BRONKHORST MASS-STREAM D-6400 User manual

MASS-STREAMTM
Instruction Manual
D-6400
Digital Mass Flow Meters / Controllers
Doc. No.: 9.17.119BDate: 31-08-2022
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
Page 2 of 51
Copyright
© 2022 Bronkhorst Instruments GmbH
All rights reserved. No part of this publication may be reproduced, distributed, or transmittedin any form or by any means,
without the prior written permission of the publisher.
Disclaimer
This document hasbeen reviewed and isbelieved to beaccurate. Bronkhorst Instruments GmbH does not assume liability
for errors, inaccuracies or absence of information. The material in this document merely serves information and illustration
purposes; no rights can be derived from its contents.
Bronkhorst Instruments GmbH reserve the right to modify or improve its products and documentation without informing
anyone. As such, the information contained in this document is subject to change without notice. Device specifications
and the contents of the package may deviate from what is stated in this document.
Symbols in this document
Receipt of equipment
Check the outside packaging box for damage incurred during shipment. If the box is damaged, the local carrier must be
notified at once regarding his liability. At the same time a report should be submitted to your Bronkhorst representative.
Carefully remove the equipment from the box. Verify that the contents of the package were not damaged during shipment.
Should the equipment be damaged, the local carrier must be notified at once regarding his liability. At the same time a
report should be submitted to your Bronkhorst representative.
Refer to Removal and return instructions about return shipment procedures.
Equipment storage
•The equipment should be stored in its original package in a climate-controlled storage location.
•Care should be taken not to subject the equipment to excessive temperatures or humidity.
•See technical specifications for information about required storage conditions.
Important information. Disregarding this information could increase the risk of damage to the
equipment, or the risk of personal injuries.
Helpful information. This information will facilitate the use of the instrument and/or contribute to its
optimal performance.
Additional information available on the internet or from your Bronkhorst representative.
•Check the packing list to ensure that you received all of the items included in the scope of delivery
•Do not discard spare or replacement parts with the packaging material

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
Page 3 of 51
Warranty
Bronkhorst®products are warranted against defects inmaterial and workmanship for a period of three years from the date
of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical
damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are
normally warranted for one year or the balance of the original warranty, whichever is the longer.
The warranty includes all initialand latent defects,random failures, and indeterminable internal causes. It excludes failures
and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst Instruments GmbH or affiliated company prepay outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand. The costs of unstamped returns are added to the
repair invoice. Import and/or export charges as well as costs of foreign shipping methods and/or carriers are paid by the
customer.
Any liability is explicitly excluded for any secondary damage, caused by the instrument’s failure or the malfunction of
any component. All wear parts, like seals for example, are also excluded from the warranty.
All devices are provided with a seal mark upon delivery. In case of a broken seal any warranty claims are void. The
opening of the instruments is only permitted by certified service personnel authorized by the Customer Service
Department (CSD) of Bronkhorst Instruments GmbH.
The products of other manufacturers are warranted for a period of one year unless otherwise mentioned.
General safety precautions
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables for cracks or breaks before each use.
The equipmentand accessories must beused inaccordancewith their specificationsand operating instructions, otherwise
the safety of the equipment may be impaired.
Opening the equipment is not allowed. There are no user serviceable parts inside. In case of a defect please return the
equipment to Bronkhorst Instruments GmbH.
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standard
fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that
are not safety related may be obtained from other suppliers, as long as they are equivalent to the original component.
Selected parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you
are unsure about the relevance of a replacement component, contact your Bronkhorst representative for information.
See also section 9 (Guarantee) of the Conditions of sales:
Bronkhorst Instruments GmbH - Conditions of Sale and Delivery

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
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Contents
1. Introduction ........................................................................................6
1.1. Scope of this manual.....................................................................................................................................6
1.2. Intended use...................................................................................................................................................6
1.3. Product description .......................................................................................................................................7
1.4. Calibration ......................................................................................................................................................7
1.5. Maintenance....................................................................................................................................................7
1.6. Documentation...............................................................................................................................................8
1.7. Model key........................................................................................................................................................9
1.8. Sealing material compatibility.....................................................................................................................10
2. Installation........................................................................................11
2.1. General..........................................................................................................................................................11
2.2. Functional properties...................................................................................................................................11
2.3. Operating conditions...................................................................................................................................11
2.4. Mounting.......................................................................................................................................................11
2.5. Piping requirements.....................................................................................................................................12
2.6. Fluid connection...........................................................................................................................................12
2.7. Electrical connection...................................................................................................................................13
2.8. Fieldbus connection ....................................................................................................................................13
2.9. Communication interface ............................................................................................................................14
3. Operation..........................................................................................16
3.1. Powering up and powering down...............................................................................................................16
3.2. First use........................................................................................................................................................16
3.3. Mass flow measurement and control .........................................................................................................16
3.4. Valve Safe State............................................................................................................................................18
3.5. Manual controls............................................................................................................................................18
3.6. Communication............................................................................................................................................24
3.7. Adjusting zero point.....................................................................................................................................28
4. Digital parameters............................................................................30
4.1. General..........................................................................................................................................................30
4.2. Special parameters ......................................................................................................................................31

______________________________________ Bronkhorst® ______________________________________
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4.3. Measurement and control............................................................................................................................33
4.4. Device Identification ....................................................................................................................................34
4.5. Alarms...........................................................................................................................................................35
4.6. Counter .........................................................................................................................................................37
4.7. Network configuration.................................................................................................................................39
4.8. Fluid set ........................................................................................................................................................41
4.9. Master/slave configuration (FLOW-BUS) ...................................................................................................43
4.10. Customized I/O options (pin 5)....................................................................................................................44
5. Troubleshooting and service ..........................................................46
5.1. Errors and warnings ....................................................................................................................................46
5.2. Restoring factory settings...........................................................................................................................46
5.3. Common issues............................................................................................................................................47
5.4. Service ..........................................................................................................................................................49
6. Returns .............................................................................................50
6.1. Removal and return instructions................................................................................................................50
6.2. Disposal (end of lifetime).............................................................................................................................50
Parameter index......................................................................................51

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1. Introduction
1.1.Scope of this manual
This manual covers the Bronkhorst®instrument model series MASS-STREAM D-6400 mass flow meters/controllers for
gases. It contains general product information, installation and operating instructions and troubleshooting tips.
1.2.Intended use
The MASS-STREAM D-6400 is designed to accurately measure and/or control gas flow rates in a fluid system using the
media and operating conditions (e.g. temperature, pressure) that were specified at ordering time.
The gas(es) in the pressurized system in which the instrument is mounted should preferably be clean and dry. The
equipment is suited for general purpose indoor (dry) applications, like laboratories and machine enclosures, as well as
for sheltered outdoor applications, like installations in the plant constructions. The compact and robust design of the
MASS-STREAM D-6400 series is less sensitive to contamination or moisture in the gas flow and allows installations in
rough ambient conditions.
MASS-STREAM D-6400 instruments are suitable for use at temperatures conditions between 0 and +50 °C and a
relative humidity of 10 to 90% RH, unless specified otherwise. The instruments have an ingress protection of IP65,
implying that the electronics housing and electrical connection offer a certain level of protection against moist and dusty
environments.
The wetted materials incorporated in the MASS-STREAM D-6400 are compatible with media and
conditions (e.g. pressure, temperature) as specified at ordering time. If you are planning to use the
product (including any third-party components supplied by Bronkhorst, such as pumps or valves) with
other media and/or other conditions, always check the wetted materials (including seals) for
compatibility. See the technical specifications of the product and consult third party documentation (if
applicable) to check the incorporated materials.
Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and
corrosion resistance of the applied materials against the processed media lies solely with the end user.
Where appropriate, this document recommends or prescribes safety measures to be taken with
respect to media usage or working with the described equipment under the specified conditions. The
end user is responsible for taking the necessary safety precautions and proper use of appropriate
(personal) protective equipment, even if such is not explicitly recommended or required in this
document.
The end user is considered to be familiar with the necessary safety precautions, and to comply with the
appropriate protective measures as described in the Material Safety Data Sheets of the media to be
used in the system (if applicable).
Bronkhorst Instruments GmbH cannot be held liable for any damage resulting from improper or unsafe
use, use for other than the intended purpose or use with other media and/or under other conditions
than specified on the purchase order.
See also section Sealing material compatibility.

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.3.Product description
Optional connector for fieldbus
Display for readout and control
Inlet connection
8DIN connector
LED status indicator and push button
Outlet connection
The MASS-STREAM D-6400 instruments are measurement devices for thermal mass flow and control of gases. They
are equipped with a digital electronic multi-bus pc-board and consist of a micro-controller with peripheral circuitry for
measuring, controlling and communication. The flow signal is measured directly in the gas flow, digitized and processed
by means of the internal software (firmware). The measured and processed values can be output through the analog
interface or through the digital communication line (RS232 or optional fieldbus interface).
For controllers the setting for the actuator is calculated by the firmware. The setpoint can be given through the analog
interface or through the digital communication line.
These digital instruments offer great flexibility thanks to the "multibus" concept, whereby the instruments can be
equipped with an on-board interface with DeviceNet™, PROFIBUS DP, PROFINET, Modbus, EtherCAT®, FLOW-BUS
or EtherNet-based protocols.
Numerous input/output options can be installed through the programmable 8DIN connector (see Customized I/O). In
addition to the various analog signal options and the standard RS232 communication, there are such options as RS485
communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output.
The MASS-STREAM D-6400 instruments offer high flexibility due to the multi-gas/multi-range functionality. This function
is easily accessible via the FlowTune™ software or PLC; there is no need to disconnect the instrument from your
system. For additional gas types the user can calculate accurate fluid properties for conversion by means of our free,
online software tool FLUIDAT®on the Net. Users of MASS-STREAM D-6400 instruments can rescale their instruments
on site, saving time and money for dismounting and recalibration.
The micro switches and LED’s on top of the instrument can also be used for manual operation of some options.
1.4.Calibration
The MASS-STREAM D-6400 is factory calibrated. Periodical inspection, recalibration or verification of the accuracy may
be subject to individual requirements of the end user.
Bronkhorst certifies that the instrument meets the rated accuracy. Calibration has been performed using measurement
standards traceable to the Dutch Metrology Institute (VSL).
1.5.Maintenance
The MASS-STREAM D-6400 needs no regular maintenance if operated properly, with clean media, compatible with the
wetted materials, avoiding pressure and thermal shocks and vibrations. Units may be purged with a clean, dry and inert
gas.
In case of severe contamination, cleaning the inside of the device may be required. After cleaning, recalibration of the
instrument is recommended.
Inexpertly servicing instruments can lead to serious personal injury and/or damage to the instrument or
the system it is used in. Servicing must therefore be performed by trained and qualified personnel.
Contact your Bronkhorst representative for information about cleaning and calibration. Bronkhorst has
a trained staff available.

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.6.Documentation
The MASS-STREAM D-6400 comes with all necessary documentation for basic operation and maintenance. Some parts
of this manual refer to other documents, most of which can be downloaded from the Bronkhorst website. Calibration
certificates, test certificates and material certificates are included in the scope of delivery or can be provided on request.
Type
Document name
Document no.
Brochure
MASS-STREAM D-6400 Brochure
9.60.079
Manuals
Instruction manual MASS-STREAM D-6400 (this document)
9.17.119
Quick Start Guide MASS-STREAM D-6400
9.17.160
Instruction manual MASS-STREAM D-6400 display
9.17.164
Technical documentation
Hook-up diagram Analog/RS232
9.16.267
Hook-up diagram CANopen
9.16.272
Hook-up diagram DeviceNet™
9.16.271
Hook-up diagram EtherCAT®
9.16.273
Hook-up diagram EtherNet/IP
9.16.273
Hook-up diagram FLOW-BUS
9.16.268
Hook-up diagram Modbus ASCII / RTU
9.16.269
Hook-up diagram Modbus TCP
9.16.273
Hook-up diagram POWERLINK
9.16.273
Hook-up diagram PROFIBUS DP
9.16.270
Hook-up diagram PROFINET
9.16.273
Hook-up diagram custom bus & I/O configurations
9.16.266
Dimensional drawings model specific
model specific
Type
Document name
Document no.
General documentation
EU Declaration of Conformity
9.06.044
Communication interfaces
manuals
Manual CANopen interface
9.17.131
Manual DeviceNet™ interface
9.17.026
Manual EtherCAT® interface
9.17.063
Manual EtherNet/IP interface
9.17.132
Manual FLOW-BUS interface
9.17.024
Manual Modbus interface ASCII / RTU / TCP
9.17.035
Manual POWERLINK interface
9.17.142
Manual PROFIBUS DP interface
9.17.025
Manual PROFINET interface
9.17.095
Manual RS232 interface
9.17.027
The documentation listed in the following table is available on the MASS-STREAM D-6400 product
pages under www.bronkhorst.com/products
The documentation listed in the following table is available on the MASS-STREAM D-6400 product
pages under www.bronkhorst.com/products

______________________________________ Bronkhorst® ______________________________________
________________________________________________________________________________________________
9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.7.Model key
The model key on the serial number label contains information about the technical properties of the instrument as ordered.
The specific properties can be retrieved with the diagrams below.
See section Customized I/O options (pin 5) for more information about the configurable input/output
(pin-5) options.

______________________________________ Bronkhorst® ______________________________________
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9.17.119A MASS-STREAMTM Instruction Manual D-6400
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1.8.Sealing material compatibility
MASS-STREAM D-6400 instruments are fitted from factory with internal seals compatible with the gas type(s) as
specified at ordering time. Before using other media, always check their compatibility with the applied sealing materials.
Check the model key on the serial number label to see which sealing materials have been incorporated in your specific
instrument. When in doubt, do not hesitate to contact your Bronkhorst representative for more information.
The table below lists compatibility with some commonly used gases:
Gas
Sealing material
FKM EPDM FFKM
Air
  
Ar (Argon)
  
CH4 (Methane)



CO (Carbon monoxide)
  
CO2 (Carbon dioxide)
max 10 bar(g), 50°C

max 10 bar(g), 50°C
C2F6 (Freon-116)



C2H2 (Acetylene)
/2


C2H4 (Ethylene)
max 10 bar(g)3
max 10 bar(g)3
max 10 bar(g)3
C2H6 (Ethane)



C3H6 #2 (Propylene)
max 10 bar(g)3


C3H8 (Propane)



Cl2 (Chlorine)



He (Helium)



H2 (Hydrogen)



H2S (Hydrogen sulfide)



Kr (Krypton)



NF3 (Nitrogen trifluoride)



NH3 (Ammonia)



NO (Nitric oxide)



N2 (Nitrogen)



N2O (Nitrous oxide)



O2 (Oxygen)



SF6 (Sulfur hexafluoride)



SiH4 (Silane)
/2


Xe (Xenon)



1) ED: Explosive Decompression resistant
2) Only O-ring seals, not suitable for control valve plunger
3) For higher pressures ED compounds must be used
•Always make sure that the used process gases or mixtures thereof are compatible with the sealing
materials the instrument is equipped with.
•Do not exceed the specified maximum operating pressure and temperature. Using the instrument
outside the specified operating limits might lead to serious damage and dangerous situations.