YOKOGAWA OX400 User manual

User’s
Manual Model OX400
Low Concentration Zirconia
Oxygen Analyzer
[Style: S2]
IM 11M10B01-01E
IM 11M10B01-01E
8th Edition

i
IM 11M10B01-01E
<INTRODUCTION>
INTRODUCTION
Thank you for purchasing the OX400 Low Concentration Zirconia Oxygen Analyzer.
Please read the following respective documents before installing and using the OX400.
The related documents are as follows.
 GeneralSpecications:GS11M10B01-01E
 User’sManual:  IM11M10B01-01E(thismanual)
* the “E” in the document number is the language code.
AnexclusiveUser’sManualmightbeattachedtotheproductswhosesu󰀩xcodesoroption
codescontainthecode“Z”(madetocustomers’specications).Pleasereaditalongwiththis
manual.
n Safety,Protection,andModicationoftheProduct
• In order to protect the system controlled by the product and the product itself and ensure
safe operation, observe the safety precautions described in this user’s manual. We assume
no liability for safety if users fail to observe these instructions when operating the product.
• Ifthisinstrumentisusedinamannernotspeciedinthisuser’smanual,theprotection
provided by this instrument may be impaired.
• If any protection or safety circuit is required for the system controlled by the product or for
the product itself, prepare it separately.
• BesuretousethesparepartsapprovedbyYokogawaElectricCorporation(hereafter
simplyreferredtoasYOKOGAWA)whenreplacingpartsorconsumables.
• Modicationoftheproductisstrictlyprohibited.
• The following symbols are used in the product and user’s manual to indicate that there are
precautionsforsafety:
n NotesonHandlingUser’sManuals
• Please hand over the user’s manuals to your end users so that they can keep the user’s
manuals on hand for convenient reference.
• Please read the information thoroughly before using the product.
• The purpose of these user’s manuals is not to warrant that the product is well suited to any
particular purpose but rather to describe the functional details of the product.
• No part of the user’s manuals may be transferred or reproduced without prior written
consent from YOKOGAWA.
• YOKOGAWA reserves the right to make improvements in the user’s manuals and product at
any time, without notice or obligation.
• Ifyouhaveanyquestions,oryoundmistakesoromissionsintheuser’smanuals,please
contact our sales representative or your local distributor.
nWarning and Disclaimer
The product is provided on an “as is” basis. YOKOGAWA shall have neither liability nor
responsibility to any person or entity with respect to any direct or indirect loss or damage arising
from using the product or any defect of the product that YOKOGAWA can not predict in advance.
Media No. IM 11M10B01-01E 8thEdition:Jan.2018(YK)
AllRightsReservedCopyright©2009,YokogawaElectricCorporation
8thEdition:Jan.10,2019-00

ii
IM 11M10B01-01E
<INTRODUCTION>
nNotes on Hardware
lAppearance and Accessories
Checkthefollowingwhenyoureceivetheproduct:
• Appearance
• Standard accessories
Contactoursalesrepresentativeoryourlocaldistributoriftheproduct’scoatinghascomeo󰀨,it
has been damaged, or there is shortage of required accessories.
l ModelandSu󰀩xCodes
Thenameplateontheproductcontainsthemodelandsu󰀩xcodes.Comparethemwiththosein
thegeneralspecicationtomakesuretheproductisthecorrectone.Ifyouhaveanyquestions,
contact our sales representative or your local distributor.
nSymbol Marks
Throughoutthisuser’smanual,youwillndseveraldi󰀨erenttypesofsymbolsareusedtoidentify
di󰀨erentsectionsoftext.Thissectiondescribestheseicons.
WARNING
Identiesinstructionsthatmustbeobservedinordertoavoidphysicalinjuryandelectricshockor
death of the operator.
CAUTION
Identiesinstructionsthatmustbeobservedinordertopreventthesoftwareorhardwarefrom
being damaged or the system from becoming faulty.
NOTE
Identiesimportantinformationrequiredtounderstandoperationsorfunctions.
8thEdition:Jan.10,2019-00

iii
IM 11M10B01-01E
<INTRODUCTION>
nAboutUniqueRepresentationsUsedinthisOperationManual
Whenoperationkeys,contentsdisplayedonthedisplay,andlampdisplaysarespecically
described in the text or anywhere else in this operation manual, in principle, they are represented
in the following ways.
• Operation key
 Representedby[]. Example:[ENT]key
• Display contents on the display
 Representedby“”. Example:Maindisplay-->“HEAt”
     Example:Sub-display-->“CAL”
     Example:Datadisplay-->“10.00”(intheONstate)
Example LED lamp -->
PPM
(intheONstate),
PPM
(intheOFFstate)
• Graphicalrepresentationoftheashingstate
Represented by italic characters or the mark.
 Flashingstate
1.000
Flashing state of decimal point
1.000
• Representation of digital characters
TheOX400employsa7-segmentalphanumericdigitaldisplay.Forthecorrespondence
between the display characters on the display and alphanumeric characters for explanation,
seeFigure5.2.
nOperation Parameters
The OX400 is shipped with default parameters as shown in Table 8.1. Change them according to
thepurposeofuse.Forhowtochangeparameters,seeChapter6,“OperationandParameters.”It
is recommended to write down the changed operation parameters as user set values as shown in
Table 8.1.
nNotes on Use
The OX400 is a product that conforms to the general safety requirements of the IEC standard. Be
sure to observe the following precautions when you operate it.
HandlingPrecautions
• Installation location
The OX400 is structurally non-explosion proof so you cannot use it in an explosive
atmosphere. Also, see 3.1, “Installation Location.”
• Power supply
BesuretocheckthatthepowersupplyvoltagespecicationoftheOX400matchesthe
voltage of the power supply before turning on the power.
• Protective ground
Be sure to connect the power plug of the OX400 to the 3P socket with a protective ground
pin in order to prevent electric shock.
• Fuse
Besuretouseadesignatedfuseinordertopreventare.Besuretoturno󰀨thepower
before replacing the fuse. Never use a fuse holder other than a designated one.
• Removing cover
ThereisaheatedareainsidetheOX400,andtouchingitdirectlymaycauseaburninjury.
Never remove the cover except to replace the sensor.
• Whenopeningthecovertoreplacethesensor,turno󰀨thepowerswitch,removethepower
plugfromthesocket,andwaitfor1.5hoursormorebeforeopeningthecover.
8thEdition:Jan.10,2019-00

iv
IM 11M10B01-01E
<INTRODUCTION>
• Before connecting wires to the terminal block on the rear panel of the OX400, remove the
powerplugfromthesocketinordertopreventelectricshock.Afternishingthewiring,
secure the removed special terminal cover with screws.
• The OX400 is a measuring instrument intended to be installed indoors, so do not install it in
a location that is exposed to direct sunlight, rain, and wind.
• DonotusetheOX400inalocationthatmaybesubjecttovibrationsandimpact.Doingso
may cause destruction and damage to the internal sensor.
• Do not apply a pressure of 30 kPaG or more to the gas inlet. Doing so may cause
destruction of the suction pump and damage to the sensor. Be sure to reduce the sample
gas pressure to the atmospheric pressure level before introducing the gas.
• Be sure to use metal piping for the gas piping; particularly when handling oxygen
concentration in 1 vol % or less. Use of piping materials such as polyethylene, vinyl, rubber,
andplasticmaycausesignicanterrorsinmeasurementsbecauseoftheirlargeoxygen
transmission and absorption rates.
• Thepresenceofcorrosivegascomponents(H2S, SOx, HCl, NH3,HF,andthelike)or
potentiallytoxicelements(Si,Sn,Cd,Te,As,P,andthelike)inthesamplegasmaycause
deteriorationofthesensor.Besuretoremovethemwithanactivatedcarbonlterorthelike
in the previous step of the OX400 before introducing the gas.
• The presence of combustible gas in the sample gas may cause errors in measurements
because oxygen in the sample gas will be consumed by combustion. Be sure to remove it
withalterorthelikeinthestepbeforeintroducingthesamplegasintotheOX400.
• Makesurethetemperatureofthesamplegasis50°Corless.
• Be careful because the presence of water droplets in the sample gas may cause damage to
the sensor.
• Keepthesupplygasowrateandpressureasconstantaspossiblewhileintroducingthe
gas.
• Keep the sample gas outlet open to the atmosphere during operation. If a gas line must
be used to discharge gas, use a gas line with a connector that has the largest possible
diameter in order to prevent back pressure.
• Do not use the supplied power cord with another device.
• Powercablesu󰀩xcodesof“-D”canbeusedinJapan,becauseanothercabledoesn’t
conform to PSE marking.
n ProductDisposal
The instrument should be disposed of in accordance with local and national legislation/
regulations.
8thEdition:Jan.10,2019-00

v
IM 11M10B01-01E
<INTRODUCTION>
uAfter-sales Warranty
n Donotmodifytheproduct.
n Duringthewarrantyperiod,forrepairunderwarrantycarryorsendthe
producttothelocalsalesrepresentativeorserviceo󰀩ce.Yokogawawill
replaceorrepairanydamagedpartsandreturntheproducttoyou.Before
returningaproductforrepairunderwarranty,provideuswiththemodelname
andserialnumberandadescriptionoftheproblem.Anydiagramsordata
explainingtheproblemwouldalsobeappreciated.
lIf we replace the product with a new one, we won’t provide you with a repair report.
lYokogawa warrants the product for the period stated in the pre-purchase quotation
Yokogawashallconductdenedwarrantyservicebasedonitsstandard.Whenthe
customer site is located outside of the service area, a fee for dispatching the maintenance
engineer will be charged to the customer.
n Inthefollowingcases,customerwillbechargedrepairfeeregardlessof
warrantyperiod.
• Failureofcomponentswhichareoutofscopeofwarrantystatedininstructionmanual.
• Failurecausedbyusageofsoftware,hardwareorauxiliaryequipment,whichYokogawa
Electric did not supply.
• Failureduetoimproperorinsu󰀩cientmaintenancebyuser.
• Failureduetomodication,misuseoroutside-of-specicationsoperationwhichYokogawa
does not authorize.
• Failureduetopowersupply(voltage,frequency)beingoutsidespecicationsorabnormal.
• Failurecausedbyanyusageoutofscopeofrecommendedusage.
• Anydamagefromre,earthquake,stormsandoods,lightning,disturbances,riots,warfare,
radiation and other natural changes.
n Yokogawadoesnotwarrantconformancewiththespecicapplicationatthe
usersite.Yokogawawillnotbeardirect/indirectresponsibilityfordamagedue
toaspecicapplication.
n YokogawaElectricwillnotbearresponsibilitywhentheuserconguresthe
productintosystemsorresellstheproduct.
n Maintenanceserviceandsupplyingrepairpartswillbecoveredforveyears
aftertheproductionends.Forrepairforthisproduct,pleasecontactthe
nearestsaleso󰀩cedescribedinthisinstructionmanual.
8thEdition:Jan.10,2019-00

vi
IM 11M10B01-01E
<INTRODUCTION>
u CEmarkingproducts
n AuthorizedRepresentativeinEEA
TheAuthorizedRepresentativeforthisproductinEEAisYokogawaEuropeB.V.(Euroweg2,
3825HDAmersfoort,TheNetherlands).
n IdenticationTag
Thismanualandtheidenticationtagattachedonpackingboxareessentialpartsoftheproduct.
Keep them together in a safe place for future reference.
nUsers
This product is designed to be used by a person with specialized knowledge.
8thEdition:Jan.10,2019-00

vii
IM 11M10B01-01E
<CONTENTS>
Model OX400
Low Concentration Zirconia Oxygen Analyzer
[Style: S2]
CONTENTS
IM11M10B01-01E8thEdition
INTRODUCTION.......................................................................................................i
uAfter-sales Warranty....................................................................................v
u CEmarkingproducts..................................................................................vi
1. Outline....................................................................................................... 1-1
2. Specications........................................................................................... 2-1
2.1 StandardSpecications................................................................................... 2-1
2.2 Characteristics.................................................................................................. 2-3
2.3 ModelandSu󰀩xCodes................................................................................... 2-4
2.4 StandardAccessories...................................................................................... 2-4
2.5 ExternalDimensions........................................................................................ 2-5
2.6 PipingDiagram................................................................................................ 2-10
2.7 WiringDiagram................................................................................................ 2-11
3. Installation................................................................................................. 3-1
3.1 InstallationLocation......................................................................................... 3-1
3.2 HowtoInstall..................................................................................................... 3-2
3.2.1 InstallingDesktopType...................................................................... 3-2
3.2.2 InstallingPanelMountType............................................................... 3-3
3.2.3 MountingActivatedCarbonFilter....................................................... 3-4
4. PipingandWiring..................................................................................... 4-1
4.1 Piping................................................................................................................. 4-1
4.2 Wirings............................................................................................................... 4-2
4.2.1 PowerSupplyWiring.......................................................................... 4-2
4.2.2 SignalWiring...................................................................................... 4-3
4.2.3 Communication.................................................................................. 4-6
5. NamesandFunctions.............................................................................. 5-1
5.1 FrontPanel........................................................................................................ 5-1
5.2 RearPanel.......................................................................................................... 5-3
6. OperationandParameters...................................................................... 6-1
6.1 StartupandSettings......................................................................................... 6-2
6.1.1 SettingOutputRange“rnG”............................................................... 6-2
6.1.2 SettingSecondaryOutput“oUt2” ...................................................... 6-4
6.1.3 SettingHOLDFunction“HoLd”.......................................................... 6-4
6.1.4 SettingBurnoutFunction“nAMU”...................................................... 6-5
8thEdition:Jan.10,2019-00

viii
IM 11M10B01-01E
<CONTENTS>
6.1.5 SettingAlarms(OxygenConcentrationHigh/LowAlarms)“ALM”..... 6-6
6.1.6 SettingCalibrationGasConcentration“SEt.C” ................................. 6-7
6.1.7 SettingSensorConstant“SEnS” ....................................................... 6-7
6.1.8 SettingOutputSmoothing“SMoo”..................................................... 6-8
6.1.9 SettingMulti-Selector“MLS”.............................................................. 6-8
6.1.10 CheckingCalibrationCoe󰀩cient“CoEF”........................................... 6-8
6.1.11 DisplayingCellResistanceValue“CEL.r” ......................................... 6-9
6.1.12 DisplayingSoftwareRevision“rEV”................................................... 6-9
6.2 Calibration“CAL”........................................................................................... 6-10
6.3 Communication............................................................................................... 6-12
6.4 MeasurementGasSamplingUsingAspirator............................................. 6-14
6.5 SwitchingMeasurementFlowPathUsingMulti-Selector.......................... 6-15
6.6 NumericalValue,DecimalPoint,andUnitInputOperation....................... 6-16
7. InspectionandMaintenance................................................................... 7-1
7.1 RoutineInspectionandMaintenance............................................................. 7-1
7.2 InspectionintheEventofanError................................................................. 7-1
7.2.1 InspectionintheEventofanAlarm(ALM) ........................................ 7-2
7.2.2 InspectionintheEventofanError(ERR).......................................... 7-2
7.3 HowtoReplaceSensor.................................................................................... 7-3
7.3.1 Removing Sensor .............................................................................. 7-3
7.3.2 InstallingSensor ................................................................................ 7-5
7.4 HowtoReplaceActivatedCarbonFilter........................................................ 7-7
7.5 HowtoReplacetheLineFilter......................................................................... 7-8
8. ParameterSettings................................................................................... 8-1
CustomerMaintenancePartsList......................................CMPL11M10B01-02E
Revision Information...............................................................................................i
8thEdition:Jan.10,2019-00

<1. Outline>1-1
IM 11M10B01-01E
1. Outline
The OX400 is a highly accurate and reliable low concentration zirconia oxygen analyzer that is
capable of measuring a wide range of concentrations, from 0-10 ppm up to 0-100 vol% O2. This
is the latest oxygen analyzer from Yokogawa, and its development was based on the company’s
long experience and strong track record with this technology.
Aproprietarynewthin-lmdepositiontechnologywasusedinthezirconiasensorthatcreatesa
molecular bond between the zirconia element and the platinum layer. This prevents separation,
enables a reduction in sensor size and ensures a high-speed response and long life.
The OX400 can be used to control and monitor various semiconductor applications, and to
control environment, air leakage into inert gas, and other processes.
Features
Longlifeandhigh-speedresponse
• ThankstotheuseofYokogawa’sproprietarynewthin-lmdepositiontechnology,thesensor
has three times the lifespan of those used in our earlier products.
• A cylindrical sensor design facilitates the replacement of measurement gases, thereby
helping to assure a high-speed response.
Highperformanceandhighreliability
• Superior repeatability and linearity even at low oxygen concentrations
• Either pump or aspirator sampling can be selected, depending on the application.
Built-infunctionsandavarietyofself-diagnosisfunctions
• Comes with multi selector, auto range, partial range,andpumpon/o󰀨functions
• A variety of self-diagnosis functions are provided that detect malfunctions such as heater
temperature error, temperature sensor burnout, and sensor resistance value error.
Superiormaintainability
• The sensor can be replaced on-site.
• Compact and lightweight for easy installation.
Applications
• Oxygenconcentrationcontrolinsemiconductor-relateddi󰀨usionanddryingfurnacesandin
LCD manufacturing processes
• Oxygenconcentrationcontrolinsolderpotowandre-owovens,andgloveboxesusedin
electronics manufacturing, and in gas production processes
• Oxygen concentration measurements to prevent dust explosions during powder transfer
8thEdition:Jan.10,2019-00

Blank Page

  <2.Specications> 2-1
IM 11M10B01-01E
2. Specications
2.1 StandardSpecications
Measurementobject
:Oxygenconcentrationsininertgasescontainingnoammablegas,silica,corrosivegas,or
liquid(includingwatervapor).
Measurementsystem:Zirconiasystem
Samplingmethod: Pump,aspirator,ornosuctiondevice.
Forthesamplinggaspressurein each sampling method, refer to the sampling gas
conditions.
Pumpandaspiratorsuctionowrate
:Approx.1.0L/min.
Aspiratorsuctionconditions
:AirorN2,supplypressure65to100kPaG,totaldischargeow10L/minmax.(whengasinlet
andoutletareatambientatmosphericpressure).
Sample gas conditions
Flowrate :200±25mL/min(onlyappliestosensor)
Temperature :0-50°C(non-condensing)
Humidity :Non-condensing
Pressure :Pumpandaspirator: 0-300PaG
Nosuctiondevice: 40kPaGmax
Measurementrange: 0-10ppmO2to 0-100 vol% O2.
Resolution: 0.01ppmO2.
Display:4digitLED.
Maindisplay:O2concentration(autoswitching).
Subdisplay:Parameteroralarm/errornumber
Unit :%,ppm.
Outputrange
Auto  :0-10ppm,0-100ppm,0-1000ppm,0-1%,0-10%,0-100%(default)  
  Other:0-0 ppm, 0-00 ppm, 0-000 ppm, 0-%, 0-0% can be set,
isanintegerfrom2to9.
Fixed  :Setto0-10ppm,0-100ppm,0-1000ppm,0-1%,0-10%,or0-100%.
Partial  :Lowervalueoruppervalueofrangecanbeset.
 Note:Span(uppervalue-lowervalue)is20%FSormoreofabovexedrange.
 Example:200-400ppmwhenxedrangeis0-1000ppm,20-40ppmwhenxedrangeis
0-100 ppm.
Analogoutput: 2outputs
Primary   :4to20mADC(maximumloadresistance:550Ω)  
Secondary  :Selectfrom0-1,0-5,0-10VDC(loadresistance:10kΩorgreater)
Contactoutput: 3 outputs
Error contact, O2concentration high/low alarm contact, range marker output
8thEdition:Jan.10,2019-00

  <2.Specications> 2-2
IM 11M10B01-01E
Multiselector(optional)
 :Contactoutputforswitchingsamplegasow,measumentowinformationcontact
output.
Note:Fordetails,seeexternaldimensions.
Contactoutputspecications
General  :Relay
Nominalcontactcapacity:
  2A30VDC,2A240VAC(120VACfor100Vpowersupply)forresistiveload
Maximumpower:60W,480VA
Maximumvoltage:30VDC,264VAC(132VACfor100Vpowersupply)
Maximumcurrent:2ADC/AC
Contactinput:Voltage-freecontact,1point
:RemoteswitchingforsamplegassuctionpumpON/OFF
:Inputsignal: Opensignal: 100kΩormore
Closesignal: 200Ωorless
Self-diagnostics
Error(failure) :Sensoruniterror,heatertemperatureerror,temperaturesensordisconnection,
device temperature error, CPU error, fan stop.
Alarm(warning) :Heaterunstable,sensordefect,electromotiveforceabnormal,
asymmetry voltage
error, calibration error, sensor resistance error, O2
concentration upper/lower, over range.
Serialcommunication
Comm.signal :RS-232,oneway
Baudrate :38,400bps
Data(ASCII) :O2concentration, unit, alarm/error
Calibrationmethods:
(1)3point: 10ppm,1000ppm,Air
(2)2point: zeroandspancalibrationmaybesetfreely
(3)1point:
(4)Aircalibration
Warm-uptime:Within20min
Powersupply:
Powersupply :100-120VAC/200-240VAC,50/60Hz
Acceptablerange:100to120VAC±10%,50/60Hz
  200to240VAC±10%,50/60Hz
Powerconsumption
:100to120VAC,200VAmax.
200to240VAC,400VAmax.
Dimensions :213(W)x132(H)xapprox.375(D)mm
Weight:Approx.5kg
Finish:Polyestercoating
Line connection
Gasinlet:Rc1/4or1/4NPTfemale
8thEdition:Jan.10,2019-00

  <2.Specications> 2-3
IM 11M10B01-01E
Gasoutlet:Rc1/4or1/4NPTfemale
Electrical connection
Externaloutputterminals:M3screw
Contactinput/outputterminals:M3screw
Serialcommunication:D-sub9pinconnector
Ground:withinpowercordconnector
Environment and operational conditions
Installationconditions: Indoors,panelorwallmounting,nonexplosionarea
Ambienttemperature: 0to40°C,non-condensing
Ambienthumidity: 5to85%RH
Storagetemperature: -5to50°C
Safety, EMC, and RoHS conformity standards
Safety:EN61010-1
 CAN/CSA-C22.2No.61010-01,ULStd.No.61010-1
EMC: EN61326-1ClassA,Table2(*1)
 EN61326-2-3,EN61000-3-2,EN61000-3-3
 EMCRegulatoryArrangementinAustraliaandNewZealand(RCM)EN61326-1ClassA
KCMarking:KoreaElectromagneticConformityStandard
*1: Inuenceofimmunityenvironment(CriteriaA):±20%ofF.S.
Note1:ThisinstrumentisaClassAproduct,anditisdesignedforuseintheindustrialenvironment.Pleaseusethisinstrumentinthe
industrial environment only.
Note2:Thecurrentorvoltagesignaloutputcablelengthandcontactinputcablelengthmustbenolongerthan30mforCEmarking.
RS232connectioncablelengthmustbenolongerthan3m.
Installationaltitude:   2000morless
CategorybasedonIEC61010:  II(Note)
PollutiondegreebasedonIEC61010: 2(Note)
Note:Installationcategory,calledover-voltagecategory,speciesimpulsewithstandvoltage.CategoryIIisforelectricalequipment.
Pollution degree indicates the degree of existence of solid, liquid, gas or other inclusions which may reduce dielectric strength.
Pollutiondegree2isthenormalindoorenvironment.
RoHS: EN50581
2.2 Characteristics
Repeatability
:±1%FS(Hereafter,either10,100,1000ppm,1%,10%,or100%O2isFS)
Linearity
:±2%FS
±3%FS(0-100ppmorless)
Response time :90%response
:Within10sec(0-1%ormore)
:Within30sec(lessthan0-1%)
Drift  :±2%FS/week
8thEdition:Jan.10,2019-00

  <2.Specications> 2-4
IM 11M10B01-01E
2.3 ModelandSu󰀩xCodes
[Style: S2]
Model Su󰀩xCode Option
Code Description
OX400 .............................. ................... Low Concentration Zirconia Oxygen Analyzer
Power supply
(*1)
-5
-3
...................
...................
100-120VAC
200-240VAC
Sampling method -P
-A
-N
...................
...................
...................
Built-in pump
With aspirator
No suction device
Line connection R
T
...................
...................
Rc 1/4
1/4 NPT
User’s manual -J
-E
...................
...................
Japanese
English
Powercable(*1) -D
-F
-H
-Q
-R
-T
...................
...................
...................
...................
..................
...................
UL/CSAcable(2m)
VDEcable(2.5m)
GBcable(2.5m)
BScable(2m)
SAAcable(2.5m)
BSMIcable(2m)
Option Mounting hardware
Multi selector function
Filter
/P
/MS
/A
Panel mount
Multi selector function
Activatedcarbonlter(*2)
*1: Powercableoftwo-polewithearthingplugisattached.
 Su󰀩xcode“-D”and“-T”ofpowercablecannotbespeciedwhen“-3”ofpowersupplyisspecied.
 Powercableof“-D”canbeusedinJapan,becauseanothercabledoesn’tconformtoPSEmarking.
 Powercableof“-F”canbeusedinKorea,becauseanothercabledoesn’tconformtoKCmarking.
Power cable of “-T” can be used in Taiwan, because another cable doesn’t conform to BSMI marking.
*2: When“R”oflineconnectionisspecied,K9643KHlter(Rc1/4)isattached,when“T”oflineconnectionisspecied,K9643KJ
lter(1/4NPT)isattached.
 “/A”isspeciedwhenitisusedforowfurnaceorreowfurnace.
2.4 StandardAccessories
Check the standard and optional accessories when you receive the product.
Accessories
Item Partno.andrating Qt’y
Fuse A1113EF:Time-lagT3.15conformedtoIEC60127 1
User’s manual IM11M10B01-01E(English),-01(Japanese) 1
Aspirator kit K9643KA(Rc1/4),K9643KB(1/4NPT) Optional
Panel mount kit K9643KC Optional
Activatedcarbonlter K9643KH(Rc1/4),K9643KJ(1/4NPT) Optional
Consumables
Item Partno.andrating Qt’y
Activatedlterelementkit(15timesreplacement) K9643KK 1
Filterkit(5timesreplacement) K9643KL 1
Sensorassembly(includingO-ring) K9643KG 1
Snapring(retainer) Y9011EV 1(*1)
Plate K9213FB 1
Filter K9643FB 1
Snap ring plier K9643ZE 1
*1: Qt’yof10piecesormorecanbepurchased.
8thEdition:Jan.10,2019-00

  <2.Specications> 2-5
IM 11M10B01-01E
2.5 ExternalDimensions
Panelmounttypewithbuilt-inpumpornosuctiondevice(OX400----/P)
135+2
0
101.6±0.3
240 ±1
225 ±1
19.3330 20 10 to 20
6 6
132
101.6
260
238
Seal
Ventilation
holes
FrameFrame
Screw
4xM5 screw
Panel Cutout
Mount
Note: Pump ON/OFF switch; when no suction device [-N] is specified for the sampling method,
this switch is not installed.
For the notes on panel mounting, see page 6.
Unit:mm
8thEdition:Jan.10,2019-00

  <2.Specications> 2-6
IM 11M10B01-01E
Panelmounttypewithaspirator(OX400--A--/P)
40 to 50
(Line connection : in case of Rc1/4)
(Line connection : in case of Rc1/4)
(Line connection : in case of 1/4NPT)
(Line connection : in case of 1/4NPT)
Mount
Ventilation
holes
Bushing
Bushing
Aspirator
Aspirator
Connector
4xM5 screw
Panel Cutout
60 to 70
101.6±0.3
135+2
0
240 ±1
225 ±1
19.3330 20 10 to 20
FrameFrame
Screw
Seal
6 6
132
101.6
260
238
For the notes on panel mounting, see page 6.
Unit:mm
8thEdition:Jan.10,2019-00

  <2.Specications> 2-7
IM 11M10B01-01E
Desktoptypewithbuilt-inpumpornosuctiondevice(OX400----)
10 to 20213
13220
350 19.3
Rear
Note: Pump ON/OFF switch; when no suction device [-N] is specified for the sampling method,
this switch is not installed.
For the notes on panel mounting, see page 6.
With multi selector function
35.3
40
Sample gas inlet
Sample gas outlet
46
Unit:mm
8thEdition:Jan.10,2019-00

  <2.Specications> 2-8
IM 11M10B01-01E
Desktoptypewithaspirator(OX400--A--)
With multi selector function
Rear
40 to 50
60 to 70
(Line connection :
in case of 1/4NPT)
(Line connection :
in case of 1/4NPT)
(Line connection :
in case of Rc1/4)
(Line connection :
in case of Rc1/4)
Bushing Bushing
Aspirator
Aspirator
Connector
10 to 20
213
132
20
350 19.3
Sample gas inlet
Aspirator gas inlet (Φ6)
Aspirator and sample gas outlet (Φ8)
35.3
46
40
For the notes on panel mounting, see page 6.
Unit:mm
8thEdition:Jan.10,2019-00

  <2.Specications> 2-9
IM 11M10B01-01E
Activatedcarbonlter
(Rc1/4 or 1/4NPT)
(Rc1/4 or 1/4NPT)
110
K9643KH: Rc1/4
K9643KJ: 1/4NPT
± 0.5 ± 0.5
Unit: mm
Sample gas outlet
2-Ф6.5 holes
2-M5 screws
Mark “A”
In case of K9643KJ
Activated carbon filter of
option code “/A”
Sample gas inlet
Fixing holes
more than 200
Maintenance space
The filter holder including
piping connection can be
moved upward to replace
a filter element.
more than
200
Maintenance space
The filter holder including
piping connection can be
moved downward to
replace a filter element.
110 150 130
47
29.5
25
15
10
(157)
35
35
60
47
8thEdition:Jan.10,2019-00