Aerotech ABL9000 Series User manual

ABL/ABLH9000 Series Stage
User’s Manual
P/N: EDS104 (Revision 1.01.00)
Dedicated to the Science of Motion
Aerotech, Inc.
101 Zeta Drive,
Pittsburgh, PA, 15238
Phone: [phone]
Fax: [phone]
www.aerotech.com

Product Registration Register online at: http://www.-
aerotech.com/prodreg.cfm
Technical Support United States Headquarters:
Phone: [phone]
Fax: [phone]
Email: [e-mail]
United Kingdom:
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Germany:
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Japan:
Phone: [phone] (Sales)
Phone: [phone] (Service)
Fax: [phone]
Email: [e-mail]
China:
Phone: [phone]
Email: [e-mail]
Revision History Revision 1.01.00 February 28, 2011
Revision 1.00.00 February 9, 2006
Product names mentioned herein are used for identification purposes only and may be trademarks of
their respective companies.
© Aerotech, Inc. 2011

ABL/ABLH9000 Series Stage User's Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures v
List of Tables vii
Chapter 1: Overview 1
1.1. Standard Features 2
1.1.1. Optional Features 3
1.2. Safety Procedures and Warnings 4
1.3. EC Declaration of Incorporation 6
Chapter 2: Installation 7
2.1. Unpacking and Handling the Stage 7
2.2. Preparing the Mounting Surface 8
2.3. Securing the Stage to the Mounting Surface 8
2.4. Attaching the Payload to the Stage 9
2.5. Electrical Installation 9
2.6. Air Requirements 9
Chapter 3: Operating Specifications 11
3.1. Environmental Specifications 11
3.2. Basic Specifications 12
3.3. Load Capability [TBD] 16
3.4. Limit Switch Wiring 16
3.4.1. Limit Switch Operation 16
3.4.2. Limit Switch Wiring 16
3.5. Standard Motor Wiring 17
3.6. Vacuum Operation 17
Chapter 4: Maintenance 19
4.1. Service and Inspection Schedule 19
4.2. Cleaning and Lubrication 19
4.2.1. Recommended Cleaning Solvents 19
4.2.2. Cleaning Process 20
Appendix A: Warranty and Field Service 21
Appendix B: Technical Changes 23
Index 25
Reader's Comments 27
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ABL/ABLH9000 Series Stage User's Manual List Of Figures
List of Figures
Figure 1-1: Typical ABL/ABLH9000 Series Positioning Stage 1
Figure 1-2: ABL/ABLH9000 Series Stage 2
Figure 3-1: Velocity vs. resolution as a function of system data rate (ABL/ABLH9000 with LTAS or
LNAS encoder)
14
Figure 3-2: Normally Closed (NC) and Normally Open (NO) Limit Switch Wiring 16
Figure 4-1: Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 20
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ABL/ABLH9000 Series Stage User's Manual List of Tables
List of Tables
Table 1-1: Model Numbers and Ordering Options 3
Table 3-1: Environmental Specifications 11
Table 3-2: ABL/ABLH9000 Series Specifications 12
Table 3-3: ABL/ABLH9000 Series Resolution Information 14
Table 3-4: ABL/ABLH9000 Motor Specifications 15
Table 4-1: Recommended Cleaning Solvents 19
Table B-1: Current Changes (1.01.00) 23
Table B-2: Archived Changes 24
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ABL/ABLH9000 Series Stage User's Manual Overview
Chapter 1: Overview
This manual describes Aerotech’s ABL/ABLH9000 series of air bearing positioning stages. Figure 1-1 shows
a typical ABL9000 positioning stage.
The ABL/ABLH9000 series supports travel distances ranging up to 1m x 1m. Designed to meet the exacting
requirements of wafer, flat panel display, and optical inspection and fabrication, the ABL/ABLH9000 sets new
standards of performance.
This chapter introduces standard and optional features of the ABL/ABLH9000 stages and gives general
safety precautions.
Figure 1-1: Typical ABL/ABLH9000 Series Positioning Stage
N O T E : Aerotech continually improves its product offerings, and listed options may be superseded at any
time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current
product information at www.aerotech.com.
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Overview ABL/ABLH9000 Series Stage User's Manual
1.1. Standard Features
The ABL/ABLH9000 series stages all incorporate completely non-contact air bearing surfaces, linear
motors, and feedback devices to provide a maintenance free stage. There is no mechanical contact to wear
or require lubrication, making these stages ideal for clean room and medical applications.
The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing
thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bear-
ing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness
that is ideal for heavy or offset loading.
The brushless linear motor uses an ironless forcer, which means there is zero cogging and no attractive
forces – resulting in unsurpassed smoothness of motion. This is especially useful in applications where
velocity control is important.
Figure 1-2: ABL/ABLH9000 Series Stage
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ABL/ABLH9000 Series Stage User's Manual Overview
1.1.1. Optional Features
The ABL/ABLH9000 can be readily customized to meet the needs of individual applications. Common exam-
ples include cable management for stage-mounted payloads, custom tabletops, and granite bases. Contact
the Aerotech factory for more details.
Table 1-1: Model Numbers and Ordering Options
ABL/ABLH9000 Series Linear Air-Bearing Stage
There are no standard options. Please contact the factory.
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Overview ABL/ABLH9000 Series Stage User's Manual
1.2. Safety Procedures and Warnings
The following statements apply throughout this manual. Failure to observe these precautions could result in
serious injury to those performing the procedures and damage to the equipment.
This manual and any additional instructions included with the stage should be retained for the lifetime of the
stage.
To minimize the possibility of electrical shock and bodily injury or death, disconnect all elec-
trical power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical
circuit is in use, ensure that no person comes in contact with the circuitry when the stage is
connected to a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to
making any mechanical adjustments.
Moving parts of the stage can cause crushing or shearing injuries. All personnel must
remain clear of any moving parts.
Improper use of the stage can cause damage, shock, injury, or death. Read and understand
this manual before operating the stage.
If the stage is used in a manner not specified by the manufacturer, the protection provided
by the stage can be impaired.
Stage cables can pose a tripping hazard. Securely mount and position all stage cables to
avoid potential hazards.
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ABL/ABLH9000 Series Stage User's Manual Overview
Do not expose the stage to environments or conditions outside the specified range of oper-
ating environments. Operation in conditions other than those specified can cause damage to
the equipment.
The stage must be mounted securely. Improper mounting can result in injury and damage to
the equipment.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Only trained personnel should operate, inspect, and maintain the stage.
This stage is intended for light industrial manufacturing or laboratory use. Use of the stage
for unintended applications can result in injury and damage to the equipment.
Before using this stage, perform an operator risk assessment to determine the needed
safety requirements.
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Overview ABL/ABLH9000 Series Stage User's Manual
1.3. EC Declaration of Incorporation
Manufactorer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238
USA
herewith declares that the product:
Aerotech, Inc. ABL/ABLH9000 Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
does therefore not in every respect comply with the provisions of this directive;
and that the following harmonized European standards have been applied:
EN ISO 12100-1,-2:2003+A1:2009
Safety of machinery - Basic concepts, general principles for design
ISO 14121-1:2007
Safety of machinery - Risk assessment - Par 1: Principles
EN 60204-1:2005
Safety of machinery - Electrical equipment of machines - Part 1: General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it
is to be incorporated or of which it is to be a component has been found and
declared to be in conformity with the provisions of the Directive 2006/42/EC and
with national implementing legislation, i.e. as a whole, including the equipment
referred to in this Declaration.
Authorized Representative: Manfred Besold
Address: AEROTECH GmbH
Süd-West-Park 90
D-90449 Nürnberg
Name:
Alex Weibel /
Position: Engineer Verifying Compliance
Location: Pittsburgh, PA
Date: February 28, 2011
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This is to certify that the aforementioned product is in accordance with the applicable
requirements of the following Directive(s):
2011/65/EU RoHS 2 Directive

ABL/ABLH9000 Series Stage User's Manual Installation
Chapter 2: Installation
This chapter describes the installation procedure the ABL/ABLH9000 stage, including handling the stage prop-
erly, securing the stage to the mounting surface, attaching the payload, and making the electrical con-
nections.
Installation must follow the instructions in this chapter. Failure to follow these instructions
could result in injury and damage to the equipment.
2.1. Unpacking and Handling the Stage
Carefully remove the stage from the protective shipping container. Before operating the stage, it is important
to let the stage to stabilize at room temperature for at least 12 hours. It is important to clean the stage by blow-
ing it off with pressurized nitrogen or clean, oil-less air. If the granite surfaces need cleaned, they can be
cleaned with a waterless granite cleaner available from most granite suppliers.
Before the stage can be operated, the shipping clamps must be removed. These are the only red anodized
parts on the stage and must all be removed.
To lift the stage, use a forklift and lift the granite from below. There are typically threaded inserts in the sides
of the granite block, but they should only be used for lifting if absolutely necessary. Consult the factory for
more details on lifting if a forklift is unavailable.
Each stage has a label listing the system part number and serial number. These numbers contain information
necessary for maintaining or updating system hardware and software. Locate this label and record the infor-
mation for later reference. If any damage has occurred during shipping, report it immediately.
Do not attempt to move the stage until the air supply, detailed inSection 2.6. , has been
installed. Moving the stage table without air supplied can cause permanent damage to the
stage.
Do not manually lift or transport the stages.
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Installation ABL/ABLH9000 Series Stage User's Manual
2.2. Preparing the Mounting Surface
The ABL/ABLH9000 is supplied on its own granite base. This base should be supported on a non-influencing
3-point mount or other suitable isolation system. Contact the factory for detailed assistance.
2.3. Securing the Stage to the Mounting Surface
All ABL/ABLH9000 stages come mounted to a granite slab from the factory. This granite is not only a part of
the air bearing system, but also eliminates the need for a customer-prepared flat mounting surface. The
mounting scheme of the granite base will depend on stage size and configuration. Consult the doc-
umentation delivered with the stage or the factory for more details on mounting.
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ABL/ABLH9000 Series Stage User's Manual Installation
2.4. Attaching the Payload to the Stage
To prevent damage to payloads, test the operation of the stage before the payload is attached to the stage
table. Proceed with the electrical installation and test the motion control system in accordance with the sys-
tem documentation. Document all results for future reference. For information on electrical connections, refer
to Section 2.5. and the documentation delivered with the stage.
The payload should be flat, rigid, and comparable to the stage in quality.
N O T E : For valid system performance, the mounting interface should be flat within 1 µm per 50 mm.
2.5. Electrical Installation
Stages come from the factory completely wired and assembled. Due to the custom nature of the
ABL/ABLH9000 series stages, there is no standard wiring procedure. Each ABL/ABLH9000 stage is shipped
with documentation regarding the stage wiring, controller interface connectors, and specs for each particular
stage.
Never connect or disconnect any electrical component or connecting cable while power is
applied, or serious damage can result.
2.6. Air Requirements
The air and vacuum supplies to the air bearing are important for the operation of the system. If compressed air
is used, it must be filtered to 0.25 microns, dry to 0ºF dewpoint, and oil free. If nitrogen is used, it must be
99.99% pure and filtered to 0.25 microns. Air pressure of 80 psi, ±5 psi, is necessary for use. Air should be
supplied via a 1/4" OD (1/8” ID) polyurethane air hose. It is recommended that a pressure switch is installed
to remove power from the air bearing if pressure drops below 40 psi because the bearing surfaces could be
damaged. Vacuum requirements are between 20” Hg and 24” Hg (approx. 1/8 hp pump). The stage can be run
without vacuum, but accuracy will be severely affected.
An air flow rate of .65 CFM at 80 psi should be observed, as well as a vacuum flow rate of .23 CFM at 22” Hg.
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ABL/ABLH9000 Series Stage User's Manual Operating Specifications
Chapter 3: Operating Specifications
This chapter contains general technical information about ABL/ABLH9000 series stages. Included are basic
product specifications and general information on limit switches and motor wiring.
3.1. Environmental Specifications
The environmental specifications for the ABL/ABLH9000 are listed in the following table.
Table 3-1: Environmental Specifications
Ambient
Temperature
Operating: 16° to 25° C (61° to 77° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the operating tem-
perature deviates from 20° C degradation in performance could occur. Contact Aerotech for
information regarding your specific application and environment.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 40 percent to 60 percent RH
The optimal operating humidity is 50 percent RH.
Storage: 30 percent to 60 percent RH, non-condensing in original packaging
Altitude Operating: 0 to 2,000 m (0 to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration can affect
stage and system performance. Contact Aerotech for information regarding your specific appli-
cation.
Dust Expo-
sure
The ABL/ABLH9000 stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
Do not expose the stage to environments or conditions outside the specified range of oper-
ating environments. Operation in conditions other than those specified can cause damage to
the equipment.
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Operating Specifications ABL/ABLH9000 Series Stage User's Manual
3.2. Basic Specifications
Basic ABL/ABLH9000 series positioning stage specifications are shown in Table 3-2. Motor specifications
are shown in Table 3-4.
Table 3-2: ABL/ABLH9000 Series Specifications
Basic Model ABL90300-300 ABL90500-500
Total Travel 300 mm x 300 mm 500 mm x 500 mm
Drive System Linear Brushless Servomotor
(Bridge Axis: BLM-142-A, Gantry Axis: BLM-142-A)
Feedback Noncontact Linear Encoder (LN) or Laser Inter-
ferometer (LZR)
Resolution 1 nm - 1.0 µm
Maximum Travel Speed(1) 500 mm/s
Maximum Linear Acceleration (no load) 1 g - 10 m/s2
Maximum Load(2) 30.0 kg
Accuracy (3) LN ±0.5 µm ±0.75 µm
LZR Standard ±10 ppm; Com-
pensated ±1.5 ppm(4) Contact Aerotech for fur- ther details
Repeatability(3) LN ±0.1 µm
Straightness and Flat-
ness(5) Maximum Deviation ±0.50 µm ±1.5 µm
Pitch/Roll/Yaw 2 arc sec 3.5 arc sec
Stage Mass 320 kg 690 kg
Moving Mass Bridge 9.5 kg
Gantry 44.0 kg 57.0 kg
Orthogonality 2 arc sec 3 arc sec
Operating Pressure(6) 551.6 kPa + 0, -34 kPa
Air Consumption(7) 45 SLPM
Material(8) Aluminum
Finish Hard Coating (62 Rockwell Hardness Teflon® Impreg-
nated)
(1) Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system res-
olution.
(2) Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
(3) Requires Aerotech controllers and HALAR Calibration option.
(4) Requires environmental compensation.
(5) Requires HALSF option
(6) To protect air bearing against under-pressure, an in-line pressure switch tied to controller E-stop input isrecommended.
(7) Air supplymust be clean, dry to 0° F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
(8) Optional construction materials include ceramic, invar, stainless, and titanium.
(9) Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload
and workpoint dependent. Consult factory for multi-axis or non-standard applications.
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