Varian 956 Manual
-~
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varian/vacuum
products division
TOLL FREE NUMBERS:
Service: National and Canada: 1-800-227-9722
From Alaska and Hawaii dial (408) 496-2888
Order Entry: National: 1-800-8-VARIAN
(1-800-882-7426)
From Alaska and Hawaii dial (415) 424-6910
Copyright
C
1989
by
Varian
Associates,
Inc
.
AU
rights
reserved,
including
the
right
of
reproduction
in
whole
or
in
part
In
any
fonn,
w~hout
pennission
in
wr~ing
from
Varian
Associates,
Lexington,
MA
02173
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WARRANTY
Products manufactured by Seller are warranted against defects
in
materials and workmanship
for twelve (12) months from date of shipment thereof to Customer, and Seller's liability under
valid warranty claims
is
limited, at the option of Seller,
to
repair, replacement, or refund
of
an
equitable portion of
the
purchase price of the Product. Items expendable
in
normal use are
not
covered by this warranty. All warranty replacement or repair of parts shall
be
limited
to
equipment malfunctions which,
in
the sole opinion of Seller, are due or traceable
to
defects
in
original materials or workmanship. All obligations of Seller under this warranty shall cease
in
the event of abuse, accident, alteration, misuse, or neglect of the equipment. In-warranty
repaired or replacement parts are warranted only for the remaining unexpired portion of
the
original warranty period applicable
to
the repaired or replaced parts. After expiration of
the
applicable warranty period, Customer shall
be
charged at the then current prices for parts,
labor,
and
transportation.
Reasonable care must be used
to
avoid hazards. Seller expressly disclaims responsibility for
loss or damage caused by use of its Products other than
in
accordance with proper operating
procedures.
Except as stated herein, Seller makes
no
warranty, express or implied (either
in
fact or by
operation of law), statutory or otherwise; and, except as stated herein, Seller shall have
no
liability under any warranty, express or implied (either
in
fact or by operation of law), statutory
or otherwise. Statements made by any person, including representatives of Seller, which
are
inconsistent or
in
conflict with
the
terms
of
this warranty shall not be binding upon Seller unless
reduced to writing and approved by
an
officer
of
Seller.
Warranty Replacement and Adjustment
All
claims under warranty must be made promptly after occurrence of circumstances giving
rise
thereto, and must
be
received within the applicable warranty period by Seller or its authorized
representative. Such claims should include the Product serial number, the date of Shipment,
and a full description of the circumstances giving rise to the claim. Before any Products
are
returned for repair and/or adjustment, written authorization from Seller or its authorized
representative for the return and instructions as to how and where these Products should
be
returned must
be
obtained. Any Product retumed
to
Seller for examination shall be prepaid
via
the
means of transportation indicated
as
acceptable by Seller. Seller reserves the right
to
reject any warranty claim not promptly reported and any warranty claim
on
any item that
has
been altered or has been returned by non-acceptable means of transportation. When any
Product is returned for examination and inspection, or for any other reason, Customer shall
be
responsible for all damage resulting from improper packing or handling, and for loss
in
transit,
notwithstanding any defect or non-conformity
in
the Product, in all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller's determination with
regard thereto shall
be
final .
If it is found that Seller's Product has been returned without cause and is stili serviceable,
Customer will
be
notified and the Product returned at its expense;
in
addition, a charge for
testing and examination may be made
on
Products
so
returned.
)
)
@
varian/vacuum
products division
121 hartwell avenue I lexington I massachusetts
02173
leI. 617·861 ·
7200
I
Iwx:
710·321-0019
SAFETY
CONSIDERATIONS
READ
THE FO
LL
OWI
NG
INST
R
UCTIONS
TAKE
ALL
NEC
ESS
ARY
PRE
C
AUT
I
ONS
varian
)
HAZARDS
Operalors and service personnel must be aware of all hazards associated with this equipment.
They must know how
to
recognize hazardous and potentially hazardous conditions, and
know
how
to
avoid them. The consequences of unskilled, improper, or careless operation of
the
equipment can be serious. This product must only be operated and maintained by trained
personnel. Every operator or service person must read and thoroughly understand
operation/maintenance manuals and any additional informati
on
provided by Varian
Associates.
All
warnings and cautions should be read carefully and strictly observed. Consult
local , state, and national agencies regarding specific requirements and regulations. Address
any safety, operation, and/or maintenance questions to your nearest Varian office.
The
fOllowing
format
is
used
in
this manual
to
call attention
to
hazards.
WARNING
WARNINGS ARE USED WHEN FAILURE TO OBSERVE INSTRUCTIONS
OR
PRECAUTIONS COULD RESULT
IN
SERIOUS INJURY
OR
DEATH.
CAUTION
CAUTIONS ARE USED WHEN FAILURE TO OBSERVE INSTRUCTIONS
COULD RESULT
IN
DAMAGE TO EQUIPMENT, WHETHER VARIAN-
SUPPLIED OR OTHER ASSOCIATED EQUIPMENT.
Note
Notes contain informa
ti
on
to aid the operator in obtaining the best performance
from the equipment.
)
@
Wlnan
varian/vacuum
products division
121 hartwell avenue
/Iexlnglon
/ massachusetts
02173
lei 617-861-7200 / Iwx: 710-321-0019
WARNING
SAFETY
CONSIDERATIONS
READ
THE
FOLLOWING
INSTRUCTIONS
TAKE
ALL
NECESSARY
PRECAUTIONS
The mechanical components
of
leak detectors are typically cleaned with Freon
TF.
alcohol. methanol.
or
other solvents.
When heated. sprayed. or exposed to high-temperature equipment. these
solvents become flammable
and
explosive. causing serious injury or death.
DO
NOT
USE
NEAR A HIGH-TEMPERATURE SOURCE. Ventilate
the
working area
with a blower and use
in
a large. well-ventilated room. When heated or
sprayed. Freon TF also becomes 4 to 5 times heavier than air and will flow
down. settling
in
tanks. pits.
and
low areas. thus displacing air which can kill
by
asphyxiation.
Use
of a self-contained breathing apparatus
may
be
necessary.
Freon TF. alcohol. methanol. and other solvents are irritants. narcotics.
depressants. and/or carcinogenics. Their inhalation and/or ingestion
may
produce serious side effects. Prolonged or continued contact with the skin will
result
in
absorption through
the
skin and moderate toxicity. Always ensure that
cleaning operations are carried out
in
large. well-ventilated rooms. and wear
) eyeshields. gloves.
and
protective clothing.
WARNING
Liquid nitrogen (when used with the optional cold trap) can cause severe
frostbite
or
blindness if splashed
on
body tissues
or
eyes. The extremely low
temperature of liquified nitrogen can cause skin damage similar to high
temperature burns. Contact with the cold gas evolving from the liquid
may
produce the same effect.
To
minimize the risk of hazardous contact with
any
part
of
the body. wear personal safety equipment recommended for use with
cryogenic materials including a face shield. full-sleeved lab coat. and clean dry
gloves which fit loosely
so
they can
be
thrown off quickly if frozen
by
contact
with
the
gas
or
liquid.
CAUTION
Do
not
use
Freon
TF
or other solvents
on
O-rings.
To
do
so
causes deterioration
and
reduces their ability
to
hold a vacuum. Wipe with a clean. lint-free cloth
and
use
a small amount of Apiezon L grease. just enough
to
make
the
O-rings shiny.
)
I
)
varian/vacuum
products division
121 hartwell avenue
/Iexlngton
/ massachusetts
02173
tal. 617-8617200 /
tw>e
71o-32Hl019
CAUTION
SAFETY
CONSIDERATIONS
READ
THE
FOLLOWING
INSTRUCT10NS
TAKE ALL
NECESSARY
PRECAUTIONS
Do
not clean any aluminum parts with Alconox. Alconox
is
not compatible with
aluminum and will cause damage.
Note
During reassembly, always use Loctite PST (teflon-impregnated pipe thread
compound)
on
pipe threads.
Note
Where applicable, inspect for any damage
to
retaining rings
and
O-rings.
Remove them carefully with your fingers.
Do
not
use
any
metal tools for this
task.
This prevents scratching of
any
sealing surfaces.
Note
To
clean O-rings, wipe
them
with
a clean, lint-free cloth or paper. If vacuum
grease is required, apply Apiezon L lightly; remove excess grease until only a
shiny,
thin
film
remains.
)
Tab
le of Contents
TABLE
OF CONTENTS
Section
Description
Safety
Considerations
SECTION I INTRODUCTION
1-1
1
-1
Scope
1-1
1-2 Need For Testing 1-1
1-3 Glossary
of
Terms
1-1
1-4 Methods of Testing 1-2
1-5 Helium Mass Spectrometer Leak Detection 1-3
1-6 Helium Mass Spectrometer Leak Detection Methods 1-5
1-7 Applications 1-6
SECTION II DESCRIPTION
2-1
2-1 Scope
2-1
2-2 Specifications
2-1
2-3 Modules 2-4
2-4 Vacuum System 2-5
2-4-1 Mechanical Pumps 2-5
) 2-4-2 Spectrometer Tube 2-5
2-4-3 Turbo Pump 2-8
2-4-4 Turbo V-80 Controller 2-9
2-5 Optional Equipment 2
-1
3
2-
5-1
Remote Controller Option 2-
13
2-6 Electronics 2-
13
2-
6-1
Accessory Output Connectors 2-13
2-6-2 Connector
Jll,
Serial Interface, RS232C 2-17
2-6-3 RS232C Interface 2-18
2-6-4 ConnectorJ12, Remote Box 2-
25
2-6-5 Connector J13, Option Control 2-26
2-6-6 Connector J14, Phone Jack 2-26
2
-7
Front Panel Controls 2-27
2-8 Menu Descriptions 2-27
2-9 Enclosures 2-28
Section
III RECEIVING AND INSTALLATION
3-1
3-1 Description 3-1
3-2 Unpacking Instructions 3-1
3-3 Services Required for Operation 3-2
3-4 Preparation for Operation 3-2
3-5 Installation 3-2
3-6 Leveling the Leak Detector 3-2
3-7 Storage 3-4
6999-09-720
Table of Contents
)
SECTION IV OPERATION
4-1
4-1
General
4-1
4-2 Startup and Shutdown Procedures 4-1
4-2-1 Startup
4-1
4-2-2 Shutdown 4-2
4-2-3 Moving the Leak Detector 4-2
4-2-4 Special Operating Instructions 4-2
4-3 Levels of Operation 4-3
4-3-1 Operation Using
Levell
Keys 4-3
4-3-2 Operation Using Level 2 Keys 4-4
4-3-3 Operation Using Level 3 Keys 4-6
4-4 System Valve Operation 4-7
4-4-1 Valve Designations and Functions 4-7
4-4-2 Vacuum Modes 4-7
4-5 Front Panel Controls 4-17
4-5-1 Right-side Control Key Functions 4-17
4-5-2 Left-side Control Key Functions 4-19
4-5-3 Second Function Key Definitions 4-20
4-6 Menu Descriptions 4-22
SECTION V MAINTENANCE, REPAIR, AND CALIBRATION
5-1
5-1 Scope
5-1
)
5-2 Scheduled Maintenance 5-2
5-2-1 Daily 5-2
5-2-2 Manual Tuning 5-2
5-2-3 Weekly 5-3
5-2-4 Semi-Annually 5-4
5-3 Unscheduled Maintenance 5-8
5-3-1 Purging (Gas Ballasting) the Forepump or Rough Pump 5-9
5-3-2 System Thermocouple Gauge (TC2) Cleaning/Replacement 5-10
5-3-3 Test Port Thermocouple Gauge (TC1) Cleaning/Replacement 5-10
5-3-4 Ion Source Replacement
5-11
5-3-5 Disassembly/Cleaning of the Spectrometer Tube
5-11
5-3-6 Cleaning the Spectrometer Tube 5-14
5-3-7 Assembly of the Spectrometer Tube 5-14
5-3-8 Enhancement Magnet Replacement/Adjustment Procedure 5-15
5-3-9 Vacuum System Removal 5-16
5-3-10 Disassembly of Calibrated Leak 5-17
5-3-11 Disassembly of Vacuum Manifold
5-21
5-3-12 Cleaning the Vacuum Manifold 5-23
5-3-13 Assembly of Vacuum Manifold 5-24
5-3-14 Assembly of the Calibrated Leak 5-25
5-3-15 Installation of the Vacuum System 5-26
5-3-16 Cleaning the Turbo Pump 5-27
5-3-17 Re-Iubricating the Turbo Pump 5-28
5-3-18 Disassembly of the Isolation valve 5-29
5-3-19 Assembly of the Isolati
on
Valve 5-30
ii
6999-09-720
)
5-4 Calibration
5-4-1 System Thermocouple TC2 Calibration
5-4-2
Test
Port Thermocouple TC 1 Calibration
5-4-3 Zeroing Ranges
5-4-4
Ion
Source Tuning
5-4-5 Checking Tolerable Forepressure
5-4-6 Turbo Speed vs Sensitivity
5-4-7 Gross Leak Calibration
5-4-8 Controller Waveform Calibration
5-4-9 Controller High and Low Frequency Adjustments
5-4-10 Control Board Calibration
SECTION VI TROUBLESHOOTING
6-1
General
6-2 Troubleshooting Symptoms
6-3 Error Messages
6-3-1 "Spec tube rough error"
6-3-2 "Spec tube pressure burst"
6-3-3 "Pressure burst"
6-3-4 "System over pressure"
6-3-5 "System pressure wait"
6-3-6 "System pressure timeout"
6-3-7 "Ion gauge pressure wait"
6-3-8 "I
on
gauge time out"
6-3-9 "Filament
#1
burned out"
6-3-1
0 "Filament
#2
burned out"
6-3-11
"
Test
port over pressure"
6-3-12 "Xfer pressure wait"
6-3-13 "Gain too high"
6-3-14 "Gain too small"
6-3-15 "No helium peak"
6-3-16
"Too
many peaks"
6-4 Detailed Troubleshooting
6-4-1 Leak Symptoms
6-4-2 Leak-checking the Leak Detector (small leaks)
6-4-3 Leak-checking the Leak Detector (large leaks)
6-4-4 Valve Check
6-4-5 Ion Source Check
6-4-6 Preamplifier Check
6-4-7 Test Port Thermocouple Gauge (
TC1
) Check
6-4-8 System Thermocouple Gauge (TC2) Check
6-5 Electronics Troubleshooting
6-6 Power-Up Sequence
6999-09-720
Table of Conte
nts
5-
31
5-31
5-31
5-
31
5-31
5-31
5-32
5-32
5-33
5-33
5-33
6-1
6-1
6-1
6-4
6-4
6-4
6-5
6-5
6-5
6-5
6-5
6-5
6-6
6-6
6-6
6-7
6-7
6-7
6-7
6-8
6-8
6-8
6-8
6-8
6-9
6-10
6-10
6-11
6-11
6-13
6-14
ii
i
Table of Contents
)
SECTION
VII
PARTS
LIST
7-1
7-1
General
7-1
7-2 Contents 7
-1
7-3 Figure and Index Number Column
7-1
7-4 Part Number Column
7-1
7-5 Description Column
7-1
7-6 Abbreviations
7-1
7-7 Units Per Assembly Column
7-1
7-8 Illustrations 7-2
7-9 How
To
Use This Parts List 7-2
7-10 How
To
Order Parts 7-2
7-11
Factory-Installed Options 7-2
SECTION
V1I1
GLOSSARY
OF
TERMS
8-1
SECTION IX
SCHEMATIC
DIAGRAMS
9-1
)
iv 6999-09-720
List
of
Illus
t
rat
i
ons
LIST OF ILLUSTRATIONS
Figure
~
~
1
-1
Magnetic separation principle
1-4
1-2
Test
piece evacuated; tracer gas spray probe used
to
locate leak.
1-5
1-3
Test
piece evacuated
and
hooded with helium atmosphere
to
determine
1-5
overall leak
rate.
1-4
Test
piece pressurized ;detector probe
used
to
locate
leak
.
1-5
1-5
Test
piece sealed wi
th
helium
or
tracer gas; bell jar used
to
determine
1-6
total leak
rate.
1-6
CRT
evacuated
and
tested with a conventional automatic leak detector.
1-6
The
CRT
is
hooded
to
insure
the
integrity of
the
entire
tube.
1-7
Varian's universal test fixture mounted
on
the
leak detector with 1
-7
its
cover
open
.
1-8
Outside-in leak testing
an
evacuated glass envelope.
1-7
1-9
Utilization
of
a "Power Probe".
1-7
1-10 A Bourdon gauge, pre-bombed with helium, under
test.
1-7
1-11
Using
the
956
to
test vacuum systems.
1-8
1-12 A typical intermediate vacuum system.
1-8
2-1
Varian
956
Leak
Detector showing basic module with 1.2-cfm fore 2-2
) pump module
and
small
cart
2-2
Varian
956
Leak Detector showing basic module, 1.2-cfm
fore
pump,
2-3
7-
cfm
roughing pump module,
and
large cart
2-3
Varian
956
Leak Detector 2-4
2-4
Varian
956
Leak
Detector
Vacuum
System
2-6
2-5
Cutaway view of
956
spectrometer
Tube
2-7
2-6 Control
Panel,
Turbo
Pump
Controller
2-10
2-7
Location of Turbo
Pump
Controller 2-
10
2-8
Remote
Controller for
956
Leak Detector 2-14
2-9 Front Panel Controls,
956
Leak Detector
2-27
3-1
Unpacking
the
956
Leak Detector
3-1
3-2
Leak
Detector Installation Connections
3-3
4-1
Schematic Diagram
of
956
Vacuum
System
4-8
4-2
Vacuum
system
in
the
system Ready-Vent
mode
4-9
4-3 Roughing
the
test port using
the
intemal pump only 4-10
4-4 Roughing
the
test port with
the
extemal pump 4-
11
4-5
Roughing the Calibrated Leak
(with
internal leak option) 4-
12
4-6
Calibrated leak open, vacuum system
in
the
Test
mode
4
-1
3
4-7
Vacuum
system
in
the Gross
Leak
Test
mode
4-14
4-8
Vacuum
system
in
the
Fine
Test
mode
4-15
4-9
Vacuum
system
in
the System
Ready
or Hold
mode
4-16
4-10 Front
Panel
Controls,
956
Leak
Detector
4-18
6999-09-720 v
List
of
Iiustrations
Figure
5-1
5-2
5-3
5-4
5-5
5-6
5-7
5-8
5-9
5-10
5-11
6-1
6-2
vi
Fore
Pump
Flush
and
Oil
Change
Rough
Pump
Flush
and
Oil
Change
Spectrometer
Tube
Exploded
View
Mounting Screws for
Vacuum
System
Exploded view of
the
main
components
of
the
vacuum
system
Calibrated Leak Exploded
View
Exploded view of vacuum manifold
Exploded view of test port
Turbo
Pump
Cleaning Procedure
Turbo
Pump
Grease Ports
Exploded view of isolation valve
Ion
source connector
Voltages
at preamplifier connector
5-4
5-7
5-13
5-18
5-19
5-20
5-22
5-23
5-27
5-29
5-30
6-12
6-12
6999-09-720
)
List of
Tab
les
LIST
OF
TABLES
Table
No
.
~
~
1
-1
Decimal Notation 1
-2
2-1
Operating Specifications
2-1
2-2 Voltage information and reference levels 2-18
2-3
Command
Mode codes 2-21
2-4
Commands
versus keystrokes 2-22
2-5 Byte definitions 2-23
2-6 List
of
Menus 2-27
4-1
Valve Truth Table 4-8
4-2 List
of
Menus
4-22
5-1
Maintenance actions to perform
5-1
6-1
Troubleshooting symptoms
6-1
)
6999-09-720 vii
Table of contents
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