Aerotech ECO165SL Series User manual

Revision 2.01
ECO165SL Series Mechanical Bearing,
Ball-Screw Stage
HARDWAREMANUAL

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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2016-2022, Aerotech, Inc., All rights reserved.

Table of Contents
ECO165SL Series Mechanical Bearing, Ball-Screw Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 6
Safety Procedures and Warnings 7
Installation and Operation 8
Electrical Warnings 9
Motor-Related Warnings 10
Pinch Points 11
Handling and Storage 12
Chapter 1: Overview 15
1.1. Environmental Specifications 17
1.2. Accuracy and Temperature Effects 17
1.3. Basic Specifications 18
1.4. Vacuum Operation 20
Chapter 2: Installation 21
2.1. Dimensions 21
2.2. Securing the Stage to the Mounting Surface 24
2.3. Attaching the Payload to the Stage 25
Chapter 3: Electrical Installation 28
3.1. Motor and Feedback Connectors 29
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 36
3.4. Limits, Marker, and Machine Direction 40
3.5. Motor and Feedback Phasing 41
Chapter 4: Maintenance 43
4.1. Service and Inspection Schedule 43
4.2. Cleaning and Lubrication 44
4.3. Motor Mounting 48
4.4. Belt Adjustment 51
4.5. Troubleshooting 54
Appendix A: Warranty and Field Service 55
Appendix B: Revision History 57
Index 59
ECO165SL Hardware Manual Table of Contents
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List of Figures
Figure 2-1: ECO165SL Dimensions 21
Figure 2-2: Tabletop Accessory Dimensions (-TT3 Option) 22
Figure 2-3: Z-Axis Bracket Dimensions 23
Figure 2-4: Stage Orientations 26
Figure 2-5: Cantilevered Load Capability 27
Figure 2-6: Load Torque Equation 27
Figure 2-7: Torque Required to Turn Ball Screw in Vertical Orientation 27
Figure 3-1: Brushless Motor and Feedback Wiring [-M1 through -M8 Options] 34
Figure 3-2: Stepper Motor and Feedback Wiring [-M9 and -M10 Options] 35
Figure 3-3: Machine Direction 40
Figure 3-4: Hall Phasing Diagram 41
Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) 42
Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) 42
Figure 4-1: Hardcover Screw Removal 46
Figure 4-2: Hardcover Removal 47
Figure 4-3: Motor Mounting Overview 48
Figure 4-4: Attach the Coupling Adapter to the Motor Shaft 49
Figure 4-5: Attach the Motor the Stage 49
Figure 4-6: Tighten the Shaft Coupling to the Drive Screw 50
Figure 4-7: Foldback Motor Cover Removal 52
Figure 4-8: Foldback Motor Part Callouts 53
Figure 4-9: Lubricate the Pulley Flanges 53
List of Figures ECO165SL Hardware Manual
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List of Tables
Table 1-1: Model Numbers and Ordering Options 15
Table 1-2: Environmental Specifications 17
Table 1-3: ECO165SL Series Specifications (-050 to -250) 18
Table 1-4: ECO165SL Series Specifications (-300 to -600) 19
Table 2-1: Stage Mounting Surface Flatness Requirement 24
Table 2-2: Stage to Mounting Surface Hardware 24
Table 3-1: Brushless Motor Connector Pinout [-M1 to -M8] 30
Table 3-2: Mating Connector Part Numbers for the Brushless Motor Connector 30
Table 3-3: Stepper Motor Connector Pinout [-M9 and -M10] 30
Table 3-4: Mating Connector Part Numbers for the Stepper Motor Connector 30
Table 3-5: Brushless Motor Feedback Connector Pinout [-M1 to -M8] 31
Table 3-6: Mating Connector Part Numbers for the Brushless Motor Feedback Connector 31
Table 3-7: Stepper Motor Feedback Connector Pinout [-M9 and -M10] 32
Table 3-8: Mating Connector Part Numbers for the Stepper Motor Feedback Connector 32
Table 3-9: Limit Connector Wiring 33
Table 3-10: Mating Connector Part Numbers for the Limit Connector 33
Table 3-11: Hall-Effect Sensor Specifications 36
Table 3-12: Thermistor Specifications (BMSMotor Options) 36
Table 3-13: Encoder Specifications 36
Table 3-14: Limit Switch Specifications 36
Table 3-15: Brake Specifications 36
Table 3-16: ECO165SL Motor Specifications (BMS100) 37
Table 3-17: ECO165SL Motor Specifications (BM130) 38
Table 3-18: ECO165SL Motor Specifications (SM100-VT2) 39
Table 3-19: Rotary Encoder Specifications for ECO165SLStages 39
Table 4-1: Hardware Requirements 48
ECO165SL Hardware Manual List of Tables
www.aerotech.com 5

EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ECO165SL Linear Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 4/14/2022
EU Declaration of Incorporation ECO165SL Hardware Manual
6 www.aerotech.com

Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
Shock/Electrocution Hazard Pinch, Shear, or Crush Hazard
General/Conditional Awareness Rotational Machinery Hazard
Hot Surface Hazard Pinch/Entanglement Hazard
Magnetic Field Hazard Trip Hazard
Heavy, Bulky Lifting Hazard Appropriate Equipment Required
Pressure/Explosive Atmosphere
Hazard Electrostatic Discharge Hazard
A blue circle symbol is an action or tip that you should obey. Some examples include:
General tip Read the manual/section
Wear personal protective equipment
(PPE): Safety Glasses If applicable, do not lift unassisted
Wear personal protective equipment
(PPE): Gloves
Wear personal protective equipment
(PPE): Hearing Protection
ECO165SL Hardware Manual Safety Procedures and Warnings
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Installation and Operation
To decrease the risk of damage to the equipment, you must obey the precautions that follow.
DANGER: General Hazard Warning!
This product can produce high forces and move at velocities that could cause injury.
The user is responsible for its safe operation. The following general equation is
provided to assist with risk assessments in regards to contact and pinch points:
WARNING: General Hazard Warning!
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lOn stages with BMSmotors: the motor over-temperature sensor must be monitored
by the drive. Use it to shut down the drive if the motor overheats.
lMake sure that the product is securely mounted before you operate it.
lMake sure that all pneumatic lines are securely connected.
lUse care when you move the ECO165SL or you could negatively affect the per-
formance of it.
WARNING:Trip Hazard!
Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could
introduce trip hazards around the system that could result in physical injury or could
damage the equipment.
Installation and Operation ECO165SL Hardware Manual
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Electrical Warnings
To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the
precautions that follow.
DANGER: Electrical Shock Hazard!
lStage motor phase voltage levels could be hazardous live.
lPersonnel are protected from hazardous voltages unless electrical interconnections,
protective bonding (safety ground), or motor/stage enclosures are compromised.
lDo not connect or disconnect stage/motor interconnections while connected to a live
electrical power source.
lBefore you set up or do maintenance, disconnect electrical power.
lIt is the responsibility of the End User/System Integrator to make sure that stages are
properly connected and grounded per Engineering Standards and applicable safety
requirements.
lIt is the responsibility of the End User/System Integrator to configure the system
drive or controller within the Aerotech motor/stage electrical and mechanical
specifications.
ECO165SL Hardware Manual Electrical Warnings
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Motor-Related Warnings
Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all
applicable codes and standards when you operate a system that incorporates Aerotech motors.
DANGER: Mechanical Hazard!
Personnel must be made aware of the mechanical hazards during set up or when you
do service to the stage.
lUnintentional manual movement into the stage "end-of-travel" stops, could damage
the stage or undo precision alignments.
lStage movement could create pinch points, entanglement hazards, or rotational
mechanical hazards.
DANGER: Hot Surface Hazard!
lThe stage/motor frame temperature could exceed 70°C in some applications.
lDo not touch the stage/motor frame while it is in operation.
lWait until the stage/motor has cooled before you touch it.
Figure 1: Motor Location
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as air-born dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
DANGER: Magnetic Field Hazard!
Aerotech stage/motors contain magnets which can present a Magnetic Field Hazard.
lDo not disassemble a stage motor under any circumstances.
lStrong magnetic fields could interfere with external/internal medical devices.
lStrong magnetic fields could present mechanical hazards such as pinch points.
Motor-Related Warnings ECO165SL Hardware Manual
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Pinch Points
A pinch point is a mechanical hazard that can occur when there are exposed parts of the stage or
system that can move. For example, the travel of a stage tabletop could expose the user to a pinch
point between the tabletop and the stage housing. The images that follow will show you typical
external and internal pinch point locations.
DANGER: Mechanical Hazard!
lSystem travel can cause crush, shear, or pinch injuries.
lOnly trained operators should operate this equipment.
lDo not put yourself in the travel path of machinery.
lRestrict access to all motor and stage parts
owhen the system moves under power (during normal operation, for example).
owhen the system is moved manually (during the installation process or when you
do maintenance, for example).
lMotors are capable of very high speeds and acceleration rates.
Figure 2: Typical Pinch Point Locations
ECO165SL Hardware Manual Pinch Points
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Handling and Storage
IMPORTANT: It is the responsibility of the customer to safely and carefully lift and
move the stage.
lBe careful when you move or transport the stage.
lRetain the shipping materials for future use.
lTransport or store the stage in its protective packaging.
WARNING: Electrostatic Discharge (ESD) Sensitive Components!
Wear an ESDwrist strap when you handle, install, or do service to the system assembly.
You could damage the power supply or drives if you fail to observe the correct
ESDpractices.
Inspect the shipping container for any evidence of shipping damage. If any damage exists, notify the
shipping carrier immediately.
Remove the packing list from the shipping container. Make sure that all the items specified on the
packing list are contained within the package.
The documentation for the stage is on the included installation device. The documents include
manuals, interconnection drawings, and other documentation pertaining to the system. Save this
information for future reference.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Unpacking and Handling
It is the responsibility of the customer to safely and carefully lift and move the stage.
IMPORTANT: All electronic equipment and instrumentation is wrapped in antistatic
material and packaged with desiccant. Ensure that the antistatic material is not
damaged during unpacking.
DANGER:Lifting Hazard! Use care when you move the ECO165SL or you could
negatively affect the performance of it.
lUse the correct lifting techniques, mechanical assistance, or additional help to lift or
move this product.
lDo not use the cables or the connectors to lift or move this product.
lMake sure that all moving parts are secure before you move the stage. Unsecured
moving parts could shift and cause injury or damage to the equipment.
lIf the stage is heavy, a single person lift could cause injury. Use assistance when you
lift or move it.
oRefer to Section 2.1. Dimensions for dimensions
oRefer to Section 1.3. Basic Specificationsfor weight specifications.
Carefully remove the stagefrom its protective shipping container.
lLift this product only by the base.
lUse lifting hardware if it has been provided (refer to Figure 3).
lFor multi-axis assemblies, always lift the system by the lower axis.
lUse a cart, dolly, or similar device to move the stage to a new location.
Handling and Storage ECO165SL Hardware Manual
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Gently set the stage on a smooth, flat, and clean surface. Use compressed nitrogen or clean, dry, oil-
free air to remove any dust or debris that has collected during shipping.
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will
ensure that all of the alignments, preloads, and tolerances are the same as they were when they
were tested at Aerotech.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Lifting Features
The lifting kit includes four eyebolts and four standoffs. Thread the eyebolts onto the standoffs and
thread the standoffs into the stage base. Remove the lifting hardware by turning a wrench on the
flats of the standoffs (see Figure 3). If the stage is part of a multi-axis system, the lifting hardware
should be attached to the lower axis. The lifting hardware must be removed before the stage can be
operated.
Figure 3: Lifting Features
Storage
Store the stage in the original shipping container. If the original packaging included ESDprotective
packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of
vibrations, and flat.
Refer to Section 1.1. Environmental Specifications
ECO165SL Hardware Manual Handling and Storage
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Handling and Storage ECO165SL Hardware Manual
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Chapter 1: Overview
Table 1-1: Model Numbers and Ordering Options
ECO165SL Mechanical-Bearing Screw-Driven Linear Stage
Travel
-050 50 mm travel stage
-100 100 mm travel stage
-150 150 mm travel stage
-200 200 mm travel stage
-250 250 mm travel stage
-300 300 mm travel stage
-400 400 mm travel stage
-500 500 mm travel stage
-600 600 mm travel stage
Tabletop (Optional)
-TT1 Tabletop with metric dimension mounting
-TT2 Tabletop with English dimension mounting
-TT3 Accessory tabletop with mounting for select rotary stages
Motor (Optional)
-M1 BMS100 Brushless Servomotor and 2500-Line TTL Encoder
-M2 BMS100 Brushless Servomotor, 2500-Line TTL Encoder, and Brake
-M3 BMS100 Brushless Servomotor and 1000-Line 1 Vpp Encoder
-M4 BMS100 Brushless Servomotor, 1000-Line 1 Vpp Encoder, and Brake
-M5 BM130 Brushless Servomotor and 2500-Line TTL Encoder
-M6 BM130 Brushless Servomotor, 2500-Line TTL Encoder, and Brake
-M7 BM130 Brushless Servomotor and 1000-Line 1 Vpp Encoder
-M8 BM130 Brushless Servomotor, 1000-Line 1 Vpp Encoder, and Brake
-M9 SM100 High Voltage Stepper Motor
-M10 SM100 High Voltage Stepper Motor and Brake
Foldback (Optional)
-FB1 Foldback Kit for .250 Inch Diameter Shaft NEMA 23 Motor
-FB2 Foldback Kit with Brake for .250 Inch Diameter Shaft NEMA 23 Motor
-FB3 Foldback Kit for .375 Inch Diameter Shaft NEMA 23 Motor
-FB4 Foldback Kit with Brake for .375 Inch Diameter Shaft NEMA 23 Motor
Motor Orientation (Optional)
-2 Bottom cable exit (optional orientation)
-3 Left side cable exit (standard orientation)
-4 Top cable exit (optional orientation)
-5 Right side cable exit (optional orientation)
-8 Right side foldback (standard orientation)
-12 Left side foldback (optional orientation)
ECO165SL Hardware Manual Chapter 1: Overview
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ECO165SL Mechanical-Bearing Screw-Driven Linear Stage (continued)
Limits (Required)
-LI1 Normally-closed limit switches, 5 VDC with 9-pin D connector
-LI2 Normally-open limit switches, 5 VDC with 9-pin D connector
Coupling (Optional)
-CP1 Coupling for 0.250 in diameter shaft
-CP2 Coupling for 0.375 in diameter shaft
LiftingHardware (Optional)
-LF Lifting hardware
NOTE: Lifting option only available on travels 400 mm and greater; lifting should never by ordered on the upper-axis of an
XY set (only order on lower-axis)
Metrology (Required)
-PL0 No Metrology Performance Plots
-PL1 Uncalibrated with Performance Plots
-PL2 Calibrated with Performance Plots
Accessories (ordered as a separate line item)
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality; alignment to within 7 µm orthogonality for short
travel stages
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality; alignment to within 10 µm
orthogonality for short travel stages
ALIGN-PA5 XY assembly; 5 arc sec orthogonality; alignment to within 3 µm orthogonality for short
travel stages
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality; alignment to within 5 µm
orthogonality for short travel stages
HDZ165 Right angle L-bracket for 50 mm, 100 mm, and 150 mm travels only;
NOTE: Requires a tabletop when mounting to an ECO series stage
Chapter 1: Overview ECO165SL Hardware Manual
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1.1. Environmental Specifications
WARNING:General Hazard Warning! Do not expose this product to environments or
conditions outside of the listed specifications. You could damage the equipment if you
exceed the environmental or operating specifications.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as air-born dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
The stage should be packaged with desiccant if it is to be stored for an extended
time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration Use the system in a low vibration environment. Floor or acoustical vibration can
affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating These stages have an ingress protection rating of IP10.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes
could cause a decrease in performance or permanent damage to the stage. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage
specifications are repeatable over an extended period of time. The severity of temperature effects
on all specifications depends on many different environmental conditions, which include how the
stage is mounted. Contact the factory for more details.
The accuracy specification of stage is measured 25 mm above the table with the stage in an
unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.2.
The accuracy of the screw is a key element in the overall positioning accuracy of the SLstage. A scale
error can be expected if temperature of the screw differs from 20° C (68° F). The greater the
temperature difference, the greater the error. The temperature of the screw depends on the speed
and duty cycle of the stage. The faster the movement and higher the duty cycle, the more the stage
accuracy will be affected by heat. The thermal expansion coefficient of the screw is 11.7 ppm/°C.
ECO165SL Hardware Manual 1.1. Environmental Specifications
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1.3. Basic Specifications
Resolution is dependent on screw pitch, encoder resolution, and controller interpolation.
Table 1-3: ECO165SL Series Specifications (-050 to -250)
-050 -100 -150 -200 -250
Travel 50 mm 100 mm 150 mm 200 mm 250 mm
Accuracy (1) Standard ±6 µm ±6 µm ±8 µm ±8 µm ±9 µm
Calibrated ±1 µm ±1.25 µm ±1.5 µm ±1.75 µm ±2 µm
Resolution
(Minimum Incremental Motion) 0.2 µm (2), 0.75 µm (3)
Bidirectional Repeatability (1) ±4 μm ±4 μm ±4 μm ±4.5 μm ±4.5 μm
Straightness (1) ±2 μm ±3 μm ±4 μm ±5 μm ±6 μm
Flatness (1) ±2 μm ±3 μm ±4 μm ±5 μm ±6 μm
Pitch 35 μrad
(7.2 arc sec)
40 μrad
(8.3 arc sec)
40 μrad
(8.3 arc sec)
50 μrad
(10.3 arc sec
60 μrad
(12.4 arc sec)
Roll 35 μrad
(7.2 arc sec)
40 μrad
(8.3 arc sec)
40 μrad
(8.3 arc sec)
50 μrad
(10.3 arc sec)
60 μrad
(12.4 arc sec)
Yaw 35 μrad
(7.2 arc sec)
40 μrad
(8.3 arc sec)
40 μrad
(8.3 arc sec)
50 μrad
(10.3 arc sec)
60 μrad
(12.4 arc sec)
Maximum Speed (4) 300 m/s
Maximum Acceleration (4) Function of motor, amplifier, payload, and maximum axial load
Load Capacity (5)
Horizontal 45 kg
Vertical
(Axial) 25 kg
Side 45 kg
Moving Mass with tabletop 2.8 kg
Stage Mass with no motor 5.4 kg 5.8 kg 6.3 kg 6.8 kg 7.3 kg
Material Anodized Aluminum
Mean Time Before Failure 20,000 Hours
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
1.3. Basic Specifications ECO165SL Hardware Manual
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Table 1-4: ECO165SL Series Specifications (-300 to -600)
-300 -400 -500 -600
Travel 300 mm 400 mm 500 mm 600 mm
Accuracy (1) Standard ±38 μm ±43 μm ±45 μm ±48 μm
Calibrated ±5.5 μm ±6 μm ±6 μm ±7 μm
Resolution
(Minimum Incremental Motion) 0.2 µm (2), 0.75 µm (3)
Bidirectional Repeatability (1) ±4.5 μm ±5 μm ±5 μm ±5 μm
Straightness (1) ±7 μm ±9 μm ±11 μm ±13 μm
Flatness (1) ±7 μm ±9 μm ±11 μm ±13 μm
Pitch 65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Roll 65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Yaw 65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Maximum Speed (4) 300 m/s
Maximum Acceleration (4) Function of motor, amplifier, payload, and maximum axial load
Load Capacity (5)
Horizontal 45 kg
Vertical
(Axial) 25 kg
Side 45 kg
Moving Mass with tabletop 2.8 kg
Stage Mass with no motor 7.8 kg 8.7 kg 9.7 kg 10.6 kg
Material Anodized Aluminum
Mean Time Before Failure 20,000 Hours
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
ECO165SL Hardware Manual 1.3. Basic Specifications
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1.4. Vacuum Operation
There are two vacuum preparation options:
lLow Vacuum (for use in atmospheric pressures to 10-3 Torr)
lHigh Vacuum (preparation for environments from 10-3 to 10-6 Torr).
Special preparations include:
lParts are lubricated with vacuum-compatible lubricants.
lMaterials, fasteners, and coatings are selected to be compatible with the specified level of
vacuum.
lHigh-vacuum systems are designed to eliminate trapped volumes.
lPrior to assembly, stage parts are thoroughly cleaned in a clean environment.
lThe stage is packaged in a special polyethylene bag.
Vacuum Guidelines
To ensure that the stage will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines
outlined in this manual).
1. Do not remove the stage from its sealed bag until it is ready to use.
2. Always handle the stage in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the stage.
3. During installation, use cleaned, vented, stainless steel fasteners to secure the stage.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the
viscous vacuum-compatible lubricants, could result in excessive motor operating temperatures.
Because of this, consider all continuous torque ratings to be 40 to 60% lower than the value
specified for operation in normal atmospheric environment. Reduce motor usage accordingly.
5. We recommend that you use a small quantity of Braycote® 602EF grease or a compatible
substitute of equal quality lubricant in vacuum applications.
6. To reduce outgassing during the initial pump-down to vacuum pressure, Aerotech recommends
that you bake out vacuum systems when you first install them into the vacuum chamber. Bake
the vacuum components at 60 °C for 24 to 48 hours to desorb water vapor from surfaces and
degas polymers (such as cable insulation).
1.4. Vacuum Operation ECO165SL Hardware Manual
20 www.aerotech.com