BRONKHORST ES-FLOW 1 C Series User manual

ES-FLOW™ 1xxC
Ultrasonic Liquid Flow Meter/Controller
Doc. no.: 9.17.153 rev. E Date: 03-10-2022
Instruction Manual
ATTENTION
Pleaseread this documentcarefully beforeinstalling and operating the product.
Not following the guidelines could result in personalinjury and/or damage to the equipment.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E2
Copyright
© 2022 Bronkhorst High-Tech B.V.
All rights reserved. No part of this publication may be reproduced, distributed, or transmitted in any form or by any means,
without the prior written permission of the publisher.
Disclaimer
This document has been reviewed and is believed to be accurate. Bronkhorst High-Tech B.V. does not assume liability for
errors, inaccuracies or absence of information. The material in this document merely serves information and illustration
purposes; no rights can be derived from its contents.
Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and documentation without prior notice.
Device specifications and the contents of the package may deviate from what is stated in this document.
Symbols in this document
Important information. Disregardingthis informationcould increasetheriskofdamagetotheequipment, or theriskof
personal injuries.
Tips, useful information, attentionpoints. Thiswill facilitatetheuseoftheinstrument and/or contributeto itsoptimal
performance.
Additional informationavailablein the referenceddocumentation, ontheindicated website(s)or from your Bronkhorst
representative.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 3
Warranty
Bronkhorst® products are warranted against defects in material and workmanship, provided they are used in accordance
with the ordering specifications and not subject to abuse or physical damage. Products that do not operate properly during
the warranty period may be repaired or replaced at no charge.
The warranty includes all initial and latent defects, random failures, and indeterminable internal causes. It excludes failures
and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock, etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand. However, if the product has been returned collect to
our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping
methods/carriers are paid by the customer.
Receipt of equipment
· Check that the outer packaging and its contents have not been damaged during transport. If the outer packaging or its
contents are damaged, the local carrier must be informed immediately regarding his liability, if so required. At the same
time a report should be submitted to your Bronkhorst representative.
· Check the packing list to ensure that you received all items included in the scope of delivery.
· Do not discard spare or replacement parts.
· See Removal and return instructions for information about return shipment procedures.
Equipment storage
· The equipment should be stored in its original package in a climate controlled storage location.
· Care should be taken not to subject the equipment to excessive temperatures or humidity.
· See technical specifications (data sheet) for information about required storage conditions.

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Instruction Manual ES-FLOW™ 1xxC 9.17.153E4

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 5
Table of contents
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Introduction1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.1 Scope of this document
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.2 Intended use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.3 Product overview
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.4 Documentation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Safety notes2
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Product specifications3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123.1 Pressure rating
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123.2 Wetted materials
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13Customized I/O options3.3.1
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Installation4
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16Location4.1.1
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Operation5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185.1 Powering up
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185.2 First use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185.3 Powering down
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185.4 Control valve
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Bleeding5.4.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19Default valve state5.4.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195.5 Hardware controls
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19Multifunctional switch5.5.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19Normal operating functions5.5.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Power-up functions5.5.1.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Control mode - readout/change5.5.1.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21Network settings - readout/change5.5.1.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Disabling multifunctional switch5.5.1.5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225.6 Adjusting zero point
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Manual procedure5.6.1
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Digital procedure on PROFIBUS DP5.6.3
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Digital communication6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256.1 RS-232 communication
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256.2 Fieldbus communication
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256.3 Parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26Measurement and control6.3.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Advanced measurement and control6.3.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Secondary outputs6.3.1.2

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Instruction Manual ES-FLOW™ 1xxC 9.17.153E6
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Maintenance7
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Troubleshooting and service8
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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Returns9
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459.1 Removal and return instructions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459.2 Disposal (end of lifetime)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Parameter index

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 7
1Introduction
1.1 Scope of this document
The ES-FLOW™ 1xxC is a precise and compact volume flow meter/controller for liquids, based on a novel ultrasonic
technology. A wide range of liquids can be measured independent of fluid density, temperature and viscosity.
Measuring is done in a straight tube, where multiple transducers measure both the surface acoustic wave and the transit
time through the media. All upstream and downstream combinations are recorded and processed in nanoseconds. The
sound wave velocity and the surface area are recalculated to the volume flow rate. This ultrasonic measuring method is fast,
accurate and inherently bi-directional.
The ES-FLOW™ 1xxC can be operated with analog signals or digitally with RS-232 communication (ProPar) or an extensive
range of fieldbus protocols. An on-board PID controller can be used to drive a control valve or pump, establishing a
complete yet compact control loop.
This document covers general product information, installation and operating instructions and troubleshooting tips for the
ES-FLOW™ 1xxC.
1.2 Intended use
The ES-FLOW™ 1xxC has been developed to accurately measure and/or control volume flow rates of liquids in a fluid
system, with high precision and a limited pressure drop. The device is suited for general purpose indoor (dry) applications,
like laboratories and machine enclosures.
Any other use than mentioned here is considered unintended.
Responsibility for the use of the equipment with regard to its intended use, suitability for the intended application,
cleaning and compatibility of process media with the applied materials lies solely with the end user.
Bronkhorst High-Tech B.V. cannot be held liable for any damage and/or injury resulting from unintended, improper or
unsafe use, or use with other media and/or under other process conditions than specified at ordering time.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E8
1.3 Product overview
Front
1. Power & signal connector
2. Fieldbus connector 1 (optional)
3. Fieldbus connector 2 (optional)
4. Actuator output connector
5. Fluid inlet
6. Fluid outlet
Rear & top
7. Indication LEDs and multifunctional switch
8. Mounting holes

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 9
1.4 Documentation
The ES-FLOW™ comes with all necessary documentation for basic operation and maintenance. At some points this
document refers to other documents, which can be downloaded from the Bronkhorst website.
Thedocumentationlisted inthefollowingtableisavailableontheES-FLOW™product pages under
www.bronkhorst.com/products
Type
Document name
Document no.
Manuals
Instruction Manual ES-FLOW™ 1xxC (this document)
9.17.153
Technical documentation
Hook-up diagram Analog/RS-232
9.16.254
Hook-up diagram CANopen
9.16.259
Hook-up diagram DeviceNet™
9.16.255
Hook-up diagram EtherCAT® / EtherNet/IP / Modbus-TCP / POWERLINK /
PROFINET
9.16.264
Hook-up diagram FLOW-BUS
9.16.256
Hook-up diagram Modbus
9.16.257
Hook-up diagram PROFIBUS DP
9.16.258
Hook-up diagram optional bus and I/O configurations
9.16.260
Dimensional drawing
7.15.220
Thedocumentationlisted inthefollowingtablecanbedownloadedfrom www.bronkhorst.com/downloads
Type
Document
Document no.
Manuals
Manual CANopen interface
9.17.131
Manual DeviceNet™ interface
9.17.026
Manual EtherCAT® interface
9.17.063
Manual EtherNet/IP interface
9.17.132
Manual FLOW-BUS interface
9.17.024
Manual Modbus interface
9.17.035
Manual POWERLINK interface
9.17.142
Manual PROFIBUS DP interface
9.17.025
Manual PROFINET interface
9.17.095
Manual RS-232 interface
9.17.027
Certificates
EU Declaration of Conformity (EMC, RoHS)
9.06.021
Manufacturer Declaration REACH
9.06.056
Manufacturer Declaration WEEE
9.06.128
Conflict Minerals Compliance Policy
9.06.065

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E10
2Safety notes
Please read this document entirely and carefully before installing and operating the product. Not following
the guidelines could resultin personal injury and damage to the product and the system(s) it is incorporated in
orconnected with.
· Theproduct(s)described inthisdocument mayonlybehandledbyqualifiedpersonnel whoarefamiliar with combined
fluid and electrical systemsand who recognizetheassociatedhazards(e.g. (high)fluidpressure, electric shock).
· Theuser isresponsiblefor takingthenecessary safetymeasurestoprevent damageand/or injury while working withthe
equipment andprocessmedia(asdescribedinthe associated Material Safety Data Sheets).
· Where appropriate, thisdocument recommendsor prescribessafetymeasurestobetakenwith respect to mediaor
equipment usageunder thespecifiedconditions. However, thisdoesnot relievetheuser ofaforementioned
responsibility, not even ifsuchisnot explicitlyrecommendedor prescribedinthisdocument.
· Theequipment anditsaccessories must be usedinaccordancewiththeir specificationsand intended use.
· Thecustomer isresponsible for conducting ariskanalysis for theentire system and takethe required safety precautions
followingapplicable laws andregulations. Basedontheriskanalysis, thecustomer should describeand adhereto
standardoperating proceduresto ensuresafeuse oftheequipment.
· Individual instrumentsmaynot bedisassembledor modifiedinanywayor for anypurpose.
· Anyunauthorizedmodification, for any purposewhatsoever, will beconsideredasunintendedand improper use, will
void warrantyand cancel themanufacturer'sliability.
· Unauthorizedmodificationscanundosafety features, compromise system specifications (suchasingressprotection
rating)and causefailure to complywith applicablelaws, regulationsanddirectives.
· If theproduct is defective or otherwisedoesnot meet your requirements, please contact your Bronkhorst representative
for assistanceor advice.
2.1 Tipsand warnings
At the factorythe ES-FLOW™hasbeenpressuretested. Thetest pressureincludesasafetyfactor, so that it isalwayshigher
thanthespecifiedmaximum operatingpressure(pressurerating). Theoperatingpressuremust never exceedthespecified
test pressure.
· Thepressurerating andthe test pressurearespecifiedontheserial number label; if thesespecificationsaremissingor
insufficient, thedevicemust not beusedand shouldbereturnedto thefactory.
· Beforeinstallation, makesurethat thepressureratingiswithin thelimitsofthe normal processconditionsand that the
test pressureisinaccordancewiththesafety factor ofyour application.
· Disassemblingthedeviceand/or replacing partswill invalidatethespecificationof thetest pressure.
Beforecommissioning, alwayscheckthewettedmaterialsfor compatibility withthe processmedia.
Do not applyfluidpressureuntil all requiredfluidconnectionsandelectrical connectionshavebeenmade.
Checkthefluidsystem for leaktightnessafter anymodificationand beforeapplyingfull operatingpressure, especially when
usinghazardousmedia (e.g. toxic or flammable).
Inorder to beableto complywith all applicable guidelinesand regulations, it isessential that electrical connectionsbe
madeby or under supervisionofa qualified electrician.
· Theequipment describedinthisdocument containselectronic componentsthat aresusceptibleto electrostatic
discharge.
· Whenworking on theelectrical installation, take appropriatemeasurestoprevent damage asaresult ofelectrostatic
discharge.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 11
TheCEmarkontheequipment indicatesthat it complieswithrequirementsimposed bytheEuropeanUnion, including
electromagnetic compatibility (EMC).
EMC canonlybeguaranteed by applyingappropriatecablesandconnectorsor glandassemblies:
· Cablewirediametersmust besufficient to carry thesupplycurrent and minimizevoltageloss.
· Whenconnectingtheproduct toother devices, ensurethat theintegrity oftheshieldingremains uncompromised; use
shieldedcablesandconnectorswherepossibleand/or required.
· Preferably usethesupplied cables(ifapplicable)tomakeelectrical (signal)connectionstoand betweenthesupplied
components. These cables areshielded, havethe required wirediameter, andlooseends(if applicable) aremarkedto
facilitatecorrect connection.
If not all requirementsfor proper shielding canbemet (for example, becausea component isnot equippedwithshielded
connectors), takethe followingmeasurestoensurethebest possibleshielding:
· Keepcablelengthsat aminimum.
· Routecablesasclosely aspossiblealongsidemetal structuresor components.
· Ensureall electrical componentsaregroundedto earth.
Whenindoubt about the shieldingofyour cablingand/or electrical connections, contact your Bronkhorst representative.
Alwaysturn offelectrical power beforeconnecting or disconnectingequipment electrically.
Whenpressurizing, prevent pressureshocksbygraduallybringingthefluidsystem to therequired operatingpressure.
Bronkhorst doesthe utmost toensurethat youreceivea cleanproduct. Thisdoesnot, however, relievetheuser ofthe
responsibilitytoensurethat theequipment and thesystem inwhich it isincorporated meet therequirements impliedby
theintendeduse oftheproduct. Theresponsibilityfor cleaningthe equipment to meet suchrequirements liesexclusively
with theuser.
· Prior to poweringdown the ES-FLOW™, the fluid system shouldbedepressurized.
· Whendepressurizing, prevent pressureshocks byshuttingoffthefluid supply gradually.
Inexpertlyservicinginstrumentscanleadtoseriouspersonal injuryand/or damageto theinstrument or thesystem it is
used in. Servicingmust thereforebeperformedbytrained andqualifiedpersonnel. Contact your Bronkhorst representative
for informationabout cleaningandcalibration. Bronkhorst hastrained staffavailable.
· Beforedisconnectingor disassemblingany fluid system relatedparts, alwaysmakesurethefluidsystem isdepressurized
to atmospheric pressure.
· Whendepressurizing, prevent suddenpressurechangesbyshutting offthefluid supply gradually.
Frequent inspectionofall fluid linesand connectionsbefore, duringandafter operationisessential, toensure and maintain
asafeworkingenvironment. Ifnecessary, re-tightenfluid connections.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E12
3Product specifications
Before installing the ES-FLOW™, check that the product specifications match your requirements.
The model key (second line on the serial number label) contains information about the technical
properties of the product as ordered. The actual properties of your product can be retrieved from
the diagram below.
If you have a question about the product or if you find the product does not meet the
specifications agreed upon, do not hesitate to contact your Bronkhorst representative. To enable us to help you quickly and
effectively, make sure to have the serial number (SN) ready whenever seeking contact with your Bronkhorst representative
about a specific item.
See section Service for contact information.
3.1 Pressure rating
At the factorythe ES-FLOW™hasbeenpressuretested. Thetest pressureincludesasafetyfactor, so that it isalwayshigher
thanthespecifiedmaximum operatingpressure(pressurerating). Theoperatingpressuremust never exceedthespecified
test pressure.
· Thepressurerating andthe test pressurearespecifiedontheserial number label; if thesespecificationsaremissingor
insufficient, thedevicemust not beusedand shouldbereturnedto thefactory.
· Beforeinstallation, makesurethat thepressureratingiswithin thelimitsofthe normal processconditionsand that the
test pressureisinaccordancewiththesafety factor ofyour application.
· Disassemblingthedeviceand/or replacing partswill invalidatethespecificationof thetest pressure.
3.2 Wetted materials
Beforecommissioning, alwayscheckthewettedmaterialsfor compatibility withthe processmedia.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 13
3.3 Model key
The model key on the serial number label contains information about the technical properties of the product as ordered.
The actual properties of your instrument can be retrieved from the diagram below.
3.3.1 Customized I/O options
ES-FLOW™ 1xxC instruments offer various customized input/output functions through pin 5 of the power connector and
through pin 2 of the actuator output connector as an option. I/O options are factory installed as specified at ordering time,
and cannot be changed.
The last 3 groups of the model key on the serial number label indicate the installed I/O configuration. The possible
configurations are described in the table below. See the hook-up diagram for custom bus and I/O configurations for an
explanation of the codes.
Code
Description
000
Disabled, pin 5 is pulled down to 0 Vdc (default selection)
A1V*
0…10 Vdc sourcing output, controller
Analog signal for pump or external valve steering (control signal only)
When the controller output is used for pump or external valve steering (mass flow meters only), make sure
to set parameter Valve maximum to 0.3 [A]. For mass flow controllers, the controller output is limited to a
value below 10Vdc, due to the maximum valve current restriction.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E14
Code
Description
B1V*
4…20 mA sourcing output, controller
Analog signal for pump or external valve steering (control signal only).
When the controller output is used for pump or external valve steering (mass flow meters only), make sure
to set parameter Valve maximum to 0.3 [A]. For mass flow controllers, the controller output is limited to a
value below 20 mA, due to the maximum valve current restriction.
B2V*
3.8…20.8 mA sourcing output, controller
Analog signal for Badger Meter valve with TEIP11 signal converter (control signal only)
C3A
Digital output, min/max alarm
During a min/max alarm, pin 5 is pulled down to 0 Vdc.
C4A
Digital output, counter alarm
During a counter alarm, pin 5 is pulled down to 0 Vdc.
C5S
Digital output, enabled by setpoint (for shut-off control)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation.
For factory selected analog control (…-A#-C5S):
If parameter Control mode is set for analog control by factory, the minimum setpoint at which the device
(shut-off valve) connected to pin 5 is activated is 1.9%. This prevents possible noise on the analog input
activating the device accidentally.
For factory selected digital control (…-D#-C5S):
If parameter Control mode is set for digital control by factory, the setpoint threshold for activating the
device connected to pin 5 is any value > 0.
Note: If the instrument is forced into Valve Safe State, the digital output is not affected, so a (n.c.) shut-off
valve connected to pin 5 will not close when the (n.c.) controller is in Valve Safe State’
Make sure to use 24 Vdc power supply corresponding to the shut-off valve specifications.
C0I
Digital output, high/low switch via remote parameter (e.g. for shut-off valve control)
Pin 5 is pulled down to 0 Vdc when writing value 1 to parameter IO switchstatus, this is undone by writing
value 0.
A device connected to pin5 (e.g. a shut-off valve) can be activated/deactivated by writing parameter IO
switch status.
Note: If the instrument is forced into Valve Safe State, the digital output is also affected, so a (n.c.) shut-off
valve connected to pin 5 will be closed when the (n.c.) controller is in ‘Valve Safe State’.
Make sure to use 24 Vdc power supply corresponding to the shut-off valve specifications.
D9E
Digital frequency output, measure
Measurement value is translated to a frequency within given frequency range.
The default frequency range to represent 0…100% flow is 0…10000 Hz. Any other frequency range must be
specified on order.
F9B
Digital pulse output, batch counter
Pin 5 is pulled down to 0Vdc when a given batch size is reached (during a given pulse length).
By default, a pulse is given at each 1x the Counter unit batch value, with a pulse length of 1 second. For
instance, when Counter unit is set to 'ln', a pulse is given each time 1 ln has passed through the instrument.
An alternative pulse length must be specified on order.
Provide a pull-up resistor of 5…10 kOhm to create 15…24 Vdc at pin 5 (according to the applicable hook-up
diagram).
I3C
Digital input, controller mode valve close
Valve closes when pin 5 is connected to 0 Vdc.
This option switches between the default Control mode and mode ‘Valve Close’ (value 3). When the default
Control mode is digital, the default value is 0 (bus/RS-232), when the default Control mode is analog, the
default value is 1 (Analog input).

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 15
Code
Description
I8C
Digital input, controller mode valve purge
Valve is fully opened when pin 5 is connected to 0 Vdc.
This option switches between the default Control mode and mode ‘Valve Fully Open’ (value 8). When the
default Control mode is digital, the default value is 0 (bus/RS-232), when the default Control mode is analog,
the default value is 1 (Analog input).
I1R
Digital input, reset counter
The counter resets when pin 5 is connected to 0 Vdc.
I2R
Digital input, reset alarm
The alarm resets when pin 5 is connected to 0 Vdc.
*) Notes regarding controller options:
· A controller output option(A1V, B1Vor B2V)canonlybeinstalledincombinationwithcontroller modeA or D
(controller enabled, seemodel key).
· If thecontroller isenabled, theM8 connector canalwaysbeusedto control aBronkhorst® valve (throughpin3).
· Althoughit istheoreticallypossible tohave 3 controller optionsinstalled, nomorethan1 signal should beusedat any
time.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E16
4Installation
4.1 Mounting
For stable fixationtoa rigidandstablesurfaceor construction, usethethreadedmountingholesintherear ofthe
instrument housing(seeproduct overview). Consult thedimensional drawingfor theexact sizeand locations.
4.1.1 Location
Gas bubbles in the liquid can lead to measuring errors. In general, the
instrument should be mounted in a pipe segment where gas bubbles
cannot accumulate. The image on the right shows the preferable
mounting locations.
· In general, the best location is a horizontal pipe segment or a segment where the fluid direction is upward.
· Gas might accumulate in the horizontal segment if it is followed by a downward segment. Do not mount
the instrument in a location like this.
· Mounting in a downward pipe segment with an open end is strongly dissuaded, especially if the pipe
diameter is 1/2" or more. Gravity might let the segment run empty; depending on the specific system
dimensions and the viscosity of the metered fluid, this effect might be stronger or weaker.
· If the instrument is part of a closed fluid system, mounting the instrument in a downward pipe segment is
not preferable, but may be considered if other mounting locations are problematic.
To minimizethe riskofgasbubblescausedbycavitation, thepreferred locationtoinstall a(control) valve is downstream
from theinstrument, thepreferredlocationfor apumpisupstream.
To prevent damagetotheinternal electronics, makesure thetemperatureinsidetheinstrument housingdoesnot get
above60 °C. Ifnecessary, takeappropriateheat dissipationmeasures, especially iftheinstrument isoperatedinsidean
enclosure(e.g. acontrol cabinet).
4.1.2 Orientation
Aside from specific application requirements, the ES-FLOW™ has no preferred mounting orientation.
4.2 Fluid connections
For regular (mono-directional) use, install the ES-FLOW™ in the process line, in accordance with the direction of the FLOW
arrow on the instrument. For bi-directional measuring, install the instrument in the direction in which the highest flow will
be measured (if applicable). When deciding which direction to install the instrument in, take into account that the
measuring range in the reverse direction is approximately 73% of the full scale range (whereas the instrument can measure
131% FS in the normal direction).
Tighten fittings according to the instructions issued by their manufacturer.
Do not applyfluidpressureuntil all requiredfluidconnectionsandelectrical connectionshavebeenmade.
Checkthefluidsystem for leaktightnessafter anymodificationand beforeapplyingfull operatingpressure, especially when
usinghazardousmedia (e.g. toxic or flammable).

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 17
4.3 Electrical connections
· Electrical connections must be made with standard cables or compatible, according to the hook-up diagram.
· When using self-assembled cables, follow the guidelines provided by the connectors' manufacturer.
· For use in a fieldbus system, follow the instructions of the cable supplier for the according fieldbus system.
· Make sure that the power supply is suitable for the power ratings as indicated on the serial number label (model key),
and that double or reinforced insulation is used for the power supply.
· Before powering up, make sure all required cabling is properly connected.
· Before each use, inspect cabling and connectors for damage.
Inorder to beableto complywith all applicable guidelinesand regulations, it isessential that electrical connectionsbe
madeby or under supervisionofa qualified electrician.
· Theequipment describedinthisdocument containselectronic componentsthat aresusceptibleto electrostatic
discharge.
· Whenworking on theelectrical installation, take appropriatemeasurestoprevent damage asaresult ofelectrostatic
discharge.
TheCEmarkontheequipment indicatesthat it complieswithrequirementsimposed bytheEuropeanUnion, including
electromagnetic compatibility (EMC).
EMC canonlybeguaranteed by applyingappropriatecablesandconnectorsor glandassemblies:
· Cablewirediametersmust besufficient to carry thesupplycurrent and minimizevoltageloss.
· Whenconnectingtheproduct toother devices, ensurethat theintegrity oftheshieldingremains uncompromised; use
shieldedcablesandconnectorswherepossibleand/or required.
· Preferably usethesupplied cables(ifapplicable)tomakeelectrical (signal)connectionstoand betweenthesupplied
components. These cables areshielded, havethe required wirediameter, andlooseends(if applicable) aremarkedto
facilitatecorrect connection.
If not all requirementsfor proper shielding canbemet (for example, becausea component isnot equippedwithshielded
connectors), takethe followingmeasurestoensurethebest possibleshielding:
· Keepcablelengthsat aminimum.
· Routecablesasclosely aspossiblealongsidemetal structuresor components.
· Ensureall electrical componentsaregroundedto earth.
Whenindoubt about the shieldingofyour cablingand/or electrical connections, contact your Bronkhorst representative.
Alwaysturn offelectrical power beforeconnecting or disconnectingequipment electrically.
4.4 Fieldbusconnection
Neverpower theinstrument simultaneouslyfrom two different powersources (e.g. fieldbusand Plug-in Power Supply).
Doingsowill irreversibly damagetheprintedcircuit boardand theinstrument will havetoberepaired beforeit can be
used.
Alwayscheckthetotal power consumptionofyour instrumentsbeforeconnectingthem toa fieldbussystem. Donot exceed
themaximum power ofthepower supplyunit.
· For informationabout settingupa fieldbusnetworkwith Bronkhorst® instruments, consult theaccordingfieldbus
manual.
· If you needassistancewithsettingupa fieldbusnetwork, contactyour Bronkhorst representativefor information.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E18
5Operation
5.1 Powering up
To maintaincontrol ofthe fluid system andensureasafesituation, it isrecommended to turnonpower beforeapplying
fluid pressureandto switchoffpower onlyafter thefluidsystem isdepressurized.
Whenpressurizing, prevent pressureshocksbygraduallybringingthefluidsystem to therequired operatingpressure.
For best performance, allowthedeviceto warm upandstabilizefor at least 60 minutesbeforestartingmeasurement
and/or control. Thismaybedonewith or without media flow.
· After powering up, the instrument needs a couple of seconds to start up the electronics and perform a self-test. After
successful initialization, the green LED will light up continuously to indicate that the instrument is ready to use.
· If the sensor tube contains gas, the red LED will light up continuously and the instrument will issue a warning code by
means of parameter Alarm Info (see Alarms).
5.2 First use
Bronkhorst doesthe utmost toensurethat youreceivea cleanproduct. Thisdoesnot, however, relievetheuser ofthe
responsibilitytoensurethat theequipment and thesystem inwhich it isincorporated meet therequirements impliedby
theintendeduse oftheproduct. Theresponsibilityfor cleaningthe equipment to meet suchrequirements liesexclusively
with theuser.
Beforestarting measurement andcontrol, makesureto removegasfrom thefluid system byflushing all fluidlineswith the
processfluidat ahighflowrate.
5.3 Powering down
· Prior to poweringdown the ES-FLOW™, the fluid system shouldbedepressurized.
· Whendepressurizing, prevent pressureshocks byshuttingoffthefluid supply gradually.
5.4 Control valve
This section is only applicable if the ES-FLOW™ is used in conjunction with a control valve.
5.4.1 Bleeding
In order to ensure stable and reliable control behavior, the dead space of the control valve should be kept free of gas, by
bleeding it from time to time. Bleeding is advised at the following occasions:
· prior to first use
· when restarting the instrument after purging
· periodically, to remove accumulated gas
· Makesureto connect thebleed outlet to anappropriatedrainingfacility, especially ifthesystem isusedtoprocess
hazardousmedia.
· Takeappropriatesafetymeasures, asdescribedinthe Material Safety DataSheet(s)ofthemediatobeprocessed(if
applicable).
Install a shut-off valve asclosetothe bleedoutlet aspossibleand connect aclear transparent tubetothevalve outlet; being
ableto seegasbubblesinthe liquidwill easemonitoring theprogressofthe bleedingprocedure
To bleed the control valve, follow this procedure:
1. Change the liquid flow setpoint to 0% (this closes the valve)
2. Pressurize the liquid inlet (if not already done so)
3. Open the bleed outlet (slowly) until liquid starts to escape
4. Optionally, tap the valve assembly and/or liquid inlet of the valve to let gas bubbles accumulate and migrate to the
valve
5. Close the bleed outlet as soon as all gas has escaped the control valve

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153E 19
5.4.2 Default valve state
When a controlling instrument is not powered or cannot communicate with the fieldbus network (if applicable), all electrical
valves operated by the instrument (whether integrated or external) automatically return to their default state. The default
state is closed for 'normally closed' valves (n/c) and fully open for 'normally open' valves (n/o). Taking into account the
typical process conditions under which the instrument is used (such as the processed media and ambient conditions; see
also Intended use), the default state is generally considered safe.
Check the serial number label or the technical specifications to see which valve type is used on your instrument (if
applicable).
5.5 Hardware controls
On top of the housing the instrument is equipped with a multifunctional switch (fn) and three
indication LEDs:
Status
Communication interface status
Mode/MOD
Operational mode
Error/NET
Error/warning indication
· During normal operation the Mode/MOD indicator is lit green l continuously, while the Error/NET
indicator flashes red l when data is being transferred.
· During initialization and special procedures, the Mode/MOD indicator blinks or flashes.
· See the troubleshooting guide for general error indications and possible causes.
· Several other indications are specific to the installed communication interface.
· The Status LED is functional only if the instrument is equipped with an Ethernet based fieldbus interface.
· Consult the according interface manual for a list of all indications.
5.5.1 Multifunctional switch
Some special instrument functions can be started manually using the multifunctional switch near the indication LEDs. These
functions are available in analog as well as in digital operation mode.
5.5.1.1 Normal operating functions
· In order to access these functions, press and hold the switch while the instrument is in normal operation mode (green
LED lit continuously).
· As long as the switch is held, the LEDs show a repeating sequence of patterns, where each pattern indicates a function.
· All patterns in this sequence are continuous.
· Each pattern is shown for a number of seconds; in the table below, the column labeled Hold time indicates the time frame
during which a pattern is shown.
· To start a function, release the switch when the LEDs show the pattern of the required function.
l
(green)
l
(red)
Hold time
Function
off
off
0…1 sec
No action
off
off
1…4 sec
1. In case of a min/max alarm: reset alarm
2. FLOW-BUS: Auto-install to bus - lets instrument obtain free node address
Note: min/max alarm (if any) has to be reset before auto install can be performed.
off
on
4…8 sec
Reset instrument; clear all warnings and error messages and restart the instrument
on
off
8…12 sec
Auto-zero; re-adjust the zero-point of the instrument (flow meters/controllers only)
on
on
12…16 sec
Enable FLASH mode for firmware update:
· the instrument shuts down and both LEDs are switched off
· at the next power-up, the instrument will be active again
· See Adjustingzeropoint for backgroundinformationand instructionsonhowto adjust thezeropoint ofaninstrument.
· Do not perform azeroingprocedure beforehavingtakennoticeofthe instructions.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153E20
5.5.1.2 Power-up functions
· In order to access these functions, press and hold the switch while powering up the instrument.
· As long as the switch is held, the LEDs show a repeating sequence of patterns, where each pattern indicates a function.
· All patterns in this sequence are flashing (0.2 sec on, 0.2 sec off).
· Each pattern is shown for a number of seconds; in the table below, the column labeled Hold time indicates the time frame
within the sequence during which a pattern is shown.
· To start a function, release the switch when the LEDs show the pattern of the required function.
l
(green)
l
(red)
Hold time
Function
off
off
0…4 sec
No action
off
on
4…8 sec
Restore factory settings (except communication settings)
on
off
8…12 sec
· FLOW-BUS: auto install to bus; let the instrument obtain a free node address from
the FLOW-BUS system
· Other protocols: no action
on
on
12…16 sec
Activate or deactivate configuration mode
· The power and signal connector is set to RS-232 communication (ProPar) at baud
rate 38400
· In configuration mode, the green LED blinks (2 seconds on, 0.1 second off)
· Deactivate configuration mode by selecting this function again at the next power-
up
5.5.1.3 Control mode - readout/change
Reading control mode
· By briefly pressing the switch 2 times within 1 second in normal operation mode, the instrument shows its current
control mode with a series of consecutive LED indication patterns.
· The number of flashes corresponds to the current value of parameter Control Mode (see Special parameters).
Step
Pattern
Indication
1
Green
l l
number of flashes indicates the tens of the parameter value
2
Red
l l
number of flashes indicates the units of the parameter value
Examples:
· for value 1 (control mode 'Analog input'), the green LED will flash 0 times and the red LED 1 time
· for value 22 (control mode 'Valve Safe State'), the green and red LED will each flash 2 times
Changing controlmode
· By briefly pressing the switch 4 times with intervals of up to 1 second in normal operation mode, the instrument enters a
state in which the control mode can be changed.
· This is done in 2 steps, each represented by a LED indication pattern (green or red; see table below).
· The number of flashes corresponds to the available values of parameter Control Mode (see Special parameters).
· At the start of each step, the according LEDs starts flashing fast (0.1 second on, 0.1 second off). By pressing and holding
the switch, the associated action is started and the flashing slows (0.5 seconds on, 0.5 seconds off).
Step
Pattern
Maximum
flash
count
Action
1
Green
l l
2
set tens of parameter value
2
Red
l l
9
set units of parameter value