BRONKHORST MASS-STREAM D-6400 User manual

MASS-STREAMTM
Instruction Manual
D-6400
Digital Mass Flow Meters / Controllers
Doc. No.: 9.17.119BDate: 31-08-2022
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
Page 2 of 51
Copyright
© 2022 Bronkhorst Instruments GmbH
All rights reserved. No part of this publication may be reproduced, distributed, or transmittedin any form or by any means,
without the prior written permission of the publisher.
Disclaimer
This document hasbeen reviewed and isbelieved to beaccurate. Bronkhorst Instruments GmbH does not assume liability
for errors, inaccuracies or absence of information. The material in this document merely serves information and illustration
purposes; no rights can be derived from its contents.
Bronkhorst Instruments GmbH reserve the right to modify or improve its products and documentation without informing
anyone. As such, the information contained in this document is subject to change without notice. Device specifications
and the contents of the package may deviate from what is stated in this document.
Symbols in this document
Receipt of equipment
Check the outside packaging box for damage incurred during shipment. If the box is damaged, the local carrier must be
notified at once regarding his liability. At the same time a report should be submitted to your Bronkhorst representative.
Carefully remove the equipment from the box. Verify that the contents of the package were not damaged during shipment.
Should the equipment be damaged, the local carrier must be notified at once regarding his liability. At the same time a
report should be submitted to your Bronkhorst representative.
Refer to Removal and return instructions about return shipment procedures.
Equipment storage
•The equipment should be stored in its original package in a climate-controlled storage location.
•Care should be taken not to subject the equipment to excessive temperatures or humidity.
•See technical specifications for information about required storage conditions.
Important information. Disregarding this information could increase the risk of damage to the
equipment, or the risk of personal injuries.
Helpful information. This information will facilitate the use of the instrument and/or contribute to its
optimal performance.
Additional information available on the internet or from your Bronkhorst representative.
•Check the packing list to ensure that you received all of the items included in the scope of delivery
•Do not discard spare or replacement parts with the packaging material

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
Page 3 of 51
Warranty
Bronkhorst®products are warranted against defects inmaterial and workmanship for a period of three years from the date
of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical
damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are
normally warranted for one year or the balance of the original warranty, whichever is the longer.
The warranty includes all initialand latent defects,random failures, and indeterminable internal causes. It excludes failures
and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst Instruments GmbH or affiliated company prepay outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand. The costs of unstamped returns are added to the
repair invoice. Import and/or export charges as well as costs of foreign shipping methods and/or carriers are paid by the
customer.
Any liability is explicitly excluded for any secondary damage, caused by the instrument’s failure or the malfunction of
any component. All wear parts, like seals for example, are also excluded from the warranty.
All devices are provided with a seal mark upon delivery. In case of a broken seal any warranty claims are void. The
opening of the instruments is only permitted by certified service personnel authorized by the Customer Service
Department (CSD) of Bronkhorst Instruments GmbH.
The products of other manufacturers are warranted for a period of one year unless otherwise mentioned.
General safety precautions
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables for cracks or breaks before each use.
The equipmentand accessories must beused inaccordancewith their specificationsand operating instructions, otherwise
the safety of the equipment may be impaired.
Opening the equipment is not allowed. There are no user serviceable parts inside. In case of a defect please return the
equipment to Bronkhorst Instruments GmbH.
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standard
fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that
are not safety related may be obtained from other suppliers, as long as they are equivalent to the original component.
Selected parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you
are unsure about the relevance of a replacement component, contact your Bronkhorst representative for information.
See also section 9 (Guarantee) of the Conditions of sales:
Bronkhorst Instruments GmbH - Conditions of Sale and Delivery

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
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Contents
1. Introduction ........................................................................................6
1.1. Scope of this manual.....................................................................................................................................6
1.2. Intended use...................................................................................................................................................6
1.3. Product description .......................................................................................................................................7
1.4. Calibration ......................................................................................................................................................7
1.5. Maintenance....................................................................................................................................................7
1.6. Documentation...............................................................................................................................................8
1.7. Model key........................................................................................................................................................9
1.8. Sealing material compatibility.....................................................................................................................10
2. Installation........................................................................................11
2.1. General..........................................................................................................................................................11
2.2. Functional properties...................................................................................................................................11
2.3. Operating conditions...................................................................................................................................11
2.4. Mounting.......................................................................................................................................................11
2.5. Piping requirements.....................................................................................................................................12
2.6. Fluid connection...........................................................................................................................................12
2.7. Electrical connection...................................................................................................................................13
2.8. Fieldbus connection ....................................................................................................................................13
2.9. Communication interface ............................................................................................................................14
3. Operation..........................................................................................16
3.1. Powering up and powering down...............................................................................................................16
3.2. First use........................................................................................................................................................16
3.3. Mass flow measurement and control .........................................................................................................16
3.4. Valve Safe State............................................................................................................................................18
3.5. Manual controls............................................................................................................................................18
3.6. Communication............................................................................................................................................24
3.7. Adjusting zero point.....................................................................................................................................28
4. Digital parameters............................................................................30
4.1. General..........................................................................................................................................................30
4.2. Special parameters ......................................................................................................................................31

______________________________________ Bronkhorst® ______________________________________
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4.3. Measurement and control............................................................................................................................33
4.4. Device Identification ....................................................................................................................................34
4.5. Alarms...........................................................................................................................................................35
4.6. Counter .........................................................................................................................................................37
4.7. Network configuration.................................................................................................................................39
4.8. Fluid set ........................................................................................................................................................41
4.9. Master/slave configuration (FLOW-BUS) ...................................................................................................43
4.10. Customized I/O options (pin 5)....................................................................................................................44
5. Troubleshooting and service ..........................................................46
5.1. Errors and warnings ....................................................................................................................................46
5.2. Restoring factory settings...........................................................................................................................46
5.3. Common issues............................................................................................................................................47
5.4. Service ..........................................................................................................................................................49
6. Returns .............................................................................................50
6.1. Removal and return instructions................................................................................................................50
6.2. Disposal (end of lifetime).............................................................................................................................50
Parameter index......................................................................................51

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
Page 6 of 51
1. Introduction
1.1.Scope of this manual
This manual covers the Bronkhorst®instrument model series MASS-STREAM D-6400 mass flow meters/controllers for
gases. It contains general product information, installation and operating instructions and troubleshooting tips.
1.2.Intended use
The MASS-STREAM D-6400 is designed to accurately measure and/or control gas flow rates in a fluid system using the
media and operating conditions (e.g. temperature, pressure) that were specified at ordering time.
The gas(es) in the pressurized system in which the instrument is mounted should preferably be clean and dry. The
equipment is suited for general purpose indoor (dry) applications, like laboratories and machine enclosures, as well as
for sheltered outdoor applications, like installations in the plant constructions. The compact and robust design of the
MASS-STREAM D-6400 series is less sensitive to contamination or moisture in the gas flow and allows installations in
rough ambient conditions.
MASS-STREAM D-6400 instruments are suitable for use at temperatures conditions between 0 and +50 °C and a
relative humidity of 10 to 90% RH, unless specified otherwise. The instruments have an ingress protection of IP65,
implying that the electronics housing and electrical connection offer a certain level of protection against moist and dusty
environments.
The wetted materials incorporated in the MASS-STREAM D-6400 are compatible with media and
conditions (e.g. pressure, temperature) as specified at ordering time. If you are planning to use the
product (including any third-party components supplied by Bronkhorst, such as pumps or valves) with
other media and/or other conditions, always check the wetted materials (including seals) for
compatibility. See the technical specifications of the product and consult third party documentation (if
applicable) to check the incorporated materials.
Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and
corrosion resistance of the applied materials against the processed media lies solely with the end user.
Where appropriate, this document recommends or prescribes safety measures to be taken with
respect to media usage or working with the described equipment under the specified conditions. The
end user is responsible for taking the necessary safety precautions and proper use of appropriate
(personal) protective equipment, even if such is not explicitly recommended or required in this
document.
The end user is considered to be familiar with the necessary safety precautions, and to comply with the
appropriate protective measures as described in the Material Safety Data Sheets of the media to be
used in the system (if applicable).
Bronkhorst Instruments GmbH cannot be held liable for any damage resulting from improper or unsafe
use, use for other than the intended purpose or use with other media and/or under other conditions
than specified on the purchase order.
See also section Sealing material compatibility.

______________________________________ Bronkhorst® ______________________________________
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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.3.Product description
Optional connector for fieldbus
Display for readout and control
Inlet connection
8DIN connector
LED status indicator and push button
Outlet connection
The MASS-STREAM D-6400 instruments are measurement devices for thermal mass flow and control of gases. They
are equipped with a digital electronic multi-bus pc-board and consist of a micro-controller with peripheral circuitry for
measuring, controlling and communication. The flow signal is measured directly in the gas flow, digitized and processed
by means of the internal software (firmware). The measured and processed values can be output through the analog
interface or through the digital communication line (RS232 or optional fieldbus interface).
For controllers the setting for the actuator is calculated by the firmware. The setpoint can be given through the analog
interface or through the digital communication line.
These digital instruments offer great flexibility thanks to the "multibus" concept, whereby the instruments can be
equipped with an on-board interface with DeviceNet™, PROFIBUS DP, PROFINET, Modbus, EtherCAT®, FLOW-BUS
or EtherNet-based protocols.
Numerous input/output options can be installed through the programmable 8DIN connector (see Customized I/O). In
addition to the various analog signal options and the standard RS232 communication, there are such options as RS485
communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output.
The MASS-STREAM D-6400 instruments offer high flexibility due to the multi-gas/multi-range functionality. This function
is easily accessible via the FlowTune™ software or PLC; there is no need to disconnect the instrument from your
system. For additional gas types the user can calculate accurate fluid properties for conversion by means of our free,
online software tool FLUIDAT®on the Net. Users of MASS-STREAM D-6400 instruments can rescale their instruments
on site, saving time and money for dismounting and recalibration.
The micro switches and LED’s on top of the instrument can also be used for manual operation of some options.
1.4.Calibration
The MASS-STREAM D-6400 is factory calibrated. Periodical inspection, recalibration or verification of the accuracy may
be subject to individual requirements of the end user.
Bronkhorst certifies that the instrument meets the rated accuracy. Calibration has been performed using measurement
standards traceable to the Dutch Metrology Institute (VSL).
1.5.Maintenance
The MASS-STREAM D-6400 needs no regular maintenance if operated properly, with clean media, compatible with the
wetted materials, avoiding pressure and thermal shocks and vibrations. Units may be purged with a clean, dry and inert
gas.
In case of severe contamination, cleaning the inside of the device may be required. After cleaning, recalibration of the
instrument is recommended.
Inexpertly servicing instruments can lead to serious personal injury and/or damage to the instrument or
the system it is used in. Servicing must therefore be performed by trained and qualified personnel.
Contact your Bronkhorst representative for information about cleaning and calibration. Bronkhorst has
a trained staff available.

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.6.Documentation
The MASS-STREAM D-6400 comes with all necessary documentation for basic operation and maintenance. Some parts
of this manual refer to other documents, most of which can be downloaded from the Bronkhorst website. Calibration
certificates, test certificates and material certificates are included in the scope of delivery or can be provided on request.
Type
Document name
Document no.
Brochure
MASS-STREAM D-6400 Brochure
9.60.079
Manuals
Instruction manual MASS-STREAM D-6400 (this document)
9.17.119
Quick Start Guide MASS-STREAM D-6400
9.17.160
Instruction manual MASS-STREAM D-6400 display
9.17.164
Technical documentation
Hook-up diagram Analog/RS232
9.16.267
Hook-up diagram CANopen
9.16.272
Hook-up diagram DeviceNet™
9.16.271
Hook-up diagram EtherCAT®
9.16.273
Hook-up diagram EtherNet/IP
9.16.273
Hook-up diagram FLOW-BUS
9.16.268
Hook-up diagram Modbus ASCII / RTU
9.16.269
Hook-up diagram Modbus TCP
9.16.273
Hook-up diagram POWERLINK
9.16.273
Hook-up diagram PROFIBUS DP
9.16.270
Hook-up diagram PROFINET
9.16.273
Hook-up diagram custom bus & I/O configurations
9.16.266
Dimensional drawings model specific
model specific
Type
Document name
Document no.
General documentation
EU Declaration of Conformity
9.06.044
Communication interfaces
manuals
Manual CANopen interface
9.17.131
Manual DeviceNet™ interface
9.17.026
Manual EtherCAT® interface
9.17.063
Manual EtherNet/IP interface
9.17.132
Manual FLOW-BUS interface
9.17.024
Manual Modbus interface ASCII / RTU / TCP
9.17.035
Manual POWERLINK interface
9.17.142
Manual PROFIBUS DP interface
9.17.025
Manual PROFINET interface
9.17.095
Manual RS232 interface
9.17.027
The documentation listed in the following table is available on the MASS-STREAM D-6400 product
pages under www.bronkhorst.com/products
The documentation listed in the following table is available on the MASS-STREAM D-6400 product
pages under www.bronkhorst.com/products

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.7.Model key
The model key on the serial number label contains information about the technical properties of the instrument as ordered.
The specific properties can be retrieved with the diagrams below.
See section Customized I/O options (pin 5) for more information about the configurable input/output
(pin-5) options.

______________________________________ Bronkhorst® ______________________________________
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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.8.Sealing material compatibility
MASS-STREAM D-6400 instruments are fitted from factory with internal seals compatible with the gas type(s) as
specified at ordering time. Before using other media, always check their compatibility with the applied sealing materials.
Check the model key on the serial number label to see which sealing materials have been incorporated in your specific
instrument. When in doubt, do not hesitate to contact your Bronkhorst representative for more information.
The table below lists compatibility with some commonly used gases:
Gas
Sealing material
FKM EPDM FFKM
Air
  
Ar (Argon)
  
CH4 (Methane)



CO (Carbon monoxide)
  
CO2 (Carbon dioxide)
max 10 bar(g), 50°C

max 10 bar(g), 50°C
C2F6 (Freon-116)



C2H2 (Acetylene)
/2


C2H4 (Ethylene)
max 10 bar(g)3
max 10 bar(g)3
max 10 bar(g)3
C2H6 (Ethane)



C3H6 #2 (Propylene)
max 10 bar(g)3


C3H8 (Propane)



Cl2 (Chlorine)



He (Helium)



H2 (Hydrogen)



H2S (Hydrogen sulfide)



Kr (Krypton)



NF3 (Nitrogen trifluoride)



NH3 (Ammonia)



NO (Nitric oxide)



N2 (Nitrogen)



N2O (Nitrous oxide)



O2 (Oxygen)



SF6 (Sulfur hexafluoride)



SiH4 (Silane)
/2


Xe (Xenon)



1) ED: Explosive Decompression resistant
2) Only O-ring seals, not suitable for control valve plunger
3) For higher pressures ED compounds must be used
•Always make sure that the used process gases or mixtures thereof are compatible with the sealing
materials the instrument is equipped with.
•Do not exceed the specified maximum operating pressure and temperature. Using the instrument
outside the specified operating limits might lead to serious damage and dangerous situations.

______________________________________ Bronkhorst® ______________________________________
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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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2. Installation
2.1.General
To avoid personal injury and/or damage to the equipment only trained and qualified personnel shall perform the
installation of the instruments.
The instruments contain electronic components which are sensitive to electronic discharges (ESD). Contact with
electronically charged persons or objects could possibly endanger these components or even result in their failure.
2.2.Functional properties
Before installing the MASS-STREAM D-6400, check the serial number label to see if
the functional properties match your requirements:
•Flow rate
•Media to be used in the instrument
•Upstream and downstream pressure(s)
•Valve type (N.C. - Normally Closed / N.O. - Normally Open)
•Sealing material
•Input and output signal
2.3.Operating conditions
Test pressure
Ambient conditions
2.4.Mounting
The instruments’ preferred mounting position is horizontally (upright). Especially when installing bigger mass flow
controllers (D-6471 and bigger) in different ways you should get in contact with your distributor or Bronkhorst
Instruments GmbH beforehand.
Bronkhorst®instruments are pressure tested to at least 1.5 times the specified operating
pressure and outboard leak tested to at least 2 * 10-8 mbar l/s Helium.
•The test pressure is specified on the device with a red label; if this label is missing or if the test
pressure is insufficient, the device must not be used and should be returned to the factory.
•Before installation, make sure that the pressure rating is within the limits of the normal process
conditions and that the tested pressure is in accordance with the safety factor of your application.
•Disassembling the device and/or replacing parts will invalidate the test pressure and leak test
specification.
Make sure that process gases do not condensate in the instrument due to (changing) ambient
conditions, as this may harm the instrument's functionality.
For optimal performance, observe the following guidelines:
•Preferably, mount the MASS-STREAM D-6400 in an upright position, especially if the operating
pressure is higher than 10 bar.
•If the instrument is mounted in a position where the flow is directed upwards or downwards,
adjusting the zero point is recommended.
•Avoid installation in close proximity of mechanical vibration and/or heat sources.
•Use the equipment in an environment with a stable ambient pressure and temperature.
For stable fixation, the bottom of the instrument base is fitted with threaded mounting holes. Consult
the dimensional drawing for the exact size and locations.

______________________________________ Bronkhorst® ______________________________________
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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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2.5.Piping requirements
2.6.Fluid connection
Install the MASS-STREAM D-6400 meter/controller in the line, in accordance with the direction of the FLOW arrow on
the body of the instrument.
All devices have Withworth pipe threads – type RP – according to ISO228-1 (cylindrical G-threads in inches according
to BSPP). Mounting connections with other thread types, like for example conical NPT threads, will destroy the inlet
threads in the instrument’s body, which under some circumstances may affect the functionality of the connection in
terms of operating pressure and leak tightness.
In addition to the connection of the instrument with commercially available compression type fittings, which can
optionally be supplied, there are also suppliers with suitable adapters for other types of connection such as "Tri-Clamp",
flange, pipe socket, etc.
Pay attention to the above-mentioned thread form in the instrument bodies and the use of suitable sealing material at all
times. Tighten connections according to the instructions of the supplier of the fittings.
•For reliable performance, make sure the fluid stream is uncontaminated. If necessary, use an inlet
filter to ensure a moisture, oil and particle-free gas stream. Select a filter with a surface area and
pore size that minimize the pressure drop.
•If back flow could occur, the use of a check valve is also recommended.
•Use piping or tubing that is suitable for the operating conditions of the application (media,
maximum temperature, maximum operating pressure).
•Do not install small diameter piping/tubing on high flow rates and avoid abrupt angles or other
disturbances within a distance of 10 times the (inside) pipe diameter from the inlet or within a
distance of 5 times the (inside) pipe diameter from the outlet of the device.
•Do not install pressure regulators within a distance of 25 times the (inside) pipe diameter from a
controlling instrument.
The use of Swagelok RP-type stainless steel adapters is recommended, in combination with
Bronkhorst®elastomer O-rings.
Check the fluid system for leaks before applying full operating pressure, especially when using
hazardous media (e.g. toxic or flammable).

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
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2.7.Electrical connection
Electrical connections must be made with standard cables or according to the applicable hook-up diagram. The factory
installed 8DIN settings are indicated in the hook-up diagram. Make sure that the power supply is suitable for the
power ratings as indicated in the hook-up diagram and that double or reinforced insulation is used for the power supply.
MASS-STREAM D-6400 instruments are powered with +15…+24 Vdc or +24 Vdc, depending on configuration or the
fieldbus system (if applicable).
2.8.Fieldbus connection
If the instrument is provided with a dedicated fieldbus interface, it can be operated digitally in a fieldbus system, using
RS485 communication. In FLOW-BUS, Modbus, CANopen and DeviceNet™ systems, the fieldbus connector can also
be used to power the instrument. In other fieldbus systems, the instrument is always powered through the 8DIN power
connector on top of the instrument.
The operation via analog interface, RS232 interface and an optional fieldbus can be performed at the same time. A
special parameter called “control mode” indicates which connection is controlling the instrument: analog or digital (via
fieldbus or RS232). Even when using more interfaces at the same time, the reading can be done simultaneously. When
changing a parameter value, the last value send by an interface will become valid.
To prevent damage as a result of reversed polarity, the use of a 2A fuse in the direct +Us line is
recommended.
Always isolate the electrical power before connecting or disconnecting equipment.
The device described in this document contains electronic components that are susceptible to
electrostatic discharge. In order to prevent damage, proper handling procedures must be followed
during installation, (dis)connecting and removing the electronics.
The device carries the CE-mark and is compliant with the concerning EMC requirements. However,
EMC requirements
can only be met using appropriate cables and connector/gland assemblies.
Bronkhorst recommends the use of their standard cables. These cables have the right connectors and
loose ends (if any) are marked to help prevent wrong connection. When using other cables, cable wire
diameters must be sufficient to carry the supply current, and voltage loss must bekept as low as possible.
When in doubt, contact your Bronkhorst representative.
When connecting the product to other devices, be sure that the integrity of the shielding is not affected;
always use shielded cabling for signals and communication and do not use unshielded wire
terminals.
Never power the instrument simultaneously from two different power sources (e.g. fieldbus and
Plug-in Power Supply). Doing so will damage the printed circuit board irreparably.
Always check the total power consumption of your instruments before connecting them to a fieldbus
system. Do not exceed the maximum power of the power supply unit.
If you need assistance with setting up a bus configuration, contact your Bronkhorst representative for
information.

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
Page 14 of 51
2.8.1. FLOW-BUS
FLOW-BUS is a Bronkhorst®designed fieldbus, based on RS485 technology, for digital communication between
devices, offering the possibility of host-control by a Windows computer.
Characteristics:
•Baud rate 187500 (default) or 400000 Baud
•+15…24 Vdc supply voltage
•Easy installation and communication with other Bronkhorst®devices
•Automatic node search and bus optimization (gap fixing)
•RS232 communication (ProPar) with Windows computer (local host)
•Connection of up to 120 instruments on a single bus
•Maximum bus length: 600 m
2.8.2. Modbus
Modbus is a 3-wire, RS485-based fieldbus communication system for parameter value exchange. In this system each
instrument/device is equipped with a micro-controller for its own dedicated task. The instrument behaves as a slave,
which means all communication (instructions and readout) is initiated by a master device on the Modbus system.
Characteristics:
•Baud rate selectable between 9600 and 256000 Baud (default: 19200 Baud)
•+15…24 Vdc supply voltage
•Connection of up to 247 instruments on a single bus
•Supports RTU and ASCII protocols
2.8.3. Other fieldbuses
For other fieldbuses consult the concerning fieldbus manual.
2.9.Communication interface
The standard 8DIN connector provides the following communication interfaces:
•Analog (0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA)
•Digital RS232 (ProPar) or RS485 (FLOW-BUS or Modbus)
Additionally, the instrument can be provided with one of the following optional digital fieldbus interfaces:
•CANopen
•DeviceNet™
•EtherCAT®
•EtherNet/IP
•FLOW-BUS
•Modbus (ASCII / RTU / TCP)
•POWERLINK
•PROFIBUS DP
•PROFINET
The default communication protocol of the instrument (analog, digital RS232 or fieldbus) is specified at ordering time.
Consult Instruction manual FLOW-BUS interface (document no. 9.17.024) for more information about
setting up a FLOW-BUS network.
Consult Instruction manual Modbus interface (document no. 9.17.035) for more information about
setting up a Modbus network.

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
Page 15 of 51
2.9.1. RS232 communication
Using a Windows computer, the instrument can be monitored
and operated via RS232. For operation, the free Bronkhorst
Software tools can be used, providing a comprehensive user
interface to the digital instrument functions.
This example uses the following components:
1. MASS-STREAM D-6400
2. RS232 T-part cable (art no. 7.03.444)
3. RS232-USB converter (art no. 9.09.122)
4. Windows computer (for readout and control)
5. Plug-in Power Supply (PiPS, art no. 7.03.423)
Connect the T-part cable with the 8DIN connector on top of the instrument and use the RS232/USB converter to
connect the other end of the cable with a free USB port of the computer.
2.9.2. Fieldbus communication
The instrument can be connected to a fieldbus system with the
optional fieldbus connector on top. At the same time, RS232
communication with a Windows computer is possible through
the 8DIN connector on the top of the instrument.
This example uses the following components:
1. MASS-STREAM D-6400 with DeviceNet™ interface
2. DeviceNet™ M12 cable (art no. 7.03.323)
3. DeviceNet™ M12 Y adapter (art no. 7.03.319)
4. RS232 cable (art no. 7.03.340)
5. RS232-USB converter (art no. 9.09.122)
6. Windows computer (for readout and control)
Note that the used fieldbus components in this example are specific to DeviceNet™. For connecting with other fieldbus
systems, other cables and adapters are needed.
For communication with a PLC or other controlling device, an 8DIN cable with a loose end (part no.
7.03.191, 7.03.540 or 7.03.541) can be used. Consult the RS232 hook-up diagram to connect the
required signals.
For RS232 communication at baud rates up to 38400 Baud the maximum allowable cable length is
10m. For higher baud rates, use a maximum cable length of 3m.
•For more information about communication through the RS232 interface, consult the RS232
manual (document no. 9.17.027).
•The FlowWare tools and accompanying documentation can be downloaded from the Accessories
and software section on the Bronkhorst® product pages (www.bronkhorst.com/products).

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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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3. Operation
After correct installation of the MASS-STREAM D-6400 and when all safety precautions have been taken into account,
the instrument can be used for measuring and/or controlling mass flow in the system.
3.1.Powering up and powering down
3.2.First use
3.3.Mass flow measurement and control
When powering up, the instrument needs a couple of seconds to
start up the electronics. As soon as the start-up sequence has
finished (green LED glows continuously), the instrument is ready to
measure mass flows, however, optimal accuracy is only reached
after warming up (see Powering up and powering down).
After powering up, the control valve closes (normally open) or stays
closed (normally closed). The valve stays closed until the instrument
receives a setpoint from the active setpoint source. The internal PID
controller then immediately opens the control valve, until the
measured flow rate matches the setpoint. It maintains the resulting
flow rate until another setpoint is given.
•It is recommended to turn on power before applying fluid pressure and to switch off power only
after relieving fluid pressure.
•For best performance, allow the device to warm up and stabilize for at least 30 minutes before
starting measurement and/or control. This may be done with or without media flow.
When applying pressure, avoid pressure shocks and bring the fluid system gradually up to the level of
the specified operating conditions; open the fluid supply gently.
In systems for use with corrosive or reactive media, purging for at least 30 minutes with a dry, inert gas (like
Nitrogen or Argon) is absolutely necessary before use. After use with corrosive, reactive or hazardous
media (e.g. toxic or flammable), purging is also necessary before the fluid system is exposed to air.
If the instrument is mounted in a position with upward or downward flow, adjusting the zero point is
advised before using the instrument for the first time. See Adjusting zero point for background
information and instructions.
After changing to another fluid set, the instrument must be zeroed at the process conditions. See
Adjusting zero point for background information and instructions.
MASS-STREAM D-6400
instruments are most accurate at the specified inlet/outlet pressure,
temperature and process gas conditions. However, the instrument will function properly in a wide range
of varying conditions. It is strongly advised to use the FlowTune™ software available with the instrument
to set the correct process conditions if the actual process conditions differ from the conditions for which
the instrument is set (see Changing fluid set).
Although MASS-STREAM D-6400 instruments have good temperature stability, the best accuracy is
achieved when temperature gradients across the instruments are avoided. Make sure that the gas
temperature matches the ambient temperature as good as possible and mount the instruments on a
rigid (heat conducting) surface.
MASS-STREAM D-6400 instruments handle pressure shocks in the system well but are not insensitive
to pressure fluctuations. For optimum control stability, provide a stable (pressure controlled) inlet
pressure with sufficient buffer volume between the pressure regulator and the instrument and avoid
installing multiple instruments or control valves in close proximity to another with small volume piping in
between.

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3.3.1. Changing fluid set
MASS-STREAM D-6400 instruments are equipped with an on-board gas database. This provides the gas properties
needed to convert to other gases for the Multi Fluid/Multi Range functionality (MFMR). MFMR enabled instruments are
calibrated ex factory for a number of standard measuring ranges, which can be configured for use with different fluids.
Defining fluids and ranges and selecting the active fluid can be done via RS232 with the free available Bronkhorst®
software tool FlowTune™.
FlowTune™ provides the following key functionality:
•Definition and storage of up to eight different fluids in the
instrument
•Storing fluid properties for any gas
•Changing inlet- and/or outlet pressure based on actual
process conditions
•Re-ranging the full scale (FS) flow rate within the
instrument's supported flow range
•Changing control speed per fluid set for faster or slower
(smoother) flow control
MFMR functionality is available for the full temperature and
pressure range of the instrument. FlowTune™ checks the
changes for the following limitations:
•Rangeability of the flow sensor for the selected fluid
•Rangeability of the control valve for the selected fluid
•Accuracy indication for the given flow range
•Compatibility of selected gases with the used sealing materials (see Sealing material compatibility)
•Limitations to the operating conditions
After all limitation checks are passed, the entered properties are stored in the instrument, including the required
controller settings. When switching to another fluid set, controller settings are automatically adjusted to the new process
conditions, so there is no need to change PID controller settings manually.
The FlowTune™ software and the associated documentation can be downloaded from the product
pages on the Bronkhorst website: (www.bronkhorst.com/products).
To connect with FlowTune™, use RS232 communication via the 8DIN connector. In case a connection
cannot be established, use the power-up functionality of the multifunctional switch to switch to
configuration mode and enable RS232 communication. After configuring the required parameters,
remember to return the instrument to the original communication mode.
It is advised to use FlowTune™ only in a non-operational environment. FlowTune™ will force the
instrument to Valve Safe State as soon as the connection is made. Be sure to close communication
between FlowTune™ and the instrument properly, to restore the normal operating mode.
After changing to another fluid set, the instrument must be zeroed at the process conditions. See
Adjusting zero point for background information and instructions.

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3.4.Valve Safe State
When a controlling instrument is not powered or cannot communicate with the fieldbus network (if applicable), the control
valve automatically returns to its default state (also called Safe State), which is closed for a 'normally closed' valve (n/c)
and fully open for a 'normally open' valve (n/o). Taking into account the typical process conditions under which the
instrument is used (such as the processed media and ambient conditions; see also LED indications), the default state is
generally considered safe.
Check the serial number label or the technical specifications to see which valve type is used on your instrument (if
applicable).
3.5.Manual controls
On top of the housing, the instrument is equipped with two LED indicators and a multifunctional
switch, which can be used to monitor the instrument visually and start several functions manually.
3.5.1. LED indications
The LEDs on top of the instrument indicate the operational state. The meaning of some indications depends on the
specific fieldbus interface of the instrument (if installed).
•(green) Mode: operation mode indication
•(red) Error: error/warning messages
The tables below list the different LED indications:
•
Green
Pattern
Time
Indication
off
continuous
Power off or program not running
on
continuous
Normal operation mode
short flash
0.1 sec on,
2 sec off
No communication, valves are in safe/default state
blink
0.2 sec on,
0.2 sec off
Special function mode: the instrument is busy performing a special function
long flash
2 sec on,
0.1 sec off
Configuration mode: the 8DIN connector is set for RS232 communication
(ProPar) at 38400 Baud
•
Red
Pattern
Time
Indication
off
continuous
No error
on
continuous
Critical error: the instrument needs servicing before it can be used
short flash
0.1 sec on,
2 sec off
FLOW-BUS Node occupied: re-install instrument
PROFIBUS DP No data exchange between master and slave (automatic recovery)
Modbus Data is being received or transmitted
DeviceNet™ Minor communication error
EtherCAT®Instrument is not in OP mode
PROFINET No application relation established
blink 0.2 sec on,
0.2 sec off
FLOW-BUS Waiting for communication
PROFIBUS DP Not used
Modbus Not used
DeviceNet™ No bus power
EtherCAT®Not used
PROFINET Not used
long flash 2 sec on,
0.1 sec off
FLOW-BUS Not used
PROFIBUS DP Requested parameter not available
Modbus Not used
DeviceNet™ Serious communication error; manual intervention needed
EtherCAT®Configuration error
PROFINET Configuration error (e.g. a requested parameter is not available)

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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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•
Green and
•
red (alternating)
Pattern
Time
Indication
slow wink
1 sec on,
1 sec off
Alarm indication: minimum/maximum alarm, power-up alarm, limit reached or batch
size reached
normal wink
0.2 sec on,
0.2 sec off
Wink mode: by sending a command to the Wink parameter, the instrument flashes its
LEDs to indicate its physical location
fast wink
0.1 sec on,
0.1 sec off
Selected action started (after releasing the multifunctional switch)
3.5.1.1. Interface status
Instruments with an EtherCAT®or PROFINET interface are equipped with a third LED (bi-color: green and red), to
indicate the status of the communication interface. This status LED can give the following indications:
Pattern
Time
EtherCAT®
PROFINET
•
off
continuous
Power off or initializing
Interface not (yet) started
•
on, green
continuous
Normal operation
Normal operation, application relation
established with I/O controller
•
blinking, green
0.2 sec on,
0.2 sec off
Pre-operational
Initializing
•
blinking, red
0.2 sec on,
0.2 sec off
Invalid state change
Link status OK, no application relation
with I/O controller
•
single flash, red
0.2 sec on,
1 sec off
Invalid configuration
n/a
•
double flash, red
0.2 sec on,
0.2 sec off,
0.2 sec on,
1 sec off
Communication timeout
(e.g. communication cable
disconnected)
n/a
•
on, red
continuous
n/a
No link
Ethernet indicators
RJ-45 connection sockets on instruments with a EtherCAT®or PROFINET interface have two integrated LED indicators,
with standard Ethernet functionality:
■Amber: Ethernet speed
■Green: Ethernet link/activity
3.5.1.2. DeviceNet™ indications
DeviceNet™ instruments have two bi-color LEDs (green/red) to indicate network and module status. The indications
below replace the standard LED indications:
•/•(green/red) Network status (NET; left)
•/•(green/red) Module status (MOD; right)
The tables on the next page list the different LED indications.
DeviceNet™ instruments have different LED indications, that replace the standard indications
described in this section (see below).

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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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Network status
Pattern
Time
Indication
•
off continuous Power off or offline
•
on, green continuous Online, connected, link OK
•
blinking, green 0.5 sec on,
0.5 sec off Online, not connected; the instrument is online but has no connections to other nodes or is not allocated to a master
•
blinking, red 0.5 sec on,
0.5 sec off Connenction timed out
•
on, red continuous Critical link failure: the device cannot connect to the network
Module status
Pattern
Time
Indication
•
off continuous No power
•
on, green continuous Normal operation mode
•
blinking, green 0.5 sec on,
0.5 sec off Device is in standby mode or configuration is missing, incomplete or incorrect
•
/
•
alternating 0.5 sec on,
0.5 sec off Self-test mode
•
on, red continuous Critical error: the instrument needs servicing before it can be used
3.5.2. Multifunctional switch
Some special functions of the instrument can be started manually using the multifunctional switch near the indication
LEDs. These functions are available in analog as well as in digital operation mode.
3.5.2.1. Normal operating functions
•In order to access these functions, press and hold the switch while the instrument is in normal operation mode
(green LED glowing).
•As long as the switch is held, the LEDs show a repeating sequence of patterns, where each pattern indicates a
function.
•All indications in this sequence are continuous.
•Each pattern is shown for a number of seconds; in the table below the column ‘Hold time’ indicates the time frame
within the sequence where the LEDs show the associated pattern.
•To start a function, release the switch when the LEDs show the pattern of the required function.
•
Green
•
Red Hold time Function
off
off
0…1 sec
No action
off off 1…4 sec
1. In case of a min/max alarm: reset alarm
2. FLOW-BUS: Auto-install to bus - lets instrument obtain free node address if
configured node address is occupied
Note: min/max alarm (if any) has to be reset before auto install can be performed.
off on 4…8 sec
Reset instrument: clear all warnings and error messages and restart the
instrument
on off 8…12 sec
Reset instrument: clear all warnings and error messages and restart the
instrument
on on 12…16 sec
Enable FLASH mode for firmware update:
•the instrument shuts down and both LEDs are switched off
•at the next power-up, the instrument will be active again