Aerotech PLANAR HD Series User manual

Planar HD Series Stage
User’s Manual
P/N: EDS144 (Revision 1.01.00)
Dedicated to the Science of Motion
Aerotech, Inc.
101 Zeta Drive,
Pittsburgh, PA, 15238
Phone: [phone]
Fax: [phone]
www.aerotech.com

Product Registration Register online at: http://www.-
aerotech.com/prodreg.cfm
Technical Support United States Headquarters:
Phone: [phone]
Fax: [phone]
Email: [e-mail]
United Kingdom:
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Germany:
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Japan:
Phone: [phone] (Sales)
Phone: [phone] (Service)
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China:
Phone: [phone]
Email: [e-mail]
Revision History Revision 1.01.00 November 10, 2010
Revision 1.00.00 July 6, 2009
Product names mentioned herein are used for identification purposes only and may be trademarks of
their respective companies.
© Aerotech, Inc. 2010

Planar HD Series Stage User's Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures v
List of Tables vii
Chapter 1: Overview 1
1.1. Standard Features 2
1.1.1. Optional Features 3
1.2. Dimensions 4
1.3. Safety Procedures and Warnings 5
1.4. EC Declaration of Incorporation 7
Chapter 2: Installation 9
2.1. Perparing the Mounting Frame or Mechanics 10
2.2. Unpacking and Handling the Stage 10
2.3. Air/Vacuum Requirements 12
2.4. Water Cooling Requirements 13
2.5. Attaching the Payload to the Stage 14
2.6. Electrical Installation 15
2.6.1. Optical Limit Swtiches 15
Chapter 3: Operating Specifications 17
3.1. Environmental Specifications 17
3.2. Accuracy and Temperature Effects 17
3.3. Basic Specifications 18
3.4. Limit Switches 20
3.4.1. Limit Switch Operation 20
3.4.2. Limit Switch Wiring 21
3.5. Standard Motor Wiring 22
3.6. Vacuum Operation 24
Chapter 4: Maintenance 25
4.1. Service and Inspection Schedule 25
4.2. Cleaning and Lubrication 25
4.2.1. Recommended Cleaning Solvents 25
4.2.2. Cleaning Process 26
Appendix A: Warranty and Field Service 29
Appendix B: Technical Changes 31
Index 33
Reader's Comments 35
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Table of Contents Planar HD Series Stage User's Manual
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Planar HD Series Stage User's Manual List Of Figures
List of Figures
Figure 1-1: Typical Planar HD Series Positioning Stage 1
Figure 1-2: Planar HD Series Stage Components 2
Figure 1-3: Planar HD Outline Dimensions and Axes Information 4
Figure 2-1: Planar HD With Lifting Inserts and Shipping Clamps Shown 11
Figure 2-2: Planar HD Air, Water, and Vacuum Connections 13
Figure 3-1: View of a Typical Planar HD Showing Limit Switches 20
Figure 3-2: Normally Closed (NC) and Normally Open (NO) Limit Switch Wiring 21
Figure 3-3: Limit and Encoder Wiring for Standard Planar HD Stages 22
Figure 3-4: Motor Wiring Connector for all Planar HD Stages 23
Figure 4-1: Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 26
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List of Figures Planar HD Series Stage User's Manual
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Planar HD Series Stage User's Manual List of Tables
List of Tables
Table 1-1: Model Numbering System 3
Table 3-1: Environmental Specifications 17
Table 3-2: Planar HD Series Specifications 18
Table 3-3: Motor Specifications 19
Table 3-4: Limit/Motor Wiring Pin Descriptions 24
Table 4-1: Recommended Cleaning Solvents 25
Table B-1: Current Changes (1.01.00) 31
Table B-2: Archived Changes 32
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List of Tables Planar HD Series Stage User's Manual
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Planar HD Series Stage User's Manual Overview
Chapter 1: Overview
This manual describes Aerotech’s Planar HD series of air bearing positioning stages. Figure 1-1 shows a typ-
ical Planar HD positioning stage.
This chapter introduces standard and optional features of the Planar HD stages and gives general safety pre-
cautions. The Planar HD is a full air-bearing planar positioning system, available in various sizes up to 650
mm by 650 mm.
Figure 1-1: Typical Planar HD Series Positioning Stage
N O T E : Aerotech continually improves its product offerings, and listed options may be superseded at any
time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current
product information at www.aerotech.com.
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Overview Planar HD Series Stage User's Manual
1.1. Standard Features
The Planar HD series stages all incorporate completely non-contact air bearing surfaces, linear motors, and
feedback devices to provide a maintenance free stage. There is no mechanical contact to wear or require
lubrication, making these stages ideal for clean room and medical applications.
The Planar HD incorporates air-on-air preload in the lateral bearing directions of each axis. The opposing
thin-film pressure maintains the bearing nominal gap tolerance. Non-contact magnetic or vacuum loads pre-
load the vertical air bearing directions. These designs, in addition to the large air-bearing surfaces that dis-
tributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy
loads or high accelerations.
The brushless linear motor uses an ironless forcer, which means there is zero cogging and there are no
attractive forces – resulting in unsurpassed smoothness of motion. This is especially useful in applications
where velocity control is important.
The trackless cable guides are enclosed in a Teflon sheath in all sections that experience motion. This elim-
inates particle generation due to alternative cable guiding systems making it ideal for clean room application.
The lack of linked cable guiding systems also produces extremely smooth motion and velocity control.
A water-cooled circuit isolates the forcer and magnet tracks of each axis, minimizing the effects of heat gen-
eration due to high duty cycles. This allows maximum throughput while maintaining a high degree of accu-
racy.
Optical limit switches and mechanical end stops, which protect the carriage from over-travel, are also stand-
ard.
Figure 1-2: Planar HD Series Stage Components
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Planar HD Series Stage User's Manual Overview
1.1.1. Optional Features
On the Planar HD many unique features are possible as a custom design, such as a wide range of cable man-
agement possibilities, encoder options for the highest resolution or temperature stability, or vacuum braking
options. The standard options for the Planar HD are shown in Table 1-1. Contact the Aerotech factory for
more details.
Table 1-1: Model Numbering System
Planar HD Travel Options
PLANAR HD-350-350 350 mm Scan Axis Travel, 350 mm Step Axis Travel
PLANAR HD-350-500 350 mm Scan Axis Travel, 500 mm Step Axis Travel
PLANAR HD-350-650 350 mm Scan Axis Travel, 650 mm Step Axis Travel
PLANAR HD-500-350 500 mm Scan Axis Travel, 350 mm Step Axis Travel
PLANAR HD-500-500 500 mm Scan Axis Travel, 500 mm Step Axis Travel
PLANAR HD-500-650 500 mm Scan Axis Travel, 650 mm Step Axis Travel
PLANAR HD-650-350 650 mm Scan Axis Travel, 350 mm Step Axis Travel
PLANAR HD-650-500 650 mm Scan Axis Travel, 500 mm Step Axis Travel
PLANAR HD-650-650 650 mm Scan Axis Travel, 650 mm Step Axis Travel
Planar HD Scan Axis Encoder Options
-LN350SC High-Accuracy Encoder, 350 mm Scan Axis Travel
-LN500SC High-Accuracy Encoder, 500 mm Scan Axis Travel
-LN650SC High-Accuracy Encoder, 650 mm Scan Axis Travel
-LT350SC Standard Encoder, 350 mm Scan Axis Travel
-LT500SC Standard Encoder, 500 mm Scan Axis Travel
-LT650SC Standard Encoder, 650 mm Scan Axis Travel
Planar HD Step Axis Encoder Options
-LN350ST High-Accuracy Encoder, 350 mm Step Axis Travel
-LN500ST High-Accuracy Encoder, 500 mm Step Axis Travel
-LN650ST High-Accuracy Encoder, 650 mm Step Axis Travel
-LT350ST Standard Encoder, 350 mm Step Axis Travel
-LT500ST Standard Encoder, 500 mm Step Axis Travel
-LT650ST Standard Encoder, 650 mm Step Axis Travel
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Overview Planar HD Series Stage User's Manual
1.2. Dimensions
Figure 1-3: Planar HD Outline Dimensions and Axes Information
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Planar HD Series Stage User's Manual Overview
1.3. Safety Procedures and Warnings
The following statements apply throughout this manual. Failure to observe these precautions could result in
serious injury to those performing the procedures and damage to the equipment.
This manual and any additional instructions included with the stage should be retained for the lifetime of the
stage.
To minimize the possibility of electrical shock and bodily injury or death, disconnect all elec-
trical power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical
circuit is in use, ensure that no person comes in contact with the circuitry when the stage is
connected to a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to
making any mechanical adjustments.
Moving parts of the stage can cause crushing or shearing injuries. All personnel must
remain clear of any moving parts.
Improper use of the stage can cause damage, shock, injury, or death. Read and understand
this manual before operating the stage.
If the stage is used in a manner not specified by the manufacturer, the protection provided
by the stage can be impaired.
Stage cables can pose a tripping hazard. Securely mount and position all stage cables to
avoid potential hazards.
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Overview Planar HD Series Stage User's Manual
Do not expose the stage to environments or conditions outside the specified range of oper-
ating environments. Operation in conditions other than those specified can cause damage to
the equipment.
The stage must be mounted securely. Improper mounting can result in injury and damage to
the equipment.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Only trained personnel should operate, inspect, and maintain the stage.
This stage is intended for light industrial manufacturing or laboratory use. Use of the stage
for unintended applications can result in injury and damage to the equipment.
Before using this stage, perform an operator risk assessment to determine the needed
safety requirements.
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Planar HD Series Stage User's Manual Overview
1.4. EC Declaration of Incorporation
Manufactorer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238
USA
herewith declares that the product:
Aerotech, Inc. Planar HD Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
does therefore not in every respect comply with the provisions of this directive;
and that the following harmonized European standards have been applied:
EN ISO 12100-1,-2:2003+A1:2009
Safety of machinery - Basic concepts, general principles for design
ISO 14121-1:2007
Safety of machinery - Risk assessment - Par 1: Principles
EN 60204-1:2005
Safety of machinery - Electrical equipment of machines - Part 1: General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it
is to be incorporated or of which it is to be a component has been found and
declared to be in conformity with the provisions of the Directive 2006/42/EC and
with national implementing legislation, i.e. as a whole, including the equipment
referred to in this Declaration.
Authorized Representative: Manfred Besold
Address: AEROTECH GmbH
Süd-West-Park 90
D-90449 Nürnberg
Name:
Alex Weibel /
Position: Engineer Verifying Compliance
Location: Pittsburgh, PA
Date: November 10, 2010
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This is to certify that the aforementioned product is in accordance with the applicable
requirements of the following Directive(s):
2011/65/EU RoHS 2 Directive

Overview Planar HD Series Stage User's Manual
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Planar HD Series Stage User's Manual Installation
Chapter 2: Installation
This chapter describes the installation procedure of the Planar HD stage, including handling the stage prop-
erly, the proper base for stage mounting, attaching the payload, and making the electrical and pneumatic con-
nections.
Installation must follow the instructions in this chapter. Failure to follow these instructions
could result in injury and damage to the equipment..
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Installation Planar HD Series Stage User's Manual
2.1. Perparing the Mounting Frame or Mechanics
The Planar HD is always integrated into a granite base that will often be designed to mount on a sub-frame.
The sub-frame will frequently incorporate an isolation system. Assemble any sub-frame and isolation prior to
unpacking the Planar HD. The design and support type and locations of the mounting frame or mechanics
should be designed by or in collaboration with Aerotech to ensure optimal stage performance.
2.2. Unpacking and Handling the Stage
Carefully remove the stage from the protective shipping container. Tapped holes are provided in each side of
the granite base for lifting rings (see Figure 2-1). Set the stage on the frame, isolation, or other prepared
mounting mechanics. It may be necessary to make adjustments to the location of the isolation or mounting
mechanics during the process of setting the stage into its final positions.
Each stage has a label listing the system part number and serial number. These numbers contain information
necessary for maintaining or updating system hardware and software. Locate this label and record the infor-
mation for later reference. If any damage has occurred during shipping, report it immediately.
Before operating the stage, it is important to let the stage stabilize to room temperature for at least 12 hours.
Clean the stage by blowing it off with pressurized nitrogen or clean, oil-free air.
Remove all red anodized shipping clamps before attempting to move the axis (see Figure 2-1).
Improper stage handling could adversely affect the stage’s performance. Therefore, use
care when moving the stage. Manually lifting or transporting stages can result in injury.
Lift the stage only by the provided lifting inserts in the granite base.
Do not attempt to move the stage until the air supply, detailed in Section 2.3. , has been
installed. Moving the stage table without air supplied can cause permanent damage to the
stage.
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Planar HD Series Stage User's Manual Installation
Figure 2-1: Planar HD With Lifting Inserts and Shipping Clamps Shown
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Installation Planar HD Series Stage User's Manual
2.3. Air/Vacuum Requirements
The quality of the air supplied to the air bearing is important for the operation of the system. If compressed air
is used, it must be filtered to 0.25 microns, dry to 0°F dew point, and oil free. If nitrogen is used, it must be
99.99% pure and filtered to 0.25 microns. The filtration requirement is to prevent particles from clogging the
air bearing. Air pressure in the range of 517 kPa to 551 kPa (75 psi to 80 psi) is necessary for use. A standard
airflow rate of 45 to 55 SLPM (standard liters per minute) at 551 kPa should be observed for the entire sys-
tem.
Vacuum in the range of 18 to 20 inches of Mercury is necessary for the proper preloading of the scan carriage
air bearing. A standard vacuum-flow rate of 4.5 SLPM at 20 inches of Mercury should be observed. Refer to
Figure 2-2 for the air and vacuum connection locations.
To protect the air bearing against under pressure or loss of pressure, an inline pressure switch tied to the
motion controller's E-stop is recommended. The pressure switch should be set to 60 psi for high dynamic
applications and no lower than 40 psi for slow speed applications.
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