTROLLER DESCRIPTION .................................................................... 69
CONTROLLER SPECIFICATIONS ................................................................................................ 70
CONTROLLER OUTLINE ............................................................................................................... 70
CONTROLLER CONNECTION....................................................................................................... 71
J6 - Fan................................................................................................................................. 71
J7 - Vent................................................................................................................................ 71
P1 - Input .............................................................................................................................. 72
J1 - Output............................................................................................................................. 73
Pump Connector ................................................................................................................... 77
Pump Driving...........................................................................................……………………… 78
Stop Speed Reading and Active Stop...................................................................................... 78

J5 - GAUGE CONNECTOR ............................................................................................................77
J2 - SERIAL CONNECTOR............................................................................................................. 78
Serial Communication Descriptions ...................................................................................... 79
Window Protocol ................................................................................................................... 81
Window Meanings.................................................................................................................83
HOW TO USE FRONT PANEL....................................................................................................... 86
General.................................................................................................................................. 88
Startup................................................................................................................................... 89
Programming......................................................................................................................... 91
Configuration menu............................................................................................................... 91
MODE menu.......................................................................................................................... 92
PUMP SETTING menu......................................................................................................... 92
INPUT/OUTPUT menu.......................................................................................................... 93
GAUGE menu ....................................................................................................................... 94
SERIAL menu........................................................................................................................ 95
HOW TO USE BY REMOTE I/O ..................................................................................................... 96
HOW TO USE IN SERIAL MODE................................................................................................... 96
PROFIBUS OPTION 97
General.................................................................................................................................. 97
Installation ............................................................................................................................. 97
Configuration......................................................................................................................... 97
Software Operation and State Machine ................................................................................ 97
Message Mapping.................................................................................................................98
Parameter Buffer................................................................................................................... 99
Output Buffer......................................................................................................................... 102
Input Buffer............................................................................................................................ 103
Diagnostic Management........................................................................................................ 105
Diagnostic Buffer................................................................................................................... 105
ERROR MESSAGES....................................................................................................................... 106
ORDERABLE PARTS...................................................................................................................... 107

INSTRUCTIONS FOR USE
65 87-900-986-01 (C)
GENERAL INFORMATION
This equipment is destined for use by professionals.
The user should read this instruction manual and any
other additional information supplied by Varian before
operating the equipment. Varian will not be held
responsible for any events occurring due to non-
compliance, even partial, with these instructions,
improper use by untrained persons, non-authorised
interference with the equipment or any action contrary
to that provided for by specific national standards.
The Turbo-V 81-AG Rack controllers are micro-
processor-controlled, solid-state, frequency converter
with self-diagnostic and self-protection features.
Controller features:
–Front / Remote / Serial Operation
–24Vdc pump fan cooling drive
–Vent valve drive
–Pump speed reading after stop command (stop
speed reading)
–Pressure reading
–Input voltage auto setting.
–Profibus interface (optional)
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
the appendix "Technical Information".
This manual uses the following standard protocol:
!
The warning messages are for attracting the attention
of the operator to a particular procedure or practice
which, if not followed correctly, could lead to serious
injury.
CAUTION!
The caution messages are displayed before
procedures which, if not followed, could cause damage
to the equipment.
NOTE
The notes contain important information taken from the
text.
STORAGE
When transporting and storing the controllers, the
following environmental requirements should be
satisfied:
•temperature: from -20 °C to + 70 °C
•relative humidity: 0 - 95%
(without condensation)
PREPARATION FOR INSTALLATION
The controller is supplied in a special protective
packing. If this shows signs of damage which may have
occurred during transport, contact your local sales
office. When unpacking the controller, ensure that it is
not dropped or subjected to any form of impact. Do not
dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies
with EEC Directive 85/399.
Controller Packing
WARNING!

INSTRUCTIONS FOR USE
66 87-900-986-01 (C)
INSTALLATION
!
The Turbo-V controller must be powered with 3-wire
power cord (see orderable parts table) and plug
(internationally approved) for user's safety. Use this
power cord and plug in conjunction with a properly
grounded power socket to avoid electrical shock and to
satisfy CE requirements. High voltage developed in the
controller can cause severe injury or death. Before
servicing the unit, disconnect the input power cable.
NOTE
The Turbo-V controller can be used as a bench unit or
a rack module, but it must be positioned so that free air
can flow through the holes. Do not install or use the
controller in an environment exposed to atmospheric
agents (rain, snow, ice), dust, aggressive gases, or in
explosive environments or those with a high fire risk.
During operation, the following environmental
conditions must be respected:
•temperature: from 5 °C to +45 °C
•relative humidity: 0 - 95%
(without condensation)
See the appendix "Technical Information" for detailed
information about the above mentioned and the other
connections, and about the options installation.
USE
This paragraph describes the fundamental operating
procedures. Detailed information and operating
procedures that involve optional connections or options
are supplied in the paragraph "USE" of the appendix
"Technical Information".
Make all vacuum manifold and electrical connections
and refer to Turbo-V pump instruction manual prior to
operating the Turbo-V controller.
!
To avoid injury to personnel and damage to the
equipment, if the pump is lying on a table make sure it
is steady. Never operate the Turbo-V pump if the pump
inlet is not connected to the system or blanked off.
NOTE
The input signal J1 connector should be left in position
including the shipping links if no external connections
are made. The forepump and the Turbo-V pump can be
switched on at the same time.
Controls, Indicators and Connectors
The following paragraph illustrates the Controller front
panel and rear panel. More details are contained in the
appendix "Technical Information".
Front Panel Description
Turbo-V 81-AG
LS
AG
COUNTERS
5
1
2
3
4
increase
decrease
LOW SPEED
menu
VACUUM TECHNOLOGIES
MEASURES
next
previous
START/STOP
R2
R1
1. Keyboard push-button to recall on the display the cycle
number, cycle time and pump life.
2. Keyboard push-button for LOW SPEED mode selection.
It is active only when the front panel operation has been
selected. Pressed once, the pump runs at “stand-by”
speed. To unselect the mode, press the push-button
again.
3. Keyboard push-button to recall on the display the pump
current, pump temperature, pump power and rotational
speed. It is always active regardless of the operating
mode selected. Push-buttons 3 and 1, if pressed
together for at least 2 seconds, put the controller in a
routine where it is possible to program some operation
parameters.
4. Keyboard push-button for START, STOP/RESET mode
selection. It is active only when the front panel operation
has been selected. By pressing once the starting phase
begins; if pressed again it stops the pump. If the pump
has been stopped automatically by a fault, this push-
button must be pressed once to reset the controller and a
second time to restart the pump.
5. LCD back-lighted alphanumeric display: dot matrix 2
lines x 16 characters.
Controller Turbo-V 81-AG Front Panel
WARNING!
WARNING!

INSTRUCTIONS FOR USE
67 87-900-986-01 (C)
5
7
86
1
2
34
Controller Turbo-V 81-AG Rearpanel
USE PROCEDURE
Controller Startup
To startup the controller plug the power cable into a
suitable power source.
Starting the Pump
To start the pump, confirm the interlock input and press
the START pushbutton on the controller front panel.
Pump Shutdown
To shutdown the pump press the STOP pushbutton on
the controller front panel.
MAINTENANCE
The Turbo-V 81-AG Rack series controller does not
require any maintenance. Any work performed on the
controller must be carried out by authorized personnel.
When a fault has occurred it is possible to use the
Varian repair service. Replacement controllers are
available on an advance exchange basis through
Varian.
!
Before carrying out any work on the controller,
disconnect it from the supply.
If a controller is to be scrapped, it must be disposed of
in accordance with the specific national standards.
DISPOSAL
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the
EC WEEE (Waste Electrical and Electronic Equipment)
Directive.
This symbol (valid only in countries of the European
Community) indicates that the product it applies to
must NOT be disposed of together with ordinary
domestic or industrial waste but must be sent to a
differentiated waste collection system.
The end user is therefore invited to contact the supplier
of the device, whether the Parent Company or a
retailer, to initiate the collection and disposal process
after checking the contractual terms and conditions of
sale.
WARNING!
1. Logic input signals connectors (mating connector supplied
with link).
2. Logic output signals connector and pump frequency
monitor plus programmable analog output.
3. Power output connector (24 Vdc for pump cooling fan,
Vent Valve and Gauge).
4. Controller power entry module consisting of mains fuses,
mains socket and EMC filter.
5. Rotary switches for Profibus address setting.
6. Profibus (Optional).
7. Remote control serial connector.
8. Pump cable (5m long).

INSTRUCTIONS FOR USE
68 87-900-986-01 (C)
ERROR MESSAGES
For a certain type of failure, the controller will self-
diagnose the error and the messages described in the
following table are displayed.
MESSAGE DESCRIPTION REPAIR ACTION
CHECK CONNECTION
TO PUMP Wrong connection between the pump
and the controller.
Or
The pump’s temperature is below 0 °C.
Check connection between controller and
pump.
Press the START push-button twice to start
the pump.
WAITING INTERLOCK The interlock signal of P1 connector is
activated by an interruption of the link
between pin 3 and 8 of J1 connector, or
because the external interlock signal is
open.
Reset the short circuit between pin 3 and
pin 8 of J1 connector, or close the external
interlock signal.
PUMP OVERTEMP. The upper bearing/pump temperature
exceeds 60 °C. Wait until the temperature decrease below threshold value.
Press the START push-button twice
to start the pump.
CONTROLLER OVERTEMP. The controller enviroment temperature
exceeds 70 °C.
Or
The controller’s radiator temperature is
above 60 °C.
Wait until the temperature decrease below
threshold value.
Press the START push-button twice
to start the pump.
TOO HIGH L0AD The current drawn by the pump is
higher than programmed. Check that the pump rotor is free to rotate.
Press the START push-button twice to start
the pump.
SHORT CIRCUIT After the starting phase the output
connection is shorted. Check connections and shortages between pump and controller.
Press the START push-button twice
to start the pump.
SYSTEM OVERRIDE The pump is stopped by an emergency
stop signal provided via a remote
contact.
Remove the controller power cable and
check the emergency condition. Then
reconnect the power cable and
press the START push-button twice
to start the pump.
OVERVOLTAGE Controller power supply circuitry is
faulty, or the Controller received a spike. Press the START push-button twice to start the pump.
Should the message still be present, call
the Varian service.
POWER FAIL Failure in the controller’s pump power
supply section. Contact Varian for Maintenance.

TECHNICAL INFORMATION
69 87-900-986-01 (C)
TURBO-V 81-AG RACK CONTROLLER
DESCRIPTION
The controller is available in three models (see
orderable parts table):
•base version
•with RS 232-485 option
•with Profibus option
The controller is a solid-state frequency converter with
the following features:
–Drives the pumps of the 81-NAV family.
–Powers the pump cooling fan
–Drives the vent valve.
–Provides and acquires the pressure of the wide
range gauge.
–Remote I/Os compatible with the previous version.
–Navigator default serial compatible with the
previous RS 232 and 485 version.
–Speed reading after stop command.
See the following diagram for the connections and
orderable parts.
AIR COOLING KIT
PUMP
VENT VALVE
TO POWER
SUPPLY
MAINS CABLE
GAUGE EXTENTION
CABLE (5 m)
AIR COOLING KIT
EXTENTION CABLE VENT EXT.
CABLE
G
A
UG
E
CONTROLLER
FUSE TYPE T 4A
J4-PROFIBUS
P1
IN
J2-SERIAL
PUMP
OUT
J1
J6
FAN
MAINS
V
ENT
J7
J5
GAUG E
MSD
LSD
GAUGE CABLE (1 m)
Turbo-V 81-AG Rack Controller – Connections

TECHNICAL INFORMATION
70 87-900-986-01 (C)
CONTROLLER SPECIFICATIONS
Input:
Voltage
Frequency
Power
100, 240 Vac
50 to 60 Hz
210 VA
Fuse 2 x T4 A (slow blow) 250 V
Output:
Voltage
Frequency
Power
76 Vac
1350 Hz
100 W
Environment storage -20 °C to +70 °C
0-95%
Operating +5 - +45 °C
0 – 90%
NOTE
The Controller must be positioned in such way that the
mains cable can be easily disconnected.
Applied norr. EN 61010 -1
EN 55011 (Class-A)
EN 61000-3-2,
EN 61000-3-3,
EN 61000-6-2,
EN 61000-4-2,3,4,5,6,11,8
Weight: 1.7 Kg (3.2 lbs)
Pollution Degree 2
Installation Category II
CONTROLLER OUTLINE
The outline dimensions for the Turbo-V 81-AG Rack
controllers are shown in the following figure.
NOTE
The Turbo-V controller can be used as a bench unit or
as a rack module, but it must be positioned so that free
air can flow through the holes.
128.5 [5.06] 122.5 [4.82]
91.4 [3.60]
106.4 [4.19]
244.0 [9.61]
Dimensions: mm [inches]
1.5 [0.06]
8.5 [0.33]
9.4 [0.37]
96.1
[
3.78
]
110.6 [4.35 ]
==
==
Turbo-V 81-AG
LS
AG
COUNTERS
increase
decrease
LOW SPEED
menu
VACUUM TECHNOLOGIES
MEASURES
next
previous
START/STOP
R2
R1
Controller Outline

TECHNICAL INFORMATION
71 87-900-986-01 (C)
CONTROLLER CONNECTION
J6 - Fan
The 24 Vdc, 150 mA maximum output voltage is
present after START pushbutton is pressed and will
remain present until a fault condition is displayed on
front panel display or the turbopump is stopped.
This is a dedicated output for the optional
Turbo-V 81-AG pump cooling fan (see orderable parts
table).
If you already have fan installed, use the available
adapter cable to connect to the pump.
Fan Connector
J7 – Vent
Vent Connector
This is dedicated 24 Vdc connector to control the
optional vent valve (see orderable parts table).
The vent valve can be driven by controller automatically
or by serial line.
If you already have a vent valve installed 110 Vac
powered, this valve must be replaced by a new model
(see orderable parts table).
Vent Valve diagram in “Auto” mode
CLOSED
Vent Valve
STOP
S
TART
CO
MMAND
RAMP NORMAL
S
T
O
P
CO
MMAND
Vent Valve Relay
Win. 126 Vent Valve Open
Time Win. 147
OPEN

TECHNICAL INFORMATION
72 87-900-986-01 (C)
P1 – Input
P1 Input Connector
All the logic input to the controller must be connected
at J1 mating connector.
With the provided J1 mating connector (shipped with
pin 3 and pin 8 shorted) make the connections with
AWG 24, (0.24 mm2) or smaller wire to the pins
indicated in the figure to obtain the desired capability.
The following table describes the signals available on
the connector.
Pins Name Description Electrical Note
1-com Start/Stop Contact closed = Start
Contact open = Stop
Optically isolated
Vlow, max = 10v
Imax = 5mA
Imin (on) = 2mA
Active only in Remote Mode
operation
2-com Low Speed Contact closed = Low Speed
Contact open = High Speed
Optically isolated
Vlow, max = 10v
Imax = 5mA
Active only in Remote Mode
operation
3-com Interlock Contact closed = Active
Contact open = Inactive
If active allows the pump
running, if inactive stops the
pump.
Optically isolated
Vlow, max = 10v
Imax = 5mA
Imin (on) = 2mA
Active in all modes
4-com System
Override Contact closed = Active
Contact open = Inactive
If active allows the pump
running, if active stops the
pump and all the others
connected devices (Fan, Vent
Valve…).
Optically isolated
Vlow, max = 10v
Imax = 5mA
Imin (on) = 2mA
Active in all modes
5-com Soft Start Contact closed= Active
Contact open= Inactive
If active before the start
command activates the spft
start procedure. To be used
only at first pump run-up.
Optically isolated
Vlow, max = 10v
Imax = 5mA
Imin (on) = 2mA
Active only in Remote Mode
operation, and in STOP status.

TECHNICAL INFORMATION
73 87-900-986-01 (C)
The following figure shows a typical contact logic input
connection and the related simplified circuit of the controller.
Typical Logic Input Connection
J1 – Output
Logic Output Connector
All the logic output from the controller must be
connected at P2 mating connector. The following table
describes the signals available on the connector.
The following figure shows a typical logic output
connection (relay coil) but any other device may be
connected e.g. a LED, a computer, etc., and the related
simplified circuit of the controller.
J 1
Digital Output Connection Example
1
2
Analog Output Connector Example
Pins Name Description Electrical Note
15-8 Fault 0V = no fail
24V = fail Optically isolated
Vmax (=open) = 24v
Vlow, max = 1,5v
Imax = 60mA
Pin-8 negative
Pin-15 positive
Connect a 10kohm
resistor between the 2
pins before measuring
voltage
A STOP command (by
front Panel or serial or
Start/stop input) reset
the FAIL status.
13-6 Start Configurable output.
Default setting (win.177 = 0): 24V
pump in RAMP state, 0V = other state.
If win.177 = 1: 0V = pump in stop or FAIL
status, 24V = other state
Optically isolated
Vmax (=open) = 24v
Vlow, max = 1,5v
Imax = 60mA
Pin-6 negative
Pin-13 positive
Connect a 10kohm
resistor between the 2
pins before measuring
voltage
12-5 Low Speed 24V = low speed active
0V = low speed not active Optically isolated
Vmax (=open) = 24v
Vlow, max = 1,5v
Imax = 60mA
Pin-5 negative
Pin-12 positive
Connect a 10kohm
resistor between the 2
pins before measuring
voltage
11-4 R1 Programmable Set Point Out
Can be related to: Frequency, Power,
Time Status or Pressure.
See following figures for more details. All
the setting can be done by: front panel or
serial line (win.101 to 105 and 162).
Optically isolated
Vmax (=open) = 24v
Vlow, max = 1,5v
Imax = 60mA
Pin-5 negative
Pin-12 positive
Connect a 10kohm
resistor between the 2
pins before measuring
voltage
+24 V
4 K7
+24 V
>1 K
>100 KΩ

TECHNICAL INFORMATION
74 87-900-986-01 (C)
Pins Name Description Electrical Note
14-7 R2 Programmable Set Point Out
Can be related to: Frequency, Power,
Time Status or Pressure.
See following figures for more details. All
the setting can be done by: front panel or
serial line (win.171 to 176).
Optically isolated
Vmax (=open) = 24v
Vlow, max = 1,5v
Imax = 60mA
Pin-7 negative
Pin-14 positive
Connect a 10kohm
resistor between the 2
pins before measuring
voltage
2-1 Programma
ble
Analog
Output
Programmable analog output.
Can be related to : frequency, power,
pump temperature (linear) or pressure
(logarithmic).
The setting can be done by: front panel or
serial line (win.111).
0V = 0Hz, 0W, 0°C
10V = 963Hz, 150W, 100°C
See following chart for more details
Optically isolated
Rload, min = 10kr
Ripple Vpp,max = 200mv
Precision = 5%
Resolution = 40mv
Pin-1negative
Pin-2 positive
Connect a 100kohm
resistor between the 2
pins before measuring
voltage
9-1 Frequency
Analog
Output
Analog output proportional to frequency
(linear).
0V = 0Hz
10V = 963Hz
Optically isolated
Rload, min = 10kr
Ripple Vpp,max = 200mv
Precision = 1%
Resolution = 40mv
Pin-1negative
Pin-9 positive
R1 – R2 OUTPUT DIAGRAMS:
Diagram 1 – R1 or R2 related to frequency
+
Diagram 2 – R1 or R2 related to power

TECHNICAL INFORMATION
75 87-900-986-01 (C)
Diagram 3 – R1 or R2 related to time
Diagram 4 – R1 or R2 related to Normal status
Diagram 5 – R1 or R2 related to pressure reading (if gauge connected)
V
(
Volt
)
R1-R2
Stop Waiting
Interlock Ramp NormalBraking FailAuto tuning
t (sec)
0
24

TECHNICAL INFORMATION
76 87-900-986-01 (C)
PROGRAMMABLE ANALOG OUTPUT DIAGRAMS:
Diagram 1 – Programmable analog output related to frquency
Diagram 2 – Programmable analog output related to power
Diagram 3 – Programmable analog output related to pump temperature
Fre
q
uenc
y
(
Hz
)
1350
V
(
Volt
)
Output Voltage
0
10
Power (W)
150
V
(
Volt
)
Output Voltage
0
10
Pump Temp (°C)
100
V
(
Volt
)
Output Voltage
0
10

TECHNICAL INFORMATION
77 87-900-986-01 (C)
Pump Connector
A five-meter long cable is available to connect the
controller to the pump. The following figure shows the
controller output connector configuration where pins:
•A-F = pump temperature sensor
•B-C-D = 75 Vac 3-phase output to pump motor
stator
•E = EARTH PROTECTION
Controller-to-Pump Connector
J5 – GAUGE CONNECTOR
This connector is available to connect “EyeSys
Mini-IMG” gauge with it’s extention cable (see
orderable parts table).
The pressure can be read by dispaly or by serial line
(win. 224) or by REMOTE I/O on Programmable Analog
Out (in this case the controller replicates the signal
coming from the gauge).
Gauge Connector
NOTE
The Mini-IMG gauge is intended for high vacuum use,
so with pressure above 50 mTorr the signal is
misinterpreted and a “false” pressure is displayed. Use
a transition gauge to understand if the reading is really
under 50 mTorr or not.

TECHNICAL INFORMATION
78 87-900-986-01 (C)
Pump Driving
Typical pump driving chart start and normal operation.
1500
1250
1000
500
250
00 50 100 150 200 250 300 350 400 - 12
12
24
0
36
48
72
84
96
108
60
Power (W)
Time (s)
F
requency
(
H
z
)
Freq. (Hz)
Power. (W)
Diagram 4
Stop Speed Reading and Active Stop
This functions can be activated by Front Panel or serial
line (Win 107, 167).
Active Stop brakes the pump using the motor. The Stop
Speed reading reads the pump speed after a stop
command.
SSR AS
Diagram 5
J2 –SERIAL CONNECTOR
This connector provides the connection for RS – 232
and RS – 485 serial line.
J2 Pin-out:
PIN N. SIGNAL NAME
1 +5 V (OUT) (Reserved)
2 TX (RS232
3 RX (RS232
4NC
5GND
6 A + (RS485)
7NC
8 B – (RS485)
9 RESERVED
Connector examples:
55
22TV 301AG
Rack Controller
PC
33
RS – 232 Connection
RS – 485 Connection
Speed
Time