Agilent Technologies 5530 User manual

Agilent 5530 Dynamic Calibrator
Measurements
Reference Guide

Agilent 5530 Dynamic Calibrator
Measurements
Reference Guide

Agilent Technologies, Inc. 7.CD.L.03.11.97.R1.J.CW1FL
Santa Clara Site
5301 Stevens Creek Boulevard
Santa Clara, California 95052-8059
©Copyright Agilent
Technologies, Inc. 1992, 1996,
2000, 2001, 2008
All Rights Reserved.
Reproduction, adaptation, or
translations without prior
written permission is
prohibited, except as allowed
under the copyright laws.
Printed: October 2008
Printed in USA
Manual part number
10747-90077
Certification
and Warranty
Certification
Agilent Technologies, Inc.
certifies that this product met
its published specification at the
time of shipment from the
factory. Agilent further certifies
that its calibration
measurements are traceable to
national standards
administered by the U. S. NIST,
NRC Canada, Euromet
members (NPL, PTB, BNM,
etc.) or other recognized
standards laboratories.
Warranty
Agilent warrants Agilent
hardware, accessories and
supplies against defects in
materials and workmanship for
a period specified by each
product from date of shipment.
If Agilent receives notice of such
defects during the warranty
period, Agilent will, at its
option, either repair or replace
products which prove to be
defective. Replacement products
may be either new or like-new.
Agilent warrants that
Agilent software will not fail to
execute its programming
instructions, for the period
specified above, due to defects in
material and workmanship
when properly installed and
used.
If Agilent receives notice of such
defects during the warranty
period, Agilent will replace
software media which does not
execute its programming
instructions due to such defects.
For detailed warranty
information, see back matter.
Safety Considerations
General
This product and related
documentation must be
reviewed for familiarization
with this safety markings and
instructions before operation.
This product is a safety Class I
instrument (provided with a
protective earth terminal).
Before Applying Power
Verify that the product is set to
match the available line voltage
and the correct fuse is installed.
Refer to instructions in Chapter
1 of the Manual.
Before Cleaning
Disconnect the product from
operating power before
cleaning.
Safety Earth Ground
An uninterruptible safety earth
ground must be provided from
the mains power source to the
product input wiring terminals
or supplied power cable.
Safety Considerations
(contd)
Warning Symbols That May
Be Used In This Book
Instruction manual symbol; the
product will be marked with
this symbol when it is necessary
for the user to refer to the
instruction manual.
Indicates hazardous voltages.
Indicates earth (ground)
terminal.
or
Indicates terminal is connected
to chassis when such connection
is not apparent.
Indicates Alternating
current.
Indicates Direct current.
Safety Considerations
(contd)
WARNING
BODILY INJURY OR DEATH
MAY RESULT FROM
FAILURE TO HEED A
WARNING. DO NOT
PROCEED BEYOND A
WARNING UNTIL THE
INDICATED CONDITIONS
ARE FULLY UNDERSTOOD
AND MET.
CAUTION
Damage to equipment, or
incorrect measurement data,
may result from failure to
heed a caution. Do not
proceed beyond a CAUTION
until the indicated conditions
are fully understood and met.
These CAUTION labels are
required by the United States
Center for Devices and
Radiological Health. Failure to
follow their instructions may
result in personal injury.
This symbol indicates laser
radiation
.
For additional safety and
acoustic noise information, see
back matter.
CONTINOUS WAVE 1mW 670nm
CLASS II LASER PRODUCT
LASER RADIATION-DO NOT
STARE INTO BEAM
CAUTION

Contents
Measurements Reference Guide iii
About This Guide
1 Planning Your Measurements
Introduction 1-2
Measurement Planning Guidelines 1-2
Planning and Storing a Calibration Program 1-4
Coordinating Multiple Types of Measurements 1-4
Triggering Options 1-5
Record button 5
Auto 5
Encoder 6
Using Online Help 1-7
2 Linear Measurements
Introduction 2-2
Setting Up for the Measurement 2-3
Placing and Using the Sensors 2-6
Mounting and Aligning the Optics on the Target
Machine 2-9
Mounting the optics 9
Aligning the optics 20
Aligning the Laser Beam to the Machine’s Travel Path
for Long-Range Measurements 2-23
Aligning the Laser Beam to the Machine’s Travel Path
for Short-Range Measurements 2-25
Making the Measurement 2-26
3 Timebase Measurements
Introduction 3-2
Setting Up for the Measurement 3-3

Contents
iv Measurements Reference Guide
Mounting and Aligning the Optics on the Target
Machine 3-7
Aligning the Laser Beam to the Machine’s Travel
Path 3-7
Making the Measurement 3-8
Analyzing Timebase Measurement Data 3-13
Displaying timebase measurement data 14
Understanding timebase measurement data 17
4 Angular Measurements
Introduction 4-2
Setting Up for a Pitch or Yaw Measurement 4-4
Mounting and Aligning the Optics on the Target
Machine 4-6
Mounting the optics 6
Aligning the optics 16
Aligning the Laser Beam to the Machine’s Travel Path
for Long-Range Measurements 4-19
Aligning the Laser Beam to the Machine’s Travel Path
for Short-Range Measurements 4-20
Making the Measurement 4-20
Angular Position Measurements 4-24
Principles of operation 25
Procedure — summary 31
Programming the machine to be calibrated 32
Initial setup of computer and laser head 35
Mounting and aligning the precision index table on the
target machine 37
Mounting and aligning on a rotary table 37
Mounting and aligning on a machining center 39
Choosing the moveable optic 42
Mounting the moveable optic 42
Creating the control link 45

Contents
Measurements Reference Guide v
Taking care of the measurement fixture’s clutch 45
For parallel spindle and table axes 47
For right-angle spindle and table axes 50
Mounting the fixed optic 54
Aligning the laser beam 56
Checking your installation 60
To set the machine’s relative zero point for your
measurement 60
To perform final optics alignment and integrity
check 61
Controlling the machine during the measurement 62
Manually stepping through the machine control
program 62
Running the machine control program 63
Making the measurement 63
Storing the hardware 67
Maintenance 67
Precision index table 67
Clutch 68
Clutch breakaway nut 71
5 Straightness Measurements
Introduction 5-2
Setting Up for the Measurement 5-4
Positioning the Laser Head and Target Machine 5-5
Positioning optics for X-axis and Y-axis measurements 6
Positioning optics for vertical Z-Axis measurements 7
Positioning optics for horizontal Z-axis measurements 8
Mounting and Aligning Optics for X-Axis or Y-Axis
Measurements 5-10
Mounting the optics 10
Aligning the optics 14
Making Vertical Axis Straightness Measurements 5-17

Contents
vi Measurements Reference Guide
Aligning the Laser Beam to the Machine’s Travel
Path 5-22
Checking the Alignment for Beam Strength 5-24
Making the Measurement 5-25
6 Squareness Measurements in a Horizontal
Plane
Introduction 6-2
Setting Up for the Measurement 6-4
Positioning the Laser Head and Target Machine 6-6
Mounting and Aligning the Optical Square and
Interferometer for the First Axis Measurement 6-10
Mounting and aligning optics on a machine with a vertical
spindle 10
Mounting the optics 10
Aligning the optics 12
Mounting and aligning optics on a machine with a
horizontal spindle 14
Mounting the optics 14
Aligning the optics 15
Aligning the Laser Beam to the Machine’s Travel Path
for the First Axis Measurement 6-16
Mounting and Aligning the Reflector for the First Axis
Measurement 6-17
Mounting the reflector 17
Aligning the reflector 17
Checking the Alignment for Beam Strength for the First
Axis Measurement 6-20
Making the First Axis Measurement 6-20
Mounting and Aligning Optics for the Second Axis
Measurement 6-24
Aligning the Laser Beam to the Machine’s Travel Path
for the Second Axis Measurement 6-26

Contents
Measurements Reference Guide vii
Checking the Alignment for Beam Strength for the
Second Axis Measurement 6-27
Making the Second Axis Measurement 6-27
7 Squareness Measurements in a Vertical Plane
Introduction 7-2
Setting Up for the Measurement 7-4
Positioning the Laser Head and Target Machine 7-6
Mounting and Aligning the Optics for the First Axis
Measurement 7-7
Aligning the Laser Beam to the Machine’s Travel Path
for the First Axis Measurement 7-9
Checking the Alignment for Beam Strength for the First
Axis Measurement 7-9
Making the First Axis Measurement 7-9
Mounting and Aligning Optics for the Second Axis
Measurement 7-13
Mounting the optics 13
Aligning the optics 16
Aligning the Laser Beam to the Machine’s Travel Path
for the Second Axis Measurement 7-22
Checking the Alignment for Beam Strength for the
Second Axis Measurement 7-23
Making the Second Axis Measurement 7-24
8 Parallelism Measurements
Introduction 8-2
Setting Up for the Measurement 8-4
Positioning the Laser Head and Target Machine 8-6
Mounting and Aligning Optics for Coplanar Parallelism
Measurements 8-11
Mounting and Aligning Optics for Spindle Parallelism
Measurements 8-11

Contents
viii Measurements Reference Guide
Mounting the optics 11
Aligning the optics 13
Aligning the Laser Beam to the Machine’s Travel
Path 8-14
Checking the Alignment for Beam Strength 8-14
Making Spindle Parallelism Measurements 8-15
Making the first set of measurements 15
Making the second set of measurements 19
Making the third set of measurements 19
Making the fourth set of measurements 20
Calculating the total out-of-parallelism value 20
Making Coplanar Parallelism Measurements 8-20
Making the first axis measurement 21
Making the second axis measurement 22
9 Flatness Measurements
Introduction 9-2
Setting Up for the Measurement 9-4
Creating the measurement grid 5
Planning your measurement grid 6
Determining grid border requirements 6
Choosing a foot spacer 7
Drawing the perimeter lines of the measurement
grid 10
Drawing the internal measurement lines 12
Assembling and Mounting the Optics 9-13
Assembling the optics 13
Mounting the optics 17
Positioning the Laser Head 9-20
Aligning the Optics 9-22
Aligning the optics if you are not using flatness
mirrors 23
Aligning the optics if you are using flatness mirrors 24