YOKOGAWA vigilantplant OX102 User manual

User's
Manual
IM 11M10A01-03E
Model OX102
Current limit type
Oxygen Analyzer
IM 11M10A01-03E
3rd Edition

i
Safety Precautions
IM 11M10A01-03E
3rd Edition: Nov. 2007 (YK)
All Rights Reserved, Copyright © 2000, Yokogawa Electric Corporation
Safety Precautions
This Analyzer is a component-type stand-alone instrument designed for instrument panel
or rack mounting.
• To ensure safe operation of this instrument, strictly observe the following safety
instructions during operation, maintenance and servicing. Yokogawa will not be
responsible or liable for damage caused by not following these instructions when
using the instrument.
d Symbols
The following graphical symbols are used in this manual.
WARNING
Emphasizes instructions that must be observed – or electric shock and injury to, or death
of, personnel could result.
CAUTION
Emphasizes instructions that must be observed – or damage to hardware, software or
system crashes, could result.
NOTE
Emphasizes points that require special attention in understanding the operation and
functions.
Notes
Notes on Instruction Manuals
• Please pass on the Instruction Manuals to the end user.
• Please read the manual thoroughly before using the instrument.
• This manual describes the functions of the product in detail; they do not imply any
warranty that the instrument will meet the special needs of the user.
• No part of the manual may be reproduced without prior written consent from
Yokogawa.
• Yokogawa reserves the right to improve the instrument and manuals at any time,
without notice or obligation.
• If you have any questions about the manuals, or feel that there are mistakes or
omissions, please contact our sales representative or your local distributor/agent.

IM 1M11A01-03E
ii
Maintenance, Safety, and Product Modification
• In order to protect the system controlled by the instrument, and the instrument itself,
and to ensure safe operation, observe the safety precautions described in this manual.
•If any protective or safety circuitry is required for the system used with this instru-
ment, or for the instrument itself, prepare and install it. Do not change the internal
parts or circuitry of the instrument in any way.
Disclaimers (Limitation of Liability)
Yokogawa grants no warranties other than the express warranty set forth under the
warranty provisions.
Yokogawa shall not be liable to you or any third party for any damage, including
consequential or incidental damages, arising out of or in connection with the use of this
equipment, defects beyond our knowledge, or any other contingency beyond our control.
WARNING
High temperature, take care
When the sensor is powered on, the sensor tip gets very hot. Be careful not to touch it.
4-20mA
ENT..
%
ppm
FAILALM
1000ppmAIR
MODE
SET
Caution: Sensor is HOT
F1.EPS
Power
Be sure to check the power supply voltage before turning on the power.
Grounding
Be sure to connect a Class D (100Vor less) ground before turning on the power, to
minimize the possibility of shock.
Need for Grounding
Do not cut the internal or external protective ground wire, or remove the ground wire
from the terminal. This creates a shock hazard.
Do not Operate without Protective Grounding and Fuse
Do not operate the instrument without protective grounding and correct fuse.
Fuse
For safety, this product is fused internally. It is recommended that you ask the local
service representative to change the fuse; do not either change it yourself, or open the
case to check the fuse. Turn off the power switch and disconnect the instrument from
the power before changing the fuse. Do not use a fuse of different type or size, or short-
circuit the fuse holder.

iii
Safety Precautions
Environmental Restrictions
Danger: Do not use this instrument in a flammable, explosive, or steamy environment.
Do not try to measure gases with traces of redox gas, corrosive gas, or organic silicon(e)
gas.
Keep Hands Out
While voltage is applied, keep hands out. Internal parts should be replaced by our
service representative, or by an authorized person.
External Connections
Before wiring, to minimize the possibility of shock, disconnect power from the instru-
ment. Also check ground connection to this instrument, to the system being measured,
and to any associated external control equipment
IM 1M11A01-03E

IM 1M11A01-03E
iv
After-Sales Warranty
Yokogawa warrants the product for the period specified in the pre-purchase quotation.
Yokogawa shall perform warranty service according to its own standards. For on-site
service outside of the normal service area, you may be billed for travel expenses of
technical personnel, even during the warranty period.
In the event of any failure caused by the following, service (including shipment to the
factory for repair where necessary) may be billed for, even during the warranty period:
• the use of software, hardware, or spare parts not supplied by Yokogawa.
• improper or insufficient maintenance by the user.
• unauthorized modification, abuse, misuse or mishandling.
• improper installation or transportation of the equipment.
• the use of unspecified power supply (voltage, frequency) or abnormal power supply.
• use under conditions not meeting the required standards, or improper maintenance of
the installation site.
• force majeure events – including, but not limited to, fires, earthquakes, windstorms,
lightning, riots, civil disorder, war or other hostilities, radiation contamination, or acts
of God.
Yokogawa makes no warranty with respect to the fitness of this equipment for a
particular user purpose. In no event shall Yokogawa be liable for direct, incidental or
consequential damages.
In the event that the equipment is incorporated into other equipment, or resold,
Yokogawa assumes no liability to the end user for direct, incidental or consequential
damages.

v
Safety Precautions
Notes on Use
• Do not drop or jolt the equipment, or its accuracy may be adversely affected.
• Do not attempt to disassemble the equipment, or it may malfunction.
• As far as possible, install the equipment horizontally. The sensor should be installed
securely so that it does not vibrate. Avoid installing the equipment in places where
the temperature exceeds 70°C.
• Avoid installing the equipment where it would be exposed to direct sunlight, radiant
heat, or the weather, and where vibration exists.
• Avoid installing the equipment in atmospheres containing corrosive gases, gas
atmospheres out of measuring scope, or atmospheres where the sensor is exposed to
silane silicone gas.
• Keep the equipment away from noise-generating devices to minimize the possibility of
malfunction, although it is designed to cope with noise.
• The sensor has a limited life, which varies depending on operating conditions. It is
strongly recommended that you replace the sensor once a year from a preventive
maintenance standpoint.
• Keep this instruction manual handy for your quick reference during operation and
maintenance.
IM 1M11A01-03E

IM 1M11A01-03E
vi
Restrictions on Use
• Do not use the equipment in atmospheres containing combustible, corrosive, or flue
gases, or organic compounds.
• If it is used in silicon gas atmospheres, in flow furnaces or nitrogen reflow furnaces,
the equipment must be used in the following system:
• The sampling unit, K9424GA, must be used.
• The sampling unit requires appropriate maintenance, which is determined by gas
conditions. Filters and activated carbon packs should be replaced at intervals which
depend on the operating conditions.
For best measurement, use new activated carbon packs. Using expired packs may
result in invalid measurement results, or even sensor deterioration.
• If you have any questions, please contact your Yokogawa representative.

vii
Safety Precautions
How to Use This Manual
The structure of this manual is as shown in the table below. This table shows which
sections you are recommended to read when performing the corresponding tasks.
Unpacking
installation Initial setting Daily
operation Changing
settings Maintenance
troubleshooting Section to refer to:
Sect. 1. Overview
Sect. 2. System Configuration
Sect. 3. Installation
Sect. 4. Wiring
Safety precautions
T1.EPS
s
s
s
Sect. 5. Component Functions
Sect. 6. Operation
Sect. 7. Inspection and Maintenance
Sect. 8. Troubleshooting
App. 1. Sampling Unit
App. 2. Calibration Gas Kits
CMPL (Parts List)
s
s
s
s
s
s
s
IM 1M11A01-03E

IM 11M10A01-03E
viii
Contents
Safety Precautions ................................................................................................................ i
After-Sales Warranty ......................................................................................................... iv
Notes on Use ......................................................................................................................... v
Restrictions on Use ............................................................................................................vi
How to Use This Manual .................................................................................................. vii
1. Overview....................................................................................................... 1-1
1.1 Standard Specifications ................................................................................... 1-1
1.2 Model and Suffix Codes ................................................................................. 1-4
1.3 External Dimensions ....................................................................................... 1-5
2. System Configuration ................................................................................. 2-1
2.1 System Configuration 1 .................................................................................. 2-1
2.2 System Configuration 2 .................................................................................. 2-2
3. Installation.................................................................................................... 3-1
3.1 Installing the Sensor........................................................................................ 3-1
3.2 Installing the Converter................................................................................... 3-3
3.3 Installing the Optional Sampling Unit (K9424GA) ....................................... 3-4
4. Wiring........................................................................................................... 4-1
4.1 Precautions ...................................................................................................... 4-1
4.2 Wiring Types................................................................................................... 4-1
4.3 Terminals for External Connections ............................................................... 4-2
4.4 Wiring Procedures........................................................................................... 4-3
5. Component Functions ................................................................................. 5-1
5.1 Sensor .............................................................................................................. 5-1
5.2 Converter ......................................................................................................... 5-2
5.3 Sampling Unit (Optional) ............................................................................... 5-3
5.4 Calibration Kit (Optional)............................................................................... 5-4
6. Operation...................................................................................................... 6-1
6.1 Startup ............................................................................................................. 6-1
6.2 Operational Flow Chart................................................................................... 6-3
6.3 Configuring Data............................................................................................. 6-5
6.4 Calibration ..................................................................................................... 6-16

ix
IM 11M10A01-03E
7. Inspection and Maintenance ...................................................................... 7-1
7.1 Sensor .............................................................................................................. 7-1
7.2 Converter ......................................................................................................... 7-1
7.3 Sampling Unit (Optional) ............................................................................... 7-1
8. Troubleshooting........................................................................................... 8-1
rAppendix 1. Sampling Unit........................................................................................ A-1
K9424GA Sampling Unit for OX100/102................................................................ A-1
1. Specifications ........................................................................................................ A-1
2. Installation............................................................................................................. A-2
3. Operating Procedures............................................................................................ A-3
3.1 Starting operation .......................................................................................... A-3
3.2 Stopping operation ........................................................................................ A-3
4. Maintenance .......................................................................................................... A-4
4.1 Replacing the activated carbon pack ............................................................ A-4
4.2 Maintenance of the disk filter attached to the gas inlet ............................... A-4
rAppendix 2. Calibration Gas Kits............................................................................. A-5
K9424JA, K9424JB, K9424JR, K9424JS Calibration Gas Kits for OX100/102.... A-5
1. Connecting the needle valve assembly to the gas cylinder ................................. A-5
2. Supplying the calibration gas ............................................................................... A-6
3. Stopping supplying the calibration gas ................................................................ A-6
Customer Maintenance Parts List ................................................CMPL 11M10A01-03E
Revision Record

IM 11M10A01-03E 1-1
1. Overview
1. Overview
The OX102 Current limit Oxygen Analyzer is an advanced oxygen analyzer which is
capable of measuring a wide range of oxygen concentrations, from ppm level to percent-
age level. The OX102 is best suited to ppm-level oxygen measurement - for example,
monitoring the furnace gas of nitrogen reflow furnaces and the atmosphere of semicon-
ductor plants. This analyzer uses a compact zirconia current limiting sensor. The sensor
is designed for direct insertion type installation. Where the furnace gas of a nitrogen
reflow furnace contains organic solvent at a few ppm to percentage level, the sensor
should be used with the K9424GA sampling system, to avoid contact with the solvent.
Note that the OX102 cannot measure oxygen concentration if combustible or corrosive
gases are present in the atmosphere to be measured.
This equipment needs to be returned to the factory for repair. Contact your Yokogawa
representative.
1.1 Standard Specifications
(1) Measurement principle: Zirconia current limiting method
(2) Sampling system : Natural diffusion system
If the sampled gas may include organic solvents, use a
sampling unit.
(3) Measured gas : O2in N2or mixed gases; cannot be used with silicone vapor,
combustible gases and organic solvents
(4) Measuring range : 0 to 25%
(5) Output range : 0-100 ppm/0-1000 ppm/0-10000 ppm/0-25%, automatic/fixed
switching mode
(6) External output : a. 4-20 mA DC automatic/manual switching mode
b. 1-5 V DC fixed (0-100 ppm/0-1000 ppm/0-10000 ppm/0-
25%)
c. 4-20 mA DC identification signal for automatic switching
(See below)
0-100 ppm 0-1000 ppm 0-10000 ppm 0-25%
4 V DC 3 V DC 2 V DC 1 V DC
T101E.EPS
Output Range
Range
Identification Signal
(7) Repeatability:
20 - 100 ppm 615 ppm O
2
T102E.EPS
100 - 1000 ppm
1000 - 5000 ppm
5000 - 10000 ppm
1 - 25%
625 ppm O
2
60.25%O 2
Measuring Range Repeatability
60.3 of reading
67.5% of reading

IM 11M10A01-03E
1-2
(8) Alarm contact output: 2 contact outputs. contact rating 110 V AC/24 V DC, 1 A
a. Alarm output if oxygen concentration abnormal (Hi, Lo)
b. Alarm output if sensor disconnected (FAIL)
(9) Alarm setting for abnormal oxygen concentration:
a. Setting range : 1 ppm to 24.9% O2
b. Setting conditions : High alarm (Hi) ^ Low alarm (Lo)
(10) Indication : LED Digital indication, ranges 0-9995 ppm to 1.0-25.0%,
autoswitching
(11) Display and resolution: 3 steps
20 N <100 ppm 100
T103E.EPS
N <10000 ppm
1.0 N 25%
9995
25.0
1 ppm
5 ppm
0.1%
Range Display Resolution
^
^001
^
^
(12) Unit indication lamp:
a. ppm LED turns on for O2measurement range 0-9995 ppm
b. % LED turns on for O2measurement range 1-25.0%
(13) Operation lamp:
a. Hi.ALM: turns on when the O2concentration exceeds the high alarm setting
b. Lo.ALM: turns on when the O2concentration goes below the low alarm setting
c. FAIL: turns on when self-diagnostics detect sensor disconnected
d. PASS: turns on when key lock is enabled, turns off when disabled
(14) Calibration:
a. Atmospheric air one-point calibration :
Calibration point setting range: 15 to 25% O2
b. One-point calibration at 100 ppm :
Calibration point setting range: 80 to 120 ppm O2
c. One-point calibration at 1000 ppm :
Calibration point setting range: 900 to 1100 ppm O2
d. One-point calibration at 10000 ppm :
Calibration point setting range: 8500 to 9500 ppm O2
e. Complete calibration (*) Calibration with air, 20, 100, 500, 1000, 10000 ppm in
that order
Calibration Setting Range
T104E.EPS
15 - 25% O 2
1
2
3
4
5
6
20 ppm
100 ppm
500 ppm
1000 ppm
10000 ppm
15 - 25 ppm O
2
80 - 120 ppm O 2
400 - 600 ppm O 2
900 - 1100 ppm O 2
8500 - 9500 ppm O 2
(*) A calibration kit for calibrating all ranges is not available. Prepare calibration gas
of specified concentration on site or contact us for factory calibration.
Calibration Order Calibration Point Calibration Point Setting Range
Atmospheric air

IM 11M10A01-03E 1-3
1. Overview
(15) Fine tune mode : The measuring value can be adjusted to true analyzer
value.
(16) Operating temperature : Converter: 0 to 508C
Sensor 0 to 1508C
0 to 2508C within 50mm of sensor tip
(17) Extension cable : 4 m, 9 m, 29 m, operating temperature: 0 to 708C
(18) Gas flow rate : 1 m/sec max.
(19) Operating pressure : 1013 640 hPa abs
(20) Power supply : 100 to 240 V AC, 50/60 Hz, approx. 15 W
(21) Storage temperature : 0 to 708C for both sensor and converter
(22) Self-diagnostic function : Detects sensor disconnection
(23) Sensor replacement : Compatibility can be achieved by entering a sensor-
specific constant

IM 11M10A01-03E
1-4
1.2 Model and Suffix Codes
(1) OX102 Current limiting Type Oxygen Analyzer
T1201E.EPS
OX102
Measuring
Range
Sensor
Manual
Optional Nipple *(1)
• • • • • • • • • • • • • • • • • •
• • • • • • • • • •
• • • • • • • • • •
• • • • • • • • • •
• • • • • • • • • •
• • • • • • • • • •
• • • • • • • • • •
• • • • • • • • • •
/J
/S
J
E
-1
1
2
3
N
Current limit type oxygen analyzer
0-100/1000/10000 ppm/0-25%O
2
5 m (1 m sensor assembly + 4 m cable)
10 m (1 m sensor assembly + 9 m cable)
30 m (1 m sensor assembly + 29 m cable)
Not required
Japanese
English
Plastic nipple, 17 mm O.D. or G3/8 hole, (for measuring
range 0-1000 ppm or greater)
Metal nipple (ferrule; teflon), Rc1/4, (for measuring
range 0-100 ppm)
*(1) Either plastic or metal nipple should be specified according to the measuring range of the application,
if required. When the OX102 is used with a sampling unit, nipple is not required.
Model Suffix Code Option Code Description
(2) Sample unit, calibration kit (optional)
T1202E.EPS
K9424GA
K9424JA
K9424JB
K9424JR
K9424JS
Sampling unit
Calibration kit: 1000 ppm, 6 cylinders (1L) + needle valve assembly, with flow adjustment
Calibration kit: 1000 ppm, 6 cylinders (1L) + needle valve assembly, without flow adjustment
Calibration kit: 10000 ppm, 6 cylinders (1L) + needle valve assembly, with flow adjustment
Calibration kit: 10000 ppm, 6 cylinders (1L) + needle valve assembly, without flow adjustment
Part Number Description
(3) Optional Accessories
K9424GY
K9424JP
K9424JQ
K9424JC
K9424JD
K9424LA
K9424LB
K9424LC
K9424LD
K9424DB
K9424DF
L9811LA
K9424GQ
K9346WH
T1203E.EPS
Activated carbon element (5 pieces/pack), for sampling unit
1000 ppm O
2 calibration gas, 1L x 6 cylinders/box
10000 ppm O
2 calibration gas, 1L x 6 cylinders/box
Needle valve assembly, with flow adjustment
Needle valve assembly, without flow adjustment
Sensor assembly, specially designed for OX102
Extension cable, 4 m, specially designed for OX102
Extension cable, 9 m, specially designed for OX102
Extension cable, 29 m, specially designed for OX102
Metal nipple (ferrule; metal), Rc1/4, 100 to 1508C *
Metal nipple (ferrule; teflon), Rc1/4, For 1008C or less
Plastic nipple, 17 mm O.D. or G3/8 hole, for measuring range 0-1000 ppm or greater
Disk filter for Sampling Unit
Felt filter for Sampling Unit
Part Number Description
* The insertion length cannot be changed once a metal ferrule is tightened with a nipple. It is because
the ferrule engages with the sheath of the sensor once tightened.

IM 11M10A01-03E 1-5
1. Overview
1.3 External Dimensions
4-20
mA
7
6
5
8
15
14
13
16
11
10
9
124
3
2
1
NC
SNSR
-
+
+
-
-
+
NC
RNG
1-5V
G
NC
100-
240
VAC
FAIL
ALM
17
7
7
88
88 103
10 22180
(212)
4-20
mA
7
6
5
8
15
14
13
16
11
10
9
124
3
2
1
NC
SNSR
-
+
+
-
-
+
NC
RNG
1-5V
G
NC
100-
240
VAC
FAIL
ALM
17
F1301E.EPS
% 4-20mA ALM
%
ppm
ENTCAL
ppm
PASSFAL.ALMH.ALM IL 96
96
89
+1
0
89
+1
0
100 *
100
55
Unit: mm
Weight :Approx. 1.2 kg
Panel Cutout Minimum Clearance Required for side-by-side
installation of multiple analyzers
* : Allow a minimum of 115 mm if easy
removal for servicing is required
Terminal Configuration
Instrument Body
Panel Dimensions
Figure 1.1 Converter Unit : mm

IM 11M10A01-03E
1-6
81
41
[860.5
(150)
(1190)
Gain1
Gain2 Gain3 Gain4 Gain5
A B B A A B A B
1.015 1.043
-65
1.002
-25
0.990
-19
1.429
-17
Sensor parameter Table
Sensor NO. XXXX
50 p
p Max temp. 708C when plastic nipple
(option code "/J" or P/N L9811LA) is used.
Temp. 2508C Max. Temp. 1508C Max. Temp. 708C Max.
F1302.EPS
Figure 1.2 Sensor
F1303.EPS
D-sub 15 pin
L(m)
L (m)
OX102-11h
OX102-12h
OX102-13h
4
9
29
Model and Code
Figure 1.3 Extension cable
F1304.EPS
(220)
136()
146( ) 290()
240()
Sample Inlet, Rc1/4
Sample Outlet, Rc1/4 Power Connector
Activated
Carbon Filter
Flowmeter
Needle Valve
Sensor Connector,
8 mm O.D.
Switch
OX102 Sensor
Disk filter : K9424GQ
Figure 1.4 Sampling Unit (K9424GA, Optional)

IM 11M10A01-03E 1-7
1. Overview
Unit : mm
F1305.EPS
Standard
Gas
OX102 Sensor
K9424JD
(255)
(310)
(90)
[75
Pressure
Gauge
Gas Vent Tubing
Needle Valve Assembly
Needle Valve Assembly, with Pressure Reducing Valve
and Fixed Throttle
Rc1/8 (Nominal diameter of piping
connection for K9424JD)
Standard Gas Cylinder Standard Calibration
Gas (6 bottles/box)
K9424JC
Approx. 340
Approx. 180
Approx. 300
T1301E.EPS
K9424JA
K9424JB
K9424JR
K9424JS
Part Number Description
Calibration kit: 1000 ppm, 6 cylinders (1L) + needle valve assembly, with flow adjustment
Calibration kit: 1000 ppm, 6 cylinders (1L) + needle valve assembly, without flow adjustment
Calibration kit: 10000 ppm, 6 cylinders (1L) + needle valve assembly, with flow adjustment
Calibration kit: 10000 ppm, 6 cylinders (1L) + needle valve assembly, without flow adjustment
Figure 1.5 Calibration Kit (Optional)