BRONKHORST MASS-STREAM D-6200 User manual

MASS-STREAMTM
Instruction Manual
D-6200
Analog Mass Flow Meters / Controllers
Doc. No.: 9.17.112A Date: 17-03-2017
ATTENTION
Before installing and operating the instrument it is strongly recommended
that this instruction manual should be read carefully. Not following the
guidelines could result in personal injury and/or damage to the equipment.

MASS-STREAMTM Instruction Manual D-6200
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SCOPE OF THIS INSTRUCTION MANUAL
This instruction manual of M+W Instruments GmbH covers the installation of the analog
Mass-StreamTM instrument model series D-6200 for mass flow measurement and control
of gasses and gas mixes
The information in this manual has been reviewed and is believed to be wholly reliable.
No responsibility, however, is assumed for inaccuracies. The material in this manual is for
information purposes only, and is subject to change without notice.
Warranty
The M+W Instruments GmbH grants a warranty on its products according to the General
Terms and Conditions. The warranty is limited to the mass flow meters and controllers
and its components. The correct use of the device under the observation of all specified
operation conditions is the precondition for the warranty.
ATTENTION!
The warranty is solely limited to the mass flow meters and controllers and its components.
No warranty claims are accepted in case of a faulty operation of the instrument, like a
wrong electrical hook-up for example.
Any liability is explicitly excluded for any secondary damage, caused by the instrument’s
failure or the malfunction of any component. All wear parts, like seals for example, are
also excluded from the warranty.

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The products of M+W Instruments GmbH are warranted against defects in material and
workmanship for a period of three years from the date of shipment, provided they are
used in accordance with the ordering specifications and they are not subjected to abuse
or physical damage. The products of other manufacturers are warranted for a period of
one year.
Products that do not operate properly during this period may be repaired or replaced at no
charge. Repairs are normally warranted for one year or the balance of the original
warranty, whichever is the longer.
See also paragraph A-V and B-II of the Terms and Conditions of sales of the
M+W Instruments GmbH.
The warranty includes all initial and latent defects, random failures, and indeterminable
internal causes. It excludes failures and damage caused by the customer, such as
contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly
judged non-warranty may be charged for.
M+W Instruments GmbH prepays outgoing freight charges when any party of the service
is performed under warranty, unless otherwise agreed upon beforehand. However, if the
product has been returned collect to M+W Instruments GmbH, these costs are added to
the repair invoice. Import and/or export charges, foreign shipping methods/carriers are
paid for by the customer.

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Table of Contents
1 ANALOG INSTRUMENTS....................................................................................... 5
1.1 General.................................................................................................................... 5
1.2 Installation...............................................................................................................7
1.3 Operation and Maintenance.................................................................................. 8
1.4 Specifications of analog MASS-STREAMTM Instruments D-6200………….…... 9
1.5 Hook-up with 6DIN Connector, 6-pin round....................................................... 10
1.6 Hook-up with 15-pin sub-D connector…….........................................................10
2 CTA MEASUREMENT PRINCIPLE……………………………................................11
The dimensional drawings and hook-up diagram of the Mass-StreamTM instruments
D-6200 are available for download on our website www.mw-instruments.com.

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1 ANALOG INSTRUMENTS
All necessary settings for this instrument are already performed at M+W Instruments
GmbH. Following the next steps carefully is the quickest way to get the instruments
operational in your own system.
1.1 General
The analog instruments of M+W Instruments GmbH are measurement devices for thermal
mass flow and control of gasses and gas mixes. The flow signal is measured directly in
the gas flow from 0.5...10 ln*/min up to 300...6,000 ln*/min and controlled when a control
valve is applied.
[* n = normal conditions: At normal conditions the volume is regarded at a temperature
of 0°C and a pressure of 1013.25 mbar (a)]
As an option ex work the device can be equipped with an integrated 3½ digit LCD flow
rate indication or with an integrated 8 digit counter.
Output signal / setpoint: 0…5V dc OR 4…20 mA
Power Supply: +15 Vdc OR +24 Vdc (please check on instrument label)
ATTENTION!
The input and output signals are NOT galvanically isolated!
Scope of Delivery
Immediately upon receipt of the incoming goods the package needs to be checked for any
possible damages and the goods have to comply with the scope of delivery listed on the
packing note. In case of any damages the supplier and the freight forwarder have to be
contacted without delay.

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In the event of any discrepancies please get in touch with your local distributor (see
www.bronkhorst.com) or contact us directly:
M+W Instruments GmbH
Dorfstr. 1
D-85391 Leonhardsbuch
Tel.: [phone]
Fax: [phone]
Email: [e-mail]
When the instrument needs to be returned please include a description of the damage in
a closed envelope.
ATTENTION!
All instruments for return must have a fully filled-in “Declaration of Decontamination“.
This declaration has to be attached to the shipping documents, allowing free access on
the outside of the package.
The declaration of decontamination is available on our accompanying CD with each
instrument shipment or it can be downloaded from our website www.bronkhorst.com.
Please mention the instrument’s model code and the serial number on your order, as well
as your VAT number when needed.

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1.2 Installation
To avoid personal injury and/or damage to the equipment only trained and qualified
personnel shall perform the installation of the instruments:
−Read the instrument’s name plate before installation and check the electrical
connection, flow range, media to be measured, inlet and outlet pressure as well as
input and output signals.
−The instruments contain electronic components which are sensitive to electronic
discharges (ESD). Contact with electronically charged persons or objects could
possibly endanger these components or even result in their failure.
−While installing the instrument take care of the arrow marking on the instrument’s flow
body, determining the flow direction.
−Ensure that all piping is absolutely clean and without any damage. It is recommended
to install an inlet filter in front of the instrument.
−Avoid piping with small diameter at high flow rates. When possible no abrupt angles or
other disturbances shall be mounted directly in front of the instrument.
−All devices have Withworth pipe threads – type RP – according to ISO228-1
(cylindrical G-threads in inches according to BSPP). The mounting of NPT-fittings will
destroy the inlet threads in the instrument’s body.
−Using an inlet pipe with sufficient piping diameter is recommended. The length of the
inlet pipe should be at least 10 times the piping diameter.
−Before the first start-up check that the system has absolutely no leakage. If toxic,
explosive and/or corrosive gases are to be used, ensure to purge the system long
enough with a dry, inert gas. This is also required to remove these kinds of gases from
the system.
−The instruments’ preferred mounting position is horizontally. Especially when installing
bigger mass flow controllers (D-6273 and bigger) in different ways you should get in
contact with your distributor or M+W Instruments GmbH beforehand.

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All instruments described in this manual carry the CE-mark. Therefore they have to
comply with the EMC requirements valid for these instruments. However compliance with
the EMC requirements is not possible without the use of proper cables and
connector/gland assemblies.
In case the instrument is connected to other devices (e.g. power supply) ensure that the
operating voltage complies with the supply voltage given on the name plate and that the
function of the shielding is not affected. M+W Instruments GmbH recommends using
standard cables following the CE-requirements and could supply them when needed.
1.3 Operation and Maintenance
When the power is switched on a warm-up period of at least 30 sec is required allowing
the instrument’s thermal stabilisation. Afterwards the instrument will work with an
accuracy of approximately 4% FS. It takes around 30 minutes until the optimal stability is
reached and the instrument will work with an accuracy of < 3% FS. This is supposed to be
performed with or without gas flow. To avoid creating gradients it is recommended that
gas and ambient temperature are kept at the same level (max ΔT approx. ± 2…3 °C).
Otherwise the accuracy of this thermal measurement could be affected in an
unpredictable manner.
Be sure that the specified pressures have been applied. Pressure surges, as may occur
during the system pressurisation, must be avoided. The control valve cannot be used as a
shut-off valve. When starting up, always bring the instrument gradually up to the level of
operating conditions.
There are no regular maintenance checks required for the instrument’s operation. It has to
be ensured that a possible mounted inline filter is checked and cleaned on a regular
basis. We recommend having the calibration checked every 24 months by the supplier or
an authorized service partner.

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1.4 Specifications of analog MASS-STREAMTM Instruments D-6200
Measurement System
Accuracy
(based on calibration with Air)
± 3% FS including non-linearity
(± 2% FS on request)
Repeatability
< ± 0.5% FS
Pressure sensitivity
± 0.3% RD / bar typical (Air)
Temperature sensitivity
± 0.3% RD / °C (Air)
Response time sensor (τ63%)
appr. 1.2 sec
Leak integrity (outboard)
< 2·10-7 mbar l/sec He
Mechanical Parts
Sensor
Stainless steel SS316 (AISI 316L, 1.4404)
Instrument body
Aluminium EN AW-6082-T6 (AL 50ST/51ST)
anodised OR
Stainless steel SS316 (AISI 316L, 1.4404)
Sieves
Stainless steel
Distance parts
Teflon
Protection
IP40
Operating Limits
Measuring range
5…100% (1:20)
Temperature
0…50 °C
Pressure
0…10 bar(g) for aluminium body
0…20 bar(g) for stainless steel body
The maximum operating pressure of controllers
also depends on the selected valve!
Warm-up time
30 min for optimum accuracy
within 30 sec for accuracy ± 4% FS
Electrical Properties
Supply voltage
+15 Vdc OR 24 Vdc ± 10%
with BJ-valve: +24 Vdc
Current peak values
Inrush current: max. 250 mA
Meter: approx. 75 mA at 0% flow
approx. 175 mA at 100% flow
Controller: add 250 mA
Output signal
0…5 Vdc active OR 4…20 mA active
Instrument connector
6-pin round DIN (male)
optional for controllers: 15-pin sub-D (male)

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1.5 Hook-up with 6DIN Connector, 6-pin round
See hook-up document no. 9.16.089 of the shipment’s accompanying documentation.
Mass flow meter D-62

0:
1
+ power
4
+ output signal
2
0 power
5
n/c
3
0 output signal
6
n/c
Mass flow controller D-62

1 / D-62

3:
1
+ power
4
+ output signal
2
0 power
5
+ setpoint signal
3
0 output signal
6
n/c
1.6 Hook-up with 15-pin sub-D Connector
Typ M for mass flow controller D-62

1 / D-62

3:
1
n/c
9
n/c
2
+ output signal
10
n/c
3
n/c
11
n/c
4
n/c
12
0 output signal
5
0 power
13
n/c
6
n/c
14
n/c
7
+ power
15
shield
8
+ setpoint signal
Typ B for mass flow controller D-62

1 / D-62

3:
1
0 power
9
0 power
2
+ output signal
10
0 power
3
0 power
11
n/c
4
n/c
12
n/c
5
+ power
13
n/c
6
n/c
14
shield
7
n/c
15
n/c
8
+ setpoint signal
Please pay attention to the label with the hook-up fitted at the cable.
Be sure that the integrity of the shielding is not affected when connecting the system to
other devices (e.g. to PLC). Only shielded wire terminals can be used.

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2 CTA MEASUREMENT PRINCIPLE
The direct through-flow measurement with CTA (Constant Temperature Anemometry) is
also named inline measurement. The working principle is based on King’s law of the ratio
between the heater energy and the heat degradation by means of gas flow or liquid flows
published in 1914.
Two elements, a heater and a temperature probe, are positioned in the gas flow. CTA is
aiming to keep the difference in temperature ∆T between both sensor pins at a constant
level. The flow rate and the heater energy required to maintain this constant ∆T are
proportional and thus indicate the mass flow of the gas. The relation between the heater
energy and the mass flow is described by the following formula:
P = P0+ C ·
Φ
mn
P … Heater power
P0 … Heater power offset at zero flow
C … Constant (device-dependent)
Φm … Mass flow
n … dimensionless figure (type 0,5)

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The calibration is processed with a mass flow controller which functions as a reference.
The controller and the gas inlet pressure forward a defined gas flow, thus a signal of the
sensor can be allocated to each specific mass flow.
Each instrument is calibrated according to the customer’s operation conditions within the
specified accuracy limits. These customer specific information can be found on the
instrument label and the calibration certificate.