Agilent Technologies B1500A Installation guide

Self-paced Training Manual
Agilent B1500A Semiconductor Device Analyzer
Agilent EasyEXPERT Software

Self-paced Training Manual
Agilent B1500A Semiconductor Device Analyzer
Agilent EasyEXPERT Software

In This Manual
1. Introduction
2. Performing Easy Tests
3. Data Display and Management
4. Modifying Application Test Definitions
5. Using Classic Test Environment
6. Creating Your Test Definitions
7. Advanced Definitions and Operations
8. Miscellaneous Operations
Notices
© Agilent Technologies 2005, 2006
No part of this manual may be reproduced in any form or by any means (including electronic storage and
retrieval or translation into a foreign language) without prior agreement and written consent from
Agilent Technologies, Inc. as governed by United States and international copyright laws.
Manual Part Number
B1500-90041
Edition
Edition 1, September 2005
Edition 2, May 2006
Agilent Technologies, Inc.
395 Page Mill Road
Palo Alto, CA 94303 USA

1-1
Module 1. Introduction

1-2
In This Module
•New Features
•EasyEXPERT
•To Perform Easy Application Test
•User Interface
•Modular Mainframe
•SCUU/GSWU
•ASU
•B2200 Switch Control
•Desktop EasyEXPERT
•415x Setup File Converter
Note:

1-3
Comprehensive
application
library
Revolutionary
EasyEXPERT
environment
Semi-auto
prober control
10 Slots
variable module
configuration
SCUU/GSWU
for IV/CV
combination
Touch-screen
w/optional
USB keyboard
& mouse
Agilent B1500A Semiconductor Device Analyzer
B2200 switch
control
415x setup file
converter
ASU for
100 aA
The B1500A has many exciting new features and capabilities.

1-4
New Features
• EasyEXPERT software
• Application test environment (> 150 algorithms)
• Classic test environment – 415x like setup
• Quick test environment – multiple test execution
• Semi-auto prober control and B2200 switch control
• Modular mainframe
•MFCMUforC-Vsweep
• HPSMU, HRSMU, MPSMU for I/V sweep/sampling
• SMU CMU Unify Unit (SCUU)/Guard Switch Unit (GSWU)
• switching effortlessly between IV and CV measurement
• Atto Sense/Switch Unit (ASU)
• 100 aA level low current measurement
• Touch-screen, knob, and softkeys
• optional USB keyboard, mouse, and stylus pen
The EasyEXPERT software
•Task-oriented, “top-down” approach to device characterization
•Multiple test execution
•Automatic measurement, auto-analysis functions
•Test sequencing without programming
Application Library (>150 algorithms)
•Categorized and organized
•Easy-to-use
415x setup file converter program
Versatile Modular Mainframe
•Flexible & Expandable (10 slots)
•Multiple SMU types
•Atto-sense and Switch Unit (ASU)
•Multi-Frequency CMU
•SMU CMU Unify Unit for IV/CV Probing
•4.2 Amp Ground Unit
Convenient User Interface
•Touch screen operation (with optional stylus pen)
•Contextual softkeys & knob control
•Optional USB keyboard & mouse

1-5
EasyEXPERT
Measurement
Measurement
resources
resources
V/I on terminals
V/I on terminals
Device parameters
Device parameters
Device type
Device type
Technology
Technology
classifications
classifications
Vth Idon Idoff gm Igleak Rg
Vg Vd Vs Vsub
Ig Id Is Isub
SMU1 SMU2 SMU3 SMU4
Mode
V
I
Mode
V
I
Mode
V
I
Mode
V
I
GaAs WLR Nano-
tech
CMU
Mode
AC V
range
MOS
FET Res. Cap.
Bipolar
Tr
CMOS
Instead of setting up the instrument hardware, the EasyEXPERT software focuses on the real task
at hand for the engineer ---device characterization. All that you need to do is to connect the
instrument to the device terminals as shown in the EasyEXPERT test parameters area.
The EasyEXPERT software also provides the classic test mode that allows the 4155/4156 like
measurement setup operation.

1-6
To Perform Easy Application Test
List of test record
Step 1: Click Application Test tab.
Step 2: Select one or more technology categories, and select a desired test from the list of tests
associated with the selected technology categories.
Step 3: Change the setup parameters (Device parameters and Test parameters) if you want.
Step 4: Connect DUT, and click the Start button. The B1500A starts the selected test.
Step 5: Analyze the measurement result data displayed on the Data Display window automatically
opened after the test.
The measurement result record is automatically stored in the internal hard disk drive when the
Auto Recode mode is ON.

1-7
User Interface
•Touch panel
•Stylus pen (option)
•Rotary knob
•Softkeys
•USB keyboard (option)
•USB mouse (option)

1-8
Modular Mainframe
10 module slots
B1510A HPSMU
GNDU: 4.2 A
N1301A-100 SCUU
N1301A-200 GSWU
E5288A ASU
B1517A HRSMU
B1511A MPSMU
B1520A CMU
The following modules and accessories are available for the B1500A:
•B1520A CMU: 1 kHz to 5 MHz CV capability (1 slot)
•B1511A MPSMU: 100 mA/100 V force capability, 10 fA/0.5 mV measurement resolution (1 slot)
•B1517A HRSMU: 100 mA/100 V force capability, 1 fA/0.5 mV measurement resolution (1 slot)
•B1510A HPSMU: 1 A/200 V force capability, 10 fA/2 mV measurement resolution (2 slots)
•N1301A-100/102: SMU CMU unify unit (SCUU) & cable assembly
•N1301A-200/201/202: Guard switch unit (GSWU) & cable assembly
•E5288A ASU: 0.1 fA/0.5 mV measurement resolution with support for IV/CV switching
The ASU (Atto sense/switch unit) can be used with the HRSMU calibrated with it.
The SCUU can be used with the CMU (slot N), SMU (slot N-1), and SMU (slot N-2).
The GSWU can be used with the SCUU.

1-9
SCUU
CMU
SMU CMU
Unify Unit
(SCUU)
SCUU cable
Simple direct connection
between SMU/CMU and
manipulators (positioners)
SMU
SMU
GSWU
Force1 or
CMUH
Force2
or
CMUL
Source1
Source2
You have a very hard time switching between CV and IV measurements (you may actually devote
separate probe stations to CV and IV just to avoid having to change cables). In addition, great
care has to be taken when cabling to a capacitance meter to insure that all of the capacitance
measurements are properly compensated. The SCUU removes all of these worries and makes
connection simple and easy. In addition, the B1500A software automatically takes care of the
multiplexing based upon the type of algorithm selected from the front panel.
To install the SCUU near the manipulators/positioners, use the N1301A-102 SCUU cable.
To realize accurate capacitance measurement, use the N1301A-200/201/202 GSWU & cable.

1-10
GSWU
GSWU
SCUU
The GSWU must be connected to the outer conductors of the manipulators/positioners
connected to the Force1/CMUH and Force2/CMUL connectors of the SCUU. And the GSWU
control cable must be connected between the GSWU and the SCUU.
When the SMU paths are available for the manipulators/positioners, the GSWU opens between
the outer conductors. However, when the MFCMU paths are available, the GSWU connects them
together to make the return path of measurement current. This will reduce the signal path
impedance. And this is effective for the accurate capacitance measurement.
By using the EasyEXPERT software, cable length between the CMU and the SCUU is
automatically detected, and the GSWU switch control is automatically performed. Also,
capacitance error compensation is also automatically performed if the compensation data are
available.
The GSWU is effective for
•reducing the residual inductance of the measurement cable
•stabilizing the residual inductance when measurement cable distance is changed (moved)
It’s roughly 1/10 to 1/30 when used with two 80 cm cable.
Note:
When the SMU paths are available for the manipulators/positioners, the outer conductors must
be open because they must be connected to the SMU guard terminals that must be always open.

1-11
ASU
•100 aA level sensing
•Channel switching
•C measurements
•PG for charge pumping
HRSMU Force
HRSMU control
C meter Hcur
ASU2
ASU1
HRSMU Force
HRSMU control
C meter Hpot
C meter Lcur
C meter Lpot
Hcur/Hpot or Force
Lcur/Lpot or
Force
Source
Source
Return path for C meter
The high-resolution SMU (HRSMU) has an innate 1 fA & 0.5 mV measurement resolution. The
optional ASU extends the HRSMU measurement resolution to 0.1 fA.
The ASU has another feature, built-in switching capability. It can switch between the SMU and an
auxiliary input (AUX input, two BNC).
If the Agilent 4284A LCR meter is connected to the AUX inputs, the ASU can switch between the
low current and CV measurements. Then connect a wire between the CMU return terminals of
ASUs to make the return path of measurement current. This is effective for accurate capacitance
measurement. However, you need to perform capacitance compensation by yourself.

1-12
B2200 Switch Control
•Allows use of a probe card to facilitate probing of standardized device
modules (usually 24-pin configuration)
•Enables easy multiplexing between the triaxial outputs of SMUs and
the coaxial outputs of other (BNC-based) instruments and modules
Switching Matrix
Wafer Prober
Device Analyzer
8
6
12 - 48
Triaxial
(SMU) Triaxial
Coaxial
(CMU, other)
GPIB cable GPIB cable
Agilent B2200A/B2201A switching matrix can be controlled by B1500A/EasyEXPERT via GPIB.
EasyEXPERT provides the Switching Matrix Operation Panel for interactive control of B2200
independent from the test execution mode of B1500. And switch setup can be saved to a classic
test setup data. In the classic test, the switch setup is sent to B2200 when a measurement start
button is clicked.
B1500A/EasyEXPERT also provides the semi-auto prober control script. The semi-auto prober
can be controlled without programming. The prober control script supports the die move
operation by using the following first three procedures in the repeat measurement setup and adds
the subsite move operation by using the Subsite procedure in the quick test setup.
Prober control script:
•Start procedure
•Iteration procedure
•Final procedure
•Subsite procedure

1-13
Desktop EasyEXPERT Software
The Desktop EasyEXPERT software provides the following additional advantages to the B1500A,
allowing you to minimize the amount of offline tasks performed on B1500A and increase the
working ratio for measurements.
•Allows B1500A to be controlled from an external computer via GPIB while online.
•Allows test setup to be created on an external computer while offline.
•Allows data analysis to be performed on an external computer while offline.
To start Desktop EasyEXPERT, see Module 8.

1-14
415x Setup File Converter
4155/4156 setup file
(file extension: MES)
B1500A setup file
(file extension: XTS)
Execution example:
C:\Mydata>SetupFileConverter.exe setup1.mes
C:\Mydata>SetupFileConverter.exe *.mes
SetupFileConverter.exe Import
To control the B1500A, you can reuse the 4155/4156 setup file (.MES file) by converting the .MES
file to the EasyEXPERT setup file (.XTS file). The file conversion can be done by the
SetupFileConverter.exe file. To execute the file conversion, see Module 8.

2-1
Module 2. Performing Easy Tests

2-2
In This Module
•To Turn on/off B1500A
•To Launch EasyEXPERT
•To Specify/Create Workspace
•To Perform Application Test
•To Save/Recall Your Test Setup
•To Export/Import Your Preset Group
•To Export/Import Test Record
•To Perform Quick Test
•To Control B2200 Switching Matrix
•To Manage Data Display Window
This section explains the above tasks. You will understand how to launch B1500A/EasyEXPERT,
how to perform application test and quick test, and how to create your test setups and preset
groups.

2-3
To Turn on/off B1500A
The Standby button works to turn on the B1500A when it is turned off. When the B1500A is
turned on, the Standby button works to terminate the EasyEXPERT software, Windows, and turn
off the B1500A.
After the B1500A is turned on, log on Windows.
The default user is Agilent B1500 User with no password.