YOKOGAWA OX400 User manual

User’s
Manual Model OX400
Low Concentration Zirconia
Oxygen Analyzer
[Style: S2]
IM 11M10B01-01E
IM 11M10B01-01E
8th Edition

i
IM 11M10B01-01E
<INTRODUCTION>
INTRODUCTION
Thank you for purchasing the OX400 Low Concentration Zirconia Oxygen Analyzer.
Please read the following respective documents before installing and using the OX400.
The related documents are as follows.
 GeneralSpecications:GS11M10B01-01E
 User’sManual:  IM11M10B01-01E(thismanual)
* the “E” in the document number is the language code.
AnexclusiveUser’sManualmightbeattachedtotheproductswhosesu󰀩xcodesoroption
codescontainthecode“Z”(madetocustomers’specications).Pleasereaditalongwiththis
manual.
n Safety,Protection,andModicationoftheProduct
• In order to protect the system controlled by the product and the product itself and ensure
safe operation, observe the safety precautions described in this user’s manual. We assume
no liability for safety if users fail to observe these instructions when operating the product.
• Ifthisinstrumentisusedinamannernotspeciedinthisuser’smanual,theprotection
provided by this instrument may be impaired.
• If any protection or safety circuit is required for the system controlled by the product or for
the product itself, prepare it separately.
• BesuretousethesparepartsapprovedbyYokogawaElectricCorporation(hereafter
simplyreferredtoasYOKOGAWA)whenreplacingpartsorconsumables.
• Modicationoftheproductisstrictlyprohibited.
• The following symbols are used in the product and user’s manual to indicate that there are
precautionsforsafety:
n NotesonHandlingUser’sManuals
• Please hand over the user’s manuals to your end users so that they can keep the user’s
manuals on hand for convenient reference.
• Please read the information thoroughly before using the product.
• The purpose of these user’s manuals is not to warrant that the product is well suited to any
particular purpose but rather to describe the functional details of the product.
• No part of the user’s manuals may be transferred or reproduced without prior written
consent from YOKOGAWA.
• YOKOGAWA reserves the right to make improvements in the user’s manuals and product at
any time, without notice or obligation.
• Ifyouhaveanyquestions,oryoundmistakesoromissionsintheuser’smanuals,please
contact our sales representative or your local distributor.
nWarning and Disclaimer
The product is provided on an “as is” basis. YOKOGAWA shall have neither liability nor
responsibility to any person or entity with respect to any direct or indirect loss or damage arising
from using the product or any defect of the product that YOKOGAWA can not predict in advance.
Media No. IM 11M10B01-01E 8thEdition:Jan.2018(YK)
AllRightsReservedCopyright©2009,YokogawaElectricCorporation
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<INTRODUCTION>
nNotes on Hardware
lAppearance and Accessories
Checkthefollowingwhenyoureceivetheproduct:
• Appearance
• Standard accessories
Contactoursalesrepresentativeoryourlocaldistributoriftheproduct’scoatinghascomeo󰀨,it
has been damaged, or there is shortage of required accessories.
l ModelandSu󰀩xCodes
Thenameplateontheproductcontainsthemodelandsu󰀩xcodes.Comparethemwiththosein
thegeneralspecicationtomakesuretheproductisthecorrectone.Ifyouhaveanyquestions,
contact our sales representative or your local distributor.
nSymbol Marks
Throughoutthisuser’smanual,youwillndseveraldi󰀨erenttypesofsymbolsareusedtoidentify
di󰀨erentsectionsoftext.Thissectiondescribestheseicons.
WARNING
Identiesinstructionsthatmustbeobservedinordertoavoidphysicalinjuryandelectricshockor
death of the operator.
CAUTION
Identiesinstructionsthatmustbeobservedinordertopreventthesoftwareorhardwarefrom
being damaged or the system from becoming faulty.
NOTE
Identiesimportantinformationrequiredtounderstandoperationsorfunctions.
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<INTRODUCTION>
nAboutUniqueRepresentationsUsedinthisOperationManual
Whenoperationkeys,contentsdisplayedonthedisplay,andlampdisplaysarespecically
described in the text or anywhere else in this operation manual, in principle, they are represented
in the following ways.
• Operation key
 Representedby[]. Example:[ENT]key
• Display contents on the display
 Representedby“”. Example:Maindisplay-->“HEAt”
     Example:Sub-display-->“CAL”
     Example:Datadisplay-->“10.00”(intheONstate)
Example LED lamp -->
PPM
(intheONstate),
PPM
(intheOFFstate)
• Graphicalrepresentationoftheashingstate
Represented by italic characters or the mark.
 Flashingstate
1.000
Flashing state of decimal point
1.000
• Representation of digital characters
TheOX400employsa7-segmentalphanumericdigitaldisplay.Forthecorrespondence
between the display characters on the display and alphanumeric characters for explanation,
seeFigure5.2.
nOperation Parameters
The OX400 is shipped with default parameters as shown in Table 8.1. Change them according to
thepurposeofuse.Forhowtochangeparameters,seeChapter6,“OperationandParameters.”It
is recommended to write down the changed operation parameters as user set values as shown in
Table 8.1.
nNotes on Use
The OX400 is a product that conforms to the general safety requirements of the IEC standard. Be
sure to observe the following precautions when you operate it.
HandlingPrecautions
• Installation location
The OX400 is structurally non-explosion proof so you cannot use it in an explosive
atmosphere. Also, see 3.1, “Installation Location.”
• Power supply
BesuretocheckthatthepowersupplyvoltagespecicationoftheOX400matchesthe
voltage of the power supply before turning on the power.
• Protective ground
Be sure to connect the power plug of the OX400 to the 3P socket with a protective ground
pin in order to prevent electric shock.
• Fuse
Besuretouseadesignatedfuseinordertopreventare.Besuretoturno󰀨thepower
before replacing the fuse. Never use a fuse holder other than a designated one.
• Removing cover
ThereisaheatedareainsidetheOX400,andtouchingitdirectlymaycauseaburninjury.
Never remove the cover except to replace the sensor.
• Whenopeningthecovertoreplacethesensor,turno󰀨thepowerswitch,removethepower
plugfromthesocket,andwaitfor1.5hoursormorebeforeopeningthecover.
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• Before connecting wires to the terminal block on the rear panel of the OX400, remove the
powerplugfromthesocketinordertopreventelectricshock.Afternishingthewiring,
secure the removed special terminal cover with screws.
• The OX400 is a measuring instrument intended to be installed indoors, so do not install it in
a location that is exposed to direct sunlight, rain, and wind.
• DonotusetheOX400inalocationthatmaybesubjecttovibrationsandimpact.Doingso
may cause destruction and damage to the internal sensor.
• Do not apply a pressure of 30 kPaG or more to the gas inlet. Doing so may cause
destruction of the suction pump and damage to the sensor. Be sure to reduce the sample
gas pressure to the atmospheric pressure level before introducing the gas.
• Be sure to use metal piping for the gas piping; particularly when handling oxygen
concentration in 1 vol % or less. Use of piping materials such as polyethylene, vinyl, rubber,
andplasticmaycausesignicanterrorsinmeasurementsbecauseoftheirlargeoxygen
transmission and absorption rates.
• Thepresenceofcorrosivegascomponents(H2S, SOx, HCl, NH3,HF,andthelike)or
potentiallytoxicelements(Si,Sn,Cd,Te,As,P,andthelike)inthesamplegasmaycause
deteriorationofthesensor.Besuretoremovethemwithanactivatedcarbonlterorthelike
in the previous step of the OX400 before introducing the gas.
• The presence of combustible gas in the sample gas may cause errors in measurements
because oxygen in the sample gas will be consumed by combustion. Be sure to remove it
withalterorthelikeinthestepbeforeintroducingthesamplegasintotheOX400.
• Makesurethetemperatureofthesamplegasis50°Corless.
• Be careful because the presence of water droplets in the sample gas may cause damage to
the sensor.
• Keepthesupplygasowrateandpressureasconstantaspossiblewhileintroducingthe
gas.
• Keep the sample gas outlet open to the atmosphere during operation. If a gas line must
be used to discharge gas, use a gas line with a connector that has the largest possible
diameter in order to prevent back pressure.
• Do not use the supplied power cord with another device.
• Powercablesu󰀩xcodesof“-D”canbeusedinJapan,becauseanothercabledoesn’t
conform to PSE marking.
n ProductDisposal
The instrument should be disposed of in accordance with local and national legislation/
regulations.
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uAfter-sales Warranty
n Donotmodifytheproduct.
n Duringthewarrantyperiod,forrepairunderwarrantycarryorsendthe
producttothelocalsalesrepresentativeorserviceo󰀩ce.Yokogawawill
replaceorrepairanydamagedpartsandreturntheproducttoyou.Before
returningaproductforrepairunderwarranty,provideuswiththemodelname
andserialnumberandadescriptionoftheproblem.Anydiagramsordata
explainingtheproblemwouldalsobeappreciated.
lIf we replace the product with a new one, we won’t provide you with a repair report.
lYokogawa warrants the product for the period stated in the pre-purchase quotation
Yokogawashallconductdenedwarrantyservicebasedonitsstandard.Whenthe
customer site is located outside of the service area, a fee for dispatching the maintenance
engineer will be charged to the customer.
n Inthefollowingcases,customerwillbechargedrepairfeeregardlessof
warrantyperiod.
• Failureofcomponentswhichareoutofscopeofwarrantystatedininstructionmanual.
• Failurecausedbyusageofsoftware,hardwareorauxiliaryequipment,whichYokogawa
Electric did not supply.
• Failureduetoimproperorinsu󰀩cientmaintenancebyuser.
• Failureduetomodication,misuseoroutside-of-specicationsoperationwhichYokogawa
does not authorize.
• Failureduetopowersupply(voltage,frequency)beingoutsidespecicationsorabnormal.
• Failurecausedbyanyusageoutofscopeofrecommendedusage.
• Anydamagefromre,earthquake,stormsandoods,lightning,disturbances,riots,warfare,
radiation and other natural changes.
n Yokogawadoesnotwarrantconformancewiththespecicapplicationatthe
usersite.Yokogawawillnotbeardirect/indirectresponsibilityfordamagedue
toaspecicapplication.
n YokogawaElectricwillnotbearresponsibilitywhentheuserconguresthe
productintosystemsorresellstheproduct.
n Maintenanceserviceandsupplyingrepairpartswillbecoveredforveyears
aftertheproductionends.Forrepairforthisproduct,pleasecontactthe
nearestsaleso󰀩cedescribedinthisinstructionmanual.
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<INTRODUCTION>
u CEmarkingproducts
n AuthorizedRepresentativeinEEA
TheAuthorizedRepresentativeforthisproductinEEAisYokogawaEuropeB.V.(Euroweg2,
3825HDAmersfoort,TheNetherlands).
n IdenticationTag
Thismanualandtheidenticationtagattachedonpackingboxareessentialpartsoftheproduct.
Keep them together in a safe place for future reference.
nUsers
This product is designed to be used by a person with specialized knowledge.
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<CONTENTS>
Model OX400
Low Concentration Zirconia Oxygen Analyzer
[Style: S2]
CONTENTS
IM11M10B01-01E8thEdition
INTRODUCTION.......................................................................................................i
uAfter-sales Warranty....................................................................................v
u CEmarkingproducts..................................................................................vi
1. Outline....................................................................................................... 1-1
2. Specications........................................................................................... 2-1
2.1 StandardSpecications................................................................................... 2-1
2.2 Characteristics.................................................................................................. 2-3
2.3 ModelandSu󰀩xCodes................................................................................... 2-4
2.4 StandardAccessories...................................................................................... 2-4
2.5 ExternalDimensions........................................................................................ 2-5
2.6 PipingDiagram................................................................................................ 2-10
2.7 WiringDiagram................................................................................................ 2-11
3. Installation................................................................................................. 3-1
3.1 InstallationLocation......................................................................................... 3-1
3.2 HowtoInstall..................................................................................................... 3-2
3.2.1 InstallingDesktopType...................................................................... 3-2
3.2.2 InstallingPanelMountType............................................................... 3-3
3.2.3 MountingActivatedCarbonFilter....................................................... 3-4
4. PipingandWiring..................................................................................... 4-1
4.1 Piping................................................................................................................. 4-1
4.2 Wirings............................................................................................................... 4-2
4.2.1 PowerSupplyWiring.......................................................................... 4-2
4.2.2 SignalWiring...................................................................................... 4-3
4.2.3 Communication.................................................................................. 4-6
5. NamesandFunctions.............................................................................. 5-1
5.1 FrontPanel........................................................................................................ 5-1
5.2 RearPanel.......................................................................................................... 5-3
6. OperationandParameters...................................................................... 6-1
6.1 StartupandSettings......................................................................................... 6-2
6.1.1 SettingOutputRange“rnG”............................................................... 6-2
6.1.2 SettingSecondaryOutput“oUt2” ...................................................... 6-4
6.1.3 SettingHOLDFunction“HoLd”.......................................................... 6-4
6.1.4 SettingBurnoutFunction“nAMU”...................................................... 6-5
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6.1.5 SettingAlarms(OxygenConcentrationHigh/LowAlarms)“ALM”..... 6-6
6.1.6 SettingCalibrationGasConcentration“SEt.C” ................................. 6-7
6.1.7 SettingSensorConstant“SEnS” ....................................................... 6-7
6.1.8 SettingOutputSmoothing“SMoo”..................................................... 6-8
6.1.9 SettingMulti-Selector“MLS”.............................................................. 6-8
6.1.10 CheckingCalibrationCoe󰀩cient“CoEF”........................................... 6-8
6.1.11 DisplayingCellResistanceValue“CEL.r” ......................................... 6-9
6.1.12 DisplayingSoftwareRevision“rEV”................................................... 6-9
6.2 Calibration“CAL”........................................................................................... 6-10
6.3 Communication............................................................................................... 6-12
6.4 MeasurementGasSamplingUsingAspirator............................................. 6-14
6.5 SwitchingMeasurementFlowPathUsingMulti-Selector.......................... 6-15
6.6 NumericalValue,DecimalPoint,andUnitInputOperation....................... 6-16
7. InspectionandMaintenance................................................................... 7-1
7.1 RoutineInspectionandMaintenance............................................................. 7-1
7.2 InspectionintheEventofanError................................................................. 7-1
7.2.1 InspectionintheEventofanAlarm(ALM) ........................................ 7-2
7.2.2 InspectionintheEventofanError(ERR).......................................... 7-2
7.3 HowtoReplaceSensor.................................................................................... 7-3
7.3.1 Removing Sensor .............................................................................. 7-3
7.3.2 InstallingSensor ................................................................................ 7-5
7.4 HowtoReplaceActivatedCarbonFilter........................................................ 7-7
7.5 HowtoReplacetheLineFilter......................................................................... 7-8
8. ParameterSettings................................................................................... 8-1
CustomerMaintenancePartsList......................................CMPL11M10B01-02E
Revision Information...............................................................................................i
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<1. Outline>1-1
IM 11M10B01-01E
1. Outline
The OX400 is a highly accurate and reliable low concentration zirconia oxygen analyzer that is
capable of measuring a wide range of concentrations, from 0-10 ppm up to 0-100 vol% O2. This
is the latest oxygen analyzer from Yokogawa, and its development was based on the company’s
long experience and strong track record with this technology.
Aproprietarynewthin-lmdepositiontechnologywasusedinthezirconiasensorthatcreatesa
molecular bond between the zirconia element and the platinum layer. This prevents separation,
enables a reduction in sensor size and ensures a high-speed response and long life.
The OX400 can be used to control and monitor various semiconductor applications, and to
control environment, air leakage into inert gas, and other processes.
Features
Longlifeandhigh-speedresponse
• ThankstotheuseofYokogawa’sproprietarynewthin-lmdepositiontechnology,thesensor
has three times the lifespan of those used in our earlier products.
• A cylindrical sensor design facilitates the replacement of measurement gases, thereby
helping to assure a high-speed response.
Highperformanceandhighreliability
• Superior repeatability and linearity even at low oxygen concentrations
• Either pump or aspirator sampling can be selected, depending on the application.
Built-infunctionsandavarietyofself-diagnosisfunctions
• Comes with multi selector, auto range, partial range,andpumpon/o󰀨functions
• A variety of self-diagnosis functions are provided that detect malfunctions such as heater
temperature error, temperature sensor burnout, and sensor resistance value error.
Superiormaintainability
• The sensor can be replaced on-site.
• Compact and lightweight for easy installation.
Applications
• Oxygenconcentrationcontrolinsemiconductor-relateddi󰀨usionanddryingfurnacesandin
LCD manufacturing processes
• Oxygenconcentrationcontrolinsolderpotowandre-owovens,andgloveboxesusedin
electronics manufacturing, and in gas production processes
• Oxygen concentration measurements to prevent dust explosions during powder transfer
8thEdition:Jan.10,2019-00