BRONKHORST F-112AX User manual

Instruction manual
Explosion proof
Flow Measurement and control
ATEX
Doc. no.: 9.17.028UDate: 25-06-2020
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
Related drawing.
No modifications permitted without
approval of the authorised person.

BRONKHORST®

BRONKHORST®
Even though care has been taken in the preparation and
publication of the contents of this manual, we do not assume
legal or other liability for any inaccuracy, mistake, mis-
statement or any other error of whatsoever nature contained
herein. The material in this manual is for information
purposes only, and is subject to change without notice.
Warranty
The products of Bronkhorst®are warranted against defects in
material and workmanship for a period of three years from
the date of shipment, provided they are used in accordance
with the ordering specifications and the instructions in this
manual and that they are not subjected to abuse, physical
damage or contamination. Products that do not operated
properly during this period may be repaired or replaced at no
charge. Repairs are normally warranted for one year or the
balance of the original warranty, whichever is the longer.
See also paragraph 9 of the Conditions of Sales.
The warranty includes all initial and latent defects, random
failures, and indeterminable internal causes.
It excludes failures and damage caused by the customer,
such as contamination, improper electrical hook-up, dropping
etc.
Re-conditioning of products primarily returned for warranty
service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. prepays outgoing freight charges
when any part of the service is performed under warranty,
unless otherwise agreed upon beforehand. However, if the
product has been returned collect to Bronkhorst High-Tech
B.V., these costs are added to the repair invoice. Import
and/or export charges, foreign shipping methods/carriers are
paid for by the customer.

BRONKHORST®
Short-Form Operation Instruction
Before installing your Mass Flow Meter/Controller it is
important to read the attached label and check:
- flow rate
- fluid to be metered
- up- and downstream pressures
- input/output signal
Check the red-coloured sticker and make sure the
test pressure is in agreement with normal safety
factors for your application.
Check if the piping system is clean. For absolute
cleanliness always install filters to assure a clean,
moisture- and oil-free gas stream.
Install the Meter/Controller in the line and tighten the
fittings according to the instructions of the supplier of
the fittings. Choose the mounting position according
to the directions given in this manual.
Check the system for leaks before applying fluid
pressure
Electrical connections must be made with a standard
cable or according to the hook-up diagram in the back
of this manual.
Apply power to the instrument and allow for approx.
30 minutes to warm-up and stabilize. This may be
done with or without fluid pressure, applied to the
system.
Your instrument is now ready for operation.

BRONKHORST®
TABLE OF CONTENTS
1 Intrinsic safe sensors
1.1 General description.................................................................................................................. page 7
1.2 Bronkhorst®flowhead .............................................................................................................. page 7
1.3 Software for conversion factor calculation ............................................................................... page 8
1.4 Control valve ............................................................................................................................ page 8
1.4.1 Introduction .............................................................................................................................. page 8
1.5 Ex-proof Coils .......................................................................................................................... page 9
1.5.1 Introduction .............................................................................................................................. page 9
1.5.2 Style XC-coil ............................................................................................................................ page 9
1.5.3 Style XB-coil............................................................................................................................. page 10
2 Installation
2.1 Receipt of equipment ............................................................................................................... page 11
2.2 Return shipment....................................................................................................................... page 11
2.3 Service ..................................................................................................................................... page 11
2.4 Mounting .................................................................................................................................. page 12
2.5 In-line filter ............................................................................................................................... page 12
2.6 Gas connections ...................................................................................................................... page 12
2.7 Piping ....................................................................................................................................... page 13
2.8 Electrical connections .............................................................................................................. page 13
2.9 Caution..................................................................................................................................... page 13
2.10 Supply pressure ....................................................................................................................... page 14
2.11 System purging ........................................................................................................................ page 14
2.12 Seals ........................................................................................................................................ page 14
2.13 Equipment storage................................................................................................................... page 14
3 Operation
3.1 General .................................................................................................................................... page 15
3.2 Power and warm-up................................................................................................................. page 15
3.3 Start-up .................................................................................................................................... page 15
3.4 Operating conditions ................................................................................................................ page 15
4 Cables
4.1 Introduction .............................................................................................................................. page 16
4.2 Cable for Bronkhorst® flowhead .............................................................................................. page 16
4.3 Control system with XC-coil..................................................................................................... page 16
4.4 Control system with XB-coil ..................................................................................................... page 16
4.5 EMC and cables....................................................................................................................... page 17
4.5.1 Cable gland assembly Bronkhorst® flowhead ......................................................................... page 17
4.5.2 Cable gland assembly XC / XB coil ......................................................................................... page 17
5 Maintenance
5.1 General .................................................................................................................................... page 18
5.2 Calibration................................................................................................................................ page 18
6 Troubleshooting
6.1 General .................................................................................................................................... page 19
6.2 Troubleshooting summary ....................................................................................................... page 19

BRONKHORST®
Appendices
1 Enclosures

BRONKHORST®
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1 INTRINSIC SAFE SENSORS
1.1 General description
The Bronkhorst® series mass flow meter is an accurate
device for measuring gas flows up to 700bar, virtually independent
of pressure and temperature changes.
The system can be completed with a control valve and flexible readout
to measure and control gasflows from
05 ml /min
n
−
up to
1000 m / h
3n
.
Model F-112AX
1.2 Bronkhorst®flowhead
The X100 flowhead has the following type of protection:
II 2 G Ex ib IIC T4 Gb
II 2 G = ATEX group and category
ib = intrinsic safe in zone 1
IIC = most dangerous explosion group with ignition energy of 20 µJ
for example: Acetylene and Hydrogen
T4 = surface temperature max. 135°C.
Gb = IEC equipment protection level
There is one gas which has a more dangerous temperature-class;
CS2
has temperature class T5. This gas
may not be measured with our meters.
STANDARDS:
The electrical apparatus and any acceptable variations to it specified in the schedule of this certificate and
the identified documents, was found to comply with the following standards:
EN 60079-0 : 2012 + A11:2013 Explosive atmospheres - Part 0: General requirements
EN 60079-11 : 2012 Explosive atmospheres - Part 11: Equipment protection by intrinsic safety "i"
The signal processing is done with a pre-amplifier, which transforms the measuring signal into a linearized
current signal.
For the power of the heater, a "zero" current of 15mA has been chosen.
The output current varies from 15 to 20mA.

BRONKHORST®
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1.3 Software for conversion factor calculation
Bronkhorst® gathered the physical properties of over 600 fluids in a database called FLUIDAT.
Application software, such as FLUIDATon the Net (FOTN), enable the user to calculate accurate
conversion factors, not only at 20°C/1 atm (as shown in the conversion table, App.1) but at any
temperature/pressure combination.
Apply to your distributor for more details of this software.
1.4 Control valve
1.4.1 Introduction
Control valves are not designed to provide positive shut-off, although some models have excellent
capabilities for this purpose.
It is recommended to install a separate shut-off valve in the line if so required. Also pressure surges, as may
occur during system pressurisation must be avoided. The following models can be distinguished:
Solenoid valve
This is considered to be the standard (direct operated) control valve. In general it
is a normally closed solenoid valve. The plunger is lifted by the force of the
magnetic field of the coil. The orifice under the plunger is removable for optimising
the orifice diameter. Also a normally opened solenoid valve is available.
Vary-P valve
For process conditions where up- and downstream pressure vary much,
a special type of valve, VARY-P has been designed. This valve consists
of two valves, a solenoid operated control valve and a fixed adjusted
pressure compensation valve.
Pilot operated valve
For high flow rates the pilot operated valve has been designed. A
solenoid driven control valve controls the pressure difference
across a piston, which lifts the main plunger.
flowcontrol
valve
pressure
compensating
valve
flowcontrol
valve
P1
pilot valve
pressure
compensating
valve
P2
flowcontrol valve

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1.5 Ex-proof Coils
1.5.1 Introduction
In our program we know two sorts of coils:
(1) Style: XC = II 2 G Ex eb IIC T4
II 2 D Ex tb IIIC T130°C
Increased safety coil with LCIE approval.
(2) Style: XB = II 1 G Ex ia IIC T6
II 1 D Ex ta IIIC T80°C
Intrinsic safe coil with LCIE approval.
This coil must be safeguarded with a isolating repeater.
1.5.2 Style XC coil
Manufacturer : Parker Lucifer
Type : 483371 24Vdc
Type of protection : II 2 G Ex eb IIC T4
II 2 D Ex tb IIIC T130°C
Certificate no. : LCIE 02 ATEX 6011 X
Housing : metal housing / IP 67
Max.supply voltage : 24Vdc
Class of insulation : F (155°C)
Max.power DC : 8 Watt (hot)
9 Watt (cold) 20°C
Connecting coupling : Cable gland M20 x 1.5 Exe
Ambient Temperature : -40°C. to + 65°C

BRONKHORST®
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1.5.3 Style XB coil
Manufacturer : Parker Lucifer
Type : 48.8650
Type of protection : II 1 G Ex ia IIC T6
II 1 D Ex ta IIIC T80°C
Certificate no. : LCIE 02 ATEX 6024 X
Housing : polyamid with fiberglass housing / IP 66
Max.supply voltage : 28 V / 110mA
Max.power DC : 3 Watt
Coil resistance : 295 Ω20°C
Impedance : 345 Ω
Apparent inductance : 0 mH
Apparent capacitance : 0 µF
Connecting coupling : Cable gland M20x1.5
Ambient temperature : -40°C to + 65°C

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2 INSTALLATION
2.1 Receipt of equipment
Check the outside packing box for damage incurred during shipment. Should the packing box be damaged,
then the local carrier must be notified at once regarding his liability, if so required. At the same time a report
should be submitted to:
BRONKHORST HIGH-TECH B.V.
RUURLO HOLLAND
If applicable, otherwise contact your distributor.
Remove the envelope containing the packing list; carefully remove the equipment from the packing box.
Do not discard spare or replacement parts with the packing material and inspect the contents for damaged or
missing parts.
2.2 Return shipment
When returning material, always describe the problem and if possible the work to be done, in a covering
letter.
It is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the
instrument!
This to enable the factory to take sufficient precautionary measures to safe-guard the staff in their repair
department. Take proper care of packing, if possible use the original packing box; seal instrument in plastic
etc.
All instruments must be dispatched with a completely filled in 'declaration on contamination form'.
Instruments without this declaration will not be accepted.
Note:
If the instruments have been used with toxic or dangerous fluids the customer should pre-clean the
instrument.
Important:
Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely:
NL801989978B01
If applicable, otherwise contact your distributor for local arrangements.
2.3 Service
If the equipment is not properly serviced, serious personal injury and/or damage to the equipment could be
the result. It is therefore important that servicing is performed by trained and qualified service personnel.
Bronkhorst®has a trained staff of servicemen available.

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2.4 Mounting
The mounting position depends on the type of meter. The preferred position is horizontal and at high
pressures (> 10 bar), Bronkhorst® strongly advices to mount the instrument in this position. Avoid installation
in close proximity of mechanic vibration and/or heat sources.
For mounting the F-106/F-107 series handle the following rules:
For further information see dimensional drawing.
In general flow straighteners have a suspicious influence on the free length of the meter.
A flow straightener can be imagined as a bundle of parallel tubes which is placed in the tube.
In general, these flow straighteners must be placed at least 6 à 8 D upstream of the meter.
In general, use a flow straightener in case of control valves and curves in unequal levels.
Next to these prescriptions for free length, the flow has to be steady, shock and pulsation free.
The flanges also must fit well to each other and there may not stick seals into the tube.
2.5 In-line filter
Although fluids to be measured should be absolutely free of dirt, oil, moisture and other particles, it is
recommended to install an in-line filter upstream of the flowmeter / controller, and if backflow can occur, a
downstream filter is recommended too. Be aware of the pressure drop caused by the filter.
On the inlet of some instruments a screen is placed to prevent foreign matter from entering the instrument
and to maintain a good flow pattern. This device cannot be seen as a filter element.
Contact your distributor for further information.
2.6 Gas connections
Bronkhorst®series mass flow meters/controllers are standard equipped with compression fittings. For leak
tight installation be sure that the tube is inserted to the shoulder in the fitting body and that no dirt or dust is
present on tube, ferrules or fitting. Tighten the nut fingertight; while holding the instrument, then tighten the
nut 1 turn. If applicable follow the guidelines of the supplier of the fittings.
Special types of fittings are available on request.
The flanges also must fit good to each other and there may not stick seals into the tube.
* Note: Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or
other dangerous fluids are used.
STRAIGHT PIPE LENGTH REQUIREMENTS (in number of diameters F)
Upstream
Downstream
one 90° bend before meter
10
4
two 90° bend before meter
13
4
two 90° bend in two planes
20
4
three 90° bend in three planes
30
4
reduction before meter
10
4
expansion before meter
20
4
pressure reducing valve / control valve /
partially closed valve before meter
30
4

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2.7 Piping
BE SURE THAT PIPING IS ABSOLUTELY CLEAN!
DO NOT install small diameter piping on high flowrates, because the inlet jetflow will affect the accuracy.
DO NOT mount abrupt angles direct on in- and outlet, especially not on high flow rates. We recommend at
least 10 pipe diameters distance between the angle and the instrument.
DO NOT mount pressure regulators direct on the inlet of flow meters/controllers, but allow some meters of
piping (at least 25 D). Special attention should be taken at high flow rates with flow controllers. An up- and
downstream buffer is needed with a volume calculated according to the following formula:
V≤0.15d
2
ρ
in which:
V = Volume in litres
d = orifice diameter in mm
ρ= density at normal conditions
d = 7.6
kV
Example:
Flow controller at 500 ln/min Air and orifice diameter d = 4 mm, needs for stable control a buffer volume of:
V≥ ⋅0.15 4 : 1.29
2
= 2.1 litres
Also the capacity of the pressure regulator should be at least 2 times the flow controller, so in this case
2 ⋅500 = 1,000
In/min
2.8 Electrical connections
Bronkhorst® recommends to use standard cables, which have been tested together with the appropriate flow
meter/controller. These cables have the right connector and if loose ends are used, these will be marked to
prevent wrong connection.
The documentation can be downloaded from www.bronkhorst.com/downloads.
To comply with the IP classification it is necessary to follow the assemble guidelines of the connector
manufacturer.
2.9 Caution
Each flow meter/controller is pressure tested to at least 1.5 time the working pressure of the process
conditions stipulated by the customer, with a minimum of 8 bar.
For pressure meter/controllers. The test pressure depends on the range of the pressure transducer.
In general 2 x F.S. value for ranges 1 and 2 bar
1,5 x F.S. value for ranges up to 200 bar
1,25 x F.S. value for ranges up to 400 bar
This tested pressure is stated on the flow meter/controller with a RED COLOURED sticker. Check test
pressure before installing in the line.
If this sticker is not available or the test pressure is incorrect, the instrument should not be mounted in the
process line and be returned to the factory.
Each instrument is helium leak tested to at least 2 ⋅10-9 mbar l/s Helium.

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2.10 Supply pressure
Do not apply pressure until electrical connections are made. When applying pressure to the system, take
care to avoid pressure shocks in the system and increase pressure gradually, especially on high pressure
units incorporating a membrane/piston operated control valve.
2.11 System purging
If explosive gases are going to be used, purge the process with inert dry gas like Nitrogen, Argon etc. for at
least 30 minutes.
In systems with corrosive gases like silane, purging with an inert gas is absolutely necessary, because if the
tubing has been exposed to air, introducing these gases will tend to clog up or corrode the system due to a
chemical reaction with air or moist air.
Complete purging is also required to remove such gases from the system before exposing the system to air.
It is preferred not to expose the system to air, when working with these corrosive gases.
2.12 Seals
Bronkhorst® has gathered a material compatibility chart from a number of sources believed to be reliable.
However, it is a general guide only. Operating conditions may substantially change the accuracy of this
guide. Therefore is no liability for damages accruing from the use of this guide.
The customer’s application demands its own specific design or test evaluation for optimum reliability.
So check if the seals like O-rings, plunger and packing glands of capillary are correct for your process.
2.13 Equipment storage
The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be
taken not to subject the equipment to excessive temperatures or humidity.

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3 OPERATION
3.1 General
The Bronkhorst® Mass Flow Meters/Controllers are designed in such a way that they will meet user process
requirements.
3.2 Power and warm-up
Before switching on power check if you have connected all the pins according to the hook-up diagram which
belongs to the flow meter/controller.
It is recommended to turn on power before applying pressure on the instrument and to switch off power after
removing pressure.
Check gas connections, and make sure there is no leakage. If needed, purge the system with a proper gas.
Turn on power and allow for at least 30 minutes to warm-up and stabilize. During warm-up period gas
pressure may either be on or off.
3.3 Start-up
Be sure your tubing is absolutely clean, free of dust, moisture etc., and your gas is cleaned by an adequate
filter. Turn on fluid supply gently. Avoid pressure shocks, and bring the instrument gradually up to the level of
the actual operating conditions. Also switch off fluid supply gently.
3.4 Operating conditions
Each instrument has been calibrated and adjusted for customer process conditions.
Controllers or valves may not operate correctly, if process conditions vary too much, because of the
restriction of the orifice in the valve.
For flow meters performance and accuracy may be affected tremendously if physical fluid properties such as
heat capacity and viscosity change due to changing process conditions.

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4 Cables
4.1 Introduction
Bronkhorst® uses two-wire Lapp Unitronic LiYCY shielded cable.
When the Bronkhorst® cables are not used, Bronkhorst®advises to use this cable or equivalent.
4.2 Cable for Bronkhorst®flowhead
Bronkhorst® uses two-wire Lapp Unitronic LiYCY shielded cable.
When using a Bronkhorst® Readout unit E-7000/E-8000 series and Bronkhorst®cables, the maximum cable
length is 400 meter.
When using a non Bronkhorst®Readout unit and cables, the total system should comply with the Ex
specifications of the flowhead and of the used intrinsic safe isolating repeater.
Also consider the fact that the minimum voltage on the flowhead should be 15Vdc for a good measurement.
4.3 Control system with XC coil
Bronkhorst® uses two-wire Lapp Unitronic LiYCY shielded cable.
When using Bronkhorst® Readout unit E-7000 series and cables, the maximum cable length is 30 meter.
When using Bronkhorst® Readout unit E-8000 series and cables, the maximum cable length is 150 meter.
When using a non Bronkhorst®Readout unit and cables, the total system should comply with the Ex
specifications of the XC coil.
4.4 Control system with XB-coil
Bronkhorst® uses two-wire Lapp Unitronic LiYCY shielded cable.
When using Bronkhorst® Readout unit E-7000 series and cables, the maximum cable length is 80 meter.
When using Bronkhorst® Readout unit E-8000 series and cables, the maximum cable length is 150 meter.
When using a non Bronkhorst®Readout unit and cables, the total system should comply with the Ex
specifications of the XB coil and of the used intrinsic safe isolating repeater.

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4.5 EMC and cables
All instruments described in this manual carry the CE-mark.
Therefore they have to comply with the EMC requirements as are valid for this kind of instruments.
However compliance with the EMC requirements is not possible without the use of proper cables and
connector/cable gland assemblies and assembled according to the assembly guidelines of the
connector/cable gland manufacturer.
For good results Bronkhorst® can provide standard cables.
Otherwise it is necessary to connect the cable shield to the enclosure of the used connector or cable
gland of the readout unit.
Readout units with its intrinsic safe isolating repeaters should be situated outside zone 2.
4.5.1 Cable gland assembly Bronkhorst®flowhead
Do not connect the cable shield to the Bronkhorst®flowhead.
See included hook-up diagram.
4.5.2 Cable gland assembly XC coil
For assembling the cable to the coil follow the instructions of the manufacturer of the coil and cable gland.
The documentation can be downloaded from www.bronkhorst.com/downloads.
4.5.3 Cable gland assembly XB coil
For assembling the cable to the coil follow the instructions of the manufacturer of the coil and cable gland.
Do not connect the cable shield to the coil.
The documentation can be downloaded from www.bronkhorst.com/downloads.

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5 MAINTENANCE
5.1 General
At normal use, no routine maintenance is required to be performed on the meters or controllers. Units may
be flushed with clean, dry inert gas.
For further information contact supplier or factory.
5.2 Calibration
All flow meters are factory calibrated. For re-calibration or re-ranging contact supplier or factory.

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6 TROUBLESHOOTING
6.1 General
For a correct analysis of the proper operation of a mass flow meter/controller it is recommended to remove
the unit from the process line and to check it without applying gas supply pressure. In case the unit is dirty,
this can be ascertained immediately by loosening the compression type couplings and, if applicable, the
flange on the inlet side.
Energizing or de-energizing of the instrument may already indicate whether there is an electronic failure.
After that gas pressure is to be applied in order to check flow behaviour.
If there should be suspicion of leakage do not check for bubbles with a leak detection liquid as this may lead
to a short-circuit in the sensor capillary assembly or p.c. board.
6.2 Troubleshooting summary
Symptom
Possible cause
Action
No output signal
No power supply
1a) check power supply
1b) check cable connection
Output stage blown-up due to long
lasting shortage and/or high-voltage
peaks
1c) return to factory
Supply pressure too high, or differential
pressure across meter too high
1d) lower supply pressure
Valve blocked/contaminated
1e) return to factory
Screen in inlet fitting blocked
1f) return to factory
Sensor/capillary failure
1g) return to factory
Maximum output signal
Output stage blown-up
2a) return to factory
Sensor/capillary failure
2b) return to factory
Output signal much lower than
setpoint signal or desired flow
Screen blocked/contamined
3a) return to factory
LFD blocked/contaminated and/or liquid
in meter
3b return to factory
Valve blocked/contaminated
3c) return to factory
Valve internals damage (swollen seat in
plunger)
3d) return to factory
Incorrect type of gas is used and/or
pressure/diff. pressure
3e) try instrument on conditions for which
it was designed
Flow is gradually decreasing
Condensation, occurs with
NH3
,
hydrocarbons such as
C H ,C H
3 8 4 10
etc.
4a) decrease supply pressure and/or
heat gas to be measured
Valve adjustment has changed
4b) see ‘1e’
Oscillation
Supply pressure/diff. pressure too high
5a) lower pressure
Pipeline too short between pressure
regulator and MFC
5b) increase length or diameter of piping
upstream
Pressure regulator is oscillating
5c) replace pressure regulator or try ‘5b’
Valve sleeve or internals damaged
5d) return to factory
Controller adjustment wrong
5e) return to factory
Small flow at zero setpoint
Valve leaks due to damaged plunger or
dirt in orifice
6a) return to factory
Pressure too high or much too low
6b) apply correct pressure

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