Varian 947 Operation manual

vacuum technologies
OPERATION AND
SERVICE MANUAL
Models
947, 948 and 960
Leak Detectors
Part No. 699909947
Revision H
May 2003
Advanced Test Equipment Rentals
www.atecorp.com 800-404-ATEC (2832)
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NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.

Copyright 2003
Varian Vacuum Technologies
Models 947, 948 and 960 Leak Detectors
Contra-Flow, MacroTorr, TriScroll and ConvecTorr are trademarks or registered trademarks of
Varian Vacuum Technologies.
Apiezon is a registered trademark of M&I Materials Ltd.
Alconox is a registered trademark of Alconox, Inc.
Loctite and PST are registered trademarks of Loctite Corporation.
Scotch-Brite is a trademark of 3M.
Skid-Mate is a registered trademark of Hardigg.

iii
Models 947, 948 and 960 Leak Detectors Operations and Service Manual
Table of Contents
Declaration of Conformity ............................................................................................................ xiii
Warranty ........................................................................................................................................ xiv
Warranty Replacement and Adjustment ....................................................................................xiv
Garantie .......................................................................................................................................... xv
Ersatz und Einstellung unter Garantie ........................................................................................xv
Factory Calibration Data .............................................................................................................xvii
List of Options or Accessories Included with System ...............................................................xvii
Hazard and Safety Information ................................................................................................xviii
Solvents ................................................................................................................................xix
Equipment, General...............................................................................................................xx
Power and Static...................................................................................................................xxi
Vacuum Equipment and Cleanliness...................................................................................xxii
O-ring Care .........................................................................................................................xxiii
Spectrometer Tube .............................................................................................................xxiv
Pumps.................................................................................................................................xxiv
Varian Services .........................................................................................................................xxv
Contacting Varian Vacuum Technologies .................................................................................xxv
Informationen über Gefahren und Sicherheit ...........................................................................xxvi
Lösungsmittel.....................................................................................................................xxvii
Maschinen, allgemein ....................................................................................................... xxviii
Strom und Statik..................................................................................................................xxix
Vakuumgeräte und Sauberkeit............................................................................................xxxi
Pflege von O-Ringen..........................................................................................................xxxii
Spektrometerrohr.............................................................................................................. xxxiii
Pumpen............................................................................................................................. xxxiii
Dienstleistungen von Varian ..................................................................................................xxxiv
Kontaktieren von Varian Vacuum Technologies ....................................................................xxxiv

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
iv
Section 1. Introduction to Models 947, 948 and 960 Leak Detectors .......................................1-1
1.1 Platform Electronics.............................................................................................................1-4
1.2 Unpacking the 947/948/960.................................................................................................1-4
1.2.1 Unpacking Instructions................................................................................................1-4
1.2.2 Removing the 947/948/960 from the Skid...................................................................1-5
1.2.3 Removing Loose Packing from Interior of 947/948/960..............................................1-6
1.3 Front Panel Controls and Indicators ....................................................................................1-6
1.4 Inner Door Instruction Label.................................................................................................1-9
1.5 Rear Panel Power Connection and Circuit Breakers.........................................................1-10
1.6 Service Pendant.................................................................................................................1-11
1.7 Installation Preparation......................................................................................................1-12
1.7.1 Power........................................................................................................................1-12
1.7.2 Liquid Nitrogen (Models 948/960 only).....................................................................1-13
1.7.3 Oil-Sealed Vacuum Pumps.......................................................................................1-13
1.7.4 Special Installation Requirements.............................................................................1-13
1.7.5 Installation Services..................................................................................................1-13
1.8 Storage ..............................................................................................................................1-14
1.9 Optional Rear Panel Interface Connections.......................................................................1-14
Einführung in die Lecksucher, Modell 947, 948 und 960 ........................................................... 15
1.10 Plattformelektronik...........................................................................................................1-18
1.11 Auspacken der 947/948/960............................................................................................1-18
1.11.6 Anleitungen zum Auspacken ..................................................................................1-19
1.11.7 Entfernen der 947/948/960 von der Palette............................................................1-19
1.11.8 Entfernen der losen Verpackungsteile aus dem Innenraum der 947/948/960........1-20
1.12 Anzeigen und Steuerelemente der Fronttafel..................................................................1-21
1.13 Anweisungsschild an der Innentür...................................................................................1-24
1.14 Rückseitige Schalttafelstromanschluss und Trennschalter..............................................1-25
1.15 Hängebedienungstafel.....................................................................................................1-26
1.16 Vorbereitung zur Installation............................................................................................1-27
1.16.1 Strom ......................................................................................................................1-27
1.16.2 Flüssigstickstoff (nur Modell 948/960) ....................................................................1-28
1.16.3 Öldichte Vakuumpumpen........................................................................................1-28
1.16.4 Spezielle Anforderungen bei der Installation ..........................................................1-28
1.16.5 Installationsdienste .................................................................................................1-29
1.17 Aufbewahrung..................................................................................................................1-29
1.18 Optionale Anschlüsse an der rückseitigen Schalttafel.....................................................1-30

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
v
Section 2. Leak Detector Integration ...........................................................................................2-1
2.1 Physical Considerations ......................................................................................................2-1
2.2 Common Configuration........................................................................................................2-1
2.3 Electronic Considerations for the Optional Rear Panel Interface.........................................2-9
2.3.1 Discrete I/O J120 Inputs..............................................................................................2-9
2.3.2 BCD J121 Outputs....................................................................................................2-10
2.3.3 Host Serial Port J123 Pinouts...................................................................................2-11
2.4 Optional Interface Connections..........................................................................................2-12
2.4.1 Grounding and Isolation............................................................................................2-12
2.4.2 Setup.........................................................................................................................2-13
2.4.3 Discrete I/O ...............................................................................................................2-13
2.5 Operation using the Optional Rear Panel Interface...........................................................2-15
2.5.1 Parallel Enable..........................................................................................................2-15
Section 3. Operation .....................................................................................................................3-1
3.1 Front Panel LED Indicators and Controls ...........................................................................3-1
3.2 Initial System Parameter Setup ...........................................................................................3-3
3.2.1 Parameters and Operating Modes..............................................................................3-3
3.3 Start-Up................................................................................................................................3-9
3.3.1 Startup Procedure.....................................................................................................3-10
3.4 Calibration and Sensitivity Checks.....................................................................................3-11
3.4.1 Calibration and Sensitivity Checks............................................................................3-12
3.5 Operating Procedures........................................................................................................3-14
3.5.1 Auto Ranging ............................................................................................................3-14
3.5.2 Manual Ranging........................................................................................................3-15
3.6 Standby..............................................................................................................................3-16
3.7 Shutdown...........................................................................................................................3-17
3.8 Using the Pendant for Parameter Setup............................................................................3-17
3.9 Optional Discrete I/O..........................................................................................................3-18
Betrieb .............................................................................................................................................19
3.10 LED-Anzeigen und Steuerelemente auf der Fronttafel....................................................3-20
3.11 Erste Einstellung der Systemparameter ..........................................................................3-22
3.11.1 Parameter und Betriebsmod...................................................................................3-22
3.12 Inbetriebnahme................................................................................................................3-28
3.12.1 Anleitungen zur Inbetriebnahme.............................................................................3-30
3.13 Kalibrierungs- und Empfindlichkeitsprüfungen.................................................................3-31
3.13.1 Kalibrierungs- und Empfindlichkeitsprüfungen........................................................3-32
3.14 Betriebsverfahren.............................................................................................................3-34
3.14.1 Automatische Bereichseinstellung..........................................................................3-34
3.14.2 Manuelle Bereichseinstellung .................................................................................3-36
3.15 Bereitschaft......................................................................................................................3-37
3.16 Abschalten .......................................................................................................................3-37
3.17 Parametereinstellung mit der Hängebedienungstafel......................................................3-38
3.18 Optionale diskrete E/A.....................................................................................................3-39

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
vi
Section 4. Maintenance ................................................................................................................4-1
4.1 Daily Maintenance ..............................................................................................................4-5
4.1.1 Calibration Check........................................................................................................4-5
4.1.1.1 Leak Checking ...............................................................................................4-5
4.1.1.2 General Suggestions for Leak Checking ........................................................4-6
4.2 Yearly Maintenance.............................................................................................................4-7
4.2.1 Replacing the Calibrated Leak....................................................................................4-7
4.2.2 Re-calibrate the Internal Calibrated Leak ...................................................................4-7
4.2.2.1 Removing the Internal Calibrated Leak ..........................................................4-7
4.2.2.2 Replacing the Internal Calibrated Leak ..........................................................4-9
4.2.3 Liquid Nitrogen Cold Trap (Models 948/960 only) ....................................................4-10
4.2.4 Flüssigstickstoff-Kühlfalle (nur Modele 948/960) ......................................................4-11
4.2.5 Spectrometer Tube Overhaul....................................................................................4-12
4.2.5.1 Removal of the Spectrometer Tube and Preamplifier ..................................4-13
4.2.5.2 Disassembly of the Spectrometer Tube and Preamplifier ............................4-15
4.2.5.3 Spectrometer Tube Cleaning .......................................................................4-17
4.2.5.4 Reassembly of the Spectrometer Tube and Preamplifier ............................4-17
4.2.5.5 Reinstallation of the Spectrometer Tube ......................................................4-21
4.2.6 Air Filter.....................................................................................................................4-22
4.2.7 Spectrometer Tube Exchange ..................................................................................4-23
4.2.7.1 Removing and Replacing both the Spectrometer Tube Assembly
and Preamplifier .......................................................................................................4-23
4.2.7.2 Reinstalling the Spectrometer Tube .............................................................4-23
4.2.8 TC1 and TC2 Gauge Replacement and Calibration.................................................4-26
4.2.8.1 Replacement of the TC1 Gauge in the Main Valve Block Assembly ...........4-26
4.2.8.2 Replacement of the TC2 Gauge in the Service Block Assembly .................4-28
4.2.8.3 Thermocouple Gauge Calibration Procedures .............................................4-30
4.2.8.4 System Pressure Gauge (TC2) Calibration ..................................................4-30
4.2.8.4.1 Vacuum (Low Pressure) Calibration ..............................................4-30
4.2.8.4.2 Atmospheric Calibration ................................................................4-31
4.2.8.5 Test Port Pressure Gauge (TC1) Calibration ...............................................4-32
4.2.8.6 Vacuum (Low Pressure) Calibration ............................................................4-32
4.2.8.7 Atmospheric Calibration ...............................................................................4-33
4.2.9 Rough Pump and Forepump Oil Level Check (Oil-sealed Mechanical Pumps) .......4-34
4.2.9.1 Condition of Oil (Oil-sealed Mechanical Pumps) ..........................................4-35
4.2.10 Cleaning the Test Port............................................................................................4-35
4.2.10.1 Removing the Test Port .............................................................................4-35
4.2.10.2 Examining and Cleaning the Test Port .......................................................4-36
4.2.10.3 Replacing the Test Port ..............................................................................4-37
4.3 Spare Parts........................................................................................................................4-37
4.3.10.4 Exchange Assemblies ................................................................................4-37
4.3.10.5 Replacement Parts .....................................................................................4-38
4.3.10.6 Ersatz teile .................................................................................................4-39

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
vii
Section 5. Troubleshooting ..........................................................................................................5-1
5.1 Error Condition Codes ........................................................................................................5-2
5.2 Troubleshooting Symptoms and Solutions ..........................................................................5-3
5.3 Fehlerzustandscodes...........................................................................................................5-5
5.4 Symptome und Lösungen bei der Fehlersuche...................................................................5-6
Appendix A. Service Pendant Keypad Functions ..................................................................... A-1
A.1 Keypad Functions................................................................................................................A-1
A.1.1 Using the Service Pendant ........................................................................................A-2
A.2 Glossary of Function Keys...................................................................................................A-3
A.3 Glossary of Input and Data Keys.........................................................................................A-3
Appendix B. Parts Replacement ................................................................................................. B-1
B.1 Removing the Covers..........................................................................................................B-1
B.1.1 Opening the Turret .....................................................................................................B-2
B.1.1.1 Removing the Service Pendant Shelf.............................................................B-2
B.1.2 Removing the Top Panel ...........................................................................................B-3
B.1.3 Replacing all Panels and Covers ...............................................................................B-4
B.1.3.1 Replacing the Service Pendant Shelf.............................................................B-4
B.1.3.2 Replacing the Top Panel.................................................................................B-5
B.2 Replacing the Ion Source ....................................................................................................B-6
B.3 Replacing the Turbo Pump..................................................................................................B-9
B.3.1 Turbo Pump ...............................................................................................................B-9
B.3.1.1 Removing the Turbo Pump...........................................................................B-10
B.3.1.2 Replacing the Turbo Pump...........................................................................B-12
B.3.1.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold.B-12
B.3.1.2.2 Connecting the Turbo Pump to the SVBA ....................................B-13
B.4 Replacing the Rough Pump...............................................................................................B-15
B.4.1 Wet Systems ............................................................................................................B-15
B.4.1.1 Removing the Wet System Rough Pump .....................................................B-16
B.4.1.1.1 Replacing the Wet System Rough Pump.......................................B-17
B.4.1.1.2 Examining and Cleaning Centering Rings, O-rings and Manifold .B-17
B.4.1.1.3 Re-installing the Wet System Rough Pump ..................................B-18
B.4.2 Dry Systems ............................................................................................................B-20
B.4.2.1 Removing the Dry System Rough Pump......................................................B-20
B.4.2.2 Replacing the Dry System Rough Pump ......................................................B-21
B.4.2.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold..B-21
B.4.2.2.2 Re-installing the Dry System Rough Pump ...................................B-21
B.5 Replacing the Forepump...................................................................................................B-22
B.5.1 Wet ..........................................................................................................................B-22
B.5.1.1 Removing the Wet System Forepump..........................................................B-23
B.5.1.2 Replacing the Wet System Forepump..........................................................B-24
B.5.1.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold..B-24
B.5.1.2.2 Re-installing the Wet System Forepump ......................................B-24

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
viii
B.5.2 Dry System ..............................................................................................................B-26
B.5.2.1 Removing the Dry System Forepump...........................................................B-26
B.5.2.1.1 Removing the Isolation Valve from the Forepump.........................B-26
B.5.2.1.2 Removing the Nitrogen Purge Connection from Pump .................B-27
B.5.2.1.3 Removing the Exhaust Fitting .......................................................B-27
B.5.2.1.4 Removing the Pump from the Cabinet ..........................................B-27
B.5.2.2 Replacing the Dry System Forepump...........................................................B-27
B.5.2.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold..B-27
B.5.2.2.2 Re-installing the Dry System Forepump .......................................B-28
B.5.2.2.3 Connecting the Nitrogen Purge Pump ..........................................B-28
B.5.2.2.4 Replacing the Isolation Valve ........................................................B-28
B.5.2.2.5 Replacing the Exhaust Fitting .......................................................B-29
B.5.2.2.6 Completing Mounting the Pump to the Cabinet Floor ...................B-29
Appendix C. Communications Protocol .....................................................................................C-1
C.1 Protocol (RS-232)................................................................................................................C-1
Appendix D. Inputs and Outputs .................................................................................................D-1
D.1 Service Serial Interface (J1)................................................................................................D-1
D.2 Optional Rear Panel Interface.............................................................................................D-1
D.2.1 Discrete I/O Parallel Interface (J120) ........................................................................D-1
D.2.2 BCD Discrete Output Parallel Interface (J121) ..........................................................D-3
D.2.3 Interface (J122) for Optional Universal Remote Control ...........................................D-4
D.2.4 Host Serial Port (J123) ..............................................................................................D-4
Appendix E. 947/948 Specifications ............................................................................................E-1
Technische Daten für 947/948 ......................................................................................................... 4
Appendix F. Accessories .............................................................................................................F-1
Appendix G. Leak Detection Theory .......................................................................................... G-1
G.1 Leak Testing—Why is it Needed?...................................................................................... G-1
G.2 Classes of Leak Detection ................................................................................................. G-1
G.3 Terminology ....................................................................................................................... G-2
G.4 Various Methods of Testing for Leaks................................................................................ G-3
G.5 Helium Mass Spectrometer Leak Detection (MSLD) ......................................................... G-4
G.5.1 Principles of Mass Spectrometry .............................................................................. G-4
G.5.2 Application as a Leak Detector ................................................................................G-4
G.5.3 The Nature of Flow in a Vacuum ..............................................................................G-4
G.5.4 Facts About Leak Rates ........................................................................................... G-4
G.6 Leak Detection Methods .................................................................................................... G-5
G.6.1 Test Piece Evacuated .............................................................................................. G-6
G.6.2 Test Piece Pressurized ............................................................................................ G-6
G.6.3 Test Piece Already Sealed ....................................................................................... G-7
G.7 Mass Spectrometer Leak Detector—Simplified Description ..............................................G-8
Index ................................................................................................................................................I-1

ix
Models 947, 948 and 960 Leak Detectors Operations and Service Manual
List of Figures
Figure Description Page
1-1 947 Leak Detector...............................................................................................................1-2
1-2 948/960 Leak Detector........................................................................................................1-3
1-3 Front Panel Controls and Indicators ...................................................................................1-6
1-4 Turret Door Instruction Label..............................................................................................1-9
1-5 Rear Power Panel.............................................................................................................1-10
1-6 Service Pendant................................................................................................................1-11
1-7 Rear Panel Interface Connectors......................................................................................1-14
1-8 947 Lecksucher.................................................................................................................1-16
1-9 948/960 Lecksucher..........................................................................................................1-17
1-10 Anzeigen und Steuerelemente der Fronttafels .................................................................1-21
1-11 Anweisungsschild auf Aufsatztür......................................................................................1-24
1-12 Rückseitige Schalttafel......................................................................................................1-25
1-13 Hängebedienungstafel......................................................................................................1-26
1-14 Schnittstellenanschlüsse an der rückseitigen Schalttafel .................................................1-30
2-1 947 Flow Diagram...............................................................................................................2-2
2-2 947 Ablaufdiagramm...........................................................................................................2-3
2-3 948 Flow Diagram...............................................................................................................2-5
2-4 948 Ablaufdiagramm...........................................................................................................2-6
2-5 960 Flow Diagram...............................................................................................................2-7
2-6 960 Flow Diagram...............................................................................................................2-8
2-7 Rear Panel........................................................................................................................2-12
2-8 Discrete Inputs/Outputs Isolated.......................................................................................2-13
3-1 Front Panel LED Indicators and Controls ...........................................................................3-1
3-2 Start-Up Controls ................................................................................................................3-9
3-3 Exponent Display with Condition Code Indicated.............................................................3-11
3-4 Location of AUTO/MAN MODE Switch.............................................................................3-14
3-5 Service Pendant Keypad ..................................................................................................3-18
3-6 LED-Anzeigen und Steuerelemente auf der Fronttafel.....................................................3-20
3-7 Steuerelemente zur Inbetriebnahme.................................................................................3-28
3-8 Exponentenanzeige mit angegebenem Zustandscode.....................................................3-31
3-9 Position des Schalters AUTO/MAN MODE.......................................................................3-35
3-10 Tastenfeld der Hängebedienungstafel..............................................................................3-38
4-1 Location of the Calibrated Leak..........................................................................................4-7
4-2 947/948/960 Spectrometer Tube Removal.......................................................................4-14
4-3 Spectrometer Tube Disassembly......................................................................................4-16
4-4 Spectrometer Tube Reassembly ......................................................................................4-18
4-5 Spectrometer Tube Reassembly (Ground Slit Plate)........................................................4-18
4-6 Spectrometer Tube Reassembly (Magnet Assembly) ......................................................4-20
4-7 947/948/960 Spectrometer Tube Installation....................................................................4-21
4-8 Air Filter Replacement ......................................................................................................4-22

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
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4-9 947/948/960 Spectrometer Tube Installation....................................................................4-24
4-10 TC1 Gauge in the MVBA ..................................................................................................4-26
4-11 TC2 Gauge in the SBA .....................................................................................................4-28
4-12 Rough Pump and Forepump Oil Level Check ..................................................................4-34
4-13 The Test Port....................................................................................................................4-35
4-14 Remove the Test Port Compression Ring and O-ring......................................................4-36
4-15 Placing the O-ring and Compression Ring onto the Test Port..........................................4-37
A-1 Service Pendant Keypad....................................................................................................A-1
B-1 Removing the Service Pendant Shelf.................................................................................B-2
B-2 The Top Panel at the Rear of the Turret.............................................................................B-3
B-3 The Test Port......................................................................................................................B-3
B-4 The Top Panel from the Front of the 947/948/960..............................................................B-4
B-5 Ion Source Replacement ....................................................................................................B-6
B-6 Location of the Turbo Pump ...............................................................................................B-9
B-7 Turbo Power and Foreline to Turbo Connections.............................................................B-10
B-8 The Turbo Power Connection...........................................................................................B-11
B-9 Radiator Clamp holding Fan to Turbo...............................................................................B-11
B-10 Location of Forepump and Rough Pump — Wet and Dry Configurations........................B-15
B-11 Rough Pump Manifold and Exhaust Connections............................................................B-16
B-12 Rough Pump Manifold and Exhaust Connections............................................................B-18
G-1 Test Piece Evacuated: Tracer Probe Used to Locate Leak...............................................G-6
G-2 Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate ............................................................................................ G-6
G-3 Test Piece Pressurized: Detector Probe Used to Locate Leak.......................................... G-6
G-4 Test Piece Sealed with Helium and/or Other Gases –
Bell Jar Used to DetermIne Overall Leak Rate.................................................................. G-7
G-5 Magnetic Separation Principle........................................................................................... G-8