Varian 990 CLD Autoline User manual

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vacuum technologies
990 CLD Autoline™
Leak Detector
Manual N0. 6999-09-690
Revision L
February 2004
INSTRUCTION MANUAL
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Copyright 2004
Vacuum Technologies
990 CLD Autoline™ Leak Detector
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990 CLD Autoline™ Leak Detector
iii
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations
of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-
ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-
ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-
standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer’s expense; in addition, a charge for testing and exam-
ination may be made on Products so returned.
3/1/00
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Table of Contents
Declaration of Conformity
Preface ........................................................................................................................................... xiv
Hazard and Safety Information ....................................................................................................xiv
990 CLD Leak Detector Hazards ..................................................................................................xv
990 CLD Leak Detector Factory Calibration Data ......................................................................xvii
Section 1. Introduction ................................................................................................................. 1-1
Model Types ............................................................................................................................... 1-2
OPTO-22 Modules................................................................................................................ 1-3
Test Cycle Description ................................................................................................................ 1-3
Signal Flow ................................................................................................................................. 1-4
Physical Description ................................................................................................................... 1-6
Controls and Indicators .........................................................................................................1-6
Internal Components........................................................................................................... 1-13
Section 2. Customer Integration .................................................................................................. 2-1
Unpacking .................................................................................................................................. 2-1
Inspection ................................................................................................................................... 2-1
Storing the Leak Detector............................................................................................................ 2-1
Leak Detector Location and Required Services............................................................................ 2-2
Installation .................................................................................................................................. 2-2
Electrical Connections........................................................................................................... 2-3
Leak Rate Output Voltage Selection ...................................................................................... 2-5
Sensitivity.............................................................................................................................. 2-6
Dismounting the Leak Detector...................................................................................................2-8
Section 3. Operations ................................................................................................................... 3-1
Required Daily Procedures ......................................................................................................... 3-2
Installation and Initial Setup Procedure ................................................................................. 3-2
Tuning Adjustments and Calibration Check........................................................................... 3-4
As-Required Procedures .............................................................................................................. 3-8
Set Point Operation............................................................................................................... 3-9
Leak Rate Display RANGE SELECT Pushbutton Operation.....................................................3-9
RANGE SELECT Switch ....................................................................................................... 3-10
Auto Filament Toggle Switch............................................................................................... 3-10
Remote Filament Control .................................................................................................... 3-10
Remote Exponent Control Operation...................................................................................3-11
Gain-Selective Amplifier ..................................................................................................... 3-14
Startup and Shutdown............................................................................................................... 3-15
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Section 4. Maintenance ................................................................................................................ 4-1
Daily Maintenance ..................................................................................................................... 4-3
Leak Detector Sensitivity Check ............................................................................................ 4-3
Annual Maintenance – Complete Overhaul ................................................................................ 4-3
As-Required Maintenance........................................................................................................... 4-4
Removing, Cleaning, and Re-installing the Spectrometer Tube.............................................. 4-5
Enhancement Magnet Adjustment......................................................................................... 4-8
Ion Source Replacement ....................................................................................................... 4-8
Electronics System .................................................................................................................... 4-10
Emission Control Adjustment .............................................................................................. 4-10
Ion Source Voltages Range Validation................................................................................. 4-11
Overpressure Protection Adjustment ................................................................................... 4-12
Amplifier Offset Adjustment................................................................................................ 4-13
Residual Background Check ............................................................................................... 4-14
Subassembly Replacement.................................................................................................. 4-14
Troubleshooting........................................................................................................................ 4-15
General............................................................................................................................... 4-15
Leak Detector Self-Test ....................................................................................................... 4-16
Symptom Checklist ............................................................................................................. 4-17
Section 5. Parts List ..................................................................................................................... 5-1
How to Order Parts..................................................................................................................... 5-1
Major Components ............................................................................................................... 5-2
Independent Electrical Components Kits ............................................................................... 5-3
Electrical Components Kit ..................................................................................................... 5-4
Independent Mechanical Items ............................................................................................. 5-4
Mechanical Components Kit ................................................................................................. 5-5
Spectrometer Tube Components Kit ...................................................................................... 5-5
Section 6. Fundamentals of Leak Detection .............................................................................. 6-1
Leak Testing — Why is it Needed?.............................................................................................. 6-1
Terminology ............................................................................................................................... 6-2
Facts about Leak Rates ..........................................................................................................6-3
Methods of Testing for Leaks....................................................................................................... 6-4
Water Immersion (Air Bubble Observation)........................................................................... 6-4
Dye Penetrant ....................................................................................................................... 6-4
Ultrasonic ............................................................................................................................. 6-4
Radioisotope......................................................................................................................... 6-4
Helium Method .................................................................................................................... 6-4
Helium Mass Spectrometer Leak Detection (MSLD) .................................................................... 6-5
Helium as an Ideal Tracer Gas .............................................................................................. 6-5
Helium Background Management......................................................................................... 6-5
Principles of Mass Spectrometry............................................................................................ 6-5
Application as a Leak Detector ............................................................................................. 6-5
The Reason to Vacuum ......................................................................................................... 6-6
Spectrometer Tube -What It Does, in brief ............................................................................ 6-6
Glossary of Terms ....................................................................................................................... 6-7
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Appendix A. Understanding the 990 CLD Analog Leak Rate Output ...................................... A-1
Understanding the 990 CLD Analog Leak Rate Output ...............................................................A-1
Linear Analog Voltage Output...............................................................................................A-1
Why Use a Linear Analog Output? ........................................................................................A-2
Logarithmic Analog Output Voltage ......................................................................................A-3
Why Use Logarithmic Analog Output Voltage? .....................................................................A-4
Appendix B. Specifications ......................................................................................................... B-1
Specifications..............................................................................................................................B-1
Request for Return Health and Safety Certification
Sales and Service Offices
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List of Figures
Figure Caption Page
1-1 990 CLD Leak Detector ....................................................................................................... 1-1
1-2 Signal Flow Diagram............................................................................................................ 1-5
1-3 Primary Operating Controls and Indicators, 990 CLD Leak Detector.................................... 1-6
1-4 Secondary Operating Controls and Indicators, 990 CLD Leak Detector................................ 1-8
1-5 Rear Panel, 990 CLD Leak Detector................................................................................... 1-10
1-6 Main Electronics Console - Top View ................................................................................ 1-13
1-7 Spectrometer Tube Ion Flow ..............................................................................................1-15
2-1 Leak Rate Output Voltage Selection ..................................................................................... 2-5
3-1 Setting the Gain via Shorting Plugs..................................................................................... 3-14
4-1 Scheduled Maintenance....................................................................................................... 4-2
A-1 990 CLD Leak Detector Linear Output Voltage -
Leak Output Voltage (V).......................................................................................................A-5
A-2 990 CLD Leak Detector Linear Output Voltage -
Leak Rate Conversion Chart (2 V/decade) ............................................................................A-6
A-3 990 CLD Leak Detector Linear Output Voltage -
Leak Rate Conversion Chart (3 V/decade) ............................................................................A-7
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List of Tables
Table Title Page
1-1 990 CLD Leak Detector Component Parts............................................................................1-2
1-2 900 CLD Customized Configuration ....................................................................................1-2
1-3 OPTO–22 Module Part Numbers ......................................................................................... 1-3
1-4 Primary Operating Controls and Indicators .......................................................................... 1-7
1-5 Secondary Operating Controls and Indicators ...................................................................... 1-9
1-6 Rear Panel Inputs and Outputs........................................................................................... 1-10
2-1 Ion Source Cable Wire Run List .......................................................................................... 2-4
2-2 Leak Rate Range for Pump Type and Speed ......................................................................... 2-6
2-3 Preamplifier Cable Wire Run List ......................................................................................... 2-7
2-4 Turbo Cable Wire Run List................................................................................................... 2-7
3-1 Suggested Setting of SENSITIVITY Switch for Tuning ...........................................................3-5
3-2 Exponent Selection, Local Mode........................................................................................3-11
3-3 Remote Exponent Control Truth Table ............................................................................... 3-12
3-4 Shorting Plug and Leak Rate Outputs ................................................................................. 3-14
4-5 As-Required Maintenance.................................................................................................... 4-2
5-1 Major Components ............................................................................................................. 5-2
5-2 Independent Electrical Items, Part Number L9022................................................................ 5-3
5-3 Electrical Components Kit, Part No. L9086301 ....................................................................5-4
5-4 Independent Mechanical Items ............................................................................................ 5-4
5-5 Mechanical Components Kit, Part No. L9087301 ................................................................ 5-5
5-6 Spectrometer Tube Components Kit, Part No. L9186301 ..................................................... 5-5
B-1 990 CLD Leak Detector, Detailed Specifications..................................................................B-1
B-2 High Vacuum Pump, Detailed Specifications.......................................................................B-2
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Varian, Inc.
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
Frederick C. Campbell
Operations Manager
Vacuum Technologies
We
Wir
Nous
Nosotros
Wij
Noi
Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Technologies
Lexington, Massachusetts, USA
Varian, Inc.
990 CLD Autoline™ Leak Detector
89/336/EEC. . . . . . . . . . . . . . . . . Electromagnetic Compatibility Directive
EN55011:1991 Class B . . . . . . . . EMC/Limits for Radiated Emissions
EN55022:1995 Class A. . . . . . . . EMC/Limits for Conducted Emissions
IEC 1000-4-2/IEC 1000-4-3. . . . . EMC/Limits for Electrostatic Emissions
IEC 1000-4-4/IEC 1000-4-6
IEC 801-2 Crit B . . . . . . . . . . . . . EMC/Immunity to Electromagnetic Fields
IEC 801-3 Crit A and Transient Burst
IEC 801-4 Crit B
March 2001
D
ec
l
ara
ti
on o
f
C
on
f
orm
ity
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Preface
Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNING Warnings are used when failure to observe instructions or
precautions could result in injury or death.
CAUTION Cautions are used when failure to observe instructions could
result in damage to equipment, whether Vacuum Technologies
supplied or other associated equipment.
NOTE Notes contain information to aid the operator in obtaining the
best performance from the equipment.
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990 CLD Leak Detector Hazards
This product must only be operated and maintained by trained personnel.
Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Vacuum Technologies. Be aware of the hazards
associated with this equipment, know how to recognize potentially hazardous conditions,
and how to avoid them. Read carefully and strictly observe all cautions and warnings. The
consequences of unskilled, improper, or careless operation of the equipment can be serious.
In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Vacuum Technologies office.
WARNING The mechanical components of leak detectors are typically
cleaned with alcohol, methanol, or other solvents.
When heated, sprayed, or exposed to high-temperature
equipment, these solvents become flammable and explosive,
causing serious injury or death. Do not use these solvents near
a high-temperature source. Ventilate the working area with a
blower and use in a large, well-ventilated room.
Alcohol, methanol, or other solvents are irritants, narcotics,
depressants and/or carcinogens. Their inhalation and/or
ingestion may produce serious side effects. Prolonged or
continued contact with the skin will result in absorption
through the skin and moderate toxicity. Always ensure that
cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.
CAUTION Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
NOTE Do not clean any aluminum parts with Alconox®. Alconox is
not compatible with aluminum and will cause damage.
NOTE During reassembly, always use LoctitePST
(teflon-impregnated pipe thread compound)on pipe threads.
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NOTE Where applicable, inspect for any damage to retaining rings
and O-rings. Remove them carefully with your fingers. Do not
use any metal tools for this task. This prevents scratching of any
sealing surfaces.
NOTE To clean O-rings, wipe them with a clean, lint-free cloth or
paper.
If vacuum grease is required, apply Apiezon® L lightly;remove
excess grease until only a shiny, thin film remains.
CAUTION Do not use grease or other substance on O-rings that will come
in contact with the spectrometer tube.
WARNING Store the Ion Source in a cool, dry area in a tightly sealed
container. Wash hands thoroughly after handling the Ion Source
and especially before smoking or eating.
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990 CLD Leak Detector Factory Calibration Data
Model Number ______________________________ Date ___________________________________
Serial Number _______________________________ Initials _________________________________
The Vacuum Technologies 990 CLD leak detector is thoroughly tested prior to shipment. It is
shipped tuned to helium on Filament No. 1. Normally, once set, the tuning adjustments are left
untouched and calibration is verified as required.
The data recorded below includes readings taken during the final test prior to shipment. They
are convenient for reference purposes, if tuning adjustments are altered. Slight changes may
occur when using Filament No. 2 or after an ion source is replaced. Dial and switch settings
and voltage measurements made prior to shipment are also indicated.
Filament Selection FILAMENT switch set to No. 1
lon Voltage (ION) ___________ VDC (between TP1 and TP4)
lon Dial Setting ___________ (Numbers at 12 o’clock position)
Emission Voltage ___________ VDC (between TP12 and TP13
Located on Main Electronics Board)
Focus Voltage: ___________ VDC (between TP3 and TP4)
Focus Setting: ___________o’clock
Residual Background Switch In RUN position
RANGE SELECT ___________
CAL ___________o’clock
COARSE ZERO ___________o’clock
ZERO Centered at five turns (out of 10)
SENSITIVITY HIGH
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1-1
Section 1. Introduction
This manual covers the description, installation, operation, theory, and maintenance of the
Vacuum Technologies 990 CLD AutoLine™ leak detector (Figure 1-1 on page 1-1). The 990
CLD leak detector is a modular, mass spectrometer leak detector that uses helium as the
trace gas. Helium spray probes, system coupling kits, and other accessories are available as
optional equipment to suit individual requirements.
The 990 CLD leak detector uses a Vacuum Technologies fast start, turbo or MacroTorr turbo
drag pump with ceramic bearings as its vacuum source. The high vacuum pump is ready for
leak detector operation in less than two minutes. An external mechanical pump
(purchasable from Vacuum Technologies) is required for use with the vacuum system.
Maintenance encompasses all of the mechanical assemblies and electronics
troubleshooting to the board level.
Figure 1-1 990 CLD Leak Detector
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