Agilent Technologies B1500A Installation guide

Self-paced Training Manual
Agilent B1500A Semiconductor Device Analyzer
Agilent EasyEXPERT Software

Self-paced Training Manual
Agilent B1500A Semiconductor Device Analyzer
Agilent EasyEXPERT Software

In This Manual
1. Introduction
2. Performing Easy Tests
3. Data Display and Management
4. Modifying Application Test Definitions
5. Using Classic Test Environment
6. Creating Your Test Definitions
7. Advanced Definitions and Operations
8. Miscellaneous Operations
Notices
© Agilent Technologies 2005, 2006
No part of this manual may be reproduced in any form or by any means (including electronic storage and
retrieval or translation into a foreign language) without prior agreement and written consent from
Agilent Technologies, Inc. as governed by United States and international copyright laws.
Manual Part Number
B1500-90041
Edition
Edition 1, September 2005
Edition 2, May 2006
Agilent Technologies, Inc.
395 Page Mill Road
Palo Alto, CA 94303 USA

1-1
Module 1. Introduction

1-2
In This Module
•New Features
•EasyEXPERT
•To Perform Easy Application Test
•User Interface
•Modular Mainframe
•SCUU/GSWU
•ASU
•B2200 Switch Control
•Desktop EasyEXPERT
•415x Setup File Converter
Note:

1-3
Comprehensive
application
library
Revolutionary
EasyEXPERT
environment
Semi-auto
prober control
10 Slots
variable module
configuration
SCUU/GSWU
for IV/CV
combination
Touch-screen
w/optional
USB keyboard
& mouse
Agilent B1500A Semiconductor Device Analyzer
B2200 switch
control
415x setup file
converter
ASU for
100 aA
The B1500A has many exciting new features and capabilities.

1-4
New Features
• EasyEXPERT software
• Application test environment (> 150 algorithms)
• Classic test environment – 415x like setup
• Quick test environment – multiple test execution
• Semi-auto prober control and B2200 switch control
• Modular mainframe
•MFCMUforC-Vsweep
• HPSMU, HRSMU, MPSMU for I/V sweep/sampling
• SMU CMU Unify Unit (SCUU)/Guard Switch Unit (GSWU)
• switching effortlessly between IV and CV measurement
• Atto Sense/Switch Unit (ASU)
• 100 aA level low current measurement
• Touch-screen, knob, and softkeys
• optional USB keyboard, mouse, and stylus pen
The EasyEXPERT software
•Task-oriented, “top-down” approach to device characterization
•Multiple test execution
•Automatic measurement, auto-analysis functions
•Test sequencing without programming
Application Library (>150 algorithms)
•Categorized and organized
•Easy-to-use
415x setup file converter program
Versatile Modular Mainframe
•Flexible & Expandable (10 slots)
•Multiple SMU types
•Atto-sense and Switch Unit (ASU)
•Multi-Frequency CMU
•SMU CMU Unify Unit for IV/CV Probing
•4.2 Amp Ground Unit
Convenient User Interface
•Touch screen operation (with optional stylus pen)
•Contextual softkeys & knob control
•Optional USB keyboard & mouse

1-5
EasyEXPERT
Measurement
Measurement
resources
resources
V/I on terminals
V/I on terminals
Device parameters
Device parameters
Device type
Device type
Technology
Technology
classifications
classifications
Vth Idon Idoff gm Igleak Rg
Vg Vd Vs Vsub
Ig Id Is Isub
SMU1 SMU2 SMU3 SMU4
Mode
V
I
Mode
V
I
Mode
V
I
Mode
V
I
GaAs WLR Nano-
tech
CMU
Mode
AC V
range
MOS
FET Res. Cap.
Bipolar
Tr
CMOS
Instead of setting up the instrument hardware, the EasyEXPERT software focuses on the real task
at hand for the engineer ---device characterization. All that you need to do is to connect the
instrument to the device terminals as shown in the EasyEXPERT test parameters area.
The EasyEXPERT software also provides the classic test mode that allows the 4155/4156 like
measurement setup operation.

1-6
To Perform Easy Application Test
List of test record
Step 1: Click Application Test tab.
Step 2: Select one or more technology categories, and select a desired test from the list of tests
associated with the selected technology categories.
Step 3: Change the setup parameters (Device parameters and Test parameters) if you want.
Step 4: Connect DUT, and click the Start button. The B1500A starts the selected test.
Step 5: Analyze the measurement result data displayed on the Data Display window automatically
opened after the test.
The measurement result record is automatically stored in the internal hard disk drive when the
Auto Recode mode is ON.

1-7
User Interface
•Touch panel
•Stylus pen (option)
•Rotary knob
•Softkeys
•USB keyboard (option)
•USB mouse (option)