8/15Alcatel Vacuum Technology France - User’s Manual AHC 2010
12/15Alcatel Vacuum Technology France - User’s Manual AHC 2010
9/15Alcatel Vacuum Technology France - User’s Manual AHC 2010 10/15Alcatel Vacuum Technology France - User’s Manual AHC 2010 11/15Alcatel Vacuum Technology France - User’s Manual AHC 2010
13/15Alcatel Vacuum Technology France - User’s Manual AHC 2010 14/15Alcatel Vacuum Technology France - User’s Manual AHC 2010 15/15Alcatel Vacuum Technology France - User’s Manual AHC 2010
The analog output signal (0/10V) is available on Pins 1(+) and 8(–).
The analog signal can be converted to pressure according to the
formula:
P = 10(U–7.75)/0.75+d where : P= pressure, U= analog signal
voltage,
d= constant.
Measurement limits: 10 V = 1000 mbar and 0.774 V = 5x10
–10
mbar
6- Operation (ctd)
Analog Signal output
0/10 V
(AHC 2010 - 0/10 V + SP)
Pressure Gas He H2O2air N2Ar Xe
1mbar to 10-2 mbar C 0.2 0.44 0.85 0.975 1.0 1.2 2.5
10-3 mbar 5.9 2.44 1.00 1.00 1.00 0.8 0.4
RS485 communication is available on the connector Pins 1(+)
and 8(–) .
Refer to the RS485 Communication Manual for details.
RS485 Signal output
(AHC 2010 - RS485 + SP)
The crystal gauge must be adjusted to atmospheric (ATM) and
low pressure (VAC). If the hot cathode filament is ON and
pressure is below 1x10-4 mbar, VAC is adjusted automatically
every 5 minutes. When the filament is OFF (input DSBL activated)
and the gauge head is cold, manual adjustment is required. The
gauge automatically determines if it works at atmospheric or low
pressure. Before adjustment, the gauge must be mounted in the
same orientation and conditions it will be used in. It must be held
under these conditions for at least 10 minutes. To adjust zero, be
sur the gauge current pressure is below 1x10-4 mbar (7.6x10-5
Torr).
Adjustment of the
gauge readings
6- Operation (ctd)
Set Point set up
(0/10 V + SP)
6- Operation (ctd)
Note: For the AHC2010 -RS485+SP models, the set points are modified only via the RS485
interface (refer to the RS485 Communication Manual).
The set point relay
output has a fixed 10%
hysteresis.
Set point output
6- Operation (ctd)
Pressure Signal
Off Off
On On
Set Point Value
Relay Output
Hysteresis
+ 10 % of S. P. value
- Vent the vacuum system to atmospheric pressure.
- Turn off the power to the gauge.
- Remove the electrical connector.
- Remove the gauge from the vacuum system.
- Place a protective cap on the fitting to prevent foreign
substances from entering the gauge.
- If the gauge must be stored, we advise to keep it away from
heat, moisture an dust ( 4 p. 4).
8- Maintenance 8- Maintenance (ctd)
If it is necessary to check the filament of the hot cathode sensor,
proceed as follows:
- Remove the sensor from the electronics ( 8 p. 12),
- Using an ohmmeter, check the filament resistance,
- If the measured value is out of range, replace the sensor.
Item Description P/N
2
Sensor DN25 ISO KF AHC2010 113049
Sensor DN40 ISO KF AHC2010 113050
Sensor DN40 CFR AHC2010 113051
3Electronics 0/10 V + SP AHC2010 113052
Electronic RS485 + SP AHC2010 113053
Unit Pa mbar Torr
d20- 0.125
For use with gasses other than Air, O2, N2, or CO, multiply the pressure reading by the
conversion factor from the table below: This formula is useful only for pressures under 1 mbar.
Peffective = Pread x C
10–10
10–8
10–6
10–4
10–2
1
102
104
1.0
1.5 2.5 3.5 4.5 5.5 6.5
2.0 3.0 4.0 5.0 6.0 7.0
7.58.0
8.59.0
9.5
10.0
Pa
mbar
Torr
Measurement
signal U (V)
Pressure P
Parts on a vacuum processing system can be contaminated with
material that is detrimental to health and environment.
Before removing this gauge, confirm whether or not the gauge is
contaminated with any harmful gasses or vapors. If it is contaminated
with any harmful substances, be sure the gauge and equipment are
purged and cleaned thoroughly before removal of the gauge.
Take the necessary precautions when handling contaminated parts,
refer to 9 p. 13.
7- Gauge Removal
Outgassing from the electrode system of the hot cathode gauge
can affect the measurement values or make them unstable.
Degassing removes absorbed gasses from these elements
by heating the electron collector grid to 70 °C by electronic
bombardment. Degassing normally lasts 3 minutes but can be
aborted.
This function is available when the pressure is below 5x10-3
mbar (pressure recommended < 1x10-5 mbar). It is activated
when +24 V is applied to Pin 5 of the gauge.
DGS degassing
function
This function deactivates the hot cathode gauge, allowing only
the crystal gauge to operate. This function is activated when
+24 V is applied to Pin 3 of the gauge.
DSBL Disable function
for hot cathode
Use this procedure to reinitialize the electronics. The electronics must be reinitialized before
mounting a sensor if either of them is being replaced. To do this:
1- Attach the cable to the electronics.
2- Apply power, the ‘power‘ indicator will blink red after several seconds.
3- Keep ATM/VAC button depressed until the ‘power’ indicator lights orange before to blink
red again. 4- Remove power from the electronics. 5- Attach the sensor element.
6- Re-apply power to the gauge. 7- Calibrate the gauge ( 6 p. 9)
Reset of the electronics
Set points 1 and 2 are modified using the switch selector:
- To set up the mantissa, use the digits 1 to 9 directly.
- To set up the exponent value (from +6 to –9) use the values in
the table below:
- To set up the measurement units, use:
mbar = 2 , torr = 1 or Pascal = any other position.
Switch
selector
ABCDEF0123456789
Exponent +6 +5 +4 +3 +2 +1 0 –1 –-2 –3 –4 –5 –6 –7 –8 –9
Set
the dial
Validate
with the SP SEL
button
Check
the confirmation
SP1 SP2
Initial state
1Start the process
2Set the dial to ‘5’ for the
mantissa of set point 1 (5x10+2)
3Set the dial to ‘E’ for the exponent
of Set point 1 (5x10+2)
(+2 = ‘E’ from the previous table)
4Set the dial to ‘8’ for the
mantissa of set point 2 (8x10–1)
5
5) Set the dial to ‘1’ for the
exponent of set point 2 (8x10–1)
(-1 = ‘1’ from the previous table)
6Set the dial to ‘2’ for mbar
(1 = Torr, any other setting = Pascal)
– End of process –
When removing this gauge from the vacuum system, do not touch
the inside of the connecting flange of the gauge or vacuum system
with bare hands. Fingerprints will increase outgassing in the gauge
and cause erroneous pressure readings
Dirt and damages can impair the function of vacuum
components. Disregard can lead to an increase of out gassing in
the vacuum system and it may have negative effects on the vacuum
process itself. Keep the gauge clean.
Do not clean the measurement device except the connecting flange.
Only use denatured alcohol to clean the outside of the gauge.
- Screwdriver for recessed head and an Ohmmeter.
Tools required
- The sensor and/or the electronics can be replaced. Proceed as
follows:
- Loosen the set screw without removing it (1)
- Pull out the sensor (2) as shown.
- Replace the sensor (2) or the electronic (3) as needed.
- Carefully align the holes in the electronics to the pins on the
sensor, then push the sensor into the electronics. Take care not to
bend the pins on the sensor. Secure the sensor to the electronics
with the set screw.
- Be sure to reset the electronics after assembly ( 8 p. 13).
Sub-assembly
replacement
9- Returning the Products
Contaminated products (e.g. with radioactive, toxic, caustic
or microbiological hazard) can be detrimental to health and the
environment. Products returned to the manufacturer should be
cleaned and free of harmful substances. Be sure to follow the
shipping regulations of all involved countries and forwarding
companies and enclose a duly completed «Safety Questionnaire»
available on our web site before shipping any products back to the
manufacturer.
10 - Decontamination and Product
Recycling
In compliance with Directive 2002/96/CE concerning the handling
of electrical and electronic equipment waste and Directive
2002/9/CE concerning restrictions on hazardous substances,
Adixen products that have reached the end of their service life must
be returned to the manufacturer for decontamination and reuse.
The manufacturer’s obligation to recover such equipment applies
only to complete items of equipment that have been neither
modified nor retrofitted and have used only spare parts from
Alcatel Vacuum Technology sold by Alcatel Vacuum Technology
and including all their assemblies and sub-assemblies.
This obligation does not include the cost of transporting the
product to a reprocessing centre, nor the cost of the service
which will be invoiced on to the customer.
All equipment returned to the service centre, must have a
properly filled in safety questionnaire. The questionnaire is
available separately, or on our Web site.
After disassembling the product, separate its components
according to the following criteria:
Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accordance
with the relevant local regulations, separated according to their
materials, and disposed of.
Other components
Such components must be separated according to their materials
and recycled.
Separating the
components
Contaminated parts.
Contaminated parts can be detrimental to health and the
environment. Before working on any parts, find out if they are
contaminated. Adhere to any relevant regulations and take the
necessary precautions when handling contaminated parts.
Substances detrimental to the environment.
Products or parts thereof (mechanical and electric components,
operating fluids etc.) can be detrimental to the environment. Dispose
of such substances in accordance with all relevant local regulations.
11 - Declaration of Conformity
There is no adjustment for the hot cathode gauge.
Note: For AHC2010 – RS485 + SP models, the readings can
also be done via the RS485 interface.
Allow to restore the
ATM or VAC stored
value.
The desired value
becomes the ATM
stored value.
Note: The stored
VAC value can not
be changed.
Press
and hold Release
time
green greenorange
Press
and hold
green orange orangegreen green
Release the switch until you
reach the desired value
(500<ATM<1100 mbar or
380 Torr<ATM<830 Torr)
time
ATM or VAC adjustments
ATM stored value change
1
2
3
0,25 7
Checking the filament
Error Gauge AHC 2010
Power Led & Voltage (V)
Controller
Message Probable Error Action
AV 10.3 V red ErrHi Crystal sensor con-
taminated or defect
Check crystal sensor
Replace sensor head
B* 10.061 ≤V < 10.3 V green Or If correct ATM/VAC
adjustment is not
possible or in case of
erratic measurement
=
sensor contaminated
Check sensor head
Run de “degas” function
Replace sensor head
C* or 0.774 V<10.061 V green 1.2 +2
D* 0.5 V < 0.774 V green Ur
E0.3 V < 0.5 V red Err06 Electronic error Replace electronic
F0,1 ≤V < 0,3 V red Err07
Filament of hot cath-
ode gauge broken or
gauge contaminated
Check hot cathode filament
Run “ degas” function
Replace sensor head
GV 0.1 V red ErrL0 Electronic error Replace electronic
Error catalog (*) =minor errors degraded working of the gauge
Set Point set up (ctd)
AHC 2010 0/10 V+SP
LED off
LED on steady
LED flashing
set point 1: 5x10+2 = 500 mbar
set point 2: 8x10–1 = 0.8 mbar
Example values
Products that are not clearly declared as “free of harmful
substances“ are decontaminated at the expense of the customer.
Products not accompanied by a duly completed “Safety
Questionnaire“ are returned to the sender at his own expense.
