Agilent Technologies 5530 User manual

Agilent 5530 Dynamic Calibrator
Getting Started Guide

Agilent 5530 Dynamic Calibrator
Getting Started Guide

Agilent Technologies, Inc. 7.CD.L.03.11.97.R1.J.CW1FL
Santa Clara Site
5301 Stevens Creek Boulevard
Santa Clara, California 95052-8059
©Copyright Agilent
Technologies, Inc. 1992, 2000,
2001, 2008
All Rights Reserved.
Reproduction, adaptation, or
translations without prior
written permission is
prohibited, except as allowed
under the copyright laws.
Printed: October 13, 2008
Printed in USA
Manual part number
10747-90061
Certification
and Warranty
Certification
Agilent Technologies, Inc.
certifies that this product met
its published specification at the
time of shipment from the
factory. Agilent further certifies
that its calibration
measurements are traceable to
national standards
administeredby the U. S. NIST,
NRC Canada, Euromet
members (NPL, PTB, BNM,
etc.) or other recognized
standards laboratories.
Warranty
Agilent warrants Agilent
hardware, accessories and
supplies against defects in
materials and workmanship for
a period specified by each
product from date of shipment.
If Agilent receives notice of such
defects during the warranty
period, Agilent will, at its
option, either repair or replace
products which prove to be
defective. Replacement products
may be either new or like-new.
Agilent warrants that
Agilent software will not fail to
execute its programming
instructions, for the period
specified above, due to defects in
material and workmanship
when properly installed and
used.
If Agilent receives notice of such
defects during the warranty
period, Agilent will replace
software media which does not
execute its programming
instructions due to such defects.
For detailed warranty
information, see back matter.
Safety Considerations
General
This product and related
documentation must be
reviewed for familiarization
with this safety markings and
instructions before operation.
This product is a safety Class I
instrument (provided with a
protective earth terminal).
Before Applying Power
Verify that the product is set to
match the available line voltage
and the correct fuse is installed.
Refer to instructions in Chapter
1 of the Manual.
Before Cleaning
Disconnect the product from
operating power before
cleaning.
Safety Earth Ground
An uninterruptible safety earth
ground must be provided from
the mains power source to the
product input wiring terminals
or supplied power cable.
Safety Considerations
(contd)
Warning Symbols That May
Be Used In This Book
Instruction manual symbol; the
product will be marked with
this symbol when it is necessary
for the user to refer to the
instruction manual.
Indicates hazardous voltages.
Indicates earth (ground)
terminal.
or
Indicates terminal is connected
to chassis when such connection
is not apparent.
Indicates Alternating
current.
Indicates Direct current.
Safety Considerations
(contd)
WARNING
BODILY INJURY OR DEATH
MAY RESULT FROM
FAILURE TO HEED A
WARNING. DO NOT
PROCEED BEYOND A
WARNING UNTIL THE
INDICATED CONDITIONS
ARE FULLY UNDERSTOOD
AND MET.
CAUTION
Damage to equipment, or
incorrect measurement data,
may result from failure to
heed a caution. Do not
proceed beyond a CAUTION
until the indicated conditions
are fully understood and met.
These CAUTION labels are
required by the United States
Center for Devices and
Radiological Health. Failure to
follow their instructions may
result in personal injury.
This symbol indicates laser
radiation
.
For additional safety and
acoustic noise information, see
back matter.
CONTINOUS WAVE 1mW 670nm
CLASS II LASER PRODUCT
LASER RADIATION-DO NOT
STARE INTO BEAM
CAUTION

Getting Started Guide iii
About This Guide
1 Introducing the Agilent 5530
Introduction 1-2
Overview of the Agilent 5530 1-3
System Overview 1-4
Overview of Laser Calibration 1-5
Types of Measurements 1-7
2 Making Laser Measurements Safely
Introduction 2-2
Safety Labeling 2-2
General Safety Precautions 2-3
Using the Laser Head Safely 2-4
Using Components Safely 2-4
Protecting the Optics 2-5
3 Installing the Software and Connecting
Components
Introduction 3-2
Installing the Metrology Software 3-2
Computer Requirements 2
Installing the software 4
To start the Metrology Software (general) 5
To exit the Metrology Software (general) 5
Connecting the Axis Module and Sensor Hub 3-6
Communication LEDs 11
ContentsContents

Contents
iv Getting Started Guide
Connecting the Sensors 3-11
Connecting the Laser 3-14
Agilent 10888A Remote Control Unit 3-16
Agilent 10887-60202 A-quad-B Cable Assembly 3-17
Connecting and Turning on Power 3-18
4 Using the Agilent 5530
for the First Time
Introduction 4-2
Task 1: Assembling and Connecting Components 4-3
Task 2: Setting Up the Software 4-6
Task 3: Aligning the Optics 4-10
Task 4: Making the Measurements 4-13
Task 5: Displaying and Saving Data 4-17
Displaying analysis data 17
Saving data 19
Task 6: Exiting the Metrology Software 4-20
5 Setting Up the Software for a Measurement
Introduction 5-2
Terms to Know 5-4
Conventions Used in the Software 5-6
Entering data 6
Using buttons 7
Using Online Help 5-7
Accessing the Software 5-8
Selecting a Measurement Type 5-10
Recalling Saved Setup Files and Data Files 5-12
Saving Setup Data and Measurement Data Files 5-14
Exiting the Metrology Software 5-16

Contents
Getting Started Guide v
Setting Up the Laser Software for Your
Measurement 5-17
Verifying the hardware setup 18
Testing the remote control unit 19
Setting up environmental compensation 19
Defining laser parameters 20
Resetting the laser position 22
Setting Up Your Measurement 5-22
6 Making the Measurement
Introduction 6-2
Mounting the Laser Head on the Tripod 6-2
Collecting Measurement Data 6-7
Recording Measurement Data 6-8
Erasing Measurement Data 6-9
7 Analyzing, Transferring, and Printing
Measurement Data
Introduction 7-2
Displaying the Analyze Data Screen 7-3
Changing the Data Display 7-4
Autoscaling 4
Adding text to your graph 4
Displaying and editing measurement data 5
Printing the data analysis graph 7
Transferring Data to Another Program 7-8
Setting Up the Data Analysis Graph 7-8
Selecting an industry standard 9
Entering machine information 10
Creating a compensation table 11

Contents
vi Getting Started Guide
8 Ensuring Repeatability, Accuracy, and
Resolution
Introduction 8-2
Ensuring Accuracy 8-3
Compensating for environmental factors 4
Correcting errors that affect linear measurements 4
Abbé error 5
Deadpath error 6
Cosine error 7
Correcting errors that affect angular measurements 9
Correcting errors that affect straightness, squareness, and
parallelism measurements 9
Ensuring the accuracy of straightness reflector
mirrors 9
Correcting for slope 10
Compensating for environmental factors 11
Optimizing Repeatability From One Calibration to the
Next 8-13
Improving Resolution 8-14
9 Troubleshooting and Maintenance
Introduction 9-2
Troubleshooting the Agilent 5530 9-2
Maintaining the Agilent 5530 9-4
Maintaining the optics 4
Cleaning with pressurized air 4
Cleaning with lens tissue and methanol or alcohol 4
Maintaining the air sensor 5
Cleaning 5
Checking accuracy quickly 5

Contents
Getting Started Guide vii
Maintaining material temperature sensor 6
Cleaning 6
Checking accuracy quickly 6
Returning sensors to Agilent for calibration 6
Agilent Service Agreement 6
AGlossary
G-2
Index

Contents
viii Getting Started Guide