Versum Materials SCHUMACHER VaporGuard Series Instruction manual


© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
VersumMaterialsConfidential


Installation / Operation / Maintenance
Manual





VaporGuard®
Absolute Control System
Manual Part Number: 163315
Edition: Rev-3

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Confidential and Proprietary Data
Page C - 2
The information and data contained herein are proprietary to Versum Materials, Inc. and
are not to be copied, reproduced, duplicated, or disclosed to others, in whole or in part,
without prior written consent of Versum Materials, Inc. The information and data should
be available only to those with a need to know. Versum Materials, Inc. makes no
representation that the information and data is appropriate for the recipient, and each
recipient needs to independently evaluate the appropriateness of the information and data
for its use.
This Installation and Operation Manual is subject to change without notification. For
current technical information please call Product Support at [phone] from
continental U.S., or write Versum Materials, Inc., 1919 Vultee Street, Allentown, PA
18103, attention: Product Support.
Printed in the U.S.A.

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WARRANTY
Versum Materials, Inc. (hereinafter referred to as "Versum Materials") warrants that:
(A) Each new Versum Materials Delivery System is free from defects in material and
workmanship under normal use and service for a period of one year from the date of
delivery by Versum Materials to the first purchaser.
(B) Each new accessory is free from defects in material and workmanship under
normal use and service for a period of one (1) year from the date of delivery by Versum
Materials to the first purchaser.
If any product requires service during the applicable warranty period, the purchaser
should communicate directly with Versum Materials to determine appropriate repair.
Repair or replacement will be carried out at Versum Materials expense subject to the
terms of this warranty. It is the responsibility of the customer to perform routine
maintenance and periodic calibration.
In no event shall Versum Materials be liable for any incidental, indirect or consequential
damages in connection with the purchase or use of any Versum Materials product. This
warranty shall not apply to, and Versum Materials shall not be responsible for, any loss
arising in connection with the purchase or use of any Versum Materials product which
has been repaired by anyone other than an authorized Versum Materials service
representative or altered in any way so as, in Versum Materials judgment, to affect its
stability or reliability, or which has been subject to misuse or negligence or accident, or
which has the unit or lot number altered, effaced or removed, or which has been used
otherwise than in accordance with the instructions furnished by Versum Materials.
This warranty is in lieu of all other warranties, express or implied, and all other
obligations or liabilities on Versum Materials part, and Versum Materials neither assumes
nor authorizes any representative or other person to assume for it any other liability in
connection with the sale of Versum Materials equipment.
VERSUM MATERIALS DISCLAIMS ALL OTHER WARRANTIES, EXPRESS
OR IMPLIED, INCLUDING ANY WARRANTY OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR APPLICATION.
Address:
Versum Materials, Inc.
1919 Vultee Street
Allentown, PA 18103, U.S.A

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Page C - 4
Revision Control Summary
Chapter Revision File Name
Introduction
Rev-0 MNL000418.doc
 Initial Release
Chapter 1 – Delivery, Unpacking, and Inspection
Rev-0 MNL000419.doc
 Initial Release
Chapter 2 – System Components and Specifications
Rev-1 MNL000420.doc
 Added note on maximum temperature specification in table 2-1
Chapter 3 – VaporGuard® Absolute Control System For Use With Trans-LC™
Rev-0 MNL000421.doc
 Initial Release
Chapter 4 – System Safety
Rev-1 MNL000422.doc
 Added T4 Labels
Chapter 5 – System Operation
Rev-1 MNL000423.doc
 Update Table 5.3
Chapter 6 – System Installation
Rev-0 MNL000424.doc
 Initial Release
Chapter 7 – Calibration
Rev-0 MNL000425.doc
 Initial Release
Chapter 8 – VaporGuard® Stainless Steel Source Configuration
Rev-0 MNL000426.doc
 Initial Release
Chapter 9 – POCl3 Safe Handling and PPE Matrix
Rev-0 MNL000427.doc
 Initial Release

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Confidential and Proprietary Data
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TABLE OF CONTENTS



Introduction

I.1



Introduction to the Manual



I-1
I.2 Emergency Response – 24 Hour Service I-2
I.3 Definition of Terms I-2
I.3.1 Definitions I-2
I.3.2 Abbreviations I-4
I.4 Approved Chemicals I-5

Chapter 1

Delivery, Unpacking, and Inspection 1-1
1.1 Delivery 1-1
1.2 Unpacking 1-1
1.3 Inspection 1-1

Chapter 2

System Components and Specifications 
2.1 Equipment and Features 2-2
2.1.1 Physical Description 2-2
2.1.2 Features 2-4
2.2 Physical Description 2-7
2.2.1 VaporGuard® Physical Specifications 2-7
2.2.2 Source Cup Assembly 2-9
2.2.3 Power Supply Module 2-10

Chapter 3

3.1

VaporGuard® Absolute Control System For Use With Trans-LC™
VaporGuard® Manufactured for Use of Trans-LC™


3-1
3.2 Trans-LC™ 3-2

Chapter 4

System Safety 
4.1 Hazardous Location Safe Operation Requirements 4-1
4.2 Safety Labels 4-3
4.3 Alarm Interlocks 4-12

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4.4 Hazardous Location Installation Requirements 4-15
4.5 Chemical Spill Cleanup 4-17
4.6 Decontamination Procedure 4-18
Chapter 5 System Operation
5.1 System Overview 5-1
5.1.1 Power Supply Module Overview 5-2
5.1.2 Source Cup Assembly Overview 5-2
5.2 Source Cup Assembly, Detailed Description 5-4
5.2.1 User Interface 5-4
5.2.2 Backlight for Sight Glass 5-5
5.2.3 Heater/Cooler START/STOP Power Switch 5-5
5.2.4 Liquid Level Alarm – Quartz Bubbler 5-6
5.2.5 Liquid Level Alarm – Stainless Steel Source Container 5-9
5.2.6 No Liquid Level 5-9
5.2.7 Temperature Probe 5-10
5.2.8 Sidewall Heater 5-11
5.2.9 Thermal Electric Cooler 5-11
5.2.10 Fan Failure Detection 5-11
5.3 Power Supply Module, Detailed Description 5-11
5.3.1 DDC Inputs/Outputs – Temperature/Level and Any Alarm 5-13
5.3.2 Remote Temperature Set Point 5-13
5.3.3 Remote Temperature Output 5-13
5.3.4 Remote Display Module 5-13
5.4 Alarms 5-14
5.4.1 Alarm Interlocks 5-14
5.4.2 Alarm Enable 5-15
5.4.3 Temperature Alarm 5-15
5.5 Operating Instructions 5-16
5.5.1 Power Up 5-16
5.5.2 Calibration Check 5-17
5.5.3 Temperature Set Point Adjustment 5-17
5.5.4 Level Check – Quartz Bubbler 5-17

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5.6.1 Basic Keypad Features 5-18
5.6.2 Boot Screens 5-19
5.6.3 Main Screen 5-19
5.6.4 Alarm Screen 5-20
5.6.5 Password Screen 5-21
5.6.6 History Alarm 5-22
5.6.7 Display Screens 5-22
5.6.8 Software Version Screen 5-22
5.6.9 Date and Time 5-23
5.6.10 Raw Analog Input 5-23
5.6.11 Digital Inputs 5-23
5.6.12 Fan and Ambient Temperature 5-24
5.6.13 Bar Light 5-24
5.6.14 Save Change 5-24
5.6.15 System Config 5-25
5.6.16 Lid Heater (not available) 5-26
5.6.17 Main Screen Second Line Selection 5-27
5.6.18 Level Mode Select 5-27
5.6.19 Product Selection 5-27
5.6.20 Alarm Interlock 5-27
5.6.21 Alarm Enabled 5-28
5.7 Parameters and Limits 5-28
5.7.1 Alarm Mute/Light Bar Time 5-29
5.7.2 Temp Limit Alarms 5-29
5.7.3 Level Limit Alarms 5-30
5.7.4 LCD Display Controls 5-30
5.7.5 Buzzer 5-31
5.7.6 Change Clock 5-31
5.7.7 Default Setups 5-31
5.7.8 Set up Screens 5-32
5.7.9 PID Settings 5-32
5.7.10 Relay Manual Control 5-33
5.8 Alarm Definitions 5-34

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5.9
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

Chapter 6
Thermal Cutout Configuration
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

System Installation
5-35
6.1 Introduction 6-1
6.2 Placement of the System 6-1
6.3 Installation 6-12
6.3.1 Electrical Requirements 6-12
6.3.2 Grounding Requirements 6-12
6.3.3 Environmental Requirements 6-12
6.3.4 Lighting Requirements 6-12
6.3.5 EMI/RFI Protection 6-13
6.3.6 Thermowell Oil 6-13
6.3.7 VaporGuard® Fan Clearance 6-13
6.3.8 Cables 6-14
6.3.9 Cable Installation Procedure 6-14
6.4 Tool Interface Connection 6-15
6.4.1 Installing the DDC - J5 6-19
6.4.2 Description of VaporGuard® Alarms 6-20
6.4.3 Digital Inputs 6-22
6.4.4 Relay Manual Control 6-22
6.5 AC Power Connections 6-27
6.5.1 De-Energizing Procedure 6-28
6.6 Bubbler Installation 6-29
6.6.1 Installing Bubbler into Source Cup Assembly 6-31
6.6.2 Removing Bubbler from Source Cup Assembly 6-34
6.6.3 Decommissioning Procedure 6-35
6.7 VaporGuard® Programming 6-35

Chapter 7

Calibration 
7.1 Introduction 7-1
7.2 Calibration 7-1
7.2.1 Equipment Required for Calibration of VaporGuard® Circuit 7-1
7.2.2 Temperature Calibration of RTD Circuit 7-1

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VersumMaterialsConfidential

7.2.3 Temperature Calibration Procedure 7-2
7.2.4 Analog Output Calibration Procedure 7-4
7.2.5 Voltage Output Calibration 7-4
7.2.6 Verification Without Calibration 7-5
7.3 Safety Test 7-6
7.4 Maintenance schedule 7-7
7.5 Spare Parts List 7-8

Chapter 8

VaporGuard® Stainless Steel Source Configuration 
8.1 Introduction 8-1
8.2 Description 8-1
8.3 Versum Materials SS Source Container with Ultrasonic Level Probe 8-3
8.4 Stainless Steel Source Container Installation 8-6

Chapter 9

9.1

POCl3 Safe Handling and PPE Matrix

Chemical Handling


9-1
9.2 Matrix Definitions 9-1
9.3 Secondary Containment 9-2

Introduction
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
Introduction


I.1 IntroductiontotheManual

This manual covers the Versum Materials, Inc. VaporGuard® Absolute Control
System. The VaporGuard® is a microprocessor-based temperature control system
designed for CVD and diffusion source chemical delivery.

READ THIS MANUAL IN ITS ENTIRITY PRIOR TO INSTALLING OR OPERATING
THE VAPORGUARD® SYSTEM.

It contains information pertinent to setup and operation of the VaporGuard®.
Inspect all shipping containers that are delivered with your shipment to verify that all
parts are available and to acquaint yourself with the system components.

The Chapters and Appendices are organized as follows:
Introduction Introduction to the Manual and Equipment
Chapter 1 Delivery, Unpacking, and Inspection
Chapter 2 System Components and Specifications
Chapter 3 VaporGuard® Absolute Control System for use with Trans-LC™
Chapter 4 System Safety and Interlocks
Chapter 5 System Operation

Chapter 6 System Installation

Chapter 7 Calibration

Chapter 8 VaporGuard® Stainless Steel Source Configuration
Chapter 9 POCL3 Safe Handling and PPE Matrix
Appendix A VaporGuard® Troubleshooting Guide

Introduction
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

I.2 EmergencyResponse‐24HourService

If an emergency occurs that cannot be alleviated by the trained operator or his/her
supervisor, call Versum Materials, Inc. on one of these telephone numbers.

 From anywhere in the continental United States, Canada and Puerto Rico – 800
523-9374 (toll free).

 From all other locations - 610-481-7711.

 VERSUM MATERIALS, INC. Operator - 610-481-4911.

 European Community/Middle East Gases - [phone].

 Equipment Technical Support – 866-624-7677.





I.3 DefinitionofTerms

I.3.1 Definitions

There is no industry-standard term for the source container used within each type of
process tool to provide chemical directly to the process. The terms ampoule,
bubbler, source container, and others are all used interchangeably in industry. To
reduce confusion, in this manual the term Bubbler is used to identify the Versum
Materials, Inc. (Schumacher) quartz container (Teflon systems) or the Stainless
Steel Source container (stainless steel systems).

There are three (3) types of notes used in this manual. They are CAUTION,
WARNING, and NOTE. For purposes of this manual, they are defined as:

Introduction







CAUTION: This is an example
of a CAUTION. A CAUTION
notifies the reader that a
procedure must be performed
as prescribed, or that a
specific set of conditions must
be maintained or avoided, in
order to avert damage to
equipment or the operating
environment.
CAUTION

VORSICHT: Dieses
VORSICHTS-Gebot dient als
Beispiel. Ein VORSICHTS-
Gebot weist den Leser darauf
hin, daß ein Verfahren nach
den gegebenen Vorschriften
durchgeführt oder bestimmte
Voraussetzungen erfüllt bzw.
vermieden werden müssen,
um eine Schädigung der
Anlage oder der
Arbeitsumgebung zu
verhindern.


ATTENTION: Voici un
exemple d’un ATTENTION à
suivre. Un ATTENTION avertit
le lecteur qu’un procédé doit
être accompli selon les
consignes prescrites ou
qu’une série de conditions
spécifiques doivent être
maintenues ou evitées afin
d’empêcher tout dégât à
l’équipement ou à la zone
d’opération.









WARNING: This is an
example of a WARNING. A
WARNING notifies the reader
that a procedure must be
performed as prescribed, or
that a specific set of conditions
must be maintained or
avoided, in order to avoid
injury or death to personnel.
WARNING

WARNUNG: Diese
WARNUNG dient als Beispiel.
Eine WARNUNG weist den
Leser darauf hin, daß ein
Verfahren nach den
gegebenen Vorschriften
durchgeführt oder bestimmte
Voraussetzungen erfüllt bzw.
vermieden werden müssen,
um das Personal vor Körper-
oder tödlichen Verletzungen zu
schützen.


AVERTISSEMENT: Voici un
exemple d’une
“AVERTISSEMENT” à suivre.
Une avertit le lecteur qu’un
procédé doit être accompli
selon les consignes prescrites
ou qu’une série de conditions
spécifiques doivent être
maintenues ou évitées afin d’
empêcher toute cause de
blessure ou de décès du
personnel.

Introduction



NOTE

This is an example of a NOTE. A NOTE notifies the reader of an item th at
warrants special attention.



I.3.2 Abbreviations

A Amperes
AC Alternating Current
AIC Ampere Interrupt Capacity
cfm Cubic Feet per Minute
ERR Error
DC Direct Current
DDC Direct Digital Controller (Tool IO Interface)
EMO Emergency Manual Off
gr. gram
He Helium
I.D. Inner Diameter
ID Identification
in. Inch(es)
kPa kilopascal, absolute
lb. pound
LED Light-Emitting Diode
Lpm Liters per Minute
mL Milliliter
mm Millimeter(s)
NC Normally closed
NO Normally open
N2 Nitrogen
O.D. Outer Diameter

Introduction


P/N Part Number
POCl3 Phosphorus Oxychloride
PPE Personal Protective Equipment
Psia pounds per square inch, absolute
Psig pounds per square inch, gauge

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Page - 6

PWR Power
SEMI Semiconductor Equipment and Materials International
SIS Shipping Identification Sheet
S. S. Stainless Steel
TEC Thermo Electric Cooler
TEOS Tetraethyl Orthosilicate
TDMAT Tetrakis-dimethylamino Titanium
TiCl4 Titanium Tetrachloride
TOMCATS Tetramethylcyclotetrasiloxane
Trans LC™ (TLC) Trans-1, 2-Dichloroethylene
UPS Uninterrupted Power Supply
US Ultrasonic Probe
USFL Ultrasonic Probe Failure
USIL Ultrasonic Probe Interlock
VAC Volts, Alternating Current
VaporGuard® VaporGuard® Absolute Control System
VDC Volts, Direct Current

I.4 SomeoftheApprovedChemicals


Chemical Recommended Source
Container
Recommended
VaporGuard®
Trans LC 1.5L Quartz Bubbler VG300N or W
BBr3 1.5L Quartz Bubbler VG300N or W
POCL3 1.5L Quartz Bubbler VG300N or W
TDMAT 1.2L S.S. Container VG600N or W
TEOS 1.2L S.S. Container VG600N or W
TICL4 1.2L S.S. Container VG600N or W


Note: For additional chemical use please consult with your local Versum Materials,
Inc. representative.

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Confidential and Proprietary Data
Page - 1
Chapter1

Delivery, Unpacking, and Inspection

1.1 DELIVERY

The VaporGuard® is shipped in one packing box. The packing slip on the outside of the
carton indicates the number of items in the order. A separate packing checklist, included
with the manual, identifies all components in the shipment.

The content of the package is detailed below:

 Packing checklist

 VaporGuard®

 Start-up kit (See Packing Checklist included with shipment)

 Installation and Operation Manual on CD, P/N 163315





1.2 UNPACKING

Save all cartons (along with foam supports and padding) for reuse in case the VaporGuard®
must be returned to Versum Materials, Inc..








Chapter -
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1.3 INSPECTION

1. Insure each item on the packing checklist is included in the shipment. Notify Versum
Materials, Inc. if any item is not include or damaged. Check the VaporGuard® for
loose connections.

2. There is a 30 day limit upon receipt of order for reporting missing or damaged
items for warrantee replacement.

3. Verify the part numbers on the items are the same as specified on the packing
checklist.

4. Keep the packing checklist for use in any future communication with Customer
Service with the following contact information:



Versum Materials, Inc. 1919 Vultee Street
Allentown, PA 18103
1-866-624-7677














Chapter - 2

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
VersumMaterialsConfidential
Chapter2

System Components and Specifications

This chapter describes the module specifications for the VaporGuard®. All models that
are described in this manual are for Versum Materials, Inc. (Schumacher) containers.
When using a non Versum Materials, Inc. container, the customer should consult with
Versum Materials, Inc. prior to use.




















Chapter - 2

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
VersumMaterialsConfidential
2.1 EquipmentandFeatures

2.1.1 PhysicalDescription

Table 2-1 ATCS15/VaporGuard® Comparisons

The VaporGuard® is available in the following models:
*Maximum temperature indicated has been tested under ideal benchtop conditions.
Actual maximum temperature is molecule and application dependent. In most cases, 80-
90C is appropriate.

Existing ATCS VaporGuard®
Models Temperature
Range
Equivalent Model Temperature range*
ATCS 15 +10 °C to 60 °C VG600 N/W +10 °C to +60 °C
ATCS 15-HT +40 °C to 90 °C VG600 NHT/WHT +10 °C to +115 °C
ATCS 15-SS +10 °C to 60 °C VG600 N/W +10 °C to +60 °C
ATCS 15-HT SS +40 °C to 90 °C VG600 NHT/WHT +10 °C to +115 °C
ATCS 15-TLC
ATCS 15 TLCHF
ATCS 15-TLCHFC
+10 °C to 22 °C VG300 N/W factory
configured for
Trans-LC™
+10 °C to 22 °C
ATCS 15-TLCHFCK +10 °C to 20 °C VG300 N/W factory
configured for
Trans-LC™
+10 °C to 22 °C

Chapter - 2

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
VersumMaterialsConfidential
Table2‐2 VaporGuard®Models,(refertoChapter6)

Part Number VaporGuard® Model Reference Drawing


161133
VaporGuard®, 300N

-300watt Power Supply Module
-Narrow Source Cup Assembly

SW004868


161134
VaporGuard®, 300W

-300watt Power Supply Module
-Wide Source Cup Assembly

SW003889


161135
VaporGuard®, 600N

-600watt Power Supply Module
-Narrow Source Cup Assembly

SW004040


161136
VaporGuard®, 600W

-600watt Power Supply Module
-Wide Source Cup Assembly

SW004050


163545
VaporGuard®, 600N, HT

-600watt Power Supply Module
-Narrow Source Cup Assembly

SW005426


163546
VaporGuard®, 600W, HT

-600watt Power Supply Module
-Wide Source Cup Assembly

SW005428


The VaporGuard® system consists of a Source Cup Assembly, a Power Supply Module
and an optional Remote Display Module. This modular design allows the Source Cup
Assembly to be installed into a hazardous location (Class 1, Division 2).
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The Power Supply Module will be located outside the Class1, Division 2 location and
still provide the same control as it would if installed locally.
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Class 1, Division 2 (hazardous) locations are established on the basis that the
equipment, in its normal operating condition, is incapable of causing an ignition of a
specified flammable gas, vapor in air mixture, dust or fibers.
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