Varian 948 Operation manual

vacuum technologies
OPERATION AND
SERVICE MANUAL
Models
947, 948 and 960
Leak Detectors
Part No. 699909947
Revision H
March 2003

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
Copyright 2003
Varian Vacuum Technologies
Models 947, 948 and 960 Leak Detectors
Contra-Flow, MacroTorr, TriScroll and ConvecTorr are trademarks or registered trademarks of
Varian Vacuum Technologies.
Apiezon is a registered trademark of M&I Materials Ltd.
Alconox is a registered trademark of Alconox, Inc.
Loctite and PST are registered trademarks of Loctite Corporation.
Scotch-Brite is a trademark of 3M.
Skid-Mate is a registered trademark of Hardigg.

iii
Models 947, 948 and 960 Leak Detectors Operations and Service Manual
Table of Contents
Declaration of Conformity ............................................................................................................ xiii
Warranty ..........................................................................................................................................xiv
Warranty Replacement and Adjustment ....................................................................................xiv
Factory Calibration Data ...................................................................................................................xv
List of Options or Accessories Included with System .................................................................xv
Hazard and Safety Information ..................................................................................................xvi
Solvents ...............................................................................................................................xvii
Equipment, General............................................................................................................ xviii
Power and Static.................................................................................................................xviii
Vacuum Equipment and Cleanliness.....................................................................................xx
O-ring Care ............................................................................................................................xx
Spectrometer Tube ...............................................................................................................xxi
Pumps...................................................................................................................................xxi
Varian Services .........................................................................................................................xxii
Contacting Varian Vacuum Technologies .................................................................................xxii
Section 1. Introduction to Models 947, 948 and 960 Leak Detectors .............................................1-1
1.1 Platform Electronics.............................................................................................................1-4
1.2 Unpacking the 947/948/960.................................................................................................1-4
1.2.1 Unpacking Instructions................................................................................................1-4
1.2.2 Removing the 947/948/960 from the Skid...................................................................1-5
1.2.3 Removing Loose Packing from Interior of 947/948/960..............................................1-6
1.3 Front Panel Controls and Indicators ....................................................................................1-6
1.4 Inner Door Instruction Label.................................................................................................1-8
1.5 Rear Panel Power Connection and Circuit Breakers...........................................................1-9
1.6 Service Pendant.................................................................................................................1-10
1.7 Installation Preparation ......................................................................................................1-11
1.7.1 Power........................................................................................................................1-11
1.7.2 Liquid Nitrogen (Models 948/960 only) .....................................................................1-12
1.7.3 Oil-Sealed Vacuum Pumps.......................................................................................1-12
1.7.4 Special Installation Requirements.............................................................................1-12
1.7.5 Installation Services..................................................................................................1-12
1.8 Storage ..............................................................................................................................1-13
1.9 Optional Rear Panel Interface Connections.......................................................................1-13

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
iv
Section 2. Leak Detector Integration ..............................................................................................2-1
2.1 Physical Considerations ......................................................................................................2-1
2.2 Common Configuration........................................................................................................2-1
2.3 Electronic Considerations for the Optional Rear Panel Interface.........................................2-6
2.3.1 Discrete I/O J120 Inputs .............................................................................................2-6
2.3.2 BCD J121 Outputs......................................................................................................2-7
2.3.3 Host Serial Port J123 Pinouts.....................................................................................2-8
2.4 Optional Interface Connections............................................................................................2-9
2.4.1 Grounding and Isolation..............................................................................................2-9
2.4.2 Setup.........................................................................................................................2-10
2.4.3 Discrete I/O...............................................................................................................2-10
2.5 Operation using the Optional Rear Panel Interface...........................................................2-12
2.5.1 Parallel Enable..........................................................................................................2-12
Section 3. Operation .......................................................................................................................3-1
3.1 Front Panel LED Indicators and Controls ...........................................................................3-1
3.2 Initial System Parameter Setup ...........................................................................................3-3
3.2.1 Parameters and Operating Modes..............................................................................3-3
3.3 Start-Up................................................................................................................................3-8
3.3.1 Startup Procedure.....................................................................................................3-10
3.4 Calibration and Sensitivity Checks.....................................................................................3-11
3.4.1 Calibration and Sensitivity Checks............................................................................3-12
3.5 Operating Procedures........................................................................................................3-13
3.5.1 Auto Ranging ............................................................................................................3-14
3.5.2 Manual Ranging........................................................................................................3-15
3.6 Standby..............................................................................................................................3-16
3.7 Shutdown...........................................................................................................................3-16
3.8 Using the Pendant for Parameter Setup............................................................................3-17
3.9 Optional Discrete I/O..........................................................................................................3-18
Section 4. Maintenance ..................................................................................................................4-1
4.1 Daily Maintenance ..............................................................................................................4-5
4.1.1 Calibration Check........................................................................................................4-5
4.1.1.1 Leak Checking ...............................................................................................4-5
4.1.1.2 General Suggestions for Leak Checking ........................................................4-6
4.2 Yearly Maintenance.............................................................................................................4-7
4.2.1 Replacing the Calibrated Leak....................................................................................4-7
4.2.2 Re-calibrate the Internal Calibrated Leak ...................................................................4-7
4.2.2.1 Removing the Internal Calibrated Leak ..........................................................4-7
4.2.2.2 Replacing the Internal Calibrated Leak ..........................................................4-9
4.2.3 Liquid Nitrogen Cold Trap (Models 948/960 only) ....................................................4-10
4.2.4 Spectrometer Tube Overhaul....................................................................................4-11

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
v
4.2.4.1 Removal of the Spectrometer Tube and Preamplifier ..................................4-12
4.2.4.2 Disassembly of the Spectrometer Tube and Preamplifier ............................4-14
4.2.4.3 Spectrometer Tube Cleaning .......................................................................4-16
4.2.4.4 Reassembly of the Spectrometer Tube and Preamplifier .............................4-16
4.2.4.5 Reinstallation of the Spectrometer Tube ......................................................4-19
4.2.5 Air Filter.....................................................................................................................4-20
4.2.6 Spectrometer Tube Exchange ..................................................................................4-21
4.2.6.1 Removing and Replacing both the Spectrometer Tube Assembly
and Preamplifier .......................................................................................................4-21
4.2.6.2 Reinstalling the Spectrometer Tube .............................................................4-21
4.2.7 TC1 and TC2 Gauge Replacement and Calibration .................................................4-23
4.2.7.1 Replacement of the TC1 Gauge in the Main Valve Block Assembly ............4-23
4.2.7.2 Replacement of the TC2 Gauge in the Service Block Assembly .................4-25
4.2.7.3 Thermocouple Gauge Calibration Procedures .............................................4-27
4.2.7.4 System Pressure Gauge (TC2) Calibration ..................................................4-27
4.2.7.4.1 Vacuum (Low Pressure) Calibration ..............................................4-27
4.2.7.4.2 Atmospheric Calibration ................................................................4-28
4.2.7.5 Test Port Pressure Gauge (TC1) Calibration ...............................................4-29
4.2.7.6 Vacuum (Low Pressure) Calibration .............................................................4-29
4.2.7.7 Atmospheric Calibration ...............................................................................4-30
4.2.8 Rough Pump and Forepump Oil Level Check (Oil-sealed Mechanical Pumps)........4-31
4.2.8.1 Condition of Oil (Oil-sealed Mechanical Pumps) ..........................................4-32
4.2.9 Cleaning the Test Port ..............................................................................................4-32
4.2.9.1 Removing the Test Port ................................................................................4-32
4.2.9.2 Examining and Cleaning the Test Port .........................................................4-33
4.2.9.3 Replacing the Test Port ................................................................................4-34
4.3 Spare Parts........................................................................................................................4-34
4.3.9.4 Exchange Assemblies ..................................................................................4-34
4.3.9.5 Replacement Parts .......................................................................................4-35
Section 5. Troubleshooting .............................................................................................................5-1
5.1 Error Condition Codes ........................................................................................................5-2
5.2 Troubleshooting Symptoms and Solutions ..........................................................................5-3
Appendix A. Service Pendant Keypad Functions ...........................................................................A-1
A.1 Keypad Functions................................................................................................................A-1
A.1.1 Using the Service Pendant ........................................................................................A-2
A.2 Glossary of Function Keys...................................................................................................A-3
A.3 Glossary of Input and Data Keys.........................................................................................A-4
Appendix B. Parts Replacement .....................................................................................................B-1
B.1 Removing the Covers..........................................................................................................B-1
B.1.1 Opening the Turret .....................................................................................................B-2
B.1.1.1 Removing the Service Pendant Shelf.............................................................B-2

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
vi
B.1.2 Removing the Top Panel ...........................................................................................B-3
B.1.3 Replacing all Panels and Covers ...............................................................................B-4
B.1.3.1 Replacing the Service Pendant Shelf.............................................................B-4
B.1.3.2 Replacing the Top Panel ................................................................................B-5
B.2 Replacing the Ion Source....................................................................................................B-6
B.3 Replacing the Turbo Pump..................................................................................................B-9
B.3.1 Turbo Pump ...............................................................................................................B-9
B.3.1.1 Removing the Turbo Pump...........................................................................B-10
B.3.1.2 Replacing the Turbo Pump...........................................................................B-12
B.3.1.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold.B-12
B.3.1.2.2 Connecting the Turbo Pump to the SVBA ....................................B-13
B.4 Replacing the Rough Pump...............................................................................................B-15
B.4.1 Wet Systems ...........................................................................................................B-15
B.4.1.1 Removing the Wet System Rough Pump.....................................................B-16
B.4.1.1.1 Replacing the Wet System Rough Pump.......................................B-17
B.4.1.1.2 Examining and Cleaning Centering Rings, O-rings and Manifold .B-17
B.4.1.1.3 Re-installing the Wet System Rough Pump ..................................B-18
B.4.2 Dry Systems ............................................................................................................B-20
B.4.2.1 Removing the Dry System Rough Pump......................................................B-20
B.4.2.2 Replacing the Dry System Rough Pump......................................................B-21
B.4.2.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold..B-21
B.4.2.2.2 Re-installing the Dry System Rough Pump ...................................B-21
B.5 Replacing the Forepump...................................................................................................B-22
B.5.1 Wet ..........................................................................................................................B-22
B.5.1.1 Removing the Wet System Forepump..........................................................B-23
B.5.1.2 Replacing the Wet System Forepump..........................................................B-24
B.5.1.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold..B-24
B.5.1.2.2 Re-installing the Wet System Forepump ......................................B-24
B.5.2 Dry System ..............................................................................................................B-26
B.5.2.1 Removing the Dry System Forepump...........................................................B-26
B.5.2.1.1 Removing the Isolation Valve from the Forepump.........................B-26
B.5.2.1.2 Removing the Nitrogen Purge Connection from Pump .................B-27
B.5.2.1.3 Removing the Exhaust Fitting .......................................................B-27
B.5.2.1.4 Removing the Pump from the Cabinet ..........................................B-27
B.5.2.2 Replacing the Dry System Forepump...........................................................B-27
B.5.2.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold..B-27
B.5.2.2.2 Re-installing the Dry System Forepump .......................................B-28
B.5.2.2.3 Connecting the Nitrogen Purge Pump ..........................................B-28
B.5.2.2.4 Replacing the Isolation Valve ........................................................B-28
B.5.2.2.5 Replacing the Exhaust Fitting .......................................................B-29
B.5.2.2.6 Completing Mounting the Pump to the Cabinet Floor ...................B-29

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
vii
Appendix C. Communications Protocol ......................................................................................... C-1
C.1 Protocol (RS-232)............................................................................................................... C-1
Appendix D. Inputs and Outputs .................................................................................................... D-1
D.1 Service Serial Interface (J1)...............................................................................................D-1
D.2 Optional Rear Panel Interface............................................................................................ D-1
D.2.1 Discrete I/O Parallel Interface (J120) ....................................................................... D-1
D.2.2 BCD Discrete Output Parallel Interface (J121) ......................................................... D-3
D.2.3 Interface (J122) for Optional Universal Remote Control ........................................... D-4
D.2.4 Host Serial Port (J123) ............................................................................................. D-4
Appendix E. 947/948 Specifications ...............................................................................................E-1
Appendix F. Accessories ................................................................................................................F-1
Appendix G. Leak Detection Theory ..............................................................................................G-1
G.1 Leak Testing—Why is it Needed?......................................................................................G-1
G.2 Classes of Leak Detection ................................................................................................. G-1
G.3 Terminology .......................................................................................................................G-2
G.4 Various Methods of Testing for Leaks................................................................................G-3
G.5 Helium Mass Spectrometer Leak Detection (MSLD) .........................................................G-4
G.5.1 Principles of Mass Spectrometry ..............................................................................G-4
G.5.2 Application as a Leak Detector .................................................................................G-4
G.5.3 The Nature of Flow in a Vacuum ..............................................................................G-4
G.5.4 Facts About Leak Rates ...........................................................................................G-5
G.6 Leak Detection Methods ....................................................................................................G-5
G.6.1 Test Piece Evacuated ..............................................................................................G-6
G.6.2 Test Piece Pressurized ............................................................................................G-6
G.6.3 Test Piece Already Sealed .......................................................................................G-7
G.7 Mass Spectrometer Leak Detector—Simplified Description ..............................................G-8

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
This page intentionally left blank.

ix
Models 947, 948 and 960 Leak Detectors Operations and Service Manual
List of Figures
Figure Description Page
1-1 947 Leak Detector...............................................................................................................1-2
1-2 948/960 Leak Detector........................................................................................................1-3
1-3 Front Panel Controls and Indicators ...................................................................................1-6
1-4 Turret Door Instruction Label..............................................................................................1-8
1-5 Rear Power Panel...............................................................................................................1-9
1-6 Service Pendant................................................................................................................1-10
1-7 Rear Panel Interface Connectors......................................................................................1-13
2-1 947 Flow Diagram...............................................................................................................2-2
2-2 948 Flow Diagram...............................................................................................................2-4
2-3 960 Flow Diagram...............................................................................................................2-5
2-4 Rear Panel..........................................................................................................................2-9
2-5 Discrete Inputs/Outputs Isolated.......................................................................................2-10
3-1 Front Panel LED Indicators and Controls ...........................................................................3-1
3-2 Start-up Controls.................................................................................................................3-8
3-3 Exponent Display with Condition Code Indicated.............................................................3-11
3-4 Location of AUTO/MAN MODE Switch.............................................................................3-14
3-5 Service Pendant Keypad ..................................................................................................3-17
4-1 Location of the Calibrated Leak..........................................................................................4-7
4-2 947/948/960 Spectrometer Tube Removal.......................................................................4-13
4-3 Spectrometer Tube Disassembly......................................................................................4-15
4-4 Spectrometer Tube Reassembly ......................................................................................4-16
4-5 Spectrometer Tube Reassembly (Ground Slit Plate)........................................................4-17
4-6 Spectrometer Tube Reassembly (Magnet Assembly) ......................................................4-18
4-7 947/948/960 Spectrometer Tube Installation....................................................................4-19
4-8 Air Filter Replacement ......................................................................................................4-20
4-9 947/948/960 Spectrometer Tube Installation....................................................................4-22
4-10 TC1 Gauge in the MVBA ..................................................................................................4-23
4-11 TC2 Gauge in the SBA .....................................................................................................4-25
4-12 Rough Pump and Forepump Oil Level Check ..................................................................4-31
4-13 The Test Port....................................................................................................................4-32
4-14 Remove the Test Port Compression Ring and O-ring ......................................................4-33
4-15 Placing the O-ring and Compression Ring onto the Test Port..........................................4-34
A-1 Service Pendant Keypad ....................................................................................................A-1
B-1 Removing the Service Pendant Shelf.................................................................................B-2
B-2 The Top Panel at the Rear of the Turret.............................................................................B-3
B-3 The Test Port......................................................................................................................B-3
B-4 The Top Panel from the Front of the 947/948/960..............................................................B-4
B-5 Ion Source Replacement ....................................................................................................B-6
B-6 Location of the Turbo Pump................................................................................................B-9
B-7 Turbo Power and Foreline to Turbo Connections.............................................................B-10

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
x
B-8 The Turbo Power Connection...........................................................................................B-11
B-9 Radiator Clamp holding Fan to Turbo...............................................................................B-11
B-10 Location of Forepump and Rough Pump — Wet and Dry Configurations........................B-15
B-11 Rough Pump Manifold and Exhaust Connections............................................................B-16
B-12 Rough Pump Manifold and Exhaust Connections............................................................B-18
G-1 Test Piece Evacuated: Tracer Probe Used to Locate Leak...............................................G-6
G-2 Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate ............................................................................................ G-6
G-3 Test Piece Pressurized: Detector Probe Used to Locate Leak.......................................... G-6
G-4 Test Piece Sealed with Helium and/or Other Gases –
Bell Jar Used to DetermIne Overall Leak Rate.................................................................. G-7
G-5 Magnetic Separation Principle........................................................................................... G-8