BRONKHORST ES-FLOW 1 C Series User manual

ES-FLOW™ 1xxC
Ultrasonic Liquid Flow Meter/Controller
Doc. no.: 9.17.153 rev. A Date: 24-06-2021
Instruction Manual
ATTENTION
Pleaseread this documentcarefully before installing and operating theproduct.
Not following the guidelines could resultin personalinjury and/or damage to theequipment.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A2
Copyright
© 2021 Bronkhorst High-Tech B.V.
All rights reserved. No part of this publication may be reproduced, distributed, or transmitted in any form or by any means,
without the prior written permission of the publisher.
Disclaimer
This document has been reviewed and is believed to be accurate. Bronkhorst High-Tech B.V. does not assume liability for
errors, inaccuracies or absence of information. The material in this document merely serves information and illustration
purposes; no rights can be derived from its contents.
Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and documentation without informing
anyone. As such, the information contained in this document is subject to change without notice. Device specifications and
the contents of the package may deviate from what is stated in this document.
Symbols on the equipment
One or more of the following signs may be attached to the product:
Read the instruction manual before installing and operating the product
General warning; consult the instruction manual for handling instructions (the appearance of this symbol may vary)
Surface may get hot during operation
Shock hazard; electrical parts inside
Symbols in this document
Important information. Disregarding this information could increase the risk of damage to the equipment, or the risk of
personal injuries.
Tips, useful information, attention points. This will facilitate the use of the instrument and/or contribute to its optimal
performance.
Additional information available in the referenced documentation, on the indicated website(s) or from your Bronkhorst
representative.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 3
Warranty
Bronkhorst® products are warranted against defects in material and workmanship, provided they are used in accordance
with the ordering specifications and not subject to abuse or physical damage. Products that do not operate properly during
the warranty period may be repaired or replaced at no charge.
The warranty includes all initial and latent defects, random failures, and indeterminable internal causes. It excludes failures
and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock, etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand. However, if the product has been returned collect to
our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping
methods/carriers are paid by the customer.
Receipt of equipment
· Check that the outer packaging and its contents have not been damaged during transport. If the outer packaging or its
contents are damaged, the local carrier must be informed immediately regarding his liability, if so required. At the same
time a report should be submitted to your Bronkhorst representative.
· Check the packing list to ensure that you received all items included in the scope of delivery.
· Do not discard spare or replacement parts.
· See Removal and return instructions for information about return shipment procedures.
Equipment storage
· The equipment should be stored in its original package in a climate controlled storage location.
· Care should be taken not to subject the equipment to excessive temperatures or humidity.
· See technical specifications for information about required storage conditions.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A4

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 5
Table of contents
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Introduction 1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.1 Scope of this document
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.2 Intended use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.3 Product overview
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.4 Documentation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Safety instructions 2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102.1 General precautions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102.2 Tips and warnings
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Product specifications 3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123.1 Pressure rating
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123.2 Wetted materials
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133.3 Model key
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Installation 4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144.1 Mounting
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Location 4.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Orientation 4.1.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144.2 Fluid connections
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.3 Electrical connections
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.4 Fieldbus connection
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Operation 5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165.1 Powering up
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165.2 First use
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165.3 Powering down
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165.4 Control valve
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16Bleeding 5.4.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Default valve state 5.4.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175.5 Hardware controls
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Multifunctional switch 5.5.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Normal operating functions 5.5.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Control mode - readout/change 5.5.1.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19Network settings - readout/change 5.5.1.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Disabling multifunctional switch 5.5.1.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205.6 Adjusting zero point
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21Manual procedure 5.6.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21Digital procedure 5.6.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Digital procedure on PROFIBUS DP 5.6.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Digital communication 6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 236.1 Parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Measurement and control 6.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Advanced measurement and control 6.1.1.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Secondary outputs 6.1.1.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Alarms 6.1.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Counter 6.1.3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29Network configuration 6.1.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30Controller 6.1.5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31Master/slave configuration (FLOW-BUS) 6.1.6

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Device identification 6.1.7
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33Special parameters 6.1.8
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35Default control mode 6.1.8.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Maintenance 7
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 367.1 Cleaning
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 367.2 Calibration
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Troubleshooting and service 8
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 378.1 Common issues
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 398.2 Service
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Returns 9
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 409.1 Removal and return instructions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 409.2 Disposal (end of lifetime)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Parameter index

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 7
1Introduction
1.1 Scope of this document
The ES-FLOW™ 1xxC is a precise and compact volume flow meter/controller for liquids, based on a novel ultrasonic
technology. A wide range of liquids can be measured independent of fluid density, temperature and viscosity.
Measuring is done in a straight tube, where multiple transducers measure both the surface acoustic wave and the transit
time through the media. All upstream and downstream combinations are recorded and processed in nanoseconds. The
sound wave velocity and the surface area are recalculated to the volume flow rate. This ultrasonic measuring method is fast,
accurate and inherently bi-directional.
The ES-FLOW™ 1xxC can be operated with analog signals or digitally with RS-232 communication (ProPar) or an extensive
range of fieldbus protocols. An on-board PID controller can be used to drive a control valve or pump, establishing a
complete yet compact control loop.
This document covers general product information, installation and operating instructions and troubleshooting tips for the
ES-FLOW™ 1xxC.
1.2 Intended use
The ES-FLOW™ 1xxC has been developed to accurately measure and/or control volume flow rates of liquids in a fluid
system, with high precision and a limited pressure drop. The device is suited for general purpose indoor (dry) applications,
like laboratories and machine enclosures.
Any other use than mentioned here is considered unintended.
Responsibility for the use of the equipment with regard to its intended use, suitability for the intended application,
cleaning and compatibility of process media with the applied materials lies solely with the end user.
Bronkhorst High-Tech B.V. cannot be held liable for any damage and/or injury resulting from unintended, improper or
unsafe use, or use with other media and/or under other process conditions than specified at ordering time.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A8
1.3 Product overview
Front
1. Power & signal connector
2. Fieldbus connector 1 (optional)
3. Fieldbus connector 2 (optional)
4. Actuator output connector
5. Fluid inlet
6. Fluid outlet
Rear & top
7. Indication LEDs and multifunctional switch
8. Mounting holes

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 9
1.4 Documentation
· This document contains basic information for installation, operation and maintenance of the ES-FLOW™.
· At some points it refers to documentation associated with important components or features. These references are listed
in the table below.
· Documents listed here that are not included in the scope of delivery can be downloaded from
www.bronkhorst.com/downloads or provided digitally on request.
Type
Document name
Document no.
Manuals
Instruction Manual ES-FLOW™ 1xxC (this document)
9.17.153
Manual CANopen interface
9.17.131
Manual DeviceNet™ interface
9.17.026
Manual EtherCAT® interface
9.17.063
Manual EtherNet/IP interface
9.17.132
Manual FLOW-BUS interface
9.17.024
Manual Modbus interface
9.17.035
Manual POWERLINK interface
9.17.142
Manual PROFIBUS DP interface
9.17.025
Manual PROFINET interface
9.17.095
Manual RS-232 interface
9.17.027
Technical documentation
Dimensional drawing
7.15.220
Hook-up diagram Analog/RS-232
9.16.254
Hook-up diagram CANopen
9.16.259
Hook-up diagram DeviceNet™
9.16.255
Hook-up diagram EtherCAT® / EtherNet/IP / Modbus-TCP / POWERLINK /
PROFINET
9.16.264
Hook-up diagram FLOW-BUS
9.16.256
Hook-up diagram Modbus
9.16.257
Hook-up diagram PROFIBUS DP
9.16.258
Hook-up diagram optional bus and I/O configurations
9.16.260
Compliance
EU Declaration of Conformity (EMC, RoHS)
9.06.021
Declaration of Conformity (REACH, WEEE)
9.06.056

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A10
2Safety instructions
2.1 General precautions
Please read this document entirely and carefully before installing and operating the product. Not following
the guidelines could result in personal injury and damage to the product and the system(s) it is incorporated in
or connected with.
The product(s) described in this document may only be used by qualified personnel who are familiar with combined fluid
and electrical systems and who recognize the associated hazards (e.g. (high) fluid pressure, electric shock).
The end user is considered to be familiar with the required safety precautions to prevent damage and/or injury while
working with the process media (as described in the associated Material Safety Data Sheets) and the equipment.
Where appropriate, this document recommends or prescribes safety measures to be taken with respect to media or
equipment usage under the specified conditions. The end user is responsible for taking the necessary safety precautions
and proper use of appropriate (personal) protective equipment, even if such is not explicitly recommended or required in
this document.
The equipment and its accessories must be used in accordance with their specifications and operating instructions.
Individual instruments may not be disassembled or modified in any way for any purpose. Any unauthorized modification,
for any purpose whatsoever, will be considered unintended and improper use, will void warranty and cancel the
manufacturer's liability. Unauthorized modifications can undo safety features, compromise system specifications (such as
ingress protection rating) and cause failure to comply with applicable laws, regulations and directives.
If the product is defective or otherwise does not meet your requirements, please contact your Bronkhorst representative for
assistance or advice.
2.2 Tips and warnings
At the factory the ES-FLOW™ has been pressure tested. The test pressure includes a safety factor, so that it is always higher
than the specified maximum operating pressure (pressure rating). Only in exceptional cases, the operating pressure may
exceed the specified maximum operating pressure very briefly. The operating pressure must never exceed the specified test
pressure.
· The pressure rating and the test pressure are specified on the serial number label; if these specifications are missing or
insufficient, the device must not be used and should be returned to the factory.
· Before installation, make sure that the pressure rating is within the limits of the normal process conditions and that the
test pressure is in accordance with the safety factor of your application.
· Disassembling the device and/or replacing parts will invalidate the specification of the test pressure.
Before commissioning, always check the wetted materials for compatibility with the process media.
Do not apply fluid pressure until all required fluid connections and electrical connections have been made.
Check the fluid system for leaks before applying full operating pressure, especially when using hazardous media (e.g. toxic
or flammable).

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 11
The equipment described in this document contains electronic components that are susceptible to electrostatic
discharge. In order to prevent damage, proper handling procedures must be followed during installation, (dis)connecting
and removing the electronics.
The equipment carries the CE-mark and is compliant with the concerning EMC requirements. However, EMC
requirements can only be met using appropriate cables and connector/gland assemblies. Bronkhorst recommends the use
of their standard cables. These cables have the right connectors and loose ends (if any) are marked to help prevent wrong
connection. When using other cables, cable wire diameters must be sufficient to carry the supply current, and voltage loss
must be kept as low as possible.
When connecting the product to other devices, be sure that the integrity of the shielding is not affected; always use
shielded cabling for signals and communication and do not use unshielded wire terminals.
When in doubt about the suitability of your cabling, contact your Bronkhorst representative.
Always isolate the electrical power before connecting or disconnecting equipment.
When applying pressure, avoid pressure shocks and bring the fluid system gradually up to the level of the required
operating conditions; open the fluid supply gently.
Bronkhorst does the utmost to ensure that you receive a clean product. This does not, however, relieve the end user of the
responsibility to ensure that the instrument and the system in which it is incorporated meet the requirements implied by
the intended use of the instrument. The responsibility for cleaning the equipment to meet such requirements lies exclusively
with the end user.
· Prior to powering down the ES-FLOW™, the fluid system should be depressurized.
· When depressurizing, prevent sudden pressure changes by shutting off the fluid supply gradually.
Inexpertly servicing instruments can lead to serious personal injury and/or damage to the instrument or the system it is
used in. Servicing must therefore be performed by trained and qualified personnel. Contact your Bronkhorst representative
for information about cleaning and calibration. Bronkhorst has a trained staff available.
· Before disconnecting or disassembling any fluid system related parts, always make sure the fluid system is depressurized.
· When depressurizing, prevent sudden pressure changes by shutting off the fluid supply gradually.
Frequent inspection of all fluid lines and connections before, during and after operation is essential, to ensure and maintain
a safe working environment. If necessary, re-tighten fluid connections.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A12
3Product specifications
Before installing the ES-FLOW™, check that the product specifications match your requirements.
The model key (second line on the serial number label) contains information about the technical
properties of the product as ordered. The actual properties of your product can be retrieved from
the diagram below.
If you have a question about the product or if you find the product does not meet the
specifications agreed upon, do not hesitate to contact your Bronkhorst representative. To enable us to help you quickly and
effectively, make sure to have the serial number (SN) ready whenever seeking contact with your Bronkhorst representative
about a specific item.
See section Service for contact information.
3.1 Pressure rating
At the factory the ES-FLOW™ has been pressure tested. The test pressure includes a safety factor, so that it is always higher
than the specified maximum operating pressure (pressure rating). Only in exceptional cases, the operating pressure may
exceed the specified maximum operating pressure very briefly. The operating pressure must never exceed the specified test
pressure.
· The pressure rating and the test pressure are specified on the serial number label; if these specifications are missing or
insufficient, the device must not be used and should be returned to the factory.
· Before installation, make sure that the pressure rating is within the limits of the normal process conditions and that the
test pressure is in accordance with the safety factor of your application.
· Disassembling the device and/or replacing parts will invalidate the specification of the test pressure.
3.2 Wetted materials
Before commissioning, always check the wetted materials for compatibility with the process media.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 13
3.3 Model key
The model key on the serial number label contains information about the technical properties of the product as ordered.
The actual properties of your instrument can be retrieved from the diagram below.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A14
4Installation
4.1 Mounting
For stable fixation to a rigid and stable surface or construction, use the threaded mounting holes in the rear of the
instrument housing (see product overview). Consult the dimensional drawing for the exact size and locations.
4.1.1 Location
Gas bubbles in the liquid can lead to measuring errors. In general, the
instrument should be mounted in a pipe segment where gas bubbles
cannot accumulate. The image on the right shows the preferable
mounting locations.
· In general, the best location is a horizontal pipe segment or a segment where the fluid direction is upward.
· Gas might accumulate in the horizontal segment if it is followed by a downward segment. Do not mount
the instrument in a location like this.
· Mounting in a downward pipe segment with an open end is strongly dissuaded, especially if the pipe
diameter is 1/2" or more. Gravity might let the segment run empty; depending on the specific system
dimensions and the viscosity of the metered fluid, this effect might be stronger or weaker.
· If the instrument is part of a closed fluid system, mounting the instrument in a downward pipe segment is
not preferable, but may be considered if other mounting locations are problematic.
To minimize the risk of gas bubbles caused by cavitation, the preferred location to install a (control) valve is downstream
from the instrument, the preferred location for a pump is upstream.
To prevent damage to the internal electronics, make sure the temperature inside the instrument housing does not get
above 60 °C. If necessary, take appropriate heat dissipation measures, especially if the instrument is operated inside an
enclosure (e.g. a control cabinet).
4.1.2 Orientation
Aside from specific application requirements, the ES-FLOW™ has no preferred mounting orientation.
4.2 Fluid connections
For regular (mono-directional) use, install the ES-FLOW™ in the process line, in accordance with the direction of the FLOW
arrow on the instrument. For bi-directional measuring, install the instrument in the direction in which the highest flow will
be measured (if applicable). When deciding which direction to install the instrument in, take into account that the
measuring range in the reverse direction is approximately 73% of the full scale range (whereas the instrument can measure
131% FS in the normal direction).
Tighten fittings according to the instructions issued by their manufacturer.
Do not apply fluid pressure until all required fluid connections and electrical connections have been made.
Check the fluid system for leaks before applying full operating pressure, especially when using hazardous media (e.g. toxic
or flammable).

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 15
4.3 Electrical connections
· Electrical connections must be made with standard cables or compatible, according to the hook-up diagram.
· When using self-assembled cables, follow the guidelines provided by the connectors' manufacturer.
· For use in a fieldbus system, follow the instructions of the cable supplier for the according fieldbus system.
· Make sure that the power supply is suitable for the power ratings as indicated on the serial number label (model key),
and that double or reinforced insulation is used for the power supply.
· Before powering up, make sure all required cabling is properly connected.
· Before each use, inspect cabling and connectors for damage.
The equipment described in this document contains electronic components that are susceptible to electrostatic
discharge. In order to prevent damage, proper handling procedures must be followed during installation, (dis)connecting
and removing the electronics.
The equipment carries the CE-mark and is compliant with the concerning EMC requirements. However, EMC
requirements can only be met using appropriate cables and connector/gland assemblies. Bronkhorst recommends the use
of their standard cables. These cables have the right connectors and loose ends (if any) are marked to help prevent wrong
connection. When using other cables, cable wire diameters must be sufficient to carry the supply current, and voltage loss
must be kept as low as possible.
When connecting the product to other devices, be sure that the integrity of the shielding is not affected; always use
shielded cabling for signals and communication and do not use unshielded wire terminals.
When in doubt about the suitability of your cabling, contact your Bronkhorst representative.
Always isolate the electrical power before connecting or disconnecting equipment.
4.4 Fieldbus connection
Never power the instrument simultaneously from two different power sources (e.g. fieldbus and Plug-in Power Supply).
Doing so will irreversibly damage the printed circuit board and the instrument will have to be repaired before it can be
used.
Always check the total power consumption of your instruments before connecting them to a fieldbus system. Do not exceed
the maximum power of the power supply unit.
· For information about setting up a fieldbus network with Bronkhorst® instruments, consult the according fieldbus
manual.
· If you need assistance with setting up a fieldbus network, contactyour Bronkhorst representative for information.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A16
5Operation
5.1 Powering up
To maintain control of the fluid system and ensure a safe situation, it is recommended to turn on power before applying
fluid pressure and to switch off power only after the fluid system is depressurized.
When applying pressure, avoid pressure shocks and bring the fluid system gradually up to the level of the required
operating conditions; open the fluid supply gently.
· After powering up, the instrument needs a couple of seconds to start up the electronics and perform a self-test. After
successful initialization, the green LED will light up continuously to indicate that the instrument is ready to use.
· If the sensor tube contains gas, the red LED will light up continuously and the instrument will issue a warning code by
means of parameter Alarm Info (see Alarms).
5.2 First use
Bronkhorst does the utmost to ensure that you receive a clean product. This does not, however, relieve the end user of the
responsibility to ensure that the instrument and the system in which it is incorporated meet the requirements implied by
the intended use of the instrument. The responsibility for cleaning the equipment to meet such requirements lies exclusively
with the end user.
Before starting measurement and control, make sure to remove gas from the fluid system by flushing all fluid lines with the
process fluid at a high flow rate.
5.3 Powering down
· Prior to powering down the ES-FLOW™, the fluid system should be depressurized.
· When depressurizing, prevent sudden pressure changes by shutting off the fluid supply gradually.
5.4 Control valve
This section is only applicable if the ES-FLOW™ is used in conjunction with a control valve.
5.4.1 Bleeding
In order to ensure stable and reliable control behavior, the dead space of the control valve should be kept free of gas, by
bleeding it from time to time. Bleeding is advised at the following occasions:
· prior to first use
· when restarting the instrument after purging
· periodically, to remove accumulated gas
· Make sure to connect the bleed outlet to an appropriate draining facility, especially if the system is used to process
hazardous media.
· Take appropriate safety measures, as described in the Material Safety Data Sheet(s) of the media to be processed (if
applicable).
Install a shut-off valve as close to the bleed outlet as possible and connect a clear transparent tube to the valve outlet; being
able to see gas bubbles in the liquid will ease monitoring the progress of the bleeding procedure
To bleed the control valve, follow this procedure:
1. Change the liquid flow setpoint to 0% (this closes the valve)
2. Pressurize the liquid inlet (if not already done so)
3. Open the bleed outlet (slowly) until liquid starts to escape
4. Optionally, tap the valve assembly and/or liquid inlet of the valve to let gas bubbles accumulate and migrate to the
valve
5. Close the bleed outlet as soon as all gas has escaped the control valve

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 17
5.4.2 Default valve state
When the instrument is not powered or cannot communicate with the fieldbus network (if applicable), the control valve
automatically returns to its default state, which is closed for 'normally closed' valves (n/c) and fully open for 'normally open'
valves (n/o). Taking into account the typical process conditions under which the instrument is used (such as the processed
media and ambient conditions; see also Intended use), the default state is generally considered safe.
5.5 Hardware controls
On top of the housing the instrument is equipped with a multifunctional switch (fn) and three
indication LEDs:
Status
Communication interface status
Mode/MOD
Operational mode
Error/NET
Error/warning indication
· During normal operation the Mode/MOD indicator is lit green l continuously, while the Error/NET
indicator flashes red l when data is being transferred.
· During initialization and special procedures, the Mode/MOD indicator blinks or flashes.
· See the troubleshooting guide for general error indications and possible causes.
· Several other indications are specific to the installed communication interface.
· The Status LED is functional only if the instrument is equipped with an Ethernet based fieldbus interface.
· Consult the according interface manual for a list of all indications.
5.5.1 Multifunctional switch
Some special instrument functions can be started manually using the multifunctional switch near the indication LEDs. These
functions are available in analog as well as in digital operation mode.
5.5.1.1 Normal operating functions
· In order to access these functions, press and hold the switch while the instrument is in normal operation mode (green
LED lit continuously).
· As long as the switch is held, the LEDs show a repeating sequence of patterns, where each pattern indicates a function.
· All patterns in this sequence are continuous.
· Each pattern is shown for a number of seconds; in the table below, the column labeled Hold time indicates the time frame
within the sequence during which a pattern is shown.
· To start a function, release the switch when the LEDs show the pattern of the required function.
l
(green)
l
(red)
Hold time
Function
off
off
0…1 sec
No action
off
off
1…4 sec
1. In case of a min/max alarm: reset alarm
2. FLOW-BUS: Auto-install to bus - lets instrument obtain free node address if
configured node address is occupied
Note: min/max alarm (if any) has to be reset before auto install can be performed.
off
on
4…8 sec
Reset instrument; clear all warnings and error messages and restart the instrument
on
off
8…12 sec
Auto-zero; re-adjust the zero-point of the instrument (flow meters/controllers only)
on
on
12…16 sec
Enable FLASH mode for firmware update:
· the instrument shuts down and both LEDs are switched off
· at the next power-up, the instrument will be active again
· See Adjusting zero point for background information and instructions on how to adjust the zero point of an instrument.
· Do not perform a zeroing procedure before having taken notice of the instructions.

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A18
5.5.1.2 Control mode - readout/change
Reading control mode
· By briefly pressing the switch 2 times with intervals of up to 1 second in normal operation mode, the instrument shows
its current control mode with a series of consecutive LED indication patterns.
· The number of flashes corresponds to the current value of parameter Control Mode (see Special parameters).
Step
Pattern
Indication
1.
Green
l l
number of flashes indicates the tens of the parameter value
2.
Red
l l
number of flashes indicates the units of the parameter value
Examples:
· for value 1 (control mode 'Analog input'), the green LED will flash 0 times and the red LED 1 time
· for value 22 (control mode 'Valve Safe State'), the green and red LED will each flash 2 times
Changing control mode
· By briefly pressing the switch 4 times with intervals of up to 1 second in normal operation mode, the instrument enters a
state in which the control mode can be changed.
· This is done in 2 steps, each represented by a LED indication pattern (green or red; see table below).
· The number of flashes corresponds to the available values of parameter Control Mode (see Special parameters).
· At the start of each step, the according LEDs starts flashing fast (0.1 second on, 0.1 second off). By pressing and holding
the switch, the associated action is started and the flashing slows (05. seconds on, 0.5 seconds off).
Step
Pattern
Maximum
flash
count
Action
1.
Green
l l
2
set tens of parameter value
2.
Red
l l
9
set units of parameter value
To execute a step, follow these instructions:
· Press and hold the switch (flashing slows)
· To select value 0 (zero), release the switch within 1 second, otherwise:
· Count the number of LED flashes
· Release the switch when the required value is reached
· In case you lose count, keep the switch pressed and wait until the flash count reaches its maximum and restarts
On completion of step 1, the instrument automatically advances to step 2. When both steps have been completed, the
instrument returns to its normal operation mode.
If the switch is not pressed within 60 seconds after starting a step, all changes are canceled and the instrument returns to its
normal operation mode.
Note that this procedure also sets the default control mode of the instrument (contrary to changing the control mode
digitally).

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC9.17.153A 19
5.5.1.3 Network settings - readout/change
Reading network settings
· By briefly pressing the switch 3 times with intervals of up to 1 second in normal operation mode, the instrument shows
its current node address and baud rate with a series of consecutive LED indication patterns:
Step
Pattern
Indication
1.
Green
l l
number of flashes indicates the tens of the node address
2.
Red
l l
number of flashes indicates the units of the node address
3.
Green and red
(simultaneous)
l l
number of flashes indicates the baud rate
Examples:
· for node address 35, the green LED will flash 3 times and the red LED 5 times
· for node address 116, the green LED will flash 11 times and the red LED 6 times
On DeviceNet™ the node address is called MAC ID.
The number of flashes for the baud rate indication is associated with the following baud rates:
Number of
flashes
(index)
Baud rate
FLOW-BUS
Modbus
(ASCII/RTU)
PROFIBUS DP
CANopen
DeviceNet™
Ethernet based
0
automatically
detected
1
187500
9600
9600
1000000
125000
100000000
2
400000
19200
19200
800000
250000
3
38400
45450
500000
500000
4
56000
93750
250000
5
57600
187500
125000
6
115200
500000
50000
7
128000
1500000
20000
8
256000
3000000
10000
9
6000000
10
12000000

Bronkhorst®
Instruction Manual ES-FLOW™ 1xxC 9.17.153A20
Changing network settings
· By briefly pressing the switch 5 times with intervals of up to 1 second in normal operation mode, the instrument enters a
state in which the node address and baud rate can be changed (non-Ethernet based protocols only; for Ethernet based
protocols, network parameters are configured by the fieldbus master and cannot be set on the instrument).
· Changing network parameters with the multifunctional switch is done in 3 steps, each represented by a LED indication
pattern (see table below).
· At the start of each step, the according LED(s) start(s) flashing fast (0.1 second on, 0.1 second off). By pressing and holding
the switch, the associated action is started and the flashing slows (05. seconds on, 0.5 seconds off).
Step
Pattern
Maximum
flash
count
Action
1.
Green
l l
12
set tens of node address
2.
Red
l l
9
set units of node address
3.
Green and red
(simultaneous)
l l
10*
set baud rate index (number of flashes)
*) maximum count depends on the supported baud rates of the fieldbus. See the baud rate table above for supported baud
rates and associated indexes.
To execute a step, follow these instructions:
· Press and hold the switch (flashing slows)
· To select value 0 (zero), release the switch within 1 second, otherwise:
· Count the number of LED flashes
· Release the switch as soon as the required value is reached
· In case you lose count, keep the switch pressed and wait until the flash count reaches its maximum and restarts
On completion of a step, the instrument automatically advances to the next step. When all required steps have been
completed, the instrument returns to its normal operation mode.
If the switch is not pressed within 60 seconds after starting a step, all changes in the previous steps are cancelled and the
instrument returns to its normal operation mode.
5.5.1.4 Disabling multifunctional switch
To prevent unwanted use of the multifunctional switch, it can be disabled through the digital interface using the following
procedure:
1. Set parameter Init reset to 64
2. Read parameter IO status
3. Subtract 8 from the read value
4. Write the new value to parameter IO status
5. Set parameter Init reset to 82
To re-enable the switch, add 8 to the value of IO status in step 3.
5.6 Adjusting zero point
Zero-stability
The zero point of a Bronkhorst® flow meter/controller (the measurement signal that indicates the absence of a flow) is
factory adjusted with water, at approximately 20 °C and atmospheric pressure (ambient conditions), with the instrument
positioned upright. Under normal circumstances, the zero point will remain stable. However, in rare cases (for example due
to strong fluctuations in temperature and/or pressure), the instrument might develop a zero-stability error over time,
causing it to detect a flow when actually there is none. The zero-stability error can be neutralized by re-adjusting the zero
point.
If the instrument still detects a (steady) flow while all valves are closed and the fluid system is leak tight, re-adjusting the
zero point is recommended.